TWI633587B - 結晶化的方法 - Google Patents

結晶化的方法 Download PDF

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Publication number
TWI633587B
TWI633587B TW106113879A TW106113879A TWI633587B TW I633587 B TWI633587 B TW I633587B TW 106113879 A TW106113879 A TW 106113879A TW 106113879 A TW106113879 A TW 106113879A TW I633587 B TWI633587 B TW I633587B
Authority
TW
Taiwan
Prior art keywords
energy
substrate
freeze
laser
laser pulse
Prior art date
Application number
TW106113879A
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English (en)
Chinese (zh)
Other versions
TW201727712A (zh
Inventor
亞當布魯斯Ｅ
杭特亞倫穆爾
莫非特史帝夫
Original Assignee
應用材料股份有限公司
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Application filed by 應用材料股份有限公司 filed Critical 應用材料股份有限公司
Publication of TW201727712A publication Critical patent/TW201727712A/zh
Application granted granted Critical
Publication of TWI633587B publication Critical patent/TWI633587B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/38—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by treatments done after the formation of the materials
    • H10P14/3802—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
    • H10P14/3808—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
    • H10P14/3816—Pulsed laser beam
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/34—Deposited materials, e.g. layers
    • H10P14/3402—Deposited materials, e.g. layers characterised by the chemical composition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/20—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials
    • H10P14/38—Formation of materials, e.g. in the shape of layers or pillars of semiconductor materials characterised by treatments done after the formation of the materials
    • H10P14/3802—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
    • H10P14/3806—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using crystallisation-enhancing elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P34/00—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices
    • H10P34/40—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation
    • H10P34/42—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation with electromagnetic radiation, e.g. laser annealing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/90—Thermal treatments, e.g. annealing or sintering

Landscapes

  • Recrystallisation Techniques (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
TW106113879A 2011-09-01 2012-08-15 結晶化的方法 TWI633587B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161530265P 2011-09-01 2011-09-01
US61/530,265 2011-09-01

Publications (2)

Publication Number Publication Date
TW201727712A TW201727712A (zh) 2017-08-01
TWI633587B true TWI633587B (zh) 2018-08-21

Family

ID=47752087

Family Applications (2)

Application Number Title Priority Date Filing Date
TW106113879A TWI633587B (zh) 2011-09-01 2012-08-15 結晶化的方法
TW101129570A TWI590309B (zh) 2011-09-01 2012-08-15 結晶化的方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW101129570A TWI590309B (zh) 2011-09-01 2012-08-15 結晶化的方法

Country Status (7)

Country Link
US (2) US9373511B2 (https=)
JP (1) JP6129837B2 (https=)
KR (2) KR101888834B1 (https=)
CN (1) CN103765564B (https=)
SG (2) SG2014008858A (https=)
TW (2) TWI633587B (https=)
WO (1) WO2013033637A2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI633587B (zh) * 2011-09-01 2018-08-21 應用材料股份有限公司 結晶化的方法
CN108604532B (zh) 2016-01-08 2024-03-29 纽约市哥伦比亚大学理事会 用于点波束结晶的方法和系统
JP7335236B2 (ja) * 2017-10-13 2023-08-29 ザ トラスティーズ オブ コロンビア ユニヴァーシティ イン ザ シティ オブ ニューヨーク スポットビーム及びラインビーム結晶化のためのシステムおよび方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200733239A (en) * 2005-04-06 2007-09-01 Univ Columbia Line scan sequential lateral solidification of thin films
US20090309104A1 (en) * 2004-11-18 2009-12-17 Columbia University SYSTEMS AND METHODS FOR CREATING CRYSTALLOGRAPHIC-ORIENTATION CONTROLLED poly-SILICON FILMS
TW201123269A (en) * 2009-12-31 2011-07-01 Univ Columbia Systems and methods for non-periodic pulse sequential lateral solidification

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JP3213338B2 (ja) * 1991-05-15 2001-10-02 株式会社リコー 薄膜半導体装置の製法
JP3065825B2 (ja) * 1992-10-21 2000-07-17 株式会社半導体エネルギー研究所 レーザー処理方法
JP3669384B2 (ja) * 1995-08-22 2005-07-06 独立行政法人理化学研究所 半導体基板中へのドーピング層の形成方法
GB9819338D0 (en) * 1998-09-04 1998-10-28 Philips Electronics Nv Laser crystallisation of thin films
JP2001110723A (ja) * 1999-10-04 2001-04-20 Matsushita Electric Ind Co Ltd 多結晶シリコン薄膜の製造方法
JP4472066B2 (ja) * 1999-10-29 2010-06-02 シャープ株式会社 結晶性半導体膜の製造方法、結晶化装置及びｔｆｔの製造方法
JP2001319891A (ja) * 2000-05-10 2001-11-16 Nec Corp 薄膜処理方法及び薄膜処理装置
JP5201614B2 (ja) * 2001-07-23 2013-06-05 株式会社日本製鋼所 レーザ光の照射方法及びその装置
JP3860444B2 (ja) 2001-08-28 2006-12-20 住友重機械工業株式会社 シリコン結晶化方法とレーザアニール装置
WO2004040628A1 (ja) * 2002-10-29 2004-05-13 Sumitomo Heavy Industries, Ltd. レーザを用いた結晶膜の製造方法及び結晶膜
US7470602B2 (en) * 2002-10-29 2008-12-30 Sumitomo Heavy Industries, Ltd. Crystalline film and its manufacture method using laser
TW200616232A (en) * 2004-08-09 2006-05-16 Adv Lcd Tech Dev Ct Co Ltd Semiconductor device including semiconductor thin film, which is subjected to heat treatment to have alignment mark, crystallizing method for the semiconductor thin film, and crystallizing apparatus for the semiconductor thin film
JP2006086447A (ja) * 2004-09-17 2006-03-30 Sharp Corp 半導体薄膜の製造方法および半導体薄膜の製造装置
US8148663B2 (en) * 2007-07-31 2012-04-03 Applied Materials, Inc. Apparatus and method of improving beam shaping and beam homogenization
TWI459444B (zh) * 2009-11-30 2014-11-01 應用材料股份有限公司 在半導體應用上的結晶處理
TWI633587B (zh) * 2011-09-01 2018-08-21 應用材料股份有限公司 結晶化的方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090309104A1 (en) * 2004-11-18 2009-12-17 Columbia University SYSTEMS AND METHODS FOR CREATING CRYSTALLOGRAPHIC-ORIENTATION CONTROLLED poly-SILICON FILMS
TW200733239A (en) * 2005-04-06 2007-09-01 Univ Columbia Line scan sequential lateral solidification of thin films
TW201123269A (en) * 2009-12-31 2011-07-01 Univ Columbia Systems and methods for non-periodic pulse sequential lateral solidification

Also Published As

Publication number Publication date
US20160293414A1 (en) 2016-10-06
TW201727712A (zh) 2017-08-01
WO2013033637A2 (en) 2013-03-07
JP2014528162A (ja) 2014-10-23
CN103765564B (zh) 2016-09-21
US20130055731A1 (en) 2013-03-07
SG2014008858A (en) 2014-03-28
CN103765564A (zh) 2014-04-30
KR20170028450A (ko) 2017-03-13
TWI590309B (zh) 2017-07-01
SG10201607229XA (en) 2016-10-28
KR20140060536A (ko) 2014-05-20
US9373511B2 (en) 2016-06-21
WO2013033637A3 (en) 2013-04-25
JP6129837B2 (ja) 2017-05-17
KR101888834B1 (ko) 2018-08-16
KR101713662B1 (ko) 2017-03-08
US10074538B2 (en) 2018-09-11
TW201314745A (zh) 2013-04-01

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