TWI616385B - Substrate storage container - Google Patents

Substrate storage container Download PDF

Info

Publication number
TWI616385B
TWI616385B TW103127425A TW103127425A TWI616385B TW I616385 B TWI616385 B TW I616385B TW 103127425 A TW103127425 A TW 103127425A TW 103127425 A TW103127425 A TW 103127425A TW I616385 B TWI616385 B TW I616385B
Authority
TW
Taiwan
Prior art keywords
wall
substrate storage
container
exterior
storage container
Prior art date
Application number
TW103127425A
Other languages
English (en)
Chinese (zh)
Other versions
TW201518188A (zh
Inventor
Sumie Shigeta
Takayuki Ueno
Shota Fukushima
Original Assignee
Miraial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miraial Co Ltd filed Critical Miraial Co Ltd
Publication of TW201518188A publication Critical patent/TW201518188A/zh
Application granted granted Critical
Publication of TWI616385B publication Critical patent/TWI616385B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67379—Closed carriers characterised by coupling elements, kinematic members, handles or elements to be externally gripped
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67386—Closed carriers characterised by the construction of the closed carrier
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D2585/00—Containers, packaging elements or packages specially adapted for particular articles or materials
    • B65D2585/68—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form
    • B65D2585/86—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form for electrical components

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Ceramic Engineering (AREA)
  • Packages (AREA)
TW103127425A 2013-08-22 2014-08-11 Substrate storage container TWI616385B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2013/072471 WO2015025410A1 (ja) 2013-08-22 2013-08-22 基板収納容器

Publications (2)

Publication Number Publication Date
TW201518188A TW201518188A (zh) 2015-05-16
TWI616385B true TWI616385B (zh) 2018-03-01

Family

ID=52483215

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103127425A TWI616385B (zh) 2013-08-22 2014-08-11 Substrate storage container

Country Status (5)

Country Link
US (1) US10580674B2 (ko)
JP (1) JP6067123B2 (ko)
KR (1) KR102154303B1 (ko)
TW (1) TWI616385B (ko)
WO (1) WO2015025410A1 (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102374961B1 (ko) * 2015-04-10 2022-03-15 신에츠 폴리머 가부시키가이샤 기판 수납 용기
KR20180098448A (ko) 2017-02-24 2018-09-04 삼성전자주식회사 잔류 가스 제거 장치 및 이를 포함하는 기판 처리 설비
WO2020122261A2 (ja) * 2020-03-31 2020-06-18 ミライアル株式会社 基板収納容器
TWI822366B (zh) * 2022-09-28 2023-11-11 家登精密工業股份有限公司 鎖附導正結構

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201132563A (en) * 2009-07-09 2011-10-01 Shinetsu Polymer Co Substrate-storing container
TW201328947A (zh) * 2011-07-06 2013-07-16 Miraial Co Ltd 基板收納容器

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06275709A (ja) 1993-03-18 1994-09-30 Hitachi Ltd 精密物品収納容器
KR0136331Y1 (ko) * 1996-01-24 1999-03-20 김광호 반도체 웨이퍼박스 포장구조
JP3312725B2 (ja) 1997-06-09 2002-08-12 三菱マテリアルシリコン株式会社 ウェーハケース
JP3506208B2 (ja) 1998-02-20 2004-03-15 三菱住友シリコン株式会社 ウェーハケース
US6871741B2 (en) * 1998-05-28 2005-03-29 Entegris, Inc. Composite substrate carrier
JP3370279B2 (ja) * 1998-07-07 2003-01-27 信越ポリマー株式会社 精密基板収納容器
JP3556480B2 (ja) * 1998-08-17 2004-08-18 信越ポリマー株式会社 精密基板収納容器
JP2000068363A (ja) 1998-08-26 2000-03-03 Kakizaki Mamufacuturing Co Ltd 薄板収納・輸送容器
JP3556519B2 (ja) * 1999-04-30 2004-08-18 信越ポリマー株式会社 基板収納容器の識別構造及び基板収納容器の識別方法
JP3874230B2 (ja) 1999-07-22 2007-01-31 株式会社Ｓｕｍｃｏ ウェーハケース
TWI259501B (en) * 2000-12-07 2006-08-01 Shinetsu Polymer Co Seal and substrate container using same
JP3944699B2 (ja) * 2001-11-06 2007-07-11 信越化学工業株式会社 基板収納容器
US20040074808A1 (en) * 2002-07-05 2004-04-22 Entegris, Inc. Fire retardant wafer carrier
JP4282369B2 (ja) 2003-05-15 2009-06-17 信越ポリマー株式会社 精密基板収納容器
JP4567956B2 (ja) * 2003-08-05 2010-10-27 信越化学工業株式会社 基板収納ケース
US7182203B2 (en) * 2003-11-07 2007-02-27 Entegris, Inc. Wafer container and door with vibration dampening latching mechanism
US7201276B2 (en) * 2003-11-07 2007-04-10 Entegris, Inc. Front opening substrate container with bottom plate
US7100772B2 (en) * 2003-11-16 2006-09-05 Entegris, Inc. Wafer container with door actuated wafer restraint
JP4457950B2 (ja) * 2005-04-15 2010-04-28 信越半導体株式会社 半導体ウェーハ収納容器用材料の評価方法および評価用容器ならびに樹脂材料の評価方法
US7922000B2 (en) * 2006-02-15 2011-04-12 Miraial Co., Ltd. Thin plate container with a stack of removable loading trays
JP5025962B2 (ja) * 2006-02-15 2012-09-12 ミライアル株式会社 薄板収納容器
CN102017119B (zh) * 2008-03-13 2014-01-01 安格斯公司 具有管状环境控制部件的晶圆容器
WO2009131016A1 (ja) * 2008-04-25 2009-10-29 信越ポリマー株式会社 リテーナ、及びリテーナを備えた基板収納容器
JP5409223B2 (ja) * 2009-09-14 2014-02-05 信越ポリマー株式会社 基板収納容器
JP2011100983A (ja) * 2009-10-07 2011-05-19 Shin Etsu Polymer Co Ltd 基板収納容器
JP5041348B2 (ja) * 2010-02-26 2012-10-03 Ｔｄｋ株式会社 清浄ガスの置換機能を備えた基板収納ポッド
JP5015280B2 (ja) * 2010-02-26 2012-08-29 Ｔｄｋ株式会社 基板収納ポッドおよびその蓋部材並びに基板の処理装置
KR102011159B1 (ko) 2011-08-12 2019-08-14 엔테그리스, 아이엔씨. 웨이퍼 캐리어

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201132563A (en) * 2009-07-09 2011-10-01 Shinetsu Polymer Co Substrate-storing container
TW201328947A (zh) * 2011-07-06 2013-07-16 Miraial Co Ltd 基板收納容器

Also Published As

Publication number Publication date
WO2015025410A1 (ja) 2015-02-26
US10580674B2 (en) 2020-03-03
KR102154303B1 (ko) 2020-09-09
TW201518188A (zh) 2015-05-16
KR20160045637A (ko) 2016-04-27
JPWO2015025410A1 (ja) 2017-03-02
JP6067123B2 (ja) 2017-01-25
US20160204011A1 (en) 2016-07-14

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