553828 A7 B7 五、發明説明（1 ) 〔發明所屬之技術領域〕 (請先閲讀背面之注意事項再填寫本頁) 本發明係有關薄膜黏貼方法及其裝置，尤其有關由加 壓貼住輥子（以下簡稱爲壓榨輥子）黏貼擬黏貼於基板表 面之薄膜於基板表面的方法及其裝置者。 〔習知技術〕 以往（習知者），乃從薄膜輥子放出薄膜，且使成連 續之薄膜朝寬（度）方向切斷來作成擬黏貼之形狀的片狀 薄膜（以下簡稱爲薄膜），而由一對壓榨輥子來黏貼薄膜 於基板表面時，係由真空板等之前端保持構件保持薄膜前 端部來黏貼於基板，並在退出前端保持構件後，以兩個壓 榨輥子夾住薄膜和基板，且由旋轉兩個壓榨輥子來輸送基 板於以複數輸送輥子所構成之輸送路面上之同時，對於基 板實施黏貼薄膜，並在快要完成黏貼時，由薄膜吸引構件 C vacuum bar，真空條）等之終端保持構件保持薄膜後端， 以黏貼直至薄膜後端部爲止於基板上（參照日本國專利特 公平3 — 16906號公報）。 經濟部智慧財產局員工消費合作社印^ 依據上述習知技術，由於黏貼薄膜前端部或後端部於 基板時，和黏貼薄膜前端部與後端之間的中間部於基板時 ，容易在加壓力上產生差異，爲此所黏貼之薄膜的前端部 或後端部會形成落差（斷層狀降落），使得對於其後之處 理基板產生困難（問題）。 例如薄膜爲抗蝕劑薄膜時，當進行曝光時，能由落差 而使光量產生變化，以致具有產生線（狀）的問題等。 -4- 本纸張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐） 553828 A7 __ B7 _ 五、發明説明（2 ) (請先閱讀背面之注意事項再填寫本頁) 又薄膜後端部之保持構件並不會進入於基板和壓榨輥 子間的空間，而是在黏貼完成以前，停止保持薄膜後端部 而釋放成自由狀，以致黏貼薄膜後端部會產生混亂，而極 容易產生皴紋或氣泡。 〔發明之摘要〕 爲此，本發明之目的係擬提供一種從薄膜前端部直至 後端部爲止並不會產生落差而可平坦地黏貼於基板的薄膜 黏貼方法及其裝置者。 又本發明之另一目的係擬提供一種不會產生皺紋或氣 泡之狀態下來從薄膜前端部直至後端部爲止能予以黏貼於 基板上的薄膜黏貼方法及其裝置者。 經濟部智慧財產局員工消費合作社印製 爲了達成上述目的，本發明方法之特徵爲：在於由壓 榨輥子來黏貼擬黏貼於基板表面之形狀的薄膜於基板表面 之薄膜黏貼方法時，作爲壓榨輥子使用具有可保持薄膜之 功能者，而由該壓榨輥子外周面來保持擬黏貼之形狀的薄 膜前端部，且由旋轉該壓榨輥子來輸送該擬黏貼的形狀之 薄膜至基板以令該前端部成一致於基板的黏貼開始位置， 同時該擬黏貼的形狀之薄膜予以黏貼於基板表面，且該擬 黏貼的形狀之薄膜後端部也由該壓榨輥子外周面來保持， 並由該壓榨輥子之旋轉來黏貼該從前端部直至後端部爲止 之所有該擬黏貼之形狀的薄膜於基板。 又爲了達成上述目的，本發明裝置係由壓榨輥子來黏 貼擬黏貼於基板表面之形狀的薄膜於基板表面之薄膜黏貼 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 553828 A7 B7 五、發明説明（3 ) (請先閲讀背面之注意事項再填寫本頁) 裝置，其特徵爲具備有：具有用於保持作成該餐黏貼的形 狀之薄膜用的功能之壓榨輥子；以保持著作成該擬黏貼的 形狀之薄膜前端部來交給該前端部於該壓榨輥子外周面用 的薄膜前端部保持構件；及以保持作成該擬黏貼的形狀之 薄膜後端部來交給該後端部於該壓榨輥子外周面的前端保 持構件，而該壓榨輥子乃以其外周面保持該前端部，且由 旋轉該壓榨輥子來輸送該作成擬黏貼之形狀的薄膜至基板 ，並令該前端部形成一致於黏貼基板之開始位置之同時， 予以進行黏貼作成擬黏貼之形狀的薄膜於基板表面，且以 該壓榨輥子外周面來也予以保持該後端部，而旋轉該壓榨 輥子來黏貼從該前端部直至後端部爲止的作成該擬黏貼之 形狀的全部薄膜於基板。 於上述本發明，作爲壓榨輥子，將使用由靜電吸著來 保持薄膜於該壓榨輥子外周面者。或作爲壓榨輥子，將使 用由黏著薄膜來保持薄膜於該壓榨輥子外周面者。 依據本發明，黏貼擬黏貼之形狀的薄膜於基板者，僅 由壓榨輥子，並未切換（轉換）壓榨構件，因此，不會產 經濟部智慧財產局員工消費合作社印製 生落差（斷層降落）之狀態下，能成平坦地黏貼於基板上 〇 再者，由壓榨輥子來黏貼從薄膜前端部直至後端部爲 止的該擬黏貼之形狀的全部薄膜於基板，因此，並不會產 生皺紋或氣泡。 〔發明之實施形態〕 -6 - 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 553828 A7 B7 五、發明説明（4 ) 圖1係本發明之一實施形態的薄膜黏貼裝置之槪略剖 面圖。 (請先閱讀背面之注意事項再填寫本頁) 爲了從薄膜捲（或輥）1放出薄膜2且輸送成連續之 薄膜2於由複數之輸送輥子1 5所構成的基板輸送路側， 而具有導輥3於薄膜捲1下側，而在於此處，將剝開保護 (覆蓋）膜2 a而作爲薄膜2 b且改變方向。在薄膜捲1 相鄰接有捲繞捲（或輥）4，用於捲繞在導輥3所剝開之 保護膜2 a。 薄膜2係以保護膜2 a和圖4所示之抗蝕劑膜2 c及 底膜2 d的三層所形成，而作爲薄膜捲1係從內側以保護 膜2 a、抗蝕劑膜2 c、底膜2 d的順序捲入。 薄膜捲1及捲繞捲4之驅動裝置（例如馬達）配設有 因應於薄膜之剩餘量來調整轉矩的功能，以令薄膜之張力 成爲一定來輸送。 經濟部智慧財產局員工消費合作社印製 而導輥3下側具有包括吸著保持薄膜2 b之前端部及 後端部來朝圖左方輸送用的薄膜前端保持構件（以下簡稱 爲前端保持構件）5和薄膜後端保持構件（以下簡稱爲後 端保持構件）6及朝寬（度）方向切斷薄膜2 b用的切斷 器8之薄膜輸送構件1 1。 在於前端保持構件5內部具有如圖3所示，朝薄膜 2 b長軸方向（輸送方向的圖之左右方向）排列且分開成 幾個之真空室5 a〜5 e及在上面朝薄膜2 b寬方向排列 且連通於各真空室5 a〜5 e的吸著孔，各真空室5 a〜 5 e係藉由未圖示之共用中間閥來連通於真空源，而形成 -7- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 553828 A7 B7 五、發明説明（5 ) (請先閲讀背面之注意事項再填寫本頁) 在上面吸著薄膜。前端保持構件5係作成截除前端部下側 而上面爲平坦面之成銳角展延的剖面的截頭錐體形狀，又 爲了抑止薄膜2b的彎翹（彎曲），而配設真空室5e和 吸著孔於要交接之前端附近。 在於各真空室5 a〜5 e和共用中間閥之間的配管， 配設了用於監視真空狀態用的壓力測感器，當由於某些原 因而使薄膜2 b之吸著位置產生偏移，致使薄膜不在位於 吸著孔上面時，可由真空壓之降低來監視薄膜2 b的吸著 狀況。 後端保持構件6也與前端保持構件同樣，在內部具有 真空室6 a〜6 e ，上面具有吸著孔，而上流側之真空室 6 a〜6 c和下流側之真空室6 d、6 e係以各別之閥來 連通於共用（共同）之真空源。 經濟部智慧財產局員工消費合作社印製 在上流側之真空室6 a〜6 c和各別之閥之間的配管 ’及下流側之真空室6 d，6 e和各別之閥之間的配管， 各配設了用於監視各真空狀態用之壓力測感器，並在由於 某些原因而使薄膜偏移了吸著位置，致使薄膜不在位於吸 著孔上時，可由真空壓之降低來監視薄膜的吸著狀態。 後端保持構件6也作成截除前端部下側而上面爲平坦 之成銳角展延的剖面之截頭錐體，並作成真空室6 e和吸 著孔於交接之前端附近，且與真空室6 a〜6 c側形成分 離（分開）之配管系，以令薄膜2 b之後端部直至交給（ 有關交給將後述之）於壓榨輥子1 3 (參照圖1 )的最後 爲止，能充分地作用拉力於薄膜2 b。 -8- 本纸張尺度適用中國國家標準（CNS ) A4規格（210X29*7公釐） 553828 A7 B7 五、發明説明（6 ) (請先閱讀背面之注意事項再填寫本頁) 又在後端保持構件6，配設有正交（垂直相交）於薄 膜2 b輸送方向（圖1之左方向）的寬（度）方向（垂直 於圖1圖面之方向）之溝6T，作用爲以切斷器（刀具） 8朝寬方向切斷薄膜時之刀具接受器。而以切斷器8朝寬 方向切斷薄膜時，可令薄膜2 b形成擬黏貼於基板之形狀 〇 再者，切斷器8乃安裝有氣缸（未圖示）於薄膜輸送 構件1 1 ，以令能朝垂直方向移動，並作爲在於未（朝寬 方向）切斷薄膜2 b時，可退出於圖1上側的機構。 再回到圖1 ，薄膜輸送構件1 1乃固定有氣缸1 2， 再與由伺服馬達9來轉動之滾珠螺桿（絲槓，Ball screw ) 1 0螺合，使得可由伺服馬達9來朝圖之左右方向移動。 後端保持構件6係藉由未圖示之連結構件來與氣缸 1 2形成結合，且能由氣缸1 2來朝垂直方向移動，使得 能與一對壓榨輥子13在夾持基板朝輸送路側垂直移動時 之外周最尚位置形成同一位置。 經濟部智慧財產局員工消費合作社印製 又薄膜輸送構件1 1固定有氣缸7，而前端保持構件 5也在後端保持構件6以氣缸1 2朝垂直方向移動來從前 方退出避開時，就由氣缸7朝壓榨輥子1 3側移動，以交 給薄膜2 b前端部於壓榨輥子1 3上（有關交給動作，將 後述之）。 再者，前端保持構件5雖未圖示，配設有朝著從基板 1 4之輸送路側離開方向打開的可對於一對壓榨輥子實施 調整接近位置的止動構件。 -9 - 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 553828 A7 B7 五、發明説明（7 ) 一對壓榨輥子1 3係在於以複數之輸送輥1 5所構成 的基板1 4之輸送路的上下位置，而配置成從上下方向夾 持移動以各輸送輥15從圖之左方朝右方輸送的基板14 。上下方向之移動係由氣缸（未圖示）來推動。 壓榨輥子1 3係由金屬製成之輥（子）本體及塗敷有 矽橡膠於其外周面所形成。輥子本體內部具有加熱器。 亦就是，壓榨輥子1 3乃構成爲具有金屬製之本體及 其外周側以優異於耐熱性之橡膠（矽橡膠等）被覆成 1. 2mm左右。又金屬製之輥子本體中心側配備有筒狀 的加熱器，且在該加熱器外側形成有封入水或油等之液體 的外套於同心圓上。而以通電加熱於加熱器來加熱外周側 之外套，就可均勻地加熱輥子整體。再者，壓榨輥子1 3 係構成爲以靜電吸著來保持薄膜2 b，雖對於被覆外周之 橡膠使用矽橡膠時可增大電阻，但由於厚度爲1 · 2mm 左右之極薄者，因而在用於靜電吸著言並不會成問題。再 者，當作爲耐熱性橡膠使用導電性橡膠時，可增進靜電吸 著效果。 在靠近壓榨輥子1 3之入口側輸送輥1 5間，設置有 偵測輸送中之基板1 4前端用的測感器2 6，將後述之控 制裝置2 3係依據測感器2 6偵測了基板1 4前端之信號 來控制輸送輥1 5，以輸送基板1 4至壓榨輥子1 3下面 之所期盼位置且使之停止。 至少上側壓榨輥子1 3成接地，並在其上方設置有電 極1 6作爲壓榨輥子帶電機構，且電極1 6係與靜電產生 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -1〇· (請先閱讀背面之注意事項再填寫本頁) 裝· 、訂 經濟部智慧財產局員工消費合作社印製 553828 A7 B7 五、發明説明（8 ) 裝置1 7相連接。 當從靜電產生裝置施加局電壓於電極1 6時，將使輸 送至電極1 6下側之薄膜2 b帶電，則薄膜2 b前端部由 庫倫力而緊密地貼住於上側壓榨輥子1 3表面。以圍繞上 側之壓榨輥子1 3及電極1 6的狀態，配設有防塵蓋（子 )18。因此，並不會形成附著塵埃等於以電極來成爲帶 電之薄膜2 b上。 用於控制裝置之動作用的控制裝置2 3乃附著用於顯 示黏貼長度之資料，驅動裝置用的馬達常數等用之監視器 畫面2 4、和記憶資料或程式用之記憶器、及用於輸入資 料用的鍵盤2 5。又包括有用於執行本裝置之動作步驟用 之程式（將依據圖2來後述），設定資料於監視器用之操 作畫面程式等。 以下，將說明有關在控制裝置2 3的設定資料。 如圖4所示，將黏貼薄膜2 b之長度（擬黏貼於基板 表面之所期盼的長度）L，基板1 4內之任意位置（例如 從基板前端E p有距離S的位置）之資料作爲黏貼條件。 又設定如圖5所示之從薄膜輸送構件1 1之原點（起始） 位置Q直至交給薄膜至壓榨輥子1 3的位置（壓榨輥子之 輸送起始位置）W爲止之距離g、從壓榨輥子1 3之輸送 起始位置W直至壓榨輥子13鉗住基板14之要開始黏貼 薄膜2 b的位置P爲止之圓周距離r、從偵測輸送中之基 板1 4前端的測感器2 6之位置E直至以壓榨輥子1 3鉗 住基板1 4的要開始黏貼薄膜2 b之位置（薄膜2 b的前 (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X29*7公釐） -11 - 553828 A7 B7 五、發明説明（9 ) 端位置）P爲止的定位基板用距離k等之輸送條件。 (請先閲讀背面之注意事項再填寫本頁) 由以上之設定資料（數據），將在控制裝置2 3以進 行如下之運算來設定從原點位置Q直至由切斷器8來切斷 之薄膜切斷位置（薄膜2 b之後端位置）D爲止的距離d 或由輸送輥1 5所輸送之基板輸送距離Z。 d = (g + r)-L .........(1) Z = k+ s .........(2) 有關設定該切斷位置D，在實際上係從原點位置Q直 至對於壓榨輥子1 3的薄膜交給位置W爲止之距離g間的 各位置附有位址（號數），當決定了距離d時，就算出所 對應之位置的位址，而切斷器8則不需要回行之原點位置 Q，可直接移動至所對應之位址的位置。 至於要附上上述位址，只要朝導輥3側從原點位置Q 附上附有負的符號之位址，則黏貼薄膜2 b之長度L即使 成爲長的長度，也可令從原點位置Q朝導輥3側之位置作 爲由切斷器所要切斷的薄膜切斷位置D。 經濟部智慧財產局Μ工消費合作社印製 又在移動薄膜2 b之狀態下，以切斷器8來進行移動 下之切斷時，就令切斷器8之切斷開始位置，亦就是待命 (等候）位置成爲從薄膜2b之移動速度和切斷器8對於 寬方向的切斷速度及切斷距離（薄膜2 b之寬）來反算的 上流地點就可。 接著，將依照圖2所示之流程來說明薄膜黏貼裝置的 動作。 首先，進行準備步驟（以下簡稱爲「S」）1〇〇之 •12- 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） 553828 A7 B7 五、發明説明（10 ) 薄膜黏貼動作。 而作爲準備要進行薄膜黏貼動作’從薄膜捲1以手動 來拉出薄膜2給予導輥3，且剝開保護膜2 a。將剝開保 護膜2 a之薄膜2 b拉出至後端保持構件6前端，並在前 端保持構件5及後端保持構件6上面來真空吸著。 該時，薄膜捲（輥）1及捲繞捲（輥）4係以驅動未 圖示之馬達（驅動裝置）來使薄膜2 b具有一定之張力（ 拉力）。 令切斷器8形成可通過後端保持構件6之溝（圖3之 溝6 T)之同時，朝薄膜2 b之寬（度）方向移動切斷器 8 ，而朝寬方向切斷薄膜2 b。以關閉吸著了薄膜2 b之 後端保持構件6的配系之閥，使之停止真空吸著而拋棄在 後端保持構件6上的薄膜2 b剩餘地切割端。 該時，在前端保持構件5上，薄膜2 b乃以從前端保 持構件5前端突出有1 0 m m長左右之狀態被真空吸著（ 參照圖3 )。 且在此一階段，將上述之黏貼條件資料（數據）（黏 貼長度L，距離S )，輸送條件（距離g，圓周距離r ) ’距離d或依據輸送輥1 5之基板輸送距離Z等的條件或 以其他條件來黏貼薄膜2 b之基板片數，以參照顯示於監 視器畫面2 4的設定用畫面下從鍵盤2 5輸入，而儲存記 憶於控制裝置2 3之記憶機構。再者，基板片數係形成由 處理程式來在完成每一片處理時可自動地倒數。 以如上述，就完成薄膜黏貼動作準備S 1 〇 〇 ，接著 本纸張尺度適用中國國家標準（CNS ) A4規格（210x297公釐） (請先閲讀背面之注意事項再填寫本頁) .!·裝· 、-5't 經濟部智慧財產局員工消費合作社印製 -13- 553828 A7 B7 五、發明説明（11 ) 進入於圖2之薄膜交給（交接）處理S 2 0 0。 在薄膜交給處理S 2 0 0係如圖6所示，以伺服馬達 9來轉動滾珠螺桿1 〇，且由薄膜輸送構件1 1來使前端 保持構件5上之薄膜2 b能維持與上側壓榨輥子1 3的外 周最上部成同一高度狀成平行移動。當在該移動中，予以 驅動配設於薄膜輸送構件1 1之氣缸1 2，以令後端保持 構件6朝下側退下迴避。 而該時，一對壓榨輥子1 3係成打開狀，且形成以內 部之加熱器予以加熱之狀態。而以氣缸7令前端保持構件 5更進一步移動，以令薄膜2 b前端成爲在於上側壓榨輥 子1 3的最上部位置。當薄膜2 b前端形成位於上側壓榨 輥子1 3的最上部位置時，就從靜電產生裝置1 7施加高 電壓於設置在上側壓榨輥子1 3上方之電極1 6，而使在 於該電極1 6和壓榨輥子1 3之間的從前端保持構件5所 突出的1 Omm左右之薄膜2 b前端部分帶電。當以靜電 吸著來保持薄膜2 b前端部分於壓榨輥子1 3之外周面後 ，就停止來自靜電產生裝置17之高電壓施加於電極16 〇 將薄膜2 b以前端保持構件5輸送於壓榨輥子1 3側 ，就可不產生皺紋於薄膜2 b前端部之狀態下且以均勻之 吸著力來交給於壓榨輥子1 3。 交給薄膜2 b之後，壓榨輥子1 3乃在事先於朝由輸 送輥15所構成之基板14的輸送路方向開始旋轉來朝下 側輸送所吸著之薄膜2 b，予以釋放（開放）在於前端保 (請先閲讀背面之注意事項再填寫本頁)553828 A7 B7 V. Description of the invention (1) [Technical field to which the invention belongs] (Please read the precautions on the back before filling out this page) The present invention relates to a method and a device for film sticking, and particularly relates to a pressure sticking roller ( Hereinafter referred to as a press roller) a method for attaching a film to be adhered to a substrate surface and a device thereof. [Knowledge technology] In the past (knowledge), a film was released from a film roll, and the continuous film was cut in a wide (degree) direction to form a sheet-like film (hereinafter referred to as a film) to be pasted. When a pair of press rollers are used to adhere the film to the substrate surface, the front end of the film is held by a front-end holding member such as a vacuum plate to adhere to the substrate. After exiting the front-end holding member, the film and the substrate are sandwiched by two press rollers. And, by rotating two pressing rollers to convey the substrate on a conveying road composed of a plurality of conveying rollers, at the same time, the substrate is pasted with a thin film, and when the sticking is almost completed, the film is attracted to the member (C vacuum bar, vacuum bar), etc. The terminal holding member holds the rear end of the film and adheres it to the substrate until the rear end of the film (refer to Japanese Patent Publication No. 3-16906). According to the above-mentioned conventional technology, since the front end or the rear end of the film is pasted on the substrate, and the middle part between the front end and the rear end of the film is pasted on the substrate, it is easy to apply pressure. Differences occur in the front end portion or the rear end portion of the film to be adhered for this purpose (stepwise fall), which makes it difficult (problem) to process the substrate thereafter. For example, when the thin film is a resist film, when exposure is performed, the amount of light can be changed by a drop, so that there is a problem that a line (shape) is generated. -4- This paper size applies Chinese National Standard (CNS) A4 specification (210X 297 mm) 553828 A7 __ B7 _ V. Description of the invention (2) (Please read the precautions on the back before filling this page) After the film The holding member at the end will not enter the space between the substrate and the press roller. Instead, it will stop holding the rear end of the film and release it into a free shape before the bonding is completed, so that the rear end of the bonding film will be chaotic and extremely easy. Generates streaks or bubbles. [Abstract of the Invention] To this end, an object of the present invention is to provide a film bonding method and a device thereof that can be flatly adhered to a substrate without causing a drop from the front end portion to the rear end portion of the film. Still another object of the present invention is to provide a film bonding method and device capable of sticking to a substrate from a front end portion to a rear end portion of a film in a state where wrinkles or bubbles are not generated. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs To achieve the above-mentioned purpose, the method of the present invention is characterized in that: a film is used as a press roller when a film is adhered to the surface of the substrate by a press roller Those who have the function of holding the film, the front end portion of the film to be adhered is maintained by the outer peripheral surface of the press roller, and the film to be adhered to the substrate is conveyed by rotating the press roller to make the front end consistent At the position where the substrate is pasted, the film of the shape to be pasted is adhered to the surface of the substrate, and the rear end of the film of the shape to be pasted is also maintained by the outer peripheral surface of the press roller, and is rotated by the rotation of the press roller. Adhere all the films to be pasted in the shape from the front end portion to the rear end portion on the substrate. In order to achieve the above purpose, the device of the present invention uses a press roller to paste a film that is to be adhered to the surface of the substrate. The film is adhered to the surface of the substrate. The paper size is applicable to Chinese National Standard (CNS) A4 (210X297 mm) 553828 A7. B7 V. Description of the invention (3) (Please read the precautions on the back before filling out this page) The device is characterized by: a press roller with the function of holding a film for forming the shape of the meal; Write the film front end portion of the pseudo-adhesive shape to the film front end portion holding member for the front end portion on the outer peripheral surface of the press roll; and hold the film rear end portion of the pseudo-adhesion shape to the rear end A front end holding member whose end portion is on the outer peripheral surface of the press roller, and the press roller holds the front end portion by its outer peripheral surface, and the press roller is rotated to transport the film made into a shape to be pasted to the substrate, and make the front end At the same time when the parts are formed to coincide with the starting position of the substrate, the film is pasted into a shape to be pasted on the surface of the substrate. Pressing the roller to the outer peripheral surface of the rear end portion can be maintained, and rotation of the press roller until the adhesive to the rear end portion made up of all of the film-shaped adhesive to the substrate from the intended distal portion. In the present invention described above, as the press roller, a film held on the outer peripheral surface of the press roller by electrostatic adsorption is used. Alternatively, as the press roller, an adhesive film is used to hold the film on the outer peripheral surface of the press roller. According to the present invention, a person who sticks a film of a shape to be pasted on a substrate is only pressed by a roller, and the pressing member is not switched (converted). Therefore, there is no production gap (faulting) printed by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economy In this state, the substrate can be adhered to the substrate flatly. Furthermore, the entire film of the shape to be pasted from the front end portion to the rear end portion of the film is adhered to the substrate by a pressing roller, so that no wrinkles or bubbles are generated. . [Implementation Mode of the Invention] -6-This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 553828 A7 B7 V. Description of the invention (4) Figure 1 shows a film adhesive device according to one embodiment of the present invention.槪 Slightly sectional view. (Please read the precautions on the back before filling this page) In order to release the film 2 from the film roll (or roller) 1 and convey it into a continuous film 2 on the substrate conveying path side composed of a plurality of conveying rollers 15 The roller 3 is on the lower side of the film roll 1, but here, the protective (covering) film 2a is peeled as the film 2b and the direction is changed. A winding roll (or roller) 4 is adjacent to the film roll 1 for winding the protective film 2 a peeled off by the guide roll 3. The thin film 2 is formed of three layers of a protective film 2 a and a resist film 2 c and a base film 2 d as shown in FIG. 4, and the thin film roll 1 is formed by protecting the film 2 a and the resist film 2 from the inside. c. The bottom film 2 d is rolled in sequence. The driving devices (such as motors) of the film roll 1 and the winding roll 4 are provided with a function of adjusting the torque in accordance with the remaining amount of the film, so that the tension of the film becomes constant for conveyance. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and the lower side of the guide roller 3 has a film front-end holding member (hereinafter referred to as a front-end holding member) for transporting the film to the left in the figure including the front end and the rear end of the holding film 2 b. ) 5 and the film rear-end holding member (hereinafter referred to as the rear-end holding member) 6 and the film conveying member 11 of the cutter 8 for cutting the film 2 b in the width (degree) direction. The front end holding member 5 has vacuum chambers 5 a to 5 e which are arranged in the long axis direction of the film 2 b (left-right direction of the drawing in the conveying direction) and are divided into several as shown in FIG. 3, and the film 2 b faces the film 2 b on the upper side. The suction holes are arranged in a wide direction and communicate with each of the vacuum chambers 5 a to 5 e. Each vacuum chamber 5 a to 5 e is connected to a vacuum source through a common intermediate valve (not shown) to form a -7-sheet. The dimensions are applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 553828 A7 B7 V. Description of the invention (5) (Please read the precautions on the back before filling in this page) Pick up the film on it. The front-end holding member 5 is formed in a truncated cone shape that cuts off the lower end of the front end and the upper surface is a flat surface extending at an acute angle. In addition, in order to suppress warping (bending) of the film 2b, a vacuum chamber 5e and a suction chamber are provided. Insert the hole near the front end to be handed over. The piping between the vacuum chambers 5 a to 5 e and the common intermediate valve is equipped with a pressure sensor for monitoring the vacuum state. When the suction position of the film 2 b is shifted due to some reasons When the film is not located above the suction hole, the suction condition of the film 2 b can be monitored by the decrease in vacuum pressure. The rear-end holding member 6 is also the same as the front-end holding member, and has vacuum chambers 6 a to 6 e inside and suction holes on the upper side, while the vacuum chambers 6 a to 6 c on the upstream side and the vacuum chambers 6 d and 6 on the downstream side. e uses separate valves to communicate with a common (common) vacuum source. The piping between the vacuum chambers 6 a to 6 c on the upstream side and the respective valves' and the vacuum chambers 6 d, 6 e on the downstream side and the respective valves are printed by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. The piping is equipped with pressure sensors for monitoring the vacuum status. When the film is shifted from the suction position due to some reasons, so that the film is not located on the suction hole, the vacuum pressure can be reduced. To monitor the sorption state of the film. The rear-end holding member 6 is also formed as a truncated cone that cuts off the lower side of the front end and has a flat surface extending at an acute angle. The vacuum chamber 6 e and the suction hole are formed near the front end of the transfer and are connected to the vacuum chamber 6. Separate (separated) piping systems are formed on the a to 6 c sides, so that the rear end of the film 2 b can be fully delivered to the end of the press roller 1 3 (refer to FIG. 1) (see FIG. 1). Apply tensile force to film 2b. -8- This paper size applies Chinese National Standard (CNS) A4 specification (210X29 * 7mm) 553828 A7 B7 V. Description of invention (6) (Please read the precautions on the back before filling this page) The holding member 6 is provided with a groove 6T that is orthogonal (vertically intersects) in the width (degree) direction (direction perpendicular to the plane of FIG. 1) in the conveying direction of the film 2 b (left direction in FIG. 1) and functions to cut Breaker (knife) 8 Tool receiver for cutting film in a wide direction. When the cutter 8 cuts the film in a wide direction, the film 2 b can be formed into a shape to be adhered to the substrate. Furthermore, the cutter 8 is equipped with a cylinder (not shown) on the film conveying member 1 1, In order to allow the film to move in the vertical direction and serve as a mechanism that can be withdrawn from the upper side of FIG. 1 when the film 2 b is not cut (toward the wide direction). Returning to FIG. 1 again, the film conveying member 11 is fixed with the air cylinder 12 and then screwed with a ball screw (ball screw) 1 0 rotated by the servo motor 9 so that the servo motor 9 can be used to face the figure. Move left and right. The rear-end holding member 6 is connected to the cylinder 12 by a connecting member (not shown), and can be moved in the vertical direction by the cylinder 12 so that it can be perpendicular to the pair of press rollers 13 on the holding substrate toward the conveying path side. When moving, the outermost position forms the same position. Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, the consumer cooperative, and the film conveying member 11 is fixed with a cylinder 7, and the front-end holding member 5 is also moved in the rear-end holding member 6 by the cylinder 12 in a vertical direction to exit from the front and avoid. The cylinder 7 is moved toward the press roller 1 3 to pass the leading end portion of the film 2 b to the press roller 13 (the delivery operation will be described later). Further, although the front-end holding member 5 is not shown in the figure, a stopper member which is opened in a direction away from the transport path side of the substrate 14 and is capable of adjusting the approach position of a pair of press rollers is provided. -9-This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 553828 A7 B7 V. Description of the invention (7) A pair of press rollers 1 3 is a substrate 1 composed of a plurality of conveying rollers 1 5 The upper and lower positions of the transport path 4 are arranged to clamp and move the substrates 14 transported from the left side to the right side by the respective transport rollers 15 in the vertical direction. The movement in the vertical direction is pushed by a cylinder (not shown). The press rollers 1 and 3 are formed of a roller (roller) body made of metal and coated with silicone rubber on its outer peripheral surface. A heater is provided inside the roller body. That is, the press roller 1 3 is configured to have a metal body and an outer peripheral side thereof covered with a rubber (silicone or the like) superior in heat resistance to about 1.2 mm. A cylindrical heater is provided on the center side of the metal roller body, and a concentric circle is formed on the outside of the heater to seal a liquid such as water or oil. On the other hand, the outer peripheral side is heated by applying electric current to the heater, so that the entire roller can be uniformly heated. In addition, the press roller 1 3 is configured to hold the film 2 b by electrostatic adsorption. Although silicone rubber can be used to increase the resistance when the rubber is applied to the outer periphery, it is extremely thin with a thickness of about 1.2 mm. It is not a problem for electrostatic sorption. Furthermore, when a conductive rubber is used as the heat-resistant rubber, the electrostatic absorption effect can be enhanced. A sensor 2 6 for detecting the front end of the substrate 1 4 during conveyance is provided between 15 and 15 conveying rollers near the entrance side of the press roller 1 3, and a control device 2 3 described later is detected based on the sensor 2 6 The signal from the front end of the substrate 14 is used to control the conveying roller 15 to convey the substrate 14 to the desired position below the press roller 13 and stop it. At least the upper press roller 13 is grounded, and an electrode 16 is provided above the press roller charging mechanism, and the electrode 16 and the static electricity are generated. This paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm)- 1〇 · (Please read the precautions on the back before filling out this page) Assembly, order printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 553828 A7 B7 V. Description of the invention (8) Device 17 is connected. When a local voltage is applied to the electrode 16 from the static electricity generating device, the film 2 b conveyed to the lower side of the electrode 16 is charged, and the front end portion of the film 2 b is closely adhered to the surface of the upper press roller 1 3 by Coulomb force. . A dust cover (child) 18 is provided so as to surround the upper press rollers 13 and the electrodes 16. Therefore, no dust is formed on the film 2b which is equivalent to being charged by the electrode. The control device 2 3 for controlling the operation of the device is attached with a monitor screen 2 for displaying data for pasting length, a motor constant for a driving device, and the like, and a memory for storing data or programs, and for Keypad for entering data 2 5. It also includes a program for executing the operation steps of this device (to be described later according to FIG. 2), an operation screen program for setting data on the monitor, and the like. The setting data of the control device 23 will be described below. As shown in FIG. 4, the length of the adhesive film 2 b (the expected length to be adhered to the substrate surface) L, and any position within the substrate 14 (for example, a position S with a distance S from the front end of the substrate) As a paste condition. The distance g from the origin (starting) position Q of the film conveying member 11 to the position where the film is delivered to the press roller 13 (starting position of the press roller conveyance) W is set as shown in FIG. The circumferential distance r from the start position W of the conveyance of the press roller 1 3 to the position P where the press roller 13 clamps the substrate 14 to start the film 2 b, and the sensor 2 6 from the front end of the substrate 1 4 that detects the conveyance Position E until pressing the roller 1 3 to clamp the substrate 1 4 to the position where the film 2 b is to be pasted (before the film 2 b (please read the precautions on the back before filling this page) and order the staff of the Intellectual Property Bureau of the Ministry of Economic Affairs Cooperative society printed this paper to the Chinese National Standard (CNS) A4 size (210X29 * 7mm) -11-553828 A7 B7 V. Description of the invention (9) End position P The transport conditions for the distance k to the positioning substrate . (Please read the precautions on the back before filling in this page.) From the above setting data (data), the control device 2 3 will perform the following calculations to set the position from the origin position Q until it is cut by the cutter 8 The distance d to the film cutting position (the rear end position of the film 2 b) D or the substrate conveying distance Z conveyed by the conveying roller 15. d = (g + r) -L ......... (1) Z = k + s ......... (2) The setting of the cut-off position D is actually An address (number) is attached to each of the distances g from the origin position Q to the film delivery position W of the press roller 1 3. When the distance d is determined, the address of the corresponding position is calculated, and The cutter 8 does not need to return to the origin position Q, and can directly move to the corresponding address position. As for attaching the above address, as long as the address with a negative symbol is attached from the origin position Q toward the guide roller 3 side, the length L of the adhesive film 2 b can be made from the origin even if it is a long length. The position of the position Q toward the guide roller 3 side is defined as a film cutting position D to be cut by the cutter. When printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and the Consumer Cooperative, and the moving film 2 b is used for cutting under the moving film 8 b, the cutting start position of the cutting film 8 is set to standby. The (waiting) position may be an upstream position calculated from the moving speed of the film 2b and the cutting speed and the cutting distance (width of the film 2b) of the cutter 8 in the wide direction. Next, the operation of the film bonding apparatus will be described in accordance with the flow shown in FIG. 2. First, perform the preparatory steps (hereinafter referred to as "S") • 100- • This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 553828 A7 B7 5. Description of the invention (10) Film sticking action . On the other hand, as a preparation for film sticking operation ', the film 2 is manually pulled out from the film roll 1 to the guide roller 3, and the protective film 2a is peeled off. The film 2 b with the peeled protective film 2 a is pulled out to the front end of the rear-end holding member 6, and vacuum-sucked on the front-end holding member 5 and the rear-end holding member 6. At this time, the film roll (roller) 1 and the winding roll (roller) 4 are driven by a motor (driving device) (not shown) to make the film 2b have a certain tension (pulling force). The cutter 8 is formed to pass through the groove of the rear-end holding member 6 (the groove 6 T in FIG. 3), and the cutter 8 is moved in the width (degree) direction of the film 2 b to cut the film 2 in the width direction. b. The matching valve of the rear-end holding member 6 that has sucked the film 2b is closed to stop the vacuum suction and the film 2b discarded on the rear-end holding member 6 has the remaining cut end. At this time, the film 2b is sucked on the front-end holding member 5 with a length of about 10 mm from the front end of the front-end holding member 5 (see FIG. 3). And at this stage, the above-mentioned sticking condition data (data) (sticking length L, distance S), conveying conditions (distance g, circumferential distance r) 'distance d or according to the substrate conveying distance Z of the conveying roller 15 etc. The number of substrates of the film 2 b is pasted under conditions or other conditions, and is input from the keyboard 25 under the setting screen displayed on the monitor screen 24 and stored in the memory mechanism of the control device 23. In addition, the number of substrates is formed by a processing program that can automatically count down when each piece of processing is completed. Based on the above, the film sticking action is prepared to prepare S 100. Then this paper size applies the Chinese National Standard (CNS) A4 specification (210x297 mm) (please read the precautions on the back before filling this page).! · Equipment, -5't Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs -13- 553828 A7 B7 V. Description of the invention (11) The film entered in Figure 2 was handed over (transferred) to process S 2 0 0. The film handing process S 2 0 0 is shown in FIG. 6, the ball screw 10 is rotated by a servo motor 9, and the film 2 b on the front-end holding member 5 can be maintained and pressed by the film conveying member 11 1. The uppermost part of the outer periphery of the roller 1 3 moves in parallel at the same height. During this movement, the air cylinder 12 arranged on the film conveying member 11 is driven so that the rear end holding member 6 is retracted downward to avoid. At this time, a pair of press rollers 13 are opened, and are heated by an internal heater. The front end holding member 5 is further moved by the air cylinder 7 so that the front end of the film 2b is at the uppermost position of the upper press roller 13. When the front end of the film 2 b is formed at the uppermost position of the upper press roller 13, a high voltage is applied from the static electricity generating device 17 to the electrode 16 provided above the upper press roller 13, so that the electrode 16 and The front end portion of the film 2 b of about 10 mm protruding from the front end holding member 5 between the press rollers 13 is charged. When the front end of the film 2 b is held on the outer peripheral surface of the press roller 1 3 by electrostatic adsorption, the high voltage from the static electricity generating device 17 is stopped from being applied to the electrode 16. The film 2 b is transported to the press roller by the front end holding member 5. On the 1 and 3 sides, wrinkles can be transferred to the pressing roller 1 3 with a uniform suction force without causing wrinkles on the leading end of the film 2 b. After being handed over to the film 2 b, the press roller 1 3 is rotated in advance in the direction of the conveying path of the substrate 14 constituted by the conveying roller 15 to convey the sucked film 2 b downward, and is released (opened) in Front end insurance (Please read the precautions on the back before filling this page)
、τ 經濟部智慧財產局8工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -14 - 553828 A7 B7 五、發明説明（12 ) (請先閱讀背面之注意事項再填寫本頁) 持構件5側之配管系的閥來解除薄膜2 b之真空吸著，薄 膜2 b就能與壓榨輥子1 3之旋轉一起開始輸送至下側。 至於在導輥3處，則配合薄膜2之捲出而剝開保護膜2 a ’保護膜2 a則由捲繞捲4來捲取（捲繞）。 確認由旋轉上側壓榨輥子1 3來旋轉之薄膜2 b前端 是否已到達上側壓榨輥子1 3之下面中央，乃由從未圖示 之配設於上側壓榨輥子1 3的偏碼器之脈衝數目來確認， 當確認已到達時，予以停止旋轉上側壓榨輥子1 3。 而該時，上側壓榨輥子1 3係開始朝由輸送輥1 5所 構成之基板1 4的輸送路方向轉動，且使所吸著保持之薄 膜2 b與下側壓榨輥子1 3鉗住（夾持）基板1 4並輸送 僅有直至要開始黏貼薄膜2 b之位置P爲止之距離r (壓 榨輥子13之外周的半個周份量）。 又在輸送薄膜中，以氣卸7來回行前端保持構件5之 後，將退出迴避之後端保持構件6予以上升作成與前端保 持構件5並列，而回到薄膜2 b之輸送位置。 經濟部智慧財產局S(工消費合作社印製 而後，爲了要要朝寬方向切斷薄膜2 b成爲所需要之 長度，乃由伺服馬達9移動後退薄膜輸送構件1 1。 然後，爲了以切斷器8朝寬方向切斷薄膜2 b ，由伺 服馬達9且藉由薄膜輸送構件來移切斷器8或將成爲接受 台之後端保持構件6至對應於響應黏貼薄膜尺寸（薄膜黏 貼長度）L的在上述第（1 )式所能獲得之從原點位置Q 朝要切斷薄膜2 b切斷位置D方向所看的距離d之位置。 而有關該移動係如上述，切斷器8並不回到原點位置Q， 本紙張尺度適用中國國家標隼（CNS ) A4規格（210X297公釐） -15 - 553828 A7 B7 _ 五、發明説明（13 ) 乃作成直接待命於所對應於切斷位置的位址。 (請先閱讀背面之注意事項再填寫本頁) 並在進行薄膜交給處理S 2 0 0中，予以同時進行基 板定位處理S300。 基板14係以輸送輥15來從圖1左方朝右方向移動 。該時，倘若測感器2 6偵測輸送中之基板1 4前端，就 從輸送輥1 5旋轉量算出基板1 4的移動量，並在基板前 端部之黏貼開始位置與位於上側壓榨輥子1 3最下部的位 置之薄膜2 b前端形成一致時，予以暫停基板1 4的移動 〇 亦即，輸送輥1 5係輸送基板1 4中，可由測感器 2 6偵測基板1 4前端E p (參照圖4 )，並令基板前端 E p能位於從黏貼條件之基板前端直至距離S的位置爲此 加上從測感器2 6之設置位置E (參照圖5 )直至壓榨輥 子1 3鉗住基板位置P爲止的基板固定位用距離k的基板 輸送距離Z 〔參照上述第（2)式〕之位置，換言之’輸 送基板1 4成爲能位於基板1 4和薄膜2 b之黏貼開始位 置P —齊在於該位置，而後停止輸送基板1 4。 經濟部智慧財產局g(工消費合作社印製 然後，進行圖2所示之薄膜黏貼處理S 4 0 0。 於薄膜黏貼處理S 4 0 0，係如圖1令上下之壓榨輥 子13朝基板方向上下移動’而以兩壓榨輥子1 3鉗住基 板1 4，並實施熱壓著薄膜前端於基板1 4來黏貼。該時 ’倘若從導輥3直至壓榨輥子13爲止之間產生了成垂曲 線（懸鏈線，catenary )性之下垂於薄膜2 b時’也可加強 薄膜捲1之反拉力一次來解除薄膜2 b之下垂。其次，以 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -16 - 553828 A7 B7 五、發明説明（14 ) (請先閱讀背面之注意事項再填寫本頁) 真空吸著來保持在於前端保持構件5及後端保持構件6之 上側的薄膜2 b，並以同步於壓榨輥子1 3之旋轉來使薄 膜輸送構件1 1朝上側壓榨輥子1 3側移動。兩壓榨輥子 13 ，將維持夾持基板14下轉動而令基板14朝右方向 輸送之同時，由上側壓榨輥子1 3來對於基板1 4進行熱 加壓黏貼（熱壓著）薄膜2 b。熱壓著量係因應於薄膜黏 貼尺寸（薄膜黏貼長度L )以控制裝置2 3來控制壓榨輥 子1 3的旋轉量（旋轉數）。 在於薄膜黏貼處理S 4 0 0時之薄膜輸送構件1 1朝 上側壓榨輥子1 3側移動中，將進行圖2所示之切斷薄膜 處理S 5 0 0。 於切斷薄膜處理S 5 0 0，將在移動中之薄膜輸送構 件1 1，以真空吸著來保持在於前端保持構件5及後端保 持構件6之上側的薄膜2 b，而朝寬方向移動切斷器8來 切斷（在輸送下來切斷）。由該切斷而使黏貼至基板14 中之黏貼2 b會成爲所要黏貼於基板1 4的長度。 經濟部智慧財產局8工消費合作社印製 於切斷薄膜處理S 5 0 0，對於朝寬方向之切斷器8 的移動速度和薄膜輸送構件1 1的移動速度並未具有相對 性之速度關係，而是調整切斷器8之速度成爲能在薄膜輸 送構件11朝壓榨輥子13之接近移動中予以完成切斷作 切斷薄膜之後，係如圖7所示，將後端保持構件6由 可朝垂直方向移動之氣缸12來移動於與關閑之壓榨輥子 1 3的外周最上部成同一高度，且以薄膜輸送構件1 1移 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -17 - 553828 A7 B7__ 五、發明説明（15 ) 動後端保持構件6前端至壓榨輥子1 3外周最上部之交給 位置，而後再施加高電壓於電極1 6。 (請先閲讀背面之注意事項再填寫本頁) 該時，薄膜2 b後端會從連通於後端保持構件6之直 空室6 a的吸著孔列側朝著連通於真空室6 e之吸著孔列 側依序滑動各吸著孔列上來輸送至壓榨輥子1 3。各真空 室6 a〜6 e之壓力會伴隨著輸送薄膜2 b而釋放（開放 )吸著孔列，使得能依序形成接近於大氣壓。 各真空室6 a〜6 e係令真空室6 a〜6 c和真空室 6 d 、6 e乃由在配管系以不同閥來連接，而由壓力感測 器來監視真空度，以致操作關閉成爲大氣壓之真空室6 a 〜6 c側的閥，也不會令真空室6 d、6 e側一齊成爲大 氣壓，因此，可保持薄膜2 b後端直至最後爲止來交給於 壓榨輥子1 3 ，使得薄膜2 b後端並不會下垂，而直至薄 膜2 b後端爲止可確實地交給於壓榨輥子1 3，且交給後 乃由靜電吸著來輸送直至基板1 4後端部爲止，因此，對 於所要黏貼之薄膜2 b，可經常賦予一定拉力（張力）來 黏貼之同時，也不會產生皺紋或氣泡。 經濟部智慧財產局員工消費合作社印製 交給薄膜2 b後端之後而在由壓榨輥子1 3輸送薄膜 2 b至基板1 4側中，將由氣缸7來回行前端保持構件5 後，將以氣缸1 2來上升退出迴避之後端保持構件6使之 成爲起始狀態，且使後端保持構件6與前端保持構件5形 成水平狀排列，以恢復至薄膜2 b之輸送起始位置，切斷 器8係在退出迴避於圖1中之上側後，予以回歸於切斷開 始位置。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） _ 18 - 553828 A7 B7 五、發明説明（16 ) (請先閲讀背面之注意事項再填寫本頁) 在重疊黏貼時（壓著中），薄膜2 b係形成底膜和抗 蝕劑膜之兩層構造，且構成爲作爲對向於基板1 4之面， 能使抗蝕劑面成相對向於基板1 4之面。亦即，底膜一側 形成被靜電吸著於壓榨輥子1 3而纏繞著。當纏繞薄膜 2 b時，壓榨輥子1 3係加熱著，致使薄膜2 b也由該熱 而被加熱。因此，會熔化底膜上之抗蝕劑而成爲具有適當 的黏性。由而以壓榨輥子1 3來熱壓著薄膜2 b於基板 1 4時，可令薄膜2b成緊密黏貼於基板14。而該時， 薄膜2b和基板1 4之附著力（黏著力）因大於作用在薄 膜2 b和壓榨輥子1 3之間的靜電吸著力，因而薄膜2 b 可容易地從壓榨輥子1 3剝開。 被熱壓著之基板1 4，將由轉動輸送輥1 5來輸送至 下流設備並以S 6 0 0進行確認是否已完成。當仍具有應 處理之基板1 4的剩餘片時，就回歸至薄膜交給處理 S 2 00，基板定位處理S3 00，並實施以上所說明之 處理。 經濟部智慧財產局a(工消費合作社印製 回到薄膜交給處理S 2 0 0時，就從以氣缸7移動前 端保持構件5來使薄膜2 b前端成爲位於上側壓榨輥子 1 3之頂點W位置的動作來重複地進行處理。 因黏貼薄膜2 b係僅由壓榨輥子1 3來實施，因而並 不會產生由位置之關係所引起黏著力的差異，又壓榨輥子 1 3外周面爲圓筒形且不具有凹凸，使得薄膜2 b成爲平 坦不具有落差（斷層），因此並不會在對基板14之後處 理產生困難（問題）的情事。 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -19 - 553828 A7 __ _ ____B7_ 五、發明説明（17 ) 又依據偵測基板前端來進行黏貼薄膜或切斷薄膜’因 而並不會產生延遲切斷，可切斷成所期盼之長度。 (請先閱讀背面之注意事項再填寫本頁) 又可自由地設定薄膜之切斷位置，因此，並不需要黏 貼薄膜於基板周圍，也可僅黏貼於基板中心部成畫框狀。 於薄膜交給處理S 2 0 0，以壓榨輥子1 3成靜電吸 著之薄膜2 b乃從上側壓榨輥子1 3頂點W位置直至與下 側壓榨輥子1 3鉗住之位置P爲止形成接觸狀，致使薄膜 2 b可由壓榨輥子1 3之內部加熱器來加熱之狀態。當由 熱而有可能會使薄膜2 b產生變形時，就可構成爲能切斷 壓榨輥子1 3內部加熱器之電源’或不配設加熱器之結構 也可。 爲了在後端保持構件6能獲得對於薄膜2 b的更強大 之拉力，也可增設吸著孔列之數量’或各個吸著孔列成爲 各別之真空室。 經濟部智慧財產局5貝工消費合作社印製 如圖8所示，也可在前端保持構件5、後端保持構件 6之一部分，將埋設有電極於塑膠複合板中者作爲用於吸 著薄膜之靜電吸著機構2 7、2 8，而施加電壓於該等來 倂用真空吸著及靜電吸著來保持薄膜且予以輸送，或者也 可構成爲全部由靜電吸著來吸著並以開關來切換吸著位置 〇 有關由壓榨輥子1 3來保持薄膜乙事，並不限定於靜 電吸著而已，也可作成以黏著性物質來形成壓榨輥子1 3 外周面的黏著保持。 在於黏貼型壓榨輥子1 3之時，可由壓榨輥子1 3對 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公董Ί - 20 - 553828 A7 B7 五、發明説明（18 ) (請先閲讀背面之注意事項再填寫本頁) 於薄膜2 b之底膜2 d的黏著力和抗蝕劑膜2 c之對於基 板1 4的黏著力之差，而使薄膜2 b可從壓榨輥子1 3剝 開，並以壓榨輥子1 3來黏貼於基板1 4。該時，不僅僅 對於薄膜2 b前端部或後端部而已，應使整面均由壓榨輥 子1 3來保持。 於圖1之實施形態，切斷器8係在基板之輸送路位於 較壓榨輥子1 3之下流側上方，因而在以切斷器8切斷薄 膜2 b時，即使產生切屑，也不會掉落於基板1 4上，因 而不會產生污染基板1 4。 倘若對於壓榨輥子1 3外周面進行交給薄膜2 b前端 部或後端部，該交給位置也可在非爲壓榨輥子1 3之最上 部。 圖9係顯示對於圖1之薄膜黏貼裝置配設新的加熱輥 (子）2 9之另一實施形態的薄膜黏貼裝置。 經濟部智慈財產局員工消費合作社印製 加熱輥2 9係與壓榨輥子1 3同樣在於由複數之輸送 輥1 5所構成的輸送路上下，輸送輥1 5乃配置成可移動 爲從上下方向夾持從圖左方朝右方向輸送之基板1 4。而 配合基板1 4的輸送來使加熱輥朝上下方向移動，係由未 圖示的氣缸來實施。 依據圖2所示之薄膜黏貼的動作流程來由壓榨輥子 1 3壓著薄膜於基板1 4整面，將以輸送輥1 5來輸送至 下流之設備。 該時，以未圖示之測感器偵測著基板1 4的移動量， 而在薄膜黏貼開始位置在於上側加熱輥2 9之下面中央位 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -21 - 553828 A7 B7 五、發明説明（19 ) (請先閱讀背面之注意事項再填寫本頁) 置時，就一旦停止移動。並在此，朝基板1 4上下方向移 震力上下的加熱輥2 9來鉗住（夾持）基板1 4而實施熱壓 著。而後，兩加熱輥2 9維持鉗住基板之狀態下來轉動， 而由輸送輥15輸送基板14給予下流之設備。 於本實施形態，乃形成壓榨輥子1 3係以常溫來實施 暫時性之壓著，而在加熱輥2 9實施主要壓著，由而以壓 榨輥子1 3輸送薄膜中可迴避薄膜產生變形。 圖1 0係顯示另一實施形態之薄膜黏貼裝置的槪略剖 面圖。 於本實施形態，將在圖1所示之實施形態中，更配設 了管嘴3 1於要交給薄膜2 b前端部於壓榨輥子1 3之位 置’亦就是在於電極1 6附近，且配設第2電極（帶電機 構）3 2於由壓榨輥子1 3來黏貼薄膜2 b後端部於基板 之位置，亦就是基板1 4的輸送路附近，而第2電極3 2 係與靜電產生裝置17連接著。 經濟部智慈財產局員工消費合作社印製 當壓榨輥子1 3要接收薄膜2 b前端部時，就從管嘴 3 1吹淸淨（淸潔）氣體至薄膜2 b前端部上。則在從靜 電產生裝置1 7施加高電壓於電極1 6時，從電極1 6飛 翔之電荷會乘上從管嘴31所噴出之清淨氣體朝向薄膜 2 b的收量會增加，使得薄膜2 b前端部可充分地帶電， 以致能使交給薄膜2 b前端部至壓榨輥子1 3之情事成爲 順暢地實施，而且由吹氣體來增進薄膜2 b前端部對於壓 榨輥子1 3的緊密貼住性。 又第2電極3 2係在由壓榨輥子1 3來黏貼薄膜2 b 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公董） -22 553828 A7 B7 五、發明説明（20 ) 後端部於基板時，將從靜電產生裝置1 7施加高電壓於第 2電極3 2。 (請先閱讀背面之注意事項再填寫本頁) 由而，薄膜2 b後端部，甚至以電極1 6成帶電之電 荷在以壓榨輥子1 3朝基板側輸送中引起放電，而具有會 降低保持力虞，也可由第2電極3 2而再賦予電荷給於薄 膜2 b後端部，並成爲具有充分之帶電量，致使薄膜2 b 後端部能維持緊密貼住於壓榨輥子1 3外周面，也不會在 黏貼中從壓榨輥子1 3外周面剝開，使得可更進一步確實 地未產生皺紋或氣泡下予以黏貼直至薄膜2 b後端部爲止 。又由第2電極3 2來使薄膜2 b帶電，也可對於薄膜 2 b前端部實施。 要設置管嘴3 1及第2電極3 2乙事，並不需要同時 配設，也可各別地來配設。 在於以上之實施形態，乃說明了黏貼薄膜2 b於基板 1 4上面的狀況，但倘若也欲黏貼薄膜於基板1 4下面時 ，只要在基板1 4之輸送路徑下側，予以成對稱性地設置 薄膜捲1 ，包括切斷器8之薄膜輸送構件11 ，壓榨輥子 經濟部智慧財產局員工消費合作社印製 帶電機構等則可。再者，當使用黏著型壓榨輥子時，就不 需要帶電機構。 接著，由圖1 1來說明再另一實施形態。 圖1 1之實施形態係要黏貼薄膜於圓形的晶圓者。 薄膜2乃拉緊張開於薄膜捲1和捲繞捲4之間’而圖 中之左方側爲上流側，右方爲下流側。 在從薄膜捲1至捲繞（纏繞）捲4之薄膜2輸送路徑 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -23 - 553828 A7 B7 五、發明説明（21 ) (請先閱讀背面之注意事項再填寫本頁) 上’依序配設有薄膜半切斷機構3 3、薄膜位置監視攝影 機3 4、靜電吸著型或黏著型的壓榨輥子1 3、半導體晶 圓位置監視攝影機3 5。而靜電吸著型之壓榨輥子1 3係 在內部內裝有帶電機構。 薄膜2係形成從上側起爲底膜、抗蝕劑膜、保護膜之 三層構造。薄膜半切斷機構3 3係令接受台3 3 a從薄膜 2下側來接受，並從薄膜2上側以切斷器3 3 b來切斷底 膜和抗蝕劑膜之整個厚度份量成圓形。雖可切斷保護膜之 一咨15分，但不會切斷整個厚度。因此，挖出成圓形之底膜 和抗蝕劑膜乃構成爲要黏貼於半導體晶圓3 6之形狀（圓 形）的薄膜2 b，而在薄膜半切斷機構3 3之下流側係形 成裝載於保護膜上。 經濟部智慧財產局員工消費合作社印製 而從設計裝置可瞭解在以薄膜半切斷機構3 3半切斷 成圓形時之部位的作成擬黏貼形狀之薄膜2 b前端部位置 和在下側壓榨輥子1 3之下側的接受作成擬黏貼形狀之薄 膜2 b前端部位置（相當於圖4之位置W)。由而可由薄 膜2之移動速度來瞭解作成擬黏貼形狀之薄膜2 b前端部 已到達用於接受薄膜2 b前端部的位置（相當於圖4之位 置W)，且可從該位置予以旋轉壓榨輥子13來保持輸送 薄膜2 b前端部至要黏貼半導體晶圓3 6和薄膜2 b之黏 貼開始位置（相當於圖4之位置P )。 半導體晶圓3 6係由未圖示之在半導體製造領域所公 知的機械臂來從下流側插入於壓榨輥子1 3間。薄膜@ ® 監視攝影機3 4，將監視作成擬黏貼形狀（圓形）之_ _ 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） -24 · 553828 A7 B7 五、發明説明（22 ) (請先閱讀背面之注意事項再填寫本頁) 2 b的位置，而半導體晶圓位置監視攝影機3 5則監視機 械臂上之半導體晶圓3 6的位置，並予以操作機械臂來調 整半導體晶圓3 6之位置，以令薄膜2 b和半導體晶圓 3 6下面的擬黏貼位置能成爲一致。 而薄膜2將通過下側之壓榨輥子1 3下方，且有調整 薄膜2之移動速度和壓榨輥子13的週邊速度成爲一致， 而薄膜2 b則從保護膜2 a剝開並由靜電吸著或黏著來保 持於下側壓榨輥子1 3而會到達晶圓3 6下面，且形成一 齊通過壓榨輥子1 3之間來實施黏貼。通過壓榨輥子1 3 間而完成黏貼薄膜2 b之晶圓3 6 ，將由未圖示之機械臂 來接受並暫時性地保管於收容卡匣等。 於本實施形態，薄片2本身乃作用成圖1所示之擬黏 貼薄膜2 b的前端保持構件、後端保持構件，形成在結構 上成爲簡略化者。 甚至在本實施形態，要黏貼薄膜於晶圓3 6者係僅有 壓榨_子1 3，因此，黏貼後並不會產生皺紋或氣泡、或 由於壓著構件之不同而產生線狀等之情事。 經濟部智慧財產局a(工消費合作社印製 壓榨輥子1 3並不會接觸於抗蝕劑膜，因而也不會產 生抗触劑會污染壓榨輥子1 3。 於上述實施形態，雖說明了圖1所示之電極1 6 (帶 電機構）內裝於壓榨輥子1 3 ，倘若不願意內裝於壓榨_ 子1 3時，只要配設相當於電極1 6者於圖1 1之以虛線 所表示的部位即可。 圖1 1之實施形態，雖顯示所謂擬黏貼之形狀者爲圓 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -25 - 553828 A7 B7 五、發明説明（23 ) 形等之任意形狀也可實施，但甚至如圖1擬黏貼成矩形薄 膜於基板之狀況時，也可利用圖1 1的實施形態。 (請先閱讀背面之注意事項再填寫本頁) 〔發明之效果〕 如以上所說明，依據本發明，可從薄膜前端部直至後 端部爲止，能在不產生落差（斷層狀）之狀態下予以形成 平坦地黏貼於基板上。 又依據本發明，能在不產生皺紋或氣泡之狀態下來黏 貼薄膜之前端部直至後端部爲止於基板上。 〔圖式之簡單說明〕 圖1係顯示本發明之一實施形態的薄膜黏貼裝置之槪 略剖面圖。 圖2係用於說明圖1之薄膜黏貼裝置的動作程序用之 流程圖。 圖3係顯示在完成準備薄膜黏貼動作時之圖1的黏貼 裝置之後端保持構件、前端保持構件的圖。 經濟部智慧財產局員工消費合作社印製 圖4係用於說明基板和所要黏貼薄膜之尺寸及關係用 的圖。 圖5係用於說明有關設定在圖1之薄膜黏貼裝置的黏 貼薄膜用之圖。 圖6係顯示在圖2之薄膜交給處理的圖1之薄膜黏貼 裝置的薄膜前端保持構件等之狀況圖。 圖7係顯示在圖2之薄膜黏貼處理的圖1之薄膜黏貼 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -26 - 553828 A7 B7 五、發明説明（24 ) 裝置的薄膜前端保持構件等之狀況圖。 圖8係顯示使用靜電吸著機構於圖1之薄膜黏貼裝置 的薄膜前端保持構件和後端保持構件之結構圖。 圖9係顯示本發明之其他實施形態的薄膜黏貼裝置之 槪略剖面圖。 圖1 0係顯示本發明之另一實施形態的薄膜黏貼裝置 之主要部分的槪略剖面圖。 圖1 1係顯示本發明之再另一實施形態的薄膜黏貼裝 置之主要部分的槪略剖面圖。 〔符號之說明〕 2 :薄 膜 2 b : 薄 膜 2 d : 底 膜 4 :捲 繞 (纏 繞）捲（或輥） 5 a〜 5 e : :真空室 6 a〜 6 e : :真空室 7 :氣缸 1 :薄膜捲（或輥） 2 a :保護膜 2 c :抗鈾（劑）膜 3 :導輥 5 :薄膜前端保持構件 6 :薄膜後端保持構件 6 丁：溝 經濟部智慧財產局8工消費合作社印製 9:伺服馬達 11:薄膜輸送構件 13:壓榨輥子（加壓黏貼輥子） 1 5 :輸送輥 17:靜電產生裝置 2 1 :薄膜（切屑） (請先閱讀背面之注意事項再填寫本頁) 8 :切斷器（刀具） 1 0 :滾珠螺桿（絲槓） 1 2 :氣缸 1 4 :基板 1 6 :電極 1 8 :防塵蓋 本紙張尺度適用中國國家標準（CNS)A4規格（210X297公釐） -27- 553828 經濟部智慈財產局員工消費合作社印製 五、發明説明（25 ) 2 3 :控制裝置 2 5 :鍵盤 27 :靜電吸著裝置 2 9 :加熱輥 3 2 :第2電極 3 3 a :接受台 3心薄膜位置監視攝影機 3 6 (半導體）晶圓 2 0 0 :薄膜交給處理 4 0 0 :薄膜黏貼處理 6 0 〇 :確認是否完成 D :切斷位置 E p :基板前端 k =基板定位用距離 P =鉗住（夾持）位置 A7 B7 2 4 :監視器畫面 2 6 :測感器 28:靜電吸著裝置 3 1 :管嘴（噴嘴） 3 3 =薄膜半切斷機構 3 3 b :切斷器 35:半導體晶圓位置監視攝影機 100:準備薄膜黏貼動作 300:基板定位處理 500:切斷薄膜處理 d:從Q直至D爲止之距離 E :測感器2 6之位置 Q :圓周距離（Q-> W之距離） L ·黏貼長度 Q :原點（起始）位置 r :圓周距離 S:從Ep至基板內的距離（任意位置) W:薄膜交給位置 Z:基板輸送距離 (請先閱讀背面之注意事項再填寫本頁), Τ Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, 8th Industrial Cooperative Cooperative, and the paper size is applicable to the Chinese National Standard (CNS) A4 (210X297 mm) -14-553828 A7 B7 V. Description of the invention (12) Please fill in this page again) Hold the valve of the piping system on the side of the member 5 to release the vacuum suction of the film 2 b, and the film 2 b can be conveyed to the lower side together with the rotation of the press roller 1 3. As for the guide roller 3, the protective film 2a is peeled off in cooperation with the unwinding of the film 2. The protective film 2a is taken up (rolled) by the winding roll 4. It is confirmed whether the front end of the film 2 b rotated by rotating the upper press roller 1 3 has reached the lower center of the upper press roller 1 3. The number of pulses of the polarizer provided on the upper press roller 1 3 is not shown. Confirm that when it is confirmed that it has arrived, stop rotating the upper press roller 1 3. At this time, the upper press roller 1 3 starts to rotate in the direction of the conveying path of the substrate 14 composed of the transport roller 15, and the sucked and held film 2 b and the lower press roller 1 3 are clamped (clamped) Hold) the substrate 1 4 and convey only the distance r (the half-period amount of the outer periphery of the press roller 13) up to the position P where the film 2 b is to be adhered. In the transporting film, after the front end holding member 5 is reciprocated with the air release 7, the rear end holding member 6 is raised to withdraw from the avoidance avoidance to be aligned with the front end holding member 5, and then returns to the transport position of the film 2b. After printing by the Intellectual Property Bureau of the Ministry of Economic Affairs (industrial and consumer cooperatives), in order to cut the film 2b in the wide direction to the required length, the servo motor 9 moves and retracts the film conveying member 1 1. Then, in order to cut off The cutter 8 cuts the film 2 b in the wide direction, and the servo motor 9 moves the cutter 8 by the film conveying member or will become the holding member 6 at the rear end of the receiving table to correspond to the size of the adhesive film (film adhesive length) L The position obtained by the above formula (1) is the distance d from the origin position Q to the direction to cut the film 2 b to the cutting position D. And the movement is as described above, the cutter 8 and Do not return to the origin position Q. This paper size is applicable to China National Standard (CNS) A4 specifications (210X297 mm) -15-553828 A7 B7 _ V. Description of the invention (13) is made to stand by directly corresponding to the cut off (Please read the precautions on the back before filling this page) and perform the substrate positioning process S300 at the same time as the film handing process S 2 0. The substrate 14 is transported by the roller 15 from Figure 1 The left moves to the right. At this time, If the sensor 2 6 detects the front end of the substrate 1 4 during conveyance, the moving amount of the substrate 14 is calculated from the rotation amount of the conveying roller 15, and the adhesion starting position at the front end of the substrate and the lowermost position of the upper press roller 1 3 are calculated. When the front end of the film 2 b at the same position is formed, the movement of the substrate 14 is suspended. That is, in the conveying roller 15, the conveying substrate 14 can be detected by the sensor 2 6 and the front end E p of the substrate 14 (refer to the figure). 4), and the substrate front end Ep can be located from the front end of the substrate to the distance S from the adhesion condition, plus the setting position E of the sensor 26 (refer to Figure 5) until the press roller 1 3 clamp the substrate position The substrate transfer distance Z at the substrate holding position K up to P [refer to the above formula (2)], in other words, the 'transport substrate 1 4 becomes the adhesion start position P of the substrate 14 and the film 2 b — Qi lies in At this position, the substrate transfer is stopped. 4. Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs (consumer and consumer cooperative), and then subjected to the film adhesion process S 4 0 0 shown in FIG. 2. The film adhesion process S 4 0 0 is shown in the figure. 1 Make the upper and lower press rollers 13 in the direction of the substrate Move 'to clamp the substrate 14 with two press rollers 1 3, and apply heat to the front end of the film to adhere to the substrate 14. At this time, if a vertical curve is generated from the guide roller 3 to the press roller 13 ( When the catenary, catenary, sags on film 2b, it can also strengthen the reverse tension of film roll 1 once to release the sag on film 2b. Secondly, the Chinese national standard (CNS) A4 specification (210X297) is applied to this paper size Mm) -16-553828 A7 B7 V. Description of the invention (14) (Please read the precautions on the back before filling out this page) Vacuum suction to hold the film 2 on the upper side of the front-end holding member 5 and the rear-end holding member 6 b, and the film conveying member 11 is moved to the upper side of the pressing rollers 13 in synchronization with the rotation of the pressing rollers 13. The two press rollers 13 keep the substrate 14 rotated while the substrate 14 is conveyed to the right, and the upper press rollers 13 are used to hot-adhesively adhere (heat-press) the film 2 b to the substrate 14. The amount of hot pressing is controlled by the control device 2 3 according to the film sticking size (film sticking length L) to control the rotation amount (number of rotations) of the press rollers 1 3. While the film conveying member 11 is moving toward the upper press roller 13 at the time of the film sticking process S400, the film cutting process S500 shown in FIG. 2 is performed. At the cutting film processing S500, the film conveying member 11 which is moving is held by the vacuum holding to hold the film 2b on the upper side of the front-end holding member 5 and the rear-end holding member 6, and moves in a wide direction. The cutter 8 is used for cutting (cutting after conveying). By this cutting, the adhesive 2 b adhered to the substrate 14 becomes a length to be adhered to the substrate 14. Printed on the cutting film processing S 5 0 by the 8th Industrial Cooperative Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. There is no relative speed relationship between the moving speed of the cutter 8 in the wide direction and the moving speed of the film conveying member 11. Instead, the speed of the cutter 8 is adjusted so that the film can be cut during the close movement of the film conveying member 11 toward the press roller 13 as shown in FIG. 7. The air cylinder 12 moving in the vertical direction is moved to the same height as the outermost upper part of the idle press roller 1 3, and the film conveying member 1 1 is moved. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) ) -17-553828 A7 B7__ V. Description of the invention (15) Move the front end of the rear end holding member 6 to the handover position of the outer periphery of the press roller 1 3, and then apply high voltage to the electrode 16. (Please read the precautions on the back before filling in this page.) At this time, the rear end of the film 2 b will be connected to the vacuum chamber 6 e from the suction hole row side of the vertical chamber 6 a that communicates with the rear-end holding member 6. The suction hole row side slides each suction hole row in order to convey it to the press rollers 1 3. The pressure of each of the vacuum chambers 6 a to 6 e will release (open) the suction hole row along with the transport film 2 b, so that the pressure can be formed close to the atmospheric pressure sequentially. The vacuum chambers 6 a to 6 e are the vacuum chambers 6 a to 6 c and the vacuum chambers 6 d and 6 e are connected by different valves in the piping system, and the pressure is monitored by the pressure sensor to close the operation. The valves on the sides of the vacuum chambers 6 a to 6 c that are at atmospheric pressure do not cause the vacuum chambers 6 d and 6 e to be at the same time at the same time. Therefore, the rear end of the film 2 b can be kept to the press roller 1 3 So that the rear end of the film 2 b does not sag, and it can be surely handed over to the press roller 1 3 until the rear end of the film 2 b, and after the delivery, it is transported by electrostatic adsorption until the rear end of the substrate 14 Therefore, for the film 2 b to be pasted, a certain tensile force (tensile force) can be often applied to adhere it, and wrinkles or bubbles will not be generated. After being printed and handed over to film 2 b by the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, the film 2 b is conveyed by the press rollers 1 3 to the substrate 1 and 4 sides. 1 2 to rise and exit to avoid the rear end holding member 6 to make it into the initial state, and to make the rear end holding member 6 and the front end holding member 5 form a horizontal arrangement to restore the transport starting position of the film 2 b, the cutter After the 8 series exited and avoided the upper side in FIG. 1, it returned to the cutting start position. This paper size is in accordance with Chinese National Standard (CNS) A4 (210X297mm) _ 18-553828 A7 B7 V. Description of the invention (16) (Please read the precautions on the back before filling this page) When overlapping and pasting (pressing (Middle), the thin film 2 b has a two-layer structure of a base film and a resist film, and is configured to be a surface facing the substrate 14, so that the resist surface can be a surface facing the substrate 14. That is, the base film is entangled with static electricity which is attracted to the press rollers 1 3. When the film 2b is wound, the press rollers 13 and 3 are heated, so that the film 2b is also heated by the heat. As a result, the resist on the base film is melted and becomes appropriate in viscosity. Therefore, when the film 2 b is hot-pressed on the substrate 14 by the press rollers 13, the film 2 b can be closely adhered to the substrate 14. At this time, since the adhesion force (adhesive force) between the film 2b and the substrate 14 is greater than the electrostatic attraction force between the film 2b and the press roller 13, the film 2b can be easily peeled from the press roller 13 . The hot-pressed substrates 14 will be transported to the downstream equipment by rotating the transport rollers 15 and confirmed with S600. When there are still the remaining pieces of the substrate 14 to be processed, it returns to the film handover processing S 2 00, the substrate positioning processing S 3 00, and performs the processing described above. Intellectual Property Bureau of the Ministry of Economic Affairs a (industrial and consumer cooperative printing and returning the film to the processing S 2 0, the front end holding member 5 is moved from the cylinder 7 to make the front end of the film 2 b the apex W of the upper press roller 1 3 Positioning operations are repeatedly processed. Since the adhesive film 2 b is only implemented by the press rollers 1 and 3, there is no difference in adhesion caused by the positional relationship. The outer peripheral surface of the press rollers 1 and 3 is cylindrical. Shape and no unevenness, so that the film 2 b becomes flat and does not have a drop (fault), so it will not cause difficulties (problems) in the post-processing of the substrate 14. This paper size applies the Chinese National Standard (CNS) A4 specification ( 210X297 mm) -19-553828 A7 __ _ ____B7_ V. Description of the invention (17) The film is adhered or cut off according to the detection of the front end of the substrate ', so there is no delayed cut, it can be cut to the desired (Please read the precautions on the back before filling in this page.) You can freely set the cutting position of the film, so you do n’t need to stick the film around the substrate, or you can only stick to the substrate. The central part is in the form of a picture frame. The film is handed over to the processing S 2 0 0, and the pressing roller 1 3 is turned into an electrostatically attracted film 2 b. It is pressed from the vertex W of the upper pressing roller 1 3 to the lower pressing roller 1 3 The contact shape is formed up to the position P, so that the film 2 b can be heated by the internal heater of the press roller 1 3. When the film 2 b may be deformed by heat, it can be configured to cut the press roller 1 3 Power supply of internal heater or structure without heater. In order to obtain a stronger pulling force for the film 2 b at the rear end holding member 6, the number of suction hole rows may be increased or each suction The row of holes becomes a separate vacuum chamber. As shown in Figure 8, printed by the 5 Bayer Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, electrodes can also be embedded in plastic in one part of the front-end holding member 5 and the back-end holding member 6. The composite board is used as an electrostatic adsorption mechanism 27, 28 for absorbing the film, and a voltage is applied to these to hold and transport the film by vacuum adsorption and electrostatic adsorption, or it may be constituted as all Adsorption by electrostatic adsorption and The switch is used to switch the suction position. The holding of the film by the pressing roller 1 3 is not limited to electrostatic adsorption, and it can also be used to form an adhesive substance to form the adhesive holding of the outer peripheral surface of the pressing roller 1 3. When the press roller 1 3, the press roller 13 can apply the Chinese National Standard (CNS) A4 specifications (210X297)-20-553828 A7 B7 to this paper size. 5. Description of the invention (18) (Please read the precautions on the back first Fill in this page again) The difference between the adhesion of the base film 2 d on the film 2 b and the adhesion of the resist film 2 c to the substrate 14, so that the film 2 b can be peeled off from the press roller 13 and The pressing rollers 1 3 are used to adhere to the substrate 14. At this time, not only the front end portion or the rear end portion of the film 2 b, but the entire surface should be held by the press rollers 13. In the embodiment of FIG. 1, the cutter 8 is located above the downstream side of the pressing roller 13 on the conveying path of the substrate. Therefore, when the film 2 b is cut by the cutter 8, it will not fall even if chips are generated. It falls on the substrate 14 so that the substrate 14 is not contaminated. If the outer peripheral surface of the press roller 1 3 is handed over to the front end portion or the rear end portion of the film 2 b, the delivery position may be at the uppermost portion other than the press roller 1 3. Fig. 9 shows a film sticking device according to another embodiment in which a new heating roller (29) is provided for the film sticking device of Fig. 1. The heating roller 2 9 printed by the employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is the same as the pressing roller 1 3 on the conveying path composed of a plurality of conveying rollers 15. The conveying rollers 15 are configured to be movable so as to move upward and downward. Hold the substrates 1 4 conveyed from the left to the right in the figure. In addition, the heating roller is moved in the up-and-down direction in accordance with the conveyance of the substrate 14, and is performed by an air cylinder (not shown). According to the operation procedure of film sticking shown in FIG. 2, the film is pressed on the entire surface of the substrate 14 by the pressing rollers 13 and conveyed to the downstream equipment by the conveying rollers 15. At this time, the amount of movement of the substrate 14 is detected by a sensor (not shown), and the start position of the film is located at the center of the lower side of the upper heating roller 29. The paper size applies the Chinese National Standard (CNS) A4 specification ( 210X297 mm) -21-553828 A7 B7 V. Description of the invention (19) (Please read the precautions on the back before filling this page) When setting, it will stop moving once. Here, the heating rollers 29, which are vibrating up and down, are moved up and down in the substrate 14 to clamp (hold) the substrate 14 and perform thermal compression. Then, the two heating rollers 29 rotate while maintaining the substrate clamped, and the substrate 14 is conveyed to the downstream equipment by the conveying roller 15. In the present embodiment, the press rollers 13 are formed to perform temporary pressing at normal temperature, and the main rollers are pressed to the heating rollers 29, so that the film can be prevented from being deformed during the conveyance of the films by the press rollers 13. FIG. 10 is a schematic cross-sectional view showing a film bonding apparatus according to another embodiment. In this embodiment, in the embodiment shown in FIG. 1, a nozzle 3 1 is further provided at the position to be handed over to the film 2 b. The front end portion is at the position of the pressing roller 13, that is, near the electrode 16, and A second electrode (charge mechanism) 3 2 is arranged to press the film 2 by a pressing roller 1 3 2 b The rear end portion is at the position of the substrate, that is, the vicinity of the transport path of the substrate 14, and the second electrode 3 2 is generated with static electricity The device 17 is connected. Printed by the Employees' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. When the press roller 1 3 is to receive the front end of the film 2 b, the clean (clean) gas is blown from the nozzle 3 1 to the front end of the film 2 b. When a high voltage is applied to the electrode 16 from the static electricity generating device 17, the charge flying from the electrode 16 is multiplied by the clean gas ejected from the nozzle 31 toward the film 2b, so that the film 2b is increased. The front end portion can be sufficiently charged, so that the delivery from the front end portion of the film 2 b to the press roller 1 3 can be smoothly implemented, and the close adhesion of the front end portion of the film 2 b to the press roller 1 3 can be improved by blowing air. . The second electrode 3 2 is attached to the film 2 by the press roller 1 3 b. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297), -22 553828 A7 B7 V. Description of the invention (20) Rear end On the substrate, a high voltage is applied from the static electricity generating device 17 to the second electrode 32. (Please read the precautions on the back before filling in this page.) Therefore, the rear end of the film 2b, even the charged charge of the electrode 16 causes discharge during the conveyance to the substrate side by the press roller 13, which will reduce the The holding force may be charged by the second electrode 3 2 to the rear end of the film 2 b and have sufficient charge, so that the rear end of the film 2 b can maintain close contact with the outer periphery of the press roller 1 3 The surface is not peeled off from the outer peripheral surface of the press roller 1 3 during the sticking, so that it can be stuck to the rear end of the film 2 b without any wrinkles or bubbles. The thin film 2b is also charged by the second electrode 32, and the thin film 2b may be applied to the front end portion of the thin film 2b. It is not necessary to arrange the nozzles 3 1 and the second electrodes 3 2 at the same time, and they can be provided separately. In the above embodiment, the state where the thin film 2 b is on the substrate 14 is explained. However, if the thin film is also to be bonded on the lower surface of the substrate 14, it is only required to be symmetrical below the conveying path of the substrate 14. It is possible to install a film roll 1 including a film conveying member 11 of a cutter 8 and a press roller to print a charging mechanism of an employee consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Furthermore, when an adhesive-type press roller is used, a charging mechanism is not required. Next, still another embodiment will be described with reference to FIG. 11. The embodiment shown in FIG. 11 is one in which a thin film is adhered to a circular wafer. The film 2 is stretched between the film roll 1 and the winding roll 4 'and the left side in the figure is the upstream side and the right side is the downstream side. In the film 2 conveying path from film roll 1 to winding (winding) roll 4, the paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -23-553828 A7 B7 V. Description of the invention (21) ( Please read the precautions on the back before filling in this page) on the 'Sequentially equipped with film half-cutting mechanism 3 3, film position monitoring camera 3 4, electrostatic suction or adhesive type press roller 1 3, semiconductor wafer position Surveillance cameras 3 5. On the other hand, electrostatic press type rollers 1 3 are equipped with a charging mechanism inside. The thin film 2 has a three-layer structure consisting of a base film, a resist film, and a protective film from the upper side. The film half-cutting mechanism 3 3 makes the receiving table 3 3 a receive from the lower side of the film 2 and cuts the entire thickness of the base film and the resist film into a circular shape with a cutter 3 3 b from the upper side of the film 2 . Although the protective film can be cut for 15 minutes, it does not cut the entire thickness. Therefore, the base film and the resist film excavated in a circular shape are configured to be adhered to the thin film 2 b in the shape (circular shape) of the semiconductor wafer 36, and are formed on the downstream side of the thin film cutting mechanism 3 3. Loaded on a protective film. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and the design device can be understood from the design of the film half-cutting mechanism 3 3 The film is made into a pseudo-adhesive shape at the half-cutting position 2 b The position of the front end and the pressing roller 1 on the lower side 1 3 The position of the front end of the film 2 b received in a pseudo-adhesive shape on the lower side (equivalent to the position W in FIG. 4). Therefore, the moving speed of the film 2 can be used to understand that the front end portion of the film 2 b made into a pseudo-adhesive shape has reached the position for receiving the front end portion of the film 2 b (equivalent to the position W in FIG. 4), and can be rotated and pressed from this position. The roller 13 keeps the leading end portion of the film 2 b transported to the bonding start position (equivalent to the position P in FIG. 4) where the semiconductor wafer 36 and the film 2 b are to be bonded. The semiconductor wafer 36 is inserted between the press rollers 13 from the downstream side by a robot arm not shown in the semiconductor manufacturing field. Film @ ® Surveillance Camera 3 4 will make surveillance into a pseudo-adhesive shape (circular) _ _ This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) -24 · 553828 A7 B7 V. Description of the invention (22 ) (Please read the precautions on the back before filling out this page) The position of 2 b, and the semiconductor wafer position monitoring camera 3 5 monitors the position of the semiconductor wafer 36 on the robot arm, and operates the robot arm to adjust the semiconductor The position of the wafer 36 is to make the film 2b and the pseudo-adhesion position under the semiconductor wafer 36 be consistent. The film 2 will pass under the press rollers 1 3 on the lower side, and the moving speed of the film 2 and the peripheral speed of the press roller 13 are adjusted to be the same, and the film 2 b is peeled from the protective film 2 a and attracted by static electricity or Adhesion is maintained on the lower press rollers 13 and will reach the bottom of the wafer 36, and it is formed by pressing between the press rollers 13 to perform adhesion. The wafer 36, which has completed the sticking of the film 2b by pressing the rollers 1 to 3, is received by a robot arm (not shown) and temporarily stored in a storage cassette or the like. In this embodiment, the sheet 2 itself functions as a front-end holding member and a rear-end holding member of the pseudo-adhesive film 2 b shown in FIG. 1, and is simplified in structure by being formed. Even in this embodiment, the only way to attach the film to the wafer 36 is to press the sub 1 3, so there will be no wrinkles or bubbles after sticking, or linearity due to the difference in the pressure member. . The Intellectual Property Bureau of the Ministry of Economic Affairs a (industrial and consumer cooperative printing press rollers 13 will not come into contact with the resist film, so it will not produce an anti-corrosive agent that will contaminate the press rollers 13. In the above embodiment, although the figure The electrode 1 6 (charged mechanism) shown in 1 is built in the press roller 1 3. If it is not willing to be built in the press roller 13, as long as it is equipped with an electrode 16 corresponding to the electrode shown in dotted line in Figure 11 The embodiment shown in Figure 1 shows that although the shape to be pasted is a round paper, the Chinese paper standard (CNS) A4 (210X297 mm) is applicable. -25-553828 A7 B7 V. Description of the invention ( 23) Any shape such as shape can also be implemented, but even when the rectangular film is intended to be pasted into the substrate as shown in Figure 1, the implementation of Figure 11 can be used. (Please read the precautions on the back before filling this page) [Effects of the Invention] As described above, according to the present invention, the film can be adhered flatly to the substrate from the front end portion to the rear end portion of the film without causing a drop (faulty state). Can be produced In the state of wrinkles or bubbles, the front end portion of the film is adhered to the substrate until the rear end portion. [Simplified description of the drawing] FIG. 1 is a schematic cross-sectional view showing a film adhesion device according to an embodiment of the present invention. The flowchart for explaining the operation procedure of the film sticking device of Fig. 1. Fig. 3 is a diagram showing the rear end holding member and the front end holding member of the sticking device of Fig. 1 when the film sticking operation is completed. The Ministry of Economic Affairs, Intellectual Property Bureau Figure 4 printed by the employee consumer cooperative is used to explain the size and relationship between the substrate and the film to be pasted. Figure 5 is a drawing used to explain the pasting film set on the film pasting device of Fig. 1. Figure 6 is a display The condition of the film front-end holding member of the film bonding apparatus of FIG. 1 after the film is handed over to FIG. 2. FIG. 7 shows the film bonding of FIG. 1 shown in the film bonding process of FIG. CNS) A4 specification (210X297 mm) -26-553828 A7 B7 V. Description of the invention (24) Status diagram of the film front-end holding member of the device. Figure 8 shows the use The structure diagram of the film front-end holding member and the rear-end holding member of the electro-adhesion mechanism in the film sticking device of FIG. 1. FIG. 9 is a schematic cross-sectional view showing a film sticking device according to another embodiment of the present invention. A schematic cross-sectional view of a main part of a film sticking device according to another embodiment of the present invention. Fig. 11 is a schematic cross-sectional view of a main part of a film sticking device according to still another embodiment of the present invention. 〔2: Film 2 b: Film 2 d: Backing film 4: Winding (winding) roll (or roller) 5 a ~ 5 e :: Vacuum chamber 6 a ~ 6 e :: Vacuum chamber 7: Cylinder 1: Film roll (Or roller) 2 a: protective film 2 c: uranium-resistant (agent) film 3: guide roller 5: film front-end holding member 6: film rear-end holding member 6 D: printed by the Industrial Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 9: Servo motor 11: Film conveying member 13: Pressing roller (pressure sticking roller) 1 5: Conveying roller 17: Static generating device 2 1: Film (chip) (Please read the precautions on the back before filling in this page) 8 : Cutter (tool) 1 0: ball screw ( (Screw) 1 2: Cylinder 1 4: Substrate 16: Electrode 1 8: Dust cover The paper size is applicable to China National Standard (CNS) A4 (210X297 mm) -27- 553828 Employees ’Cooperatives, Intellectual Property Office, Ministry of Economic Affairs Printed 5. Description of the invention (25) 2 3: Control device 2 5: Keyboard 27: Electrostatic adsorption device 2 9: Heating roller 3 2: Second electrode 3 3 a: Receiving table 3 core film position monitoring camera 3 6 ( (Semiconductor) Wafer 2 0: Film handing process 4 0 0: Film sticking process 6 0 0: Confirmation of completion D: Cutting position E p: Front end of substrate k = Distance for substrate positioning P = Clamping (holding) Position A7 B7 2 4: Monitor screen 2 6: Sensor 28: Electrostatic pickup device 3 1: Nozzle (nozzle) 3 3 = Film half-cutting mechanism 3 3 b: Cutter 35: Semiconductor wafer position monitoring Camera 100: Preparing film bonding action 300: Substrate positioning process 500: Cutting film process d: Distance from Q to D E: Position of sensor 2 6 Q: Circumferential distance (Q- > W distance) L · Adhesion length Q: Origin (starting) position r: Circumferential distance S: Distance from Ep to the substrate (any position) W: Thin Film delivery position Z: substrate conveying distance (please read the precautions on the back before filling this page)
本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -28-This paper size applies to China National Standard (CNS) A4 (210X297 mm) -28-