TWI684226B - 電子零件搬送裝置及電子零件檢查裝置 - Google Patents

電子零件搬送裝置及電子零件檢查裝置 Download PDF

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Publication number
TWI684226B
TWI684226B TW106145894A TW106145894A TWI684226B TW I684226 B TWI684226 B TW I684226B TW 106145894 A TW106145894 A TW 106145894A TW 106145894 A TW106145894 A TW 106145894A TW I684226 B TWI684226 B TW I684226B
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TW
Taiwan
Prior art keywords
electronic component
component
area
inspection
electronic
Prior art date
Application number
TW106145894A
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English (en)
Chinese (zh)
Other versions
TW201824422A (zh
Inventor
小谷憲昭
Original Assignee
日商精工愛普生股份有限公司
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Publication of TW201824422A publication Critical patent/TW201824422A/zh
Application granted granted Critical
Publication of TWI684226B publication Critical patent/TWI684226B/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
    • G01R31/66—Testing of connections, e.g. of plugs or non-disconnectable joints
    • G01R31/68—Testing of releasable connections, e.g. of terminals mounted on a printed circuit board

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW106145894A 2016-12-27 2017-12-27 電子零件搬送裝置及電子零件檢查裝置 TWI684226B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-252558 2016-12-27
JP2016252558A JP6903268B2 (ja) 2016-12-27 2016-12-27 電子部品搬送装置および電子部品検査装置

Publications (2)

Publication Number Publication Date
TW201824422A TW201824422A (zh) 2018-07-01
TWI684226B true TWI684226B (zh) 2020-02-01

Family

ID=62630529

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106145894A TWI684226B (zh) 2016-12-27 2017-12-27 電子零件搬送裝置及電子零件檢查裝置

Country Status (4)

Country Link
US (1) US10591534B2 (enExample)
JP (1) JP6903268B2 (enExample)
CN (1) CN108241120A (enExample)
TW (1) TWI684226B (enExample)

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* Cited by examiner, † Cited by third party
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JP2020012748A (ja) * 2018-07-19 2020-01-23 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
JP2020051939A (ja) * 2018-09-27 2020-04-02 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
JP2020153732A (ja) * 2019-03-19 2020-09-24 セイコーエプソン株式会社 電子部品搬送装置、および電子部品検査装置
JP7362507B2 (ja) * 2020-02-25 2023-10-17 株式会社Ｎｓテクノロジーズ 電子部品搬送装置、電子部品検査装置およびポケット位置検出方法
JP3227434U (ja) 2020-03-12 2020-08-27 株式会社アドバンテスト 電子部品ハンドリング装置及び電子部品試験装置
US20240231323A9 (en) * 2021-03-09 2024-07-11 Fuji Corporation Maintenance device
CN114062392B (zh) * 2021-11-01 2024-08-16 深圳市卡博尔科技有限公司 一种ic载板电镀工艺的同步智能检测方法及系统

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TW201011849A (en) * 2008-09-03 2010-03-16 King Yuan Electronics Co Ltd Bare die dual-face detector
TW201128729A (en) * 2010-02-06 2011-08-16 Chroma Ate Inc Chip quick-sorting-arrangement machine and method thereof

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JP4013488B2 (ja) * 2001-02-28 2007-11-28 横河電機株式会社 デバイス位置検出装置
JP3835271B2 (ja) 2001-12-04 2006-10-18 セイコーエプソン株式会社 部品検出方法、部品検出装置、ｉｃハンドラ及びｉｃ検査装置
JP3971216B2 (ja) * 2002-03-14 2007-09-05 ヤマハ発動機株式会社 部品試験装置
JP2004152916A (ja) * 2002-10-29 2004-05-27 Nec Corp 半導体デバイス検査装置及び検査方法
WO2006109358A1 (ja) 2005-04-11 2006-10-19 Advantest Corporation 電子部品ハンドリング装置
DE112005003666T5 (de) 2005-08-11 2008-07-10 Advantest Corp. Prüfvorrichtung für elektronische Bauelemente
KR100869539B1 (ko) * 2007-04-13 2008-11-19 (주)제이티 반도체디바이스 검사장치
JP5119744B2 (ja) 2007-05-28 2013-01-16 セイコーエプソン株式会社 部品検出方法、部品検出装置、ｉｃハンドラの部品検出方法、及び、ｉｃハンドラ
JP4539685B2 (ja) 2007-06-22 2010-09-08 セイコーエプソン株式会社 部品搬送装置及びｉｃハンドラ
JP4471011B2 (ja) * 2008-03-11 2010-06-02 セイコーエプソン株式会社 部品試験装置及び部品搬送方法
JP2011082243A (ja) * 2009-10-05 2011-04-21 Panasonic Corp 部品実装装置および部品実装装置における実装状態検査方法
JP5621313B2 (ja) * 2010-05-14 2014-11-12 セイコーエプソン株式会社 電子部品検査装置及び電子部品搬送方法
JP2013024829A (ja) * 2011-07-26 2013-02-04 Seiko Epson Corp 電子部品搬送装置及び電子部品搬送方法
JP2014196908A (ja) * 2013-03-29 2014-10-16 セイコーエプソン株式会社 ハンドラーおよび検査装置
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CN107432111B (zh) * 2015-03-18 2020-05-26 株式会社富士 元件供给装置
EP3075702B1 (en) * 2015-03-31 2021-02-17 OSAI A.S. S.p.A. Testing method and unit for micro electromechanical systems
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JP6104429B2 (ja) * 2016-04-26 2017-03-29 平田機工株式会社 搬送システム

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TW201011849A (en) * 2008-09-03 2010-03-16 King Yuan Electronics Co Ltd Bare die dual-face detector
TW201128729A (en) * 2010-02-06 2011-08-16 Chroma Ate Inc Chip quick-sorting-arrangement machine and method thereof

Also Published As

Publication number Publication date
US10591534B2 (en) 2020-03-17
JP2018105730A (ja) 2018-07-05
TW201824422A (zh) 2018-07-01
US20180180669A1 (en) 2018-06-28
CN108241120A (zh) 2018-07-03
JP6903268B2 (ja) 2021-07-14

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