TWI717467B - 吸盤台 - Google Patents
吸盤台 Download PDFInfo
- Publication number
- TWI717467B TWI717467B TW106105331A TW106105331A TWI717467B TW I717467 B TWI717467 B TW I717467B TW 106105331 A TW106105331 A TW 106105331A TW 106105331 A TW106105331 A TW 106105331A TW I717467 B TWI717467 B TW I717467B
- Authority
- TW
- Taiwan
- Prior art keywords
- suction
- fixture
- holding
- base
- jig
- Prior art date
Links
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
- B28D7/046—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work the supporting or holding device being of the vacuum type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/32—Holders for supporting the complete device in operation, i.e. detachable fixtures
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting substrates others than wafers, e.g. chips
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016068082A JP2017183484A (ja) | 2016-03-30 | 2016-03-30 | チャックテーブル |
JP2016-068082 | 2016-03-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201742186A TW201742186A (zh) | 2017-12-01 |
TWI717467B true TWI717467B (zh) | 2021-02-01 |
Family
ID=60008623
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106105331A TWI717467B (zh) | 2016-03-30 | 2017-02-17 | 吸盤台 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2017183484A (ja) |
KR (1) | KR20170113117A (ja) |
CN (1) | CN107263755A (ja) |
TW (1) | TWI717467B (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107718332B (zh) * | 2017-10-23 | 2021-02-02 | 安徽中晶光技术股份有限公司 | 一种用于晶体线切割的通用装夹工装 |
CN108447800B (zh) * | 2018-01-31 | 2019-12-10 | 北京铂阳顶荣光伏科技有限公司 | 薄膜电池的制造方法 |
CN108789869A (zh) * | 2018-06-15 | 2018-11-13 | 蚌埠朝阳玻璃机械有限公司 | 一种异形玻璃装夹工作台 |
JP7418271B2 (ja) | 2020-04-13 | 2024-01-19 | 株式会社ディスコ | 治具テーブル及び分割方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11274110A (ja) * | 1998-03-20 | 1999-10-08 | Towa Corp | 半導体ウェーハの切断方法及び切断装置 |
JP2009142992A (ja) * | 2007-12-11 | 2009-07-02 | Disco Abrasive Syst Ltd | パッケージ基板の保持治具 |
JP2016040060A (ja) * | 2014-08-12 | 2016-03-24 | Towa株式会社 | 切断装置及び切断方法並びに吸着機構及びこれを用いる装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004153270A (ja) * | 1999-03-03 | 2004-05-27 | Hitachi Ltd | 半導体素子の分離方法およびその装置並びに半導体素子の搭載方法 |
JP2004055860A (ja) * | 2002-07-22 | 2004-02-19 | Renesas Technology Corp | 半導体装置の製造方法 |
JP2014175602A (ja) * | 2013-03-12 | 2014-09-22 | Disco Abrasive Syst Ltd | 保持治具 |
JP6173173B2 (ja) * | 2013-11-11 | 2017-08-02 | 株式会社ディスコ | 切削装置 |
-
2016
- 2016-03-30 JP JP2016068082A patent/JP2017183484A/ja active Pending
-
2017
- 2017-02-17 TW TW106105331A patent/TWI717467B/zh active
- 2017-03-15 KR KR1020170032309A patent/KR20170113117A/ko not_active Application Discontinuation
- 2017-03-27 CN CN201710187022.7A patent/CN107263755A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11274110A (ja) * | 1998-03-20 | 1999-10-08 | Towa Corp | 半導体ウェーハの切断方法及び切断装置 |
JP2009142992A (ja) * | 2007-12-11 | 2009-07-02 | Disco Abrasive Syst Ltd | パッケージ基板の保持治具 |
JP2016040060A (ja) * | 2014-08-12 | 2016-03-24 | Towa株式会社 | 切断装置及び切断方法並びに吸着機構及びこれを用いる装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20170113117A (ko) | 2017-10-12 |
TW201742186A (zh) | 2017-12-01 |
CN107263755A (zh) | 2017-10-20 |
JP2017183484A (ja) | 2017-10-05 |
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