TWI656201B - 包含苯并三唑衍生物作爲抗腐蝕劑之化學機械拋光組成物 - Google Patents

包含苯并三唑衍生物作爲抗腐蝕劑之化學機械拋光組成物 Download PDF

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Publication number
TWI656201B
TWI656201B TW103123600A TW103123600A TWI656201B TW I656201 B TWI656201 B TW I656201B TW 103123600 A TW103123600 A TW 103123600A TW 103123600 A TW103123600 A TW 103123600A TW I656201 B TWI656201 B TW I656201B
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Taiwan
Prior art keywords
cmp
composition
group
chemical mechanical
mechanical polishing
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TW103123600A
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English (en)
Chinese (zh)
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TW201512382A (zh
Inventor
羅伯特 萊哈德
馬汀 卡勒
米夏埃爾 勞特
李玉琢
安卓亞斯 克里普
Original Assignee
德商巴斯夫歐洲公司
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Publication of TW201512382A publication Critical patent/TW201512382A/zh
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/04—Aqueous dispersions
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
    • H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
    • H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Materials Engineering (AREA)
  • Dispersion Chemistry (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
TW103123600A 2013-07-11 2014-07-09 包含苯并三唑衍生物作爲抗腐蝕劑之化學機械拋光組成物 TWI656201B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13176221 2013-07-11
??13176221.3 2013-07-11

Publications (2)

Publication Number Publication Date
TW201512382A TW201512382A (zh) 2015-04-01
TWI656201B true TWI656201B (zh) 2019-04-11

Family

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Family Applications (1)

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TW103123600A TWI656201B (zh) 2013-07-11 2014-07-09 包含苯并三唑衍生物作爲抗腐蝕劑之化學機械拋光組成物

Country Status (10)

Country Link
US (2) US10647900B2 (he)
EP (1) EP3019569B1 (he)
JP (2) JP2016529700A (he)
KR (1) KR102264348B1 (he)
CN (1) CN105378011B (he)
IL (1) IL243274B (he)
RU (1) RU2669598C2 (he)
SG (1) SG11201600138XA (he)
TW (1) TWI656201B (he)
WO (1) WO2015004567A2 (he)

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EP3320014B1 (de) 2015-07-09 2022-04-06 Basf Se Härtbare zusammensetzungen
KR102340528B1 (ko) * 2016-06-06 2021-12-20 후지필름 가부시키가이샤 연마액, 화학적 기계적 연마 방법
WO2018179061A1 (ja) * 2017-03-27 2018-10-04 日立化成株式会社 研磨液、研磨液セット及び研磨方法
US10711158B2 (en) * 2017-09-28 2020-07-14 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Aqueous silica slurry and amine carboxylic acid compositions for use in shallow trench isolation and methods of using them
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WO2019190730A2 (en) 2018-03-28 2019-10-03 Fujifilm Electronic Materials U.S.A., Inc. Barrier ruthenium chemical mechanical polishing slurry
CN109015328B (zh) * 2018-08-24 2020-09-18 福达合金材料股份有限公司 一种基于磁力抛光去除铆钉型电触头表面缺陷的方法
CN111116502A (zh) * 2018-10-30 2020-05-08 中国石油化工股份有限公司 一步法合成苯骈三氮唑的方法
CN113242890A (zh) * 2018-12-12 2021-08-10 巴斯夫欧洲公司 含有铜和钌的基材的化学机械抛光
WO2020120522A1 (en) * 2018-12-12 2020-06-18 Basf Se Chemical mechanical polishing of substrates containing copper and ruthenium
KR102261822B1 (ko) * 2019-05-23 2021-06-08 에스케이씨솔믹스 주식회사 결함 발생이 감소된 cmp 슬러리 조성물 및 이의 제조방법
CN110205633A (zh) * 2019-07-08 2019-09-06 威海翔泽新材料科技有限公司 一种耐卤素铜缓蚀剂及其制备方法
JP7215977B2 (ja) * 2019-08-08 2023-01-31 日揮触媒化成株式会社 セリア系複合微粒子分散液、その製造方法及びセリア系複合微粒子分散液を含む研磨用砥粒分散液
CN113122143B (zh) * 2019-12-31 2024-03-08 安集微电子（上海）有限公司 一种化学机械抛光液及其在铜抛光中的应用
CN113122144A (zh) * 2019-12-31 2021-07-16 安集微电子（上海）有限公司 一种化学机械抛光液
US11525071B2 (en) * 2020-03-30 2022-12-13 Fujimi Incorporated Polishing composition based on mixture of colloidal silica particles
DE102020124843A1 (de) 2020-09-23 2022-03-24 MWK Bionik GmbH Mehrkomponenten-Zusammensetzung zur Oberflächenbehandlung
DE102020124845A1 (de) 2020-09-23 2022-03-24 MWK Bionik GmbH Mehrkomponenten-Zusammensetzung zur Oberflächenbehandlung
KR20220058069A (ko) * 2020-10-30 2022-05-09 주식회사 이엔에프테크놀로지 세정제 조성물 및 이를 이용한 세정방법
CN114591686B (zh) * 2022-03-11 2023-05-26 万华化学集团电子材料有限公司 一种铜阻挡层化学机械抛光液及其应用

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Also Published As

Publication number Publication date
CN105378011B (zh) 2020-07-07
JP2019143147A (ja) 2019-08-29
IL243274B (he) 2019-12-31
JP6771060B2 (ja) 2020-10-21
KR102264348B1 (ko) 2021-06-11
US11168239B2 (en) 2021-11-09
US10647900B2 (en) 2020-05-12
TW201512382A (zh) 2015-04-01
CN105378011A (zh) 2016-03-02
KR20160030566A (ko) 2016-03-18
EP3019569B1 (en) 2018-05-30
RU2016104422A (ru) 2017-08-16
EP3019569A2 (en) 2016-05-18
EP3019569A4 (en) 2017-05-03
SG11201600138XA (en) 2016-02-26
US20160200943A1 (en) 2016-07-14
WO2015004567A2 (en) 2015-01-15
US20200255713A1 (en) 2020-08-13
WO2015004567A3 (en) 2015-05-14
IL243274A0 (he) 2016-02-29
RU2669598C2 (ru) 2018-10-12
JP2016529700A (ja) 2016-09-23

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