TWI555675B - Carrying device and electronic component handling device - Google Patents

Carrying device and electronic component handling device Download PDF

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Publication number
TWI555675B
TWI555675B TW104136311A TW104136311A TWI555675B TW I555675 B TWI555675 B TW I555675B TW 104136311 A TW104136311 A TW 104136311A TW 104136311 A TW104136311 A TW 104136311A TW I555675 B TWI555675 B TW I555675B
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Taiwan
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carrier tape
tape
electronic component
sealing
reel
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TW104136311A
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Chinese (zh)
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TW201625474A (en
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Masato Miyata
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Ueno Seiki Co Ltd
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B15/00Attaching articles to cards, sheets, strings, webs, or other carriers
    • B65B15/04Attaching a series of articles, e.g. small electrical components, to a continuous web
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02Feeding of components

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Description

載帶行走裝置及電子元件搬運裝置 Carrier tape walking device and electronic component handling device

本發明係關於可交替使用在將電子元件收容於載帶的用途與將電子元件從載帶取出的用途之載帶行走技術。 The present invention relates to a tape running technique that can be used interchangeably for the purpose of accommodating an electronic component in a carrier tape and for removing the electronic component from the carrier tape.

電子元件,係在其製造過程中經過各種檢查而被分類為良品或不良品,捆包之後,進行出貨。若檢查基準嚴苛,則將屬於良品的電子元件分類到不良品之收容體的誤判率會提高,而使生產效率降低。若檢查基準寬鬆,則將屬於不良品的電子元件當作良品來出貨,造成品質不一,而導致檢查的可靠性降低。於單一元件單價高的IC或LSI等之積體電路的電子元件中,誤判率高、品質不一都是嚴重的問題。 Electronic components are classified as good or defective after various inspections in the manufacturing process, and are shipped after being bundled. If the inspection standard is severe, the misjudgment rate of classifying the electronic components that are good products into the containment body of the defective product will increase, and the production efficiency will be lowered. If the inspection standard is loose, the electronic components belonging to the defective product are shipped as good products, resulting in different quality, which leads to a decrease in the reliability of the inspection. In an electronic component of an integrated circuit such as an IC or a LSI having a high unit price, a high false positive rate and a different quality are serious problems.

因此,在檢查及分類的步驟中,有時也會針對在良品群中是否包含不良品,或者在不良品群中是否包含良品,或改變檢查項目、檢查手法或者檢查精度而對其等進行再檢查,然後反映再檢查結果將良品群或不良品群進行再分類,再捆包之後,進行出貨。 Therefore, in the steps of inspection and classification, it is sometimes necessary to include whether a defective product is included in the good product group, or whether the defective product group contains a good product, or change the inspection item, inspection method, or inspection accuracy. Check, then reflect the re-inspection results, reclassify the good product group or the defective product group, and then bundle the product and ship it.

對電子元件進行檢查、分類、再檢查,然後進行再分類的電子元件搬運裝置,係構成為包含複數個包帶裝置與1個剝帶裝置的系統。此電子元件搬運裝置,係將電子元件載置於搬運路徑上進行檢查,將電子元件分類至因應品質的等級所準備的複數個包帶裝置。若電子元件的分類結束,則將成為再檢查對象的等級捆包後的捲盤從包帶裝置移至剝帶裝置,將電子元件再度載置於搬運路徑上進行再檢查,將電子元件分類至因應品質的等級所準備的複數個包帶裝置。 An electronic component conveying device that inspects, sorts, re-inspects, and reclassifies an electronic component is configured as a system including a plurality of tape wrapping devices and one tape stripping device. This electronic component conveying device is a plurality of wrapping devices prepared by placing electronic components on a conveyance path for inspection and classifying the electronic components to a level corresponding to the quality. When the classification of the electronic component is completed, the reel after the level of the re-inspection is transferred from the tape wrapping device to the tape stripping device, and the electronic component is placed on the conveyance path again for re-inspection, and the electronic components are classified into A plurality of strap devices prepared in response to the quality level.

包帶裝置,係使載帶朝向用來捲取載帶的捲盤間歇地行走的裝置(例如,參照專利文獻1)。載帶,係將袋部沿著長度方向進行壓花加工。在包帶裝置讓載帶停止的期間機械手等會將電子元件送進袋部。載帶裝置,係將密封帶重疊壓接於載帶上,藉此將收容於袋部的電子元件進行密封。 The wrapping device is a device that causes the carrier tape to travel intermittently toward the reel for winding the carrier tape (for example, refer to Patent Document 1). In the carrier tape, the bag portion is embossed along the length direction. The robot or the like sends the electronic component into the pocket while the strap device stops the carrier tape. In the carrier tape device, the sealing tape is superposed and pressure-bonded to the carrier tape, thereby sealing the electronic components housed in the bag portion.

剝帶裝置,係一邊將載帶從捲盤拉出一邊間歇地進行行走的裝置(例如,參照專利文獻2)。在剝帶裝置讓載帶停止的期間機械手等會將電子元件從袋部取出。該剝帶裝置,係將爪插入載帶與密封帶之間,使密封帶從載帶剝離,讓電子元件露出。 The stripping device is a device that intermittently travels while pulling the carrier tape out of the reel (see, for example, Patent Document 2). The robot or the like takes out the electronic component from the pocket portion while the tape stripping device stops the carrier tape. The stripping device inserts a claw between the carrier tape and the sealing tape to peel the sealing tape from the carrier tape and expose the electronic component.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開2007-137426號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2007-137426

[專利文獻2]日本特開2009-140994號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2009-140994

可檢查、分類、再檢查及再分類的電子元件搬運裝置,除了包帶裝置以外還搭載有剝帶裝置,在不頻繁地實施再檢查及再分類的情況,剝帶裝置只會讓裝置的成本提高,佔用製造設備大量空間而使製造設備之單位面積的生產效率下降。然而,由於再檢查及再分類並非完全不需要的步驟,因此也不能廢除剝帶裝置。 The electronic component handling device that can be inspected, sorted, re-inspected and re-classified is equipped with a stripping device in addition to the strapping device. In the case of infrequent re-inspection and re-classification, the stripping device only costs the device. Increasing, occupying a large amount of space in the manufacturing equipment and reducing the production efficiency per unit area of the manufacturing equipment. However, since re-inspection and re-classification are not completely unnecessary steps, the stripping device cannot be abolished.

本發明係為了解決如上述般之問題點而提案者,其目的在於,提供一種可兼用於包帶裝置與剝帶裝置的載帶行走裝置,與具備有該載帶行走裝置的電子元件搬運裝置。 The present invention has been made in order to solve the problems as described above, and an object of the invention is to provide a carrier tape traveling device that can be used for both a tape wrapping device and a tape stripping device, and an electronic component conveying device including the carrier tape running device. .

為了解決上述課題,本發明之載帶行走裝置,係使以等間隔形成有用以收納電子元件的袋部之載帶在長度方向上行走,其特徵在於,具備有:鏈輪、馬達、捲盤、以及一對的塊,該鏈輪,係讓前述載帶掛上而進行行走;該馬達,係進行正轉及逆轉而使前述鏈輪旋轉;該捲盤,係捲繞著貼合於前述載帶的密封帶;該一對的塊,係用來夾住從前述捲盤拉出後的前述密封帶與前述載帶, 而將前述密封帶貼合於前述載帶,藉由使前述馬達進行正轉,將前述密封帶從前述捲盤拉出,使前述一對的塊接近,而成為將前述載帶以前述密封帶進行密封的包帶裝置,藉由使前述馬達進行逆轉,將前述密封帶拉向前述捲盤,使前述一對的塊分離,而成為將前述密封帶從前述載帶剝離的剝帶裝置。 In order to solve the problem, the carrier tape running device of the present invention is configured such that a carrier tape for forming a pocket portion for accommodating electronic components is formed in a longitudinal direction at equal intervals, and is characterized in that: a sprocket, a motor, and a reel are provided. And a pair of blocks, wherein the sprocket is driven by the carrier tape; the motor rotates forward and reverse to rotate the sprocket; and the reel is wound and attached to the foregoing a sealing tape of the carrier tape; the pair of blocks are used to clamp the sealing tape and the carrier tape after being pulled out from the reel, And the sealing tape is bonded to the carrier tape, and the sealing tape is pulled out from the reel by the forward rotation of the motor, and the pair of blocks are brought close to each other, and the carrier tape is the sealing tape. The tape wrapping device that performs sealing reverses the motor to pull the sealing tape toward the reel, and separates the pair of blocks to form a tape stripping device that peels the sealing tape from the carrier tape.

亦可設為前述鏈輪,係於周面形成銷狀的突起,將突起卡在形成於前述載帶的鏈輪孔來進行旋轉,前述突起,係銷尖端具有漸開線形狀。 Further, the sprocket may be formed with a pin-shaped projection formed on the circumferential surface, and the projection may be rotated by a sprocket hole formed in the carrier tape, and the projection may have an involute shape at the tip end.

亦可設為具備正時皮帶作為前述鏈輪與前述馬達之間的傳動機構。 A timing belt may be provided as a transmission mechanism between the sprocket and the motor.

亦可設為具備有壓輥,係介在於前述捲盤與前述載帶的行走路線之間,用來將前述密封帶導引至前述載帶的附近,前述壓輥,係當將前述密封帶貼合於前述載帶時,接近前述載帶的附近,當前述密封帶從前述載帶剝離時,離開前述載帶,使剝離基點之前述載帶與前述密封帶所成的角度比前述貼合時更為平緩。 The pressure roller may be provided between the reel and the travel path of the carrier tape for guiding the sealing tape to the vicinity of the carrier tape, and the pressure roller is to be the sealing tape. When the carrier tape is bonded to the carrier tape, when the sealing tape is peeled off from the carrier tape, the carrier tape is separated from the carrier tape, and the angle between the carrier tape and the sealing tape at the peeling base point is closer than the bonding tape. It is more gradual.

亦可設為具備有吸引部,其係通過形成於前述袋部的底面的孔,來吸引收容於前述袋部內的電子元件,前述吸引部,係在前述載帶之行走中,將前述電子元件吸附於前述載帶。 The suction unit may be provided with a suction hole formed in the bottom surface of the pocket portion to attract the electronic component housed in the pocket portion, and the suction portion may be the electronic component while the carrier tape is traveling. Adsorbed to the aforementioned carrier tape.

為了解決上述課題,本發明之電子元件搬運裝置,其特徵在於,係具備有前述載帶行走裝置,將電子 元件沿著搬運路徑進行搬運,並具備有:搬運台、收容體保持手段、觀察手段、以及複數個前述載帶行走裝置,該搬運台係用來形成前述搬運路徑;該收容體保持手段,係配置於前述搬運台的周圍,用來保持電子元件的收容體;該觀察手段,係配置於前述搬運台的周圍,用來觀察前述搬運路徑內的電子元件;該複數個前述載帶行走裝置,係配置於前述搬運台的周圍,且具有分類模式與再分類模式,在分類模式與再分類模式下,係使前述收容體保持手段與前述載帶行走裝置成為電子元件之供給手段或者成為電子元件的分類類別之分類手段,於前述分類模式下,前述收容體保持手段係前述供給手段,所有的前述載帶行走裝置成為前述包帶裝置而作為前述分類手段,於前述再分類模式下,前述載帶行走裝置當中的一部分成為前述剝帶裝置而作為前述供給手段,前述載帶行走裝置當中的其他部分成為前述包帶裝置而作為前述分類手段。 In order to solve the above problems, an electronic component conveying device according to the present invention includes the carrier tape running device and an electronic device The component is conveyed along the conveyance path, and includes a conveyance table, a container holding means, an observation means, and a plurality of the above-described carrier tape running devices for forming the conveyance path; the container holding means a storage body for holding an electronic component disposed around the transfer table; the observation means is disposed around the transfer table for observing electronic components in the conveyance path; and the plurality of carrier tape running devices The device is disposed around the transport platform and has a classification mode and a reclassification mode. In the classification mode and the reclassification mode, the container holding means and the carrier tape device are used as supply means of electronic components or as electronic components. In the classification mode, the container holding means is the supply means, and all of the tape running devices are the tape wrapping means, and the sorting means is used in the reclassification mode. A part of the belt running device becomes the aforementioned stripping device as the aforementioned supply Section, other portions of the carrier tape traveling apparatus which becomes the device as a packet with the classification means.

亦可設為於前述再分類模式下,除了成為前述剝帶裝置的前述載帶行走裝置以外,前述收容體保持手段也作為前述分類手段。 In addition to the above-described tape carrying device which is the stripping device, the container holding means may be used as the sorting means.

亦可設為前述收容體保持手段,係用來保持將電子元件排列成陣列狀的晶圓環之晶圓環保持部,或者用來保持其平面分隔成格子狀並將電子元件排列成陣列狀的托盤之托盤保持部。 The container holding means may be used to hold the wafer ring holding portion of the wafer ring in which the electronic components are arranged in an array, or to keep the planes separated into a lattice shape and arrange the electronic components in an array. The tray holder of the tray.

依據本發明,載帶行走裝置係由於可兼用作為包帶裝置與剝帶裝置,因此無須另外準備包帶裝置與剝帶裝置,而可減低設備的成本。 According to the present invention, since the carrier tape running device can be used as both the tape wrapping device and the tape stripping device, it is not necessary to separately prepare the tape wrapping device and the tape stripping device, and the cost of the apparatus can be reduced.

1‧‧‧載帶行走裝置 1‧‧‧Loading device

2‧‧‧密封部 2‧‧‧ Sealing Department

21‧‧‧加熱器塊 21‧‧‧ heater block

22‧‧‧基座塊 22‧‧‧Base block

3‧‧‧密封帶捲盤(捲盤) 3‧‧‧Seal tape reel (reel)

31‧‧‧馬達 31‧‧‧Motor

32‧‧‧壓輥 32‧‧‧pressure roller

41‧‧‧鏈輪 41‧‧‧Sprocket

42‧‧‧鏈輪 42‧‧‧Sprocket

43‧‧‧突起 43‧‧‧Protrusion

51‧‧‧馬達 51‧‧‧Motor

51a‧‧‧正時皮帶 51a‧‧‧ Timing belt

52‧‧‧馬達 52‧‧‧Motor

52a‧‧‧正時皮帶 52a‧‧‧ Timing belt

6‧‧‧交接位置 6‧‧‧ handover location

7‧‧‧馬達驅動器 7‧‧‧Motor drive

71‧‧‧控制台 71‧‧‧ console

72‧‧‧包帶參數 72‧‧‧Package parameters

73‧‧‧剝帶參數 73‧‧‧ Stripping parameters

8‧‧‧吸引部 8‧‧‧Attraction

81‧‧‧容器 81‧‧‧ Container

82‧‧‧吸引溝槽 82‧‧‧ attracting trenches

83‧‧‧吸引孔 83‧‧‧Attraction hole

9‧‧‧剝離基點 9‧‧‧ peeling base point

100‧‧‧載帶 100‧‧‧ Carrier tape

101‧‧‧袋部 101‧‧‧ Bag Department

102‧‧‧密封帶 102‧‧‧Sealing tape

103‧‧‧晶圓環 103‧‧‧ wafer ring

104‧‧‧電子元件 104‧‧‧Electronic components

200‧‧‧捲盤 200‧‧‧Reel

300‧‧‧電子元件搬運裝置 300‧‧‧Electronic component handling device

301‧‧‧搬運路徑 301‧‧‧Transportation path

310‧‧‧搬運台 310‧‧‧Passport

311‧‧‧保持手段 311‧‧‧ means of keeping

312‧‧‧直接驅動馬達 312‧‧‧Direct drive motor

320‧‧‧晶圓環支架 320‧‧‧ Wafer ring bracket

321‧‧‧推頂銷 321‧‧‧ push pin

330‧‧‧拾取裝置 330‧‧‧ picking device

331‧‧‧臂 331‧‧‧ Arm

340‧‧‧觀測裝置 340‧‧‧ Observing device

[第1圖]係作為載帶行走裝置之包帶裝置的內部構造圖。 [Fig. 1] is an internal structural view of a wrapping device as a carrier tape running device.

[第2圖]係作為載帶行走裝置之剝帶裝置的內部構造圖。 [Fig. 2] is an internal structural view of a stripping device as a carrier tape running device.

[第3圖]係載帶行走裝置所具備之吸引部的構造圖,(a)為俯視圖,(b)為側視圖。 [Fig. 3] Fig. 3 is a structural view showing a suction portion provided in the tape running device, wherein (a) is a plan view and (b) is a side view.

[第4圖]係具備有載帶行走裝置之電子元件搬運裝置的構造圖。 [Fig. 4] A structural view of an electronic component conveying device including a carrier tape running device.

[第5圖]係顯示電子元件搬運裝置之電子元件搬運路徑的示意圖。 [Fig. 5] is a schematic view showing an electronic component transport path of the electronic component transport device.

針對本發明之實施形態的載帶行走裝置,及具備有該載帶行走裝置的電子元件搬運裝置,一邊參照附圖一邊詳細地說明。 A carrier tape running device according to an embodiment of the present invention and an electronic component conveying device including the carrier tape running device will be described in detail with reference to the drawings.

(載帶行走裝置) (carrier carrying device) (構造) (structure)

如第1圖所示般,載帶行走裝置1,係使用以將電子元件104收容於袋部101的載帶100沿長度方向行走。此載帶行走裝置1,係使載帶100朝捲盤200側行走而發揮作為包帶裝置的功能,並且以從捲盤200側拉出載帶100的方式進行逆向行走而發揮作為剝帶裝置的功能。 As shown in Fig. 1, the carrier tape running device 1 is used to travel in the longitudinal direction by the carrier tape 100 in which the electronic component 104 is housed in the pocket portion 101. In the carrier tape running device 1, the carrier tape 100 is moved toward the reel 200 side to function as a wrapping device, and the carrier tape 100 is pulled backward from the reel 200 side to function as a tape stripping device. Features.

載帶行走裝置1,係具備有用來捲繞密封帶102的密封帶捲盤(捲盤)3及密封部2,作為包帶裝置,係一邊使載帶100朝捲盤200側進行行走,一邊將密封帶102從密封帶捲盤3拉出,使密封帶102貼合於載帶100。另外,載帶行走裝置1,係作為剝帶裝置而一邊使密封部2從載帶100之行走路線退避,以從捲盤200側拉出載帶100的方式進行逆向行走,一邊使密封帶102捲繞於密封帶捲盤3,將密封帶102從載帶100剝離。 The carrier tape running device 1 includes a sealing tape reel (reel) 3 and a sealing portion 2 for winding the sealing tape 102, and as a wrapping device, while carrying the carrier tape 100 toward the reel 200 side, The sealing tape 102 is pulled out from the sealing tape reel 3, and the sealing tape 102 is attached to the carrier tape 100. In addition, the carrier tape running device 1 is a tape stripping device, and the sealing portion 2 is retracted from the traveling path of the carrier tape 100, and the carrier tape 100 is pulled out from the reel 200 side to perform reverse travel, and the sealing tape 102 is caused to be reversed. The sealing tape reel 3 is wound around the carrier tape reel 3 and peeled off from the carrier tape 100.

此載帶行走裝置1,係具備有2個鏈輪41、42。2個鏈輪41、42,係沿著周面突設有突起43之同徑的圓盤。鏈輪41、42,係各自透過正時皮帶51a、52a與對應的馬達51、52之輸出軸連接,並以相同周方向、相同旋轉量及相同時點進行間歇旋轉。 The carrier tape running device 1 includes two sprocket wheels 41 and 42. The two sprocket wheels 41 and 42 are discs having the same diameter as the projections 43 projecting along the circumferential surface. The sprockets 41 and 42 are connected to the output shafts of the corresponding motors 51 and 52 through the timing belts 51a and 52a, respectively, and intermittently rotate in the same circumferential direction, the same amount of rotation, and the same timing.

於兩鏈輪41、42繞掛載帶100。於載帶100,係於帶片側沿著長度方向等間隔地開設有鏈輪孔。兩鏈輪41、42的突起43嚙合於該鏈輪孔。鏈輪41、42,係使突起43卡在鏈輪孔來進行旋轉,而使載帶100沿長度方向行走。該突起43,係具有圓型形狀,且加工成漸開線形狀。突起43的直徑,係稍微小於載帶100的 鏈輪孔。 The carrier tape 100 is wound around the two sprockets 41, 42. The carrier tape 100 is provided with sprocket holes at equal intervals along the longitudinal direction on the tape side. The projections 43 of the two sprockets 41, 42 are engaged with the sprocket holes. The sprockets 41 and 42 are such that the projections 43 are engaged with the sprocket holes for rotation, and the carrier tape 100 is moved in the longitudinal direction. The projections 43 have a circular shape and are processed into an involute shape. The diameter of the protrusion 43 is slightly smaller than that of the carrier tape 100 Sprocket hole.

兩鏈輪41、42,係排列在同一垂直面上,其旋轉軸平行且高度相同。因此,載帶100,係在將延伸方向保持水平的狀態下,朝捲盤200側或離開捲盤200的方向行走。 The two sprockets 41, 42 are arranged on the same vertical plane, and their axes of rotation are parallel and the height is the same. Therefore, the carrier tape 100 travels toward the reel 200 side or away from the reel 200 while maintaining the extending direction horizontal.

馬達51、52的旋轉節距,係對應於袋部101的配置間隔。載帶100,係在長度方向上等間隔地具有壓花加工後的袋部101。也就是說,馬達51、52,係讓袋部100在共通的停止位置停止。共通的停止位置當中的一部位,係設定在電子元件104的交接位置6。 The rotational pitch of the motors 51, 52 corresponds to the arrangement interval of the pockets 101. The carrier tape 100 has the embossed bag portion 101 at equal intervals in the longitudinal direction. That is, the motors 51, 52 stop the bag portion 100 at a common stop position. One of the common stop positions is set at the delivery position 6 of the electronic component 104.

吸附噴嘴等之保持手段311係可昇降地存在於交接位置6的正上方。載帶行走裝置1,係藉由使袋部101依序位於交接位置6,以作為包帶裝置,使脫離保持手段311的電子元件104收容於載帶100,或者作為剝帶裝置,使袋部101內的電子元件104被保持手段311取出。 The holding means 311 of the adsorption nozzle or the like is present vertically above the delivery position 6. In the carrier tape running device 1, the bag portion 101 is sequentially placed at the delivery position 6 as a wrapping device, and the electronic component 104 of the detachment holding means 311 is housed in the carrier tape 100 or as a tape stripping device. The electronic component 104 in 101 is taken out by the holding means 311.

該馬達51、52,作為包帶裝置是進行正轉,作為剝帶裝置是進行逆轉。該馬達51、52,例如,係具有H橋接電路的伺服馬達。馬達51、52,係藉由控制旋轉方向、旋轉量及旋轉時點的馬達驅動器7,因應於包帶或剝帶來進行控制。馬達驅動器7,可設置於載帶行走裝置1,亦可設置於用來將保持手段311等進行統合控制的控制裝置側。 The motors 51 and 52 are forwardly rotated as a tape wrapping device, and are reversed as a tape stripping device. The motors 51, 52 are, for example, servo motors having an H-bridge circuit. The motors 51 and 52 are controlled by the motor driver 7 that controls the direction of rotation, the amount of rotation, and the point of rotation, in response to the tape or strip. The motor driver 7 may be provided in the carrier tape running device 1 or may be provided on the control device side for integrally controlling the holding means 311 and the like.

密封部2,係如第1圖所示般,具備有加熱器 塊21及基座塊22。加熱器塊21與基座塊22,係隔著載帶100之行走路線而對置。加熱器塊21,係從載帶100的行走路線上方壓住載帶100,基座塊22,係從載帶100的行走路線下方壓住載帶100。如第1圖及第2圖所示般,加熱器塊21,係可接觸或遠離載帶100之行走路線地進行移動。 The sealing portion 2 is provided with a heater as shown in Fig. 1 Block 21 and base block 22. The heater block 21 and the base block 22 are opposed to each other via the traveling path of the carrier tape 100. The heater block 21 presses the carrier tape 100 from above the traveling path of the carrier tape 100, and the base block 22 presses the carrier tape 100 from below the traveling path of the carrier tape 100. As shown in Figs. 1 and 2, the heater block 21 is movable in contact with or away from the traveling path of the carrier tape 100.

於該密封部2,密封帶102係與載帶100重疊而進行供給。加熱器塊21與基座塊22,係藉由包夾,而將密封帶102與載帶100進行壓接,加熱器塊21,係進一步將熱供給至密封帶102與載帶100之壓接面。 In the sealing portion 2, the sealing tape 102 is superposed on the carrier tape 100 and supplied. The heater block 21 and the base block 22 are crimped by the carrier tape 100 by the clamping, and the heater block 21 further supplies heat to the sealing tape 102 and the carrier tape 100. surface.

密封帶捲盤3,作為包帶裝置時,係將密封帶102朝向載帶100拉出,作為剝帶裝置時,係將密封帶102朝離開載帶100的方向捲繞。此密封帶捲盤3,係具備有位在載帶100的行走路線上方處之馬達31及壓輥32。 When the tape reel 3 is used as a tape wrapping device, the sealing tape 102 is pulled toward the carrier tape 100. When the tape is taken as a tape stripping device, the sealing tape 102 is wound in a direction away from the carrier tape 100. The sealing tape reel 3 is provided with a motor 31 and a pressure roller 32 which are positioned above the traveling path of the carrier tape 100.

馬達31,係透過正時皮帶來使密封帶捲盤3旋轉,密封帶捲盤3可進行正轉及逆轉,例如是具有H橋接電路的伺服馬達。壓輥32,係位在載帶100的行走路線附近,用來將密封帶102引導至載帶100。 The motor 31 rotates the seal reel 3 through the timing belt, and the seal reel 3 can be rotated forward and reversed, for example, a servo motor having an H-bridge circuit. The pressure roller 32 is positioned near the travel path of the carrier tape 100 for guiding the sealing tape 102 to the carrier tape 100.

如第1圖及第2圖所示般,壓輥32,係可接近或遠離載帶100之行走路線地進行移動。當載帶行走裝置1發揮作為包帶裝置的功能時,如第1圖所示般,係接近載帶100之行走路線,將密封帶102緊壓於載帶100。當載帶行走裝置1發揮作為剝帶的功能時,如第2圖所示 般,係從載帶100之行走路線離開。藉由使壓輥32從載帶100之行走路線離開,在載帶100與密封帶102之剝離基點9,使載帶100與密封帶102所成之角度θ成為平緩。 As shown in Figs. 1 and 2, the pressure roller 32 is movable toward or away from the traveling path of the carrier tape 100. When the carrier tape running device 1 functions as a tape wrapping device, as shown in Fig. 1, the traveling path of the carrier tape 100 is approached, and the sealing tape 102 is pressed against the carrier tape 100. When the carrier tape running device 1 functions as a stripping tape, as shown in Fig. 2 Generally, it leaves the walking route of the carrier tape 100. By separating the pressure roller 32 from the traveling path of the carrier tape 100, the angle θ formed between the carrier tape 100 and the sealing tape 102 at the peeling base point 9 of the carrier tape 100 and the sealing tape 102 is gentle.

此外,如第1圖所示般,使該載帶100朝兩方向進行行走的載帶行走裝置1,係於載帶100之行走路線下方具備有吸引部8。載帶100,係於各袋部101的底面具有孔部。吸引部8,係通過該孔部來吸引袋部101內部的電子元件104而使其貼合於袋部101的底面。 Further, as shown in FIG. 1, the carrier tape running device 1 that causes the carrier tape 100 to travel in two directions is provided with a suction portion 8 below the traveling path of the carrier tape 100. The carrier tape 100 has a hole portion on the bottom surface of each pocket portion 101. The suction portion 8 sucks the electronic component 104 inside the pocket portion 101 through the hole portion and bonds it to the bottom surface of the pocket portion 101.

如第3圖所示般,該吸引部8,係具備於載帶100之行走路線側開設有吸引溝槽82的容器81,並於容器81的底部開設有複數個吸引孔83。吸引溝槽82,係於載帶100之行走路線正下方沿著行走路線開設。吸引溝槽82的溝寬,係大於等於開設在載帶100的袋部101之孔部的直徑,且小於載帶100的帶寬。吸引孔83,係與真空泵等之負壓產生裝置的空氣壓回路連通。 As shown in FIG. 3, the suction portion 8 is provided with a container 81 having a suction groove 82 on the side of the traveling path of the carrier tape 100, and a plurality of suction holes 83 are formed in the bottom of the container 81. The suction groove 82 is opened along the traveling route directly below the traveling path of the carrier tape 100. The groove width of the suction groove 82 is equal to or larger than the diameter of the hole portion of the bag portion 101 opened in the carrier tape 100, and is smaller than the bandwidth of the carrier tape 100. The suction hole 83 communicates with an air pressure circuit of a vacuum generating device such as a vacuum pump.

該吸引部8,係通過吸引孔83來使容器81內減壓,通過吸引溝槽82與形成於載帶100之袋部101的孔部來使袋部101內的電子元件104貼合於袋部101的底面。 The suction portion 8 decompresses the inside of the container 81 by the suction hole 83, and the electronic component 104 in the pocket portion 101 is attached to the bag by the suction groove 82 and the hole portion formed in the pocket portion 101 of the carrier tape 100. The bottom surface of the portion 101.

(動作) (action)

該載帶行走裝置1之包帶動作係如下所述。載帶行走裝置1,係藉由馬達51、52的正轉使正時皮帶51a、52a 行走,而使鏈輪41、42進行正轉。鏈輪41、42,係使突起43卡在鏈輪孔,而使載帶100朝捲盤200側行走。 The entrainment operation of the carrier tape running device 1 is as follows. The carrier tape running device 1 is such that the timing belts 51a, 52a are rotated by the forward rotation of the motors 51, 52. Walking, the sprocket 41, 42 is rotated forward. The sprockets 41, 42 are such that the projections 43 are caught in the sprocket holes, and the carrier tape 100 is moved toward the reel 200 side.

載帶行走裝置1,係藉由使馬達51、52間歇性地旋轉,而將載帶100間歇性地送往捲盤200側,而使空的袋部101依序位於交接位置6。各保持手段311,係逐一保持電子元件104而依序在交接位置6停止,將電子元件104收容在存在於交接位置6之空的袋部101。 In the carrier tape running device 1, the carrier tapes 100 are intermittently rotated to the reel 200 side by intermittently rotating the motors 51 and 52, and the empty bag portions 101 are sequentially placed at the delivery position 6. Each of the holding means 311 stops the electronic component 104 one by one and sequentially stops at the delivery position 6, and accommodates the electronic component 104 in the pocket portion 101 which is present at the delivery position 6.

密封帶捲盤3,係藉由馬達31的正轉而將密封帶102往載帶100側拉出。壓輥32,係將從密封帶捲盤3拉出後的密封帶102引導到載帶100的表面,使密封帶102重疊於載帶100之開設有袋部101之面。 The sealing tape reel 3 pulls the sealing tape 102 toward the carrier tape 100 side by the forward rotation of the motor 31. The pressure roller 32 guides the sealing tape 102 pulled out from the sealing tape reel 3 to the surface of the carrier tape 100 so that the sealing tape 102 overlaps the surface of the carrier tape 100 on which the bag portion 101 is opened.

密封部2,係預先使加熱器塊21與載帶100之行走路線接觸。於密封部2,密封帶102係與載帶100重疊而進行供給。密封部2,係以加熱器塊21與基座塊22夾住載帶100與密封帶102,藉由加壓與加熱來將密封帶102貼合於載帶100。藉此,袋部101內的電子元件104,係藉由密封帶102與袋部104的內壁而被密封。 In the sealing portion 2, the heater block 21 is brought into contact with the traveling path of the carrier tape 100 in advance. In the sealing portion 2, the sealing tape 102 is superposed on the carrier tape 100 and supplied. In the sealing portion 2, the carrier tape 100 and the sealing tape 102 are sandwiched between the heater block 21 and the base block 22, and the sealing tape 102 is bonded to the carrier tape 100 by pressurization and heating. Thereby, the electronic component 104 in the pocket part 101 is sealed by the sealing tape 102 and the inner wall of the pocket part 104.

載帶100,係在藉由密封帶102進行密封之後,藉由進一步間歇性的行走而被引導至捲盤200,捲繞於捲盤200。 The carrier tape 100 is guided to the reel 200 by further intermittent walking after being sealed by the sealing tape 102, and wound around the reel 200.

載帶行走裝置1之剝帶動作係如下所述。載帶行走裝置1,係藉由馬達51、52的間歇性逆轉使正時皮帶51a、52a行走,而使鏈輪41、42進行逆轉。鏈輪41、42,係使突起43卡在鏈輪孔,而將載帶100從捲盤 200間歇性地拉出。 The stripping operation of the tape running device 1 is as follows. In the carrier tape running device 1, the timing belts 51a and 52a are moved by the intermittent reversal of the motors 51 and 52, and the sprockets 41 and 42 are reversed. The sprocket 41, 42 causes the protrusion 43 to be caught in the sprocket hole, and the carrier tape 100 is taken from the reel 200 is pulled out intermittently.

在此,突起43,係圓型且成為漸開線形狀。漸開線形狀,一般而言,係藉由使齒輪的齒彼此以一定角度及一定面積接觸,且形成適當的餘隙,而讓齒輪的旋轉變容易。若將此漸開線形狀適用於突起43,則伴隨著載帶100之行走而來的振動會受到抑制,而增加行走的安定性。 Here, the projections 43 are rounded and have an involute shape. The involute shape is generally made to facilitate the rotation of the gear by bringing the teeth of the gear into contact with each other at a certain angle and a certain area and forming an appropriate clearance. When the involute shape is applied to the projections 43, the vibration accompanying the travel of the carrier tape 100 is suppressed, and the stability of walking is increased.

此外,將馬達51、52與鏈輪41、42之間的傳動機構,在剝帶裝置上由一般的棘輪改成正時皮帶51a、52a,使伴隨著載帶100之行走的振動受到抑制,而增加行走的安定性。 Further, the transmission mechanism between the motors 51, 52 and the sprocket wheels 41, 42 is changed from the normal ratchet to the timing belts 51a, 52a on the stripping device, so that the vibration accompanying the travel of the carrier tape 100 is suppressed. And increase the stability of walking.

另一方面,密封帶捲盤3,係以與載帶100之反向行走相同速度、相同量、相同時點來捲繞密封帶102。載帶100係水平地進行反向行走,密封帶102係被捲到比載帶100之行走路線更上方處。因此,載帶100與密封帶102,係朝不同方向分岔,使密封帶102從載帶100剝離。 On the other hand, the sealing tape reel 3 winds the sealing tape 102 at the same speed, the same amount, and the same timing as the reverse travel of the carrier tape 100. The carrier tape 100 is reversely traveling horizontally, and the sealing tape 102 is wound above the traveling path of the carrier tape 100. Therefore, the carrier tape 100 and the sealing tape 102 are branched in different directions to peel the sealing tape 102 from the carrier tape 100.

此時,密封部2,在剝帶動作中,係使加熱器塊21退避到上方,從接近捲盤200的地方形成供載帶100與密封帶102區分岔的空間。此外,密封帶捲盤3,在剝帶動作中,係使壓輥32移動到上方。藉此,使載帶100與密封帶102以平緩的角度θ進行剝離。 At this time, in the stripping operation, the sealing portion 2 retracts the heater block 21 upward, and forms a space in which the carrier tape 100 is separated from the sealing tape 102 from a position close to the reel 200. Further, the sealing tape reel 3 moves the pressure roller 32 upward during the stripping operation. Thereby, the carrier tape 100 and the sealing tape 102 are peeled off at a gentle angle θ.

由於在袋部101之開口區域載帶100與密封帶102的密合面積小,在此區域剝離時所需要的力量較 小,若剝離時施加一定的力量,即可在此區域一氣呵成地進行剝離。此外,若超過袋部101之開口區域,則剝離時必須要相對較大的力量,反而降低剝離的進展。因此,於載帶100,在剝帶動作中有產生較大的振動之虞。 Since the adhesion area between the carrier tape 100 and the sealing tape 102 in the opening region of the pocket portion 101 is small, the force required for peeling off in this region is higher. Small, if a certain amount of force is applied during peeling, it can be peeled off in this area in one go. Further, if the opening area of the bag portion 101 is exceeded, a relatively large force is required at the time of peeling, and the progress of peeling is reduced. Therefore, in the carrier tape 100, a large vibration is generated in the stripping operation.

然而,於該載帶行走裝置1中,由於載帶100與密封帶102係以平緩的角度θ進行剝離,因此在袋部101之開口區域之剝離的進展較緩和,剝帶動作時之載帶100的振動減弱,而使載帶100之反向行走安定化。 However, in the carrier tape running device 1, since the carrier tape 100 and the sealing tape 102 are peeled off at a gentle angle θ, the progress of peeling in the opening region of the bag portion 101 is moderated, and the tape carrier during the stripping operation is carried out. The vibration of 100 is weakened, and the reverse travel of the carrier tape 100 is stabilized.

此外,載帶行走裝置1,係在剝帶動作中,驅動吸引部8。吸引部8,係通過吸引孔83來將容器81減壓,通過吸引溝槽82與袋部101的孔來吸引袋部101內的電子元件104。因此,載帶100之間歇性反向行走中,電子元件104會吸附於載帶100而成為一體,在電子元件104的袋部101內之搖動受到抑制,而使載帶100之行走安定化。此外,吸引部8會產生吸附載帶100的作用,在將密封帶102剝離時使發生在載帶100上的振動變緩和。 Further, the carrier tape running device 1 drives the suction portion 8 during the stripping operation. The suction portion 8 decompresses the container 81 through the suction hole 83, and sucks the electronic component 104 in the pocket portion 101 by the suction groove 82 and the hole of the pocket portion 101. Therefore, in the intermittent reverse running of the carrier tape 100, the electronic component 104 is adsorbed to the carrier tape 100 and integrated, and the rocking in the pocket portion 101 of the electronic component 104 is suppressed, and the travel of the carrier tape 100 is stabilized. Further, the suction portion 8 acts to adsorb the carrier tape 100, and the vibration generated on the carrier tape 100 is relieved when the sealing tape 102 is peeled off.

接著,因密封帶102從載帶100的剝離而露出的袋部101,係藉由馬達51、52之間歇性逆轉,而依序位於交接位置6。空的各保持手段311,係依序在交接位置6處停止,而將存在於交接位置6的電子元件104取出。 Next, the bag portion 101 exposed by the peeling of the sealing tape 102 from the carrier tape 100 is sequentially placed at the delivery position 6 by the intermittent reversal of the motors 51 and 52. The empty holding means 311 are sequentially stopped at the delivery position 6, and the electronic component 104 existing at the delivery position 6 is taken out.

(電子元件搬運裝置) (electronic component handling device) (構造) (structure)

針對具備有該載帶行走裝置1之電子元件搬運裝置,一邊參照附圖一邊詳細地說明。如第4圖所示般,電子元件搬運裝置300,係配設有電子元件104之搬運路徑301,沿著搬運路徑301來將複數個電子元件104排成一列同時進行搬運。此外,電子元件搬運裝置300,係沿著搬運路徑301並列設有晶圓環支架320、複數個觀測裝置340及複數個包帶行走裝置1。拾取裝置330係介在於晶圓環支架320與搬運路徑301之間。 The electronic component conveying device including the carrier tape running device 1 will be described in detail with reference to the drawings. As shown in FIG. 4, the electronic component conveying device 300 is provided with a conveyance path 301 of the electronic component 104, and a plurality of electronic components 104 are arranged in a row along the conveyance path 301 while being conveyed. Further, in the electronic component conveying device 300, a wafer ring holder 320, a plurality of observation devices 340, and a plurality of tape walking devices 1 are arranged side by side along the conveyance path 301. The pick-up device 330 is interposed between the wafer ring holder 320 and the transport path 301.

搬運路徑301係由搬運台310所形成。搬運台310,係具有以一點作為中心而呈放射狀擴展的圓盤或星形等之形狀,沿周方向間歇地以既定角度旋轉。於搬運台310的外周係安裝有保持手段311。保持手段311,可沿著軸線方向進行昇降。該保持手段311,係沿著搬運台310的外周在圓周均分位置上,且距離搬運台310之中心同一距離處安裝複數個。 The conveyance path 301 is formed by the conveyance stage 310. The transport table 310 has a shape such as a disk or a star that radially expands around a point, and intermittently rotates at a predetermined angle in the circumferential direction. A holding means 311 is attached to the outer periphery of the transfer table 310. The holding means 311 can be raised and lowered in the axial direction. The holding means 311 is installed at a plurality of circumferentially equally spaced positions along the outer circumference of the transfer table 310 and at the same distance from the center of the transfer table 310.

保持手段311例如係吸附噴嘴。吸附噴嘴,其內部為中空且一端設有開口,從搬運台310朝向下方延伸,將開口端朝向下方。吸附噴嘴的內部,係與真空泵或噴射器等之負壓產生裝置的空氣壓回路連通。通過空氣壓回路於吸附噴嘴的內部產生負壓,利用開口端將電子元件104進行吸引保持,並藉由破壞真空或曝露於大氣來解除吸引,釋放電子元件104。 The holding means 311 is, for example, an adsorption nozzle. The adsorption nozzle has a hollow interior and an opening at one end thereof, and extends downward from the transfer table 310 to face the opening end downward. The inside of the adsorption nozzle is in communication with an air pressure circuit of a vacuum generating device such as a vacuum pump or an ejector. A negative pressure is generated inside the adsorption nozzle by the air pressure circuit, and the electronic component 104 is suction-held by the open end, and the attraction is released by breaking the vacuum or exposing to the atmosphere, and the electronic component 104 is released.

搬運台310的動力源係直接驅動馬達312。直接驅動馬達312係以等節距間歇地旋轉。搬運台310的旋 轉距離對於直接驅動馬達312的旋轉節距的比值,係等於保持手段311的配置間隔。亦即,保持手段311,係伴隨著搬運台310之間歇旋轉沿著共通的移動軌跡前進,而在共通的停止位置停止。於此停止位置設置晶圓環支架320、觀測裝置340及包帶行走裝置1。 The power source of the transfer table 310 directly drives the motor 312. The direct drive motor 312 is intermittently rotated at equal pitches. Rotation of the transfer table 310 The ratio of the turning distance to the rotational pitch of the direct drive motor 312 is equal to the arrangement interval of the holding means 311. That is, the holding means 311 is moved along the common movement trajectory with the intermittent rotation of the conveyance table 310, and is stopped at the common stop position. The wafer ring holder 320, the observation device 340, and the tape walking device 1 are disposed at the stop position.

晶圓環支架320,係用以保持晶圓環103,使該晶圓環103與面平行地進行移動。晶圓環103,係貼附有晶圓薄片的環,晶圓薄片,係貼附有被切割成各個電子元件104後之晶圓的薄片。環支架320,以將電子元件104的貼合面朝向搬運台310的外緣的方式將晶圓環103縱向載置。該晶圓環支架320具備有推頂銷321,該推頂銷321,係用以將晶圓環103從背側朝向拾取裝置330推頂。 The wafer ring holder 320 is used to hold the wafer ring 103 and move the wafer ring 103 in parallel with the surface. The wafer ring 103 is attached with a ring of a wafer sheet to which a sheet of a wafer cut into individual electronic components 104 is attached. The ring holder 320 vertically places the wafer ring 103 so that the bonding surface of the electronic component 104 faces the outer edge of the transfer table 310. The wafer ring holder 320 is provided with an ejector pin 321 for pushing the wafer ring 103 from the back side toward the pickup device 330.

拾取裝置330,係從晶圓環103將電子元件104拾取而供給至搬運路徑301。該拾取裝置330,係具有從1點在同一平面上呈放射狀延伸的臂331。臂331的放射面,係與保持手段311的移動面和晶圓環展開的鉛直面正交。於臂331前端係附設有吸附噴嘴。吸附噴嘴,係使軸沿著臂331延伸,讓吸附電子元件104的開口端朝向放射方向外方。該拾取裝置330,係潛入至搬運台310的下方,設置於拾取裝置330的頂點與搬運路徑301重疊的位置處,以側面與晶圓環103相對。 The pickup device 330 picks up the electronic component 104 from the wafer ring 103 and supplies it to the conveyance path 301. The pickup device 330 has an arm 331 extending radially from the same point on the same plane. The radiating surface of the arm 331 is orthogonal to the moving surface of the holding means 311 and the vertical plane on which the wafer ring is unfolded. An adsorption nozzle is attached to the front end of the arm 331. The adsorption nozzle extends the shaft along the arm 331 such that the open end of the adsorption electronic component 104 faces outward in the radial direction. The pickup device 330 is submerged below the transfer table 310, and is disposed at a position where the apex of the pickup device 330 overlaps with the conveyance path 301, and faces the wafer ring 103 with the side surface.

拾取裝置330,係使臂331繞著放射中心間歇旋轉。晶圓環支架320,係利用推頂銷321將電子元件 104從背側推頂,而將電子元件104交接至與晶圓環103對置的臂331。接收到電子元件104的拾取裝置330的臂331,係與搬運台310的保持手段311在拾取裝置330的頂點對置,而將電子元件104交接至搬運台310。 The pickup device 330 intermittently rotates the arm 331 around the radiation center. The wafer ring holder 320 uses the push pin 321 to carry the electronic components 104 is pushed from the back side and the electronic component 104 is handed over to the arm 331 opposite the wafer ring 103. The arm 331 of the pickup device 330 that has received the electronic component 104 is opposed to the apex of the pickup device 330 by the holding means 311 of the transfer table 310, and the electronic component 104 is delivered to the transfer table 310.

觀測裝置340,係用以觀察電子元件104的外觀或電特性,或者為了此觀察而輔助電子元件104之位置修正等。亦即,觀測裝置340,係具有CCD或CMOS等之攝像元件與透鏡的攝像機、具有與電子元件104之端子接觸而進行電流注入或電壓施加之接觸件的電特性測定裝置,或者藉由載置電子元件104並進行旋轉及平面移動,而變更電子元件104的方向與位置的位置修正裝置。 The observation device 340 is used to observe the appearance or electrical characteristics of the electronic component 104, or to assist in the position correction of the electronic component 104 or the like for this observation. In other words, the observation device 340 is a camera having a camera element such as a CCD or a CMOS and a lens, and an electrical characteristic measuring device having a contact for current injection or voltage application in contact with a terminal of the electronic component 104, or by mounting. The position correcting means for changing the direction and position of the electronic component 104 by rotating and moving the electronic component 104.

(動作) (action)

第5圖,係將電子元件搬運裝置300之電子元件104進行搬運的第1樣態。如第5圖所示般,電子元件搬運裝置300,係沿著搬運路徑301具備有一個晶圓環支架320與2個載帶行走裝置1。載帶行走裝置1,係作為良品等級用與良品以外用。於晶圓環支架320,係保持有檢查對象之晶圓環103。 Fig. 5 is a first view showing the conveyance of the electronic component 104 of the electronic component conveying device 300. As shown in FIG. 5, the electronic component conveying device 300 includes one wafer ring holder 320 and two carrier tape running devices 1 along the conveyance path 301. The carrier tape running device 1 is used as a good grade for use as a good product. The wafer ring holder 320 holds the wafer ring 103 to be inspected.

晶圓環支架320,係使晶圓環103進行平行移動,使各電子元件104依序朝拾取位置移動,藉由推頂銷321而朝向拾取裝置330上推。拾取裝置330,係藉由臂331將拾取位置的電子元件104拾取,而交接至搬運台310的保持手段311。晶圓環支架320與拾取裝置330, 係反覆進行朝電子元件104之拾取位置的移動、拾取位置之電子元件104的拾取及朝保持手段311的交接。 The wafer ring holder 320 moves the wafer ring 103 in parallel so that the electronic components 104 are sequentially moved toward the pickup position, and are pushed up toward the pickup device 330 by the ejector pins 321. The pickup device 330 picks up the electronic component 104 at the pickup position by the arm 331 and delivers it to the holding means 311 of the transfer table 310. Wafer ring holder 320 and pick-up device 330, The movement toward the pickup position of the electronic component 104, the pickup of the electronic component 104 at the pickup position, and the transfer to the holding means 311 are repeated.

搬運台310,係藉由直接驅動馬達312進行間歇旋轉,保持手段311,係一邊保持電子元件104,一邊在搬運路徑301上移動。當保持手段311通過各觀測裝置340時,各觀測裝置340,係進行電子元件104之觀測處理。例如,作為觀測裝置340係設置有位置修正裝置、攝像機及電特性測定裝置的情況,電子元件,係藉由位置修正裝置而進行檢查用的位置修正,並藉由攝像機及電特性測定裝置而進行外觀檢查及電特性測定檢查。電子元件104,係因應於外觀檢查與電特性測定檢查的結果,而區分等級為良品與良品以外。 The conveyance table 310 is intermittently rotated by the direct drive motor 312, and the holding means 311 moves on the conveyance path 301 while holding the electronic component 104. When the holding means 311 passes through each of the observation devices 340, each of the observation devices 340 performs observation processing of the electronic component 104. For example, when the observation device 340 is provided with a position correction device, a camera, and an electrical characteristic measurement device, the electronic component is subjected to position correction for inspection by the position correction device, and is performed by a camera and an electrical characteristic measurement device. Visual inspection and electrical property measurement inspection. The electronic component 104 is classified into a good product and a good product in accordance with the results of the visual inspection and the electrical property measurement test.

搬運台310藉由直接驅動馬達312進一步進行間歇旋轉,若區分等級為良品後的電子元件104到達良品用載帶行走裝置1,則正在保持該電子元件104的保持手段311使電子元件104脫離。 The conveyance table 310 is further intermittently rotated by the direct drive motor 312. When the electronic component 104 having the good grade is reached, the holding device 311 holding the electronic component 104 is detached from the electronic component 104.

於良品用之載帶行走裝置1,安裝有密封部2而發揮作為包帶裝置的功能。該良品用之載帶行走裝置1,係一邊使載帶100朝捲盤200的方向行走,一邊將電子元件104收納於載帶100的袋部101,並利用密封帶102進行密封。捲盤200,係將利用密封帶102密封後的載帶100進行捲繞。 In the carrier tape running device 1 for good use, the sealing portion 2 is attached to function as a tape wrapping device. In the carrier tape running device 1 for the good product, the electronic component 104 is housed in the bag portion 101 of the carrier tape 100 while the carrier tape 100 is traveling in the direction of the reel 200, and is sealed by the sealing tape 102. The reel 200 is wound by a carrier tape 100 sealed by a sealing tape 102.

若分類成良品以外的等級的電子元件104到達良品以外用的載帶行走裝置1,則正在保持該電子元件 104的保持手段311使電子元件104脫離。 If the electronic component 104 classified into a grade other than the good product arrives at the carrier tape running device 1 other than the good product, the electronic component is being held. The holding means 311 of 104 disengages the electronic component 104.

於良品以外用之載帶行走裝置1,安裝有密封部2而發揮作為包帶裝置的功能。該良品用之載帶行走裝置1,係一邊使載帶100朝捲盤200的方向行走,一邊在交接位置6將電子元件104收納於載帶100的袋部101,並利用密封帶102進行密封。捲盤200,係將利用密封帶102密封後的載帶100進行捲繞。 The carrier tape running device 1 for use outside the good product is attached to the sealing portion 2 and functions as a tape wrapping device. In the carrier tape running device 1 for the good product, the electronic component 104 is housed in the bag portion 101 of the carrier tape 100 at the delivery position 6 while the carrier tape 100 is traveling in the direction of the reel 200, and is sealed by the sealing tape 102. The reel 200 is wound by a carrier tape 100 sealed by a sealing tape 102.

若將晶圓環103之各電子元件104分類為良品或良品以外且對於載帶100之捆包完成,則分類為良品以外的電子元件104會進行再檢查。於再檢查中,作業員會對觀測裝置340所得到的數據進行確認,將分類為良品以外的電子元件104重新再判定為良品與良品以外。 When the electronic components 104 of the wafer ring 103 are classified into good products or good products and the packaging for the carrier tape 100 is completed, the electronic components 104 classified as good products are re-examined. During the re-inspection, the operator confirms the data obtained by the observation device 340, and re-determines the electronic component 104 classified as a good product as a good product or a good product.

再判定之後,良品以外用之載帶行走裝置1,係將密封部2卸下後安裝剝離部3,而成為剝帶裝置。接著,電子元件搬運裝置300,係成為再分類模式,良品以外用之載帶行走裝置1,係作為剝帶裝置,而讓載帶100從捲盤200退出,將密封帶102從載帶100剝離,並且使電子元件104露出於交接位置6。 After the determination, the carrier tape running device 1 for use outside the good product removes the sealing portion 2 and attaches the peeling portion 3 to become a tape stripping device. Next, the electronic component conveying device 300 is a re-sorting mode, and the carrier tape running device 1 other than the good product is used as a tape stripping device, and the carrier tape 100 is withdrawn from the reel 200, and the sealing tape 102 is peeled off from the carrier tape 100. And the electronic component 104 is exposed to the transfer position 6.

保持手段311,係保持交接位置6的電子元件104,伴隨著搬運台310的間歇旋轉,而在搬運路徑301上移動。於再分類模式下,晶圓環支架320,係將良品以外之電子元件進行捆包,與成為剝帶裝置的載帶行走裝置1不同的另一方之載帶行走裝置1,係繼續作為包帶裝置而將良品進行捆包。 The holding means 311 moves the electronic component 104 holding the delivery position 6 and moves on the conveyance path 301 in accordance with the intermittent rotation of the conveyance table 310. In the reclassification mode, the wafer ring holder 320 is bundled with electronic components other than the good product, and the other carrier tape running device 1 different from the tape running device 1 that is the tape stripping device continues to be used as a tape. The device is bundled with good products.

若將再判定為良品以外的電子元件104予以保持的保持手段311到達晶圓環支架320,則晶圓環支架320的推頂銷321,係將晶圓環103的薄片推頂而迎接電子元件104,使再判定為良品以外的電子元件104貼合於薄片。保持手段311,係藉由曝露於大氣或破壞真空而解除電子元件104的吸附,將電子元件104交接至晶圓環103。 When the holding means 311 that holds the electronic component 104 other than the good product reaches the wafer ring holder 320, the push pin 321 of the wafer ring holder 320 pushes up the sheet of the wafer ring 103 to greet the electronic component 104. The electronic component 104 other than the good product is bonded to the sheet. The holding means 311 releases the electronic component 104 by exposure to the atmosphere or breaks the vacuum, and the electronic component 104 is transferred to the wafer ring 103.

將再判定為良品的電子元件104予以保持的保持手段311,係藉由搬運台310的間歇旋轉而到達仍舊安裝有密封部2之良品用的載帶行走裝置1,藉由曝露於大氣或破壞真空而解除電子元件104的吸附,使電子元件104脫離至交接位置6的袋部101內。 The holding means 311 for holding the electronic component 104 which is determined to be a good product is intermittently rotated by the transfer table 310 to reach the carrier running device 1 for the good product in which the sealing portion 2 is still attached, by exposure to the atmosphere or destruction. The vacuum is applied to release the adsorption of the electronic component 104, and the electronic component 104 is detached from the pocket portion 101 of the delivery position 6.

良品用之載帶行走裝置1,係在交接位置6將電子元件104收納於載帶100的袋部101,並利用密封帶102進行密封。捲盤200,係將利用密封帶102密封後的載帶100進行捲繞。 In the carrier tape running device 1 for good use, the electronic component 104 is housed in the bag portion 101 of the carrier tape 100 at the delivery position 6, and is sealed by the sealing tape 102. The reel 200 is wound by a carrier tape 100 sealed by a sealing tape 102.

藉此,電子元件104,係從晶圓環103被分類至良品用之載帶行走裝置1與良品以外之載帶行走裝置1。接著,被分類成良品以外之載帶100的電子元件104,經再判定之後,從分類時成為包帶裝置而收容有良品以外之電子元件104的載帶行走裝置1變成剝帶裝置而進行再供給,接著再分類至成為包帶裝置之良品用的載帶行走裝置1與良品以外用之晶圓環支架320。 Thereby, the electronic component 104 is sorted from the wafer ring 103 to the carrier tape running device 1 for good products and the carrier tape running device 1 other than the good product. Then, the electronic component 104 that has been classified as the carrier tape 100 other than the good product is re-determined, and the carrier tape running device 1 that is the tape wrapping device and the electronic component 104 other than the good product is stored as a tape stripping device. The supply is then further classified into a tape carrier device 1 for use as a good product for the tape wrapping device and a wafer ring holder 320 for use outside the product.

(效果) (effect)

如此一來,本實施形態之載帶行走裝置1,係繞在鏈輪41、42繞掛載帶100來使其行走。鏈輪41、42,係藉由正轉及逆轉的馬達51、52而進行旋轉。此外,具備有密封帶捲盤3及加熱器塊21與基座塊22,該密封帶捲盤3,係捲繞著用以貼合於載帶100的密封帶102;該加熱器塊21與基座塊22,係夾住從密封帶捲盤3拉出的密封帶102與載帶100,而將密封帶102貼合於載帶100。 As a result, the carrier tape running device 1 of the present embodiment winds around the sprocket wheels 41 and 42 and travels around the tape. The sprockets 41 and 42 are rotated by the motors 51 and 52 which are rotated forward and reverse. Further, the sealing tape reel 3 and the heater block 21 and the base block 22 are provided, and the sealing tape reel 3 is wound around a sealing tape 102 for attaching to the carrier tape 100; the heater block 21 and The base block 22 clamps the sealing tape 102 and the carrier tape 100 pulled out from the sealing tape reel 3, and bonds the sealing tape 102 to the carrier tape 100.

該載帶行走裝置1,係藉由使馬達51、52進行正轉,將密封帶102從密封帶捲盤3拉出,使一對的塊21、22接近,而成為將載帶100利用密封帶102進行密封的包帶裝置。此外,藉由使馬達51、52進行逆轉,將密封帶102拉向密封帶捲盤3,使一對的塊21、22分離,而成為將密封帶102從載帶100進行剝離的剝帶裝置。 In the carrier tape running device 1, the sealing tape 102 is pulled out from the sealing tape reel 3 by the forward rotation of the motors 51 and 52, and the pair of blocks 21 and 22 are brought close to each other, thereby sealing the carrier tape 100. The belt 102 is sealed with a tape wrapping device. Further, by reversing the motors 51 and 52, the sealing tape 102 is pulled toward the sealing tape reel 3, and the pair of blocks 21 and 22 are separated to become a stripping device for peeling the sealing tape 102 from the carrier tape 100. .

藉此,載帶行走裝置1,係成為可兼用於作為包帶裝置與剝帶裝置。因此,無須另外準備包帶裝置與剝帶裝置,而可減低設備的成本。例如,無須於電子元件搬運裝置300設置專用的剝帶裝置。另外,電子元件搬運裝置300的佔有面積係減少不設置剝帶裝置的部分,而使單位設備面積之電子元件生產效率提高。 Thereby, the carrier tape running device 1 can be used as both a tape wrapping device and a tape stripping device. Therefore, it is not necessary to separately prepare the strapping device and the stripping device, and the cost of the device can be reduced. For example, it is not necessary to provide a dedicated stripping device for the electronic component handling device 300. Further, the area occupied by the electronic component conveying device 300 is reduced by the portion where the stripping device is not provided, and the production efficiency of the electronic component per unit area is improved.

作為電子元件搬運裝置300,係於用來形成搬運路徑301的搬運台310之周圍,設置收容體保持手段、觀察裝置340、以及複數個載帶行走裝置1,該收容體保 持手段,係用來保持電子元件104之收容體;該觀察裝置340,係用來觀察搬運路徑301內的電子元件104。收容體保持手段,例如為晶圓環支架320,該收容體為晶圓環103。其他,作為收容體,係其平面分隔成格子狀,於格子內收容電子元件104的托盤。作為用來保持托盤的收容體保持手段,係使托盤進行平面移動的載置台。 As the electronic component conveying device 300, a container holding means, an observation device 340, and a plurality of carrier tape running devices 1 are provided around the transfer table 310 for forming the conveyance path 301. The holding means is for holding the housing of the electronic component 104; the viewing device 340 is for viewing the electronic component 104 in the transport path 301. The container holding means is, for example, a wafer ring holder 320 which is a wafer ring 103. Others, as a container, a tray in which the plane is divided into a lattice shape and the electronic component 104 is housed in the grid. As a container holding means for holding a tray, a mounting table for moving a tray in a plane is used.

該電子元件搬運裝置300,係具有分類模式與再分類模式,在分類模式與再分類模式下,係使收容體保持手段與載帶行走裝置1成為電子元件104之供給手段或者成為電子元件的分類目的地之分類手段。而且,於分類模式下,收容體保持手段係供給手段,所有的載帶行走裝置1成為包帶裝置而作為分類手段。於再分類模式下,只要載帶行走裝置1當中的一部分成為剝帶裝置而作為供給手段,載帶行走裝置1當中的其他部分成為包帶裝置而作為分類手段即可。此外,於再分類模式下,除了成為剝帶裝置的載帶行走裝置1以外,收容體保持手段亦可作為分類手段。 The electronic component conveying device 300 has a classification mode and a reclassification mode, and in the classification mode and the reclassification mode, the container holding means and the tape carrier device 1 are used as a supply means of the electronic component 104 or as a classification of electronic components. The means of classification of destinations. Further, in the sorting mode, the container holding means is a supply means, and all of the tape running devices 1 serve as a tape collecting means as a sorting means. In the reclassification mode, as long as a part of the carrier tape running device 1 serves as a feeding means, the other part of the carrier tape running device 1 may be a tape wrapping device as a sorting means. Further, in the reclassification mode, in addition to the carrier tape running device 1 which is a tape stripping device, the container holding means can be used as a sorting means.

於如此之電子元件搬運裝置300,不需要為了再分類而將捲盤200從包帶裝置轉移至剝帶裝置,因此除了設備成本降低、生產效率提昇以外,亦可減輕作業員的勞力。 In such an electronic component conveying apparatus 300, it is not necessary to transfer the reel 200 from the wrapping apparatus to the stripping apparatus for reclassification. Therefore, in addition to the reduction in equipment cost and improvement in production efficiency, the labor of the worker can be reduced.

進而,鏈輪41、42,係於周面形成突起43,使突起卡在形成於載帶100的鏈輪孔來進行旋轉。此突起43係具有漸開線形狀。藉此,於載帶100之行走時,振 動減低,可防止電子元件104從袋部101飛出,而提高生產效率。 Further, the sprockets 41 and 42 are formed with projections 43 on the circumferential surface, and the projections are engaged with the sprocket holes formed in the carrier tape 100 to rotate. This protrusion 43 has an involute shape. Thereby, when the carrier tape 100 is walking, the vibration The reduction in motion prevents the electronic component 104 from flying out of the pocket portion 101, thereby improving production efficiency.

此外,作為鏈輪41、42與馬達51、52之間的傳動機構係使用正時皮帶51a、52a。藉此,相較於傳動機構是使用棘輪的情況,於載帶100之反向行走時,變得不易發生來自傳動機構之振動,可防止電子元件104從袋部101飛出,而提高生產效率。 Further, timing belts 51a and 52a are used as the transmission mechanism between the sprockets 41 and 42 and the motors 51 and 52. Thereby, compared with the case where the transmission mechanism uses a ratchet, when the carrier tape 100 is traveling in the reverse direction, vibration from the transmission mechanism is less likely to occur, and the electronic component 104 can be prevented from flying out of the pocket portion 101, thereby improving production efficiency. .

此外,使壓輥32介在於密封帶捲盤3與載帶100的行走路線之間,且將密封帶102引導至載帶100的附近。該壓輥32,在將密封帶102貼合於載帶100時,係靠近載帶100的附近。 Further, the pressure roller 32 is interposed between the sealing tape reel 3 and the traveling path of the carrier tape 100, and the sealing tape 102 is guided to the vicinity of the carrier tape 100. The pressure roller 32 is adjacent to the vicinity of the carrier tape 100 when the sealing tape 102 is bonded to the carrier tape 100.

另一方面,壓輥32,當密封帶102從載帶100剝離時,離開載帶100,使剝離基點9之載帶100與密封帶102所成的角度比前述貼合時更為平緩。藉此,可抑制將密封帶102從載帶100剝離所導致的振動,可防止電子元件104從袋部101飛出,而提高生產效率。 On the other hand, when the sealing tape 102 is peeled off from the carrier tape 100, the pressure roller 32 is separated from the carrier tape 100 so that the angle between the carrier tape 100 of the peeling base point 9 and the sealing tape 102 is gentler than that at the time of bonding. Thereby, vibration caused by peeling of the sealing tape 102 from the carrier tape 100 can be suppressed, and the electronic component 104 can be prevented from flying out of the pocket part 101, and productivity can be improved.

此外,具備有吸引部8,其係通過形成於袋部101的底面的孔,來吸引收容於袋部101內的電子元件104。該吸引部8,係在載帶100之行走中,將電子元件104吸附於載帶100。藉此,載帶100與電子元件104成為一體,即使在載帶100之行走產生振動,電子元件104也不易在袋部101內搖晃,且載帶100的振動變緩和,可防止電子元件104從袋部101飛出,而提高生產效率。 Further, the suction portion 8 is provided to suck the electronic component 104 housed in the pocket portion 101 through a hole formed in the bottom surface of the pocket portion 101. The suction unit 8 is configured to adsorb the electronic component 104 to the carrier tape 100 while the carrier tape 100 is traveling. Thereby, the carrier tape 100 is integrated with the electronic component 104, and even if the carrier tape 100 vibrates, the electronic component 104 is less likely to be shaken in the pocket portion 101, and the vibration of the carrier tape 100 is relieved, thereby preventing the electronic component 104 from being removed. The bag portion 101 flies out to improve production efficiency.

雖如以上所述般地對本發明之實施形態作說 明,但在不脫離發明之要旨的範圍內,可進行各種的省略、置換、變更。而且,此實施形態及其變形,係包含於發明的範圍或要旨中,並且包含於申請專利範圍中所記載之發明與其均等的範圍中。 Although the embodiment of the present invention is described as described above It is to be understood that various omissions, substitutions and changes may be made without departing from the scope of the invention. Further, the embodiment and its modifications are intended to be included in the scope and spirit of the invention, and are included in the scope of the invention described in the claims.

例如,作為保持手段311雖採用吸附噴嘴為例進行了說明,但亦可為靜電吸附方式、伯努利吸盤(Bernoulli chuck)方式、或者配置用來機械性地挾持電子元件104的夾頭機構。此外,作為電子元件104,只要可被載帶100所捆包者皆可。例如,作為電子元件104,係可列舉半導體元件、及半導體元件以外之電阻或電容器等。作為半導體元件,係可列舉:電晶體、二極體、LED、及閘流體等之分離式半導體、IC或LSI等之積體電路等。 For example, the holding means 311 has been described by taking an adsorption nozzle as an example, but may be an electrostatic adsorption method, a Bernoulli chuck method, or a chuck mechanism configured to mechanically hold the electronic component 104. Further, as the electronic component 104, any packaged by the carrier tape 100 may be used. For example, examples of the electronic component 104 include a semiconductor device and a resistor or capacitor other than the semiconductor device. Examples of the semiconductor element include a separate semiconductor such as a transistor, a diode, an LED, and a thyristor, and an integrated circuit such as an IC or an LSI.

此外,於本實施形態中,雖設成藉由二個馬達51、52來使載帶100行走,但亦可設有馬達51、52之任一個,藉由該馬達使載帶100行走。再者,關於鏈輪41、42,亦可設置任1個,另一個,則設為用來引導載帶100之無銷的滾輪。 Further, in the present embodiment, the carrier tape 100 is moved by the two motors 51 and 52. However, any one of the motors 51 and 52 may be provided, and the carrier tape 100 may be driven by the motor. Further, any one of the sprockets 41 and 42 may be provided, and the other one may be a roller without a pin for guiding the carrier tape 100.

1‧‧‧載帶行走裝置 1‧‧‧Loading device

2‧‧‧密封部 2‧‧‧ Sealing Department

3‧‧‧密封帶捲盤 3‧‧‧Seal tape reel

6‧‧‧交接位置 6‧‧‧ handover location

7‧‧‧馬達驅動器 7‧‧‧Motor drive

8‧‧‧吸引部 8‧‧‧Attraction

21‧‧‧加熱器塊 21‧‧‧ heater block

22‧‧‧基座塊 22‧‧‧Base block

31‧‧‧馬達 31‧‧‧Motor

32‧‧‧壓輥 32‧‧‧pressure roller

41‧‧‧鏈輪 41‧‧‧Sprocket

42‧‧‧鏈輪 42‧‧‧Sprocket

43‧‧‧突起 43‧‧‧Protrusion

51‧‧‧馬達 51‧‧‧Motor

51a‧‧‧正時皮帶 51a‧‧‧ Timing belt

52‧‧‧馬達 52‧‧‧Motor

52a‧‧‧正時皮帶 52a‧‧‧ Timing belt

100‧‧‧載帶 100‧‧‧ Carrier tape

101‧‧‧袋部 101‧‧‧ Bag Department

102‧‧‧密封帶 102‧‧‧Sealing tape

104‧‧‧電子元件 104‧‧‧Electronic components

200‧‧‧捲盤 200‧‧‧Reel

311‧‧‧保持手段 311‧‧‧ means of keeping

Claims (8)

一種載帶行走裝置,係使以等間隔形成有用以收納電子元件的袋部之載帶在長度方向上行走,其特徵在於,具備有:鏈輪、馬達、捲盤、一對的塊、以及壓輥,該鏈輪,係讓前述載帶掛上而進行行走;該馬達,係進行正轉及逆轉而使前述鏈輪旋轉;該捲盤,係捲繞著貼合於前述載帶的密封帶;該一對的塊,係可接觸或遠離前述載帶之行走路線地進行移動,用來夾住從前述捲盤拉出後的前述密封帶與前述載帶,而將前述密封帶貼合於前述載帶,該壓輥,係可接近或遠離前述載帶之行走路線地進行移動,藉由使前述馬達進行正轉,將前述密封帶從前述捲盤拉出,讓前述壓輥接近前述載帶之行走路線,使前述一對的塊接近,而成為將前述載帶以前述密封帶進行密封的包帶裝置,藉由使前述馬達進行逆轉,將前述密封帶拉向前述捲盤,使前述一對的塊分離,讓前述壓輥從前述載帶之行走路線離開,而成為將前述密封帶從前述載帶剝離的剝帶裝置。 A carrier tape running device that travels in a longitudinal direction by forming a carrier tape for storing a pocket portion of an electronic component at equal intervals, and is characterized by comprising: a sprocket, a motor, a reel, a pair of blocks, and a pressure roller that causes the carrier tape to be hung and travels; the motor rotates forward and reverse to rotate the sprocket; the reel is wound around a seal attached to the carrier tape a pair of blocks that are movable in contact with or away from the traveling path of the carrier tape for clamping the sealing tape and the carrier tape after being pulled out from the reel, and bonding the sealing tape In the carrier tape, the pressure roller is movable away from or away from the traveling path of the carrier tape, and the sealing tape is pulled out from the reel by rotating the motor forward, so that the pressure roller is close to the foregoing The traveling path of the carrier tape is such that the pair of blocks are close to each other, and the tape is sealed by the sealing tape, and the sealing tape is pulled toward the reel by reversing the motor. Block separation of the aforementioned pair Let the platen roller from the routes of the carrier tape away, with a stripping device becomes the sealing tape is peeled from the carrier tape. 如申請專利範圍第1項所述之載帶行走裝置,其中,前述鏈輪,係於周面形成突起,將前述突起卡在形成於前述載帶的鏈輪孔來進行旋轉, 前述突起具有漸開線形狀。 The carrier tape running device according to claim 1, wherein the sprocket is formed with a projection on a circumferential surface, and the projection is engaged with a sprocket hole formed in the carrier tape to rotate. The aforementioned protrusions have an involute shape. 如申請專利範圍第1項或第2項所述之載帶行走裝置,其中,具備正時皮帶作為前述鏈輪與前述馬達之間的傳動機構。 The carrier tape running device according to claim 1 or 2, further comprising a timing belt as a transmission mechanism between the sprocket and the motor. 如申請專利範圍第1項或第2項所述之載帶行走裝置,其中,前述壓輥係介在於前述捲盤與前述載帶的行走路線之間,用來將前述密封帶導引至前述載帶的附近,前述壓輥,當將前述密封帶貼在前述載帶時,接近前述載帶的附近,當前述密封帶從前述載帶剝離時,離開前述載帶,使剝離基點之前述載帶與前述密封帶所成的角度比前述貼合時更為平緩。 The carrier tape travel device of claim 1 or 2, wherein the pressure roller is disposed between the reel and the travel path of the carrier tape for guiding the sealing tape to the foregoing In the vicinity of the carrier tape, when the sealing tape is attached to the carrier tape, the proximity of the carrier tape is close to the vicinity of the carrier tape, and when the sealing tape is peeled off from the carrier tape, the carrier tape is separated from the carrier tape to cause the carrier tape to be removed. The angle formed by the belt with the aforementioned sealing tape is gentler than that of the aforementioned bonding. 如申請專利範圍第1項或第2項所述之載帶行走裝置,其中,具備有吸引部,其係通過形成於前述袋部的底面的孔,來吸引收容於前述袋部內的電子元件,前述吸引部,係在前述載帶之行走中,將前述電子元件吸附於前述載帶。 The carrier tape running device according to claim 1 or 2, further comprising a suction portion that sucks an electronic component housed in the bag portion through a hole formed in a bottom surface of the bag portion. The suction unit is configured to adsorb the electronic component to the carrier tape during the travel of the carrier tape. 一種電子元件搬運裝置,其特徵在於,係具備有如申請專利範圍第1項至第5項中任一項所述之載帶行走裝置,將電子元件沿著搬運路徑進行搬運,並具備有:搬運台、收容體保持手段、觀察手段、以及複數個前述載帶行走裝置,該搬運台係用來形成前述搬運路徑;該收容體保持手段,係配置於前述搬運台的周圍,用 來保持電子元件的收容體;該觀察手段,係配置於前述搬運台的周圍,用來觀察前述搬運路徑內的電子元件;該複數個前述載帶行走裝置,係配置於前述搬運台的周圍;且具有分類模式與再分類模式,在分類模式與再分類模式下,係使前述收容體保持手段與前述載帶行走裝置成為電子元件之供給手段或者成為電子元件的分類類別之分類手段,於前述分類模式下,前述收容體保持手段係前述供給手段,所有的前述載帶行走裝置成為前述包帶裝置而作為前述分類手段,於前述再分類模式下,前述載帶行走裝置當中的一部分成為前述剝帶裝置而作為前述供給手段,前述載帶行走裝置當中的其他部分成為前述包帶裝置而作為前述分類手段。 An electronic component transporting apparatus according to any one of claims 1 to 5, wherein the electronic component is transported along a transport path and is provided with: a table, a container holding means, an observation means, and a plurality of the above-mentioned carrier tape running means for forming the conveyance path; the container holding means being disposed around the conveyance table Holding the electronic component storage body; the observation means is disposed around the transfer table for observing electronic components in the transport path; and the plurality of carrier tape travel devices are disposed around the transfer table; Further, in the classification mode and the re-classification mode, the container holding means and the carrier tape running device are means for supplying electronic components or classifying means for classifying electronic components. In the classification mode, the container holding means is the supply means, and all of the carrier tape running devices are the tape wrapping means as the sorting means. In the reclassification mode, a part of the carrier tape running device is peeled off. As the above-described supply means, the belt feeder is the other means of the above-described tape running device as the above-described tape sorting means. 如申請專利範圍第6項所述之電子元件搬運裝置,其中,於前述再分類模式下,除了成為前述剝帶裝置的前述載帶行走裝置以外,前述收容體保持手段也作為前述分類手段。 The electronic component conveying apparatus according to claim 6, wherein in the reclassification mode, the storage body holding means is used as the sorting means in addition to the carrier tape running device which is the stripping device. 如申請專利範圍第6項或第7項所述之電子元件搬運裝置,其中,前述收容體保持手段,係用來保持將電子 元件排列成陣列狀的晶圓環之晶圓環保持部,或者用來保持其平面分隔成格子狀並將電子元件排列成陣列狀的托盤之托盤保持部。 The electronic component handling device according to claim 6 or 7, wherein the container holding means is for holding an electron The wafer ring holding portion of the wafer ring in which the elements are arranged in an array, or the tray holding portion for holding the tray whose plane is divided into a lattice shape and the electronic components are arranged in an array.
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