TWI807484B - 剝離機構及使用該剝離機構的積層裝置 - Google Patents
剝離機構及使用該剝離機構的積層裝置 Download PDFInfo
- Publication number
- TWI807484B TWI807484B TW110142400A TW110142400A TWI807484B TW I807484 B TWI807484 B TW I807484B TW 110142400 A TW110142400 A TW 110142400A TW 110142400 A TW110142400 A TW 110142400A TW I807484 B TWI807484 B TW I807484B
- Authority
- TW
- Taiwan
- Prior art keywords
- peeling
- film
- sheet
- starting point
- stage
- Prior art date
Links
- 230000007246 mechanism Effects 0.000 title claims abstract description 87
- 206010040844 Skin exfoliation Diseases 0.000 claims abstract description 235
- 238000001816 cooling Methods 0.000 claims abstract description 43
- 230000002093 peripheral effect Effects 0.000 claims abstract description 8
- 239000010408 film Substances 0.000 claims description 132
- 239000000853 adhesive Substances 0.000 claims description 86
- 230000001070 adhesive effect Effects 0.000 claims description 86
- 239000010409 thin film Substances 0.000 claims description 44
- 238000003475 lamination Methods 0.000 claims description 28
- 210000000078 claw Anatomy 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 20
- 238000004804 winding Methods 0.000 claims description 9
- 238000000926 separation method Methods 0.000 claims description 5
- 238000013459 approach Methods 0.000 claims description 4
- 210000000080 chela (arthropods) Anatomy 0.000 claims description 2
- 239000012809 cooling fluid Substances 0.000 description 23
- 230000009471 action Effects 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 239000012790 adhesive layer Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 8
- 238000001179 sorption measurement Methods 0.000 description 8
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 238000010030 laminating Methods 0.000 description 5
- 239000007921 spray Substances 0.000 description 5
- 238000011084 recovery Methods 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000003949 liquefied natural gas Substances 0.000 description 2
- 239000003915 liquefied petroleum gas Substances 0.000 description 2
- 239000003550 marker Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- NOOLISFMXDJSKH-UTLUCORTSA-N (+)-Neomenthol Chemical compound CC(C)[C@@H]1CC[C@@H](C)C[C@@H]1O NOOLISFMXDJSKH-UTLUCORTSA-N 0.000 description 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229920002799 BoPET Polymers 0.000 description 1
- NOOLISFMXDJSKH-UHFFFAOYSA-N DL-menthol Natural products CC(C)C1CCC(C)CC1O NOOLISFMXDJSKH-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 230000009878 intermolecular interaction Effects 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229940041616 menthol Drugs 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/10—Removing layers, or parts of layers, mechanically or chemically
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020218719A JP7558058B2 (ja) | 2020-12-28 | 2020-12-28 | 剥離機構及びこれを用いた積層装置 |
| JP2020-218719 | 2020-12-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202226441A TW202226441A (zh) | 2022-07-01 |
| TWI807484B true TWI807484B (zh) | 2023-07-01 |
Family
ID=82135882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW110142400A TWI807484B (zh) | 2020-12-28 | 2021-11-15 | 剝離機構及使用該剝離機構的積層裝置 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7558058B2 (https=) |
| CN (1) | CN114683673B (https=) |
| TW (1) | TWI807484B (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024214641A1 (ja) * | 2023-04-12 | 2024-10-17 | テイコクテーピングシステム株式会社 | マウンター装置、テープ剥離装置、基板転写装置、テープ剥離方法、及び基板転写方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201836094A (zh) * | 2017-03-21 | 2018-10-01 | 日商富士軟片股份有限公司 | 積層裝置、積層體及積層裝置的製造方法 |
| TW201943812A (zh) * | 2018-04-11 | 2019-11-16 | 日商日東電工股份有限公司 | 黏著帶剝離方法及黏著帶剝離裝置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08244019A (ja) * | 1995-03-13 | 1996-09-24 | Taiyo Yuden Co Ltd | セラミックグリーンシートの積層方法 |
| JP5060402B2 (ja) * | 2008-06-18 | 2012-10-31 | クライムプロダクツ株式会社 | 保護フィルムの剥離装置 |
| JP2010037009A (ja) * | 2008-07-31 | 2010-02-18 | Sharp Corp | フィルム剥離装置 |
| JP2011077098A (ja) * | 2009-09-29 | 2011-04-14 | Disco Abrasive Syst Ltd | ダイボンダ装置 |
| JP2011171530A (ja) * | 2010-02-19 | 2011-09-01 | Mitsubishi Electric Corp | 保護テープの剥離方法および剥離装置、ならびに半導体装置の製造方法 |
| JP5334135B2 (ja) * | 2010-08-20 | 2013-11-06 | ニチゴー・モートン株式会社 | 積層装置 |
| JP2014088255A (ja) * | 2012-10-31 | 2014-05-15 | Hitachi Plant Mechanics Co Ltd | フィルム剥離方法及びそのためのフィルム剥離装置 |
| JP6916223B2 (ja) * | 2019-01-30 | 2021-08-11 | 日機装株式会社 | 剥離装置 |
-
2020
- 2020-12-28 JP JP2020218719A patent/JP7558058B2/ja active Active
-
2021
- 2021-11-15 CN CN202111344872.6A patent/CN114683673B/zh active Active
- 2021-11-15 TW TW110142400A patent/TWI807484B/zh active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201836094A (zh) * | 2017-03-21 | 2018-10-01 | 日商富士軟片股份有限公司 | 積層裝置、積層體及積層裝置的製造方法 |
| TW201943812A (zh) * | 2018-04-11 | 2019-11-16 | 日商日東電工股份有限公司 | 黏著帶剝離方法及黏著帶剝離裝置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2022103834A (ja) | 2022-07-08 |
| TW202226441A (zh) | 2022-07-01 |
| CN114683673B (zh) | 2024-09-03 |
| JP7558058B2 (ja) | 2024-09-30 |
| CN114683673A (zh) | 2022-07-01 |
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