Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/02104—Forming layers
  • H01L21/02365—Forming inorganic semiconducting materials on a substrate
  • H01L21/02656—Special treatments
  • H01L21/02664—Aftertreatments
  • H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
  • H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
  • H01L21/02686—Pulsed laser beam
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/02104—Forming layers
  • H01L21/02365—Forming inorganic semiconducting materials on a substrate
  • H01L21/02518—Deposited layers
  • H01L21/02521—Materials
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/26—Bombardment with radiation
  • H01L21/263—Bombardment with radiation with high-energy radiation
  • H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation

Landscapes

• Physics & Mathematics (AREA)
• Engineering & Computer Science (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Optics & Photonics (AREA)
• High Energy & Nuclear Physics (AREA)
• Crystallography & Structural Chemistry (AREA)
• Chemical & Material Sciences (AREA)
• Electromagnetism (AREA)
• Health & Medical Sciences (AREA)
• Toxicology (AREA)
• Recrystallisation Techniques (AREA)
• Crystals, And After-Treatments Of Crystals (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=47752087

Family Applications (2)

Family Applications After (1)

Country Status (7)

Families Citing this family (3)

Family Cites Families (19)

• 2012
  • 2012-08-15 TW TW101129570A patent/TWI590309B/en active
  • 2012-08-15 TW TW106113879A patent/TWI633587B/en active
  • 2012-08-31 CN CN201280041674.5A patent/CN103765564B/en active Active
  • 2012-08-31 WO PCT/US2012/053527 patent/WO2013033637A2/en active Application Filing
  • 2012-08-31 SG SG10201607229XA patent/SG10201607229XA/en unknown
  • 2012-08-31 KR KR1020177005829A patent/KR101888834B1/en active IP Right Grant
  • 2012-08-31 KR KR1020147007164A patent/KR101713662B1/en active IP Right Grant
  • 2012-08-31 US US13/601,069 patent/US9373511B2/en not_active Expired - Fee Related
  • 2012-08-31 JP JP2014528670A patent/JP6129837B2/en active Active
  • 2012-08-31 SG SG2014008858A patent/SG2014008858A/en unknown
• 2016
  • 2016-06-19 US US15/186,499 patent/US10074538B2/en active Active

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