WO2016080162A1 - Carrier tape-running device and electronic part-conveying apparatus - Google Patents

Carrier tape-running device and electronic part-conveying apparatus Download PDF

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Publication number
WO2016080162A1
WO2016080162A1 PCT/JP2015/080323 JP2015080323W WO2016080162A1 WO 2016080162 A1 WO2016080162 A1 WO 2016080162A1 JP 2015080323 W JP2015080323 W JP 2015080323W WO 2016080162 A1 WO2016080162 A1 WO 2016080162A1
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WO
WIPO (PCT)
Prior art keywords
carrier tape
tape
electronic component
seal
reel
Prior art date
Application number
PCT/JP2015/080323
Other languages
French (fr)
Japanese (ja)
Inventor
正人 宮田
Original Assignee
上野精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 上野精機株式会社 filed Critical 上野精機株式会社
Priority to CN201580002286.XA priority Critical patent/CN106170443A/en
Publication of WO2016080162A1 publication Critical patent/WO2016080162A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B15/00—Attaching articles to cards, sheets, strings, webs, or other carriers
    • B65B15/04—Attaching a series of articles, e.g. small electrical components, to a continuous web
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/02—Feeding of components

Definitions

  • the present invention relates to a carrier tape running technique that is used by switching between the use of storing electronic parts in a carrier tape and the use of taking out electronic parts from the carrier tape.
  • Electronic parts are classified into non-defective products and defective products through various inspections in the manufacturing process, and are shipped after packing. If the standard of inspection is severe, the overkill rate that classifies a non-defective electronic component as a defective container increases, and the production efficiency decreases. If inspection standards are loose, defective electronic parts are shipped as non-defective products, resulting in variations in quality and reducing the reliability of inspection. In an electronic component of an integrated circuit such as an IC or LSI having a high unit price per component, a high overkill ratio or a variation in quality is particularly problematic.
  • the non-defective product group or the non-defective product is not included in the defective product group is re-inspected by changing the inspection item, inspection method or inspection accuracy.
  • the non-defective product group or the defective product group is reclassified by reflecting the re-inspection result, and then shipped after repacking.
  • the electronic component transport device that inspects, classifies, reinspects, and reclassifies electronic components is configured as a system that includes a plurality of taping devices and one detaper device.
  • This electronic component transport device places an electronic component on a transport path for inspection, and classifies the electronic components into a plurality of taping devices prepared according to quality ranks.
  • the reel packed with the rank to be re-inspected is moved from the taping device to the detaper device, the electronic component is re-inspected by re-inspecting it on the transport path, and prepared according to the quality rank.
  • the electronic components are classified into a plurality of taping devices.
  • the taping device is a device that intermittently runs the carrier tape toward a reel that winds up the carrier tape (see, for example, Patent Document 1).
  • the pocket is embossed along the longitudinal direction. While the taping device stops the carrier tape, a manipulator or the like puts electronic components in the pockets.
  • the taping device seals the electronic component accommodated in the pocket by stacking and sealing the sealing tape on the carrier tape.
  • the detaper device is a device that runs intermittently while pulling out the carrier tape from the reel (see, for example, Patent Document 2). While the detaper device stops the carrier tape, the manipulator or the like takes out the electronic component from the pocket. In this detaper device, a claw is inserted between the carrier tape and the seal tape, the seal tape is peeled off from the carrier tape, and the electronic components are exposed.
  • Electronic component transport devices that can be inspected, classified, re-inspected, and re-classified are equipped with a detaper device in addition to the taping device.
  • the production efficiency per unit area of the production equipment is reduced by occupying a large amount of production equipment.
  • the detaper device cannot be eliminated.
  • the present invention has been proposed to solve the above-described problems, and provides a carrier tape traveling device that can be used as both a taping device and a detaper device, and an electronic component conveying device including the carrier tape traveling device.
  • the purpose is to do.
  • a carrier tape traveling device is a carrier tape traveling device that travels in the longitudinal direction a carrier tape in which pockets for storing electronic components are formed at equal intervals.
  • a sprocket that is hooked to travel, a motor that rotates forward and reverse, and rotates the sprocket, a reel wound with a seal tape that is attached to the carrier tape, and a travel line of the carrier tape.
  • a pair of blocks that move in a possible manner and sandwich the seal tape drawn out from the reel and the carrier tape and adhere the seal tape to the carrier tape, and approach or separate from the carrier tape travel line
  • a holding roller that is capable of rotating the motor forward and rotating the reel.
  • the sprocket is formed with pin-shaped protrusions on the peripheral surface, and rotates by hooking the protrusions into sprocket holes formed in the carrier tape, and the protrusions have an involute shape at the pin tip. It may be.
  • a timing belt may be provided as a transmission mechanism between the sprocket and the motor.
  • a pressing roller is interposed between the reel and the carrier tape running line and guides the sealing tape to the vicinity of the carrier tape, and the pressing roller attaches the sealing tape to the carrier tape.
  • the carrier tape is separated from the carrier tape, and the angle formed by the carrier tape and the seal tape at the peeling base point You may make it loose compared with.
  • the suction part may attract the electronic component to the carrier tape while the carrier tape is running.
  • an electronic component transport apparatus is an electronic component transport apparatus that includes the carrier tape travel device and transports an electronic component along a transport path, and transports the transport path.
  • a plurality of the carrier tape traveling devices arranged around the transport table, and the container holding unit and the carrier tape traveling device are classified as electronic component supply means or electronic component classification means Mode and reclassification mode, wherein in the classification mode, the container holding means is the supply means, and all the carrier tape running devices are In the reclassification mode, a part of the carrier tape travel device becomes the detaper device and serves as the supply means, and the other of the carrier tape travel devices
  • the taping device is the classification means.
  • the container holding means may also be the classification means.
  • the container holding means is a wafer ring holding unit that holds a wafer ring in which electronic components are arranged in an array, or a tray holding unit that holds a tray in which electronic parts are arranged in an array by partitioning a plane in a lattice shape. You may do it.
  • the carrier tape traveling device can be used as both a taping device and a detaper device, it is not necessary to separately prepare the taping device and the detaper device, and the cost of the equipment can be reduced.
  • the carrier tape running device 1 runs a carrier tape 100 for housing an electronic component 104 in a pocket 101 in the longitudinal direction.
  • the carrier tape traveling device 1 functions as a taping device by traveling the carrier tape 100 to the reel 200 side, and functions as a detaper device by traveling backward so as to pull out the carrier tape 100 from the reel 200 side.
  • the carrier tape travel device 1 includes a seal tape reel 3 around which the seal tape 102 is wound, and a sealing portion 2. As the taping device, the carrier tape 100 travels toward the reel 200 while the seal tape reel 3 Then, the seal tape 102 is pulled out and the seal tape 102 is attached to the carrier tape 100. Further, the carrier tape running device 1 is a detapering device that retracts the sealing portion 2 from the running line of the carrier tape 100 and moves the seal tape reel 3 to the seal tape reel 3 while running backward to pull out the carrier tape 100 from the reel 200 side. The seal tape 102 is wound up, and the seal tape 102 is peeled off from the carrier tape 100.
  • This carrier tape traveling device 1 includes two sprockets 41 and 42.
  • the two sprockets 41 and 42 are disks having the same diameter and having protrusions 43 protruding along the circumferential surface.
  • the sprockets 41 and 42 are connected to the output shafts of the corresponding motors 51 and 52 through timing belts 51a and 52a, respectively, and rotate intermittently at the same circumferential direction, the same rotation amount, and the same timing.
  • the carrier tape 100 is stretched over both the sprockets 41 and 42.
  • sprocket holes are opened at equal intervals along the longitudinal direction on the strip side.
  • the protrusions 43 of both the sprockets 41 and 42 mesh with the sprocket holes.
  • the sprockets 41 and 42 rotate by hooking the protrusions 43 into the sprocket holes, and cause the carrier tape 100 to run in the longitudinal direction.
  • the protrusion 43 has a round shape and is processed into an involute shape.
  • the diameter of the protrusion 43 is slightly smaller than the sprocket hole of the carrier tape 100.
  • Both the sprockets 41 and 42 are arranged on the same vertical plane, the rotation axes are parallel and have the same height. Therefore, the carrier tape 100 runs in the direction away from the reel 200 or in the direction away from the reel 200 while keeping the extending direction horizontal.
  • the rotation pitch of the motors 51 and 52 corresponds to the arrangement interval of the pockets 101.
  • the carrier tape 100 has embossed pockets 101 at equal intervals in the longitudinal direction. That is, the motors 51 and 52 stop the pocket 100 at a common stop position. One of the common stop positions is set at the transfer position 6 of the electronic component 104.
  • a holding means 311 such as a suction nozzle can be moved up and down just above the delivery position 6.
  • the carrier tape traveling device 1 causes the electronic tape 104 to be detached by the holding means 311 to be accommodated in the carrier tape 100 as a taping device by sequentially matching the pocket 101 to the delivery position 6 or as a detaper in the pocket 101.
  • the electronic component 104 is taken out by the holding means 311.
  • the motors 51 and 52 rotate forward as a taping device and reverse as a detaper device.
  • the motors 51 and 52 are, for example, servo motors having an H bridge circuit.
  • the motors 51 and 52 are controlled according to whether they are taping or detaping by a motor driver 7 that controls the rotation direction, rotation amount, and rotation timing.
  • the motor driver 7 may be provided in the carrier tape traveling device 1 or may be provided on the control device side that integrally controls the holding means 311 and the like.
  • the sealing unit 2 includes a heater block 21 and a base block 22 as shown in FIG.
  • the heater block 21 and the base block 22 are arranged to face each other across the travel line of the carrier tape 100.
  • the heater block 21 presses the carrier tape 100 from above the travel line of the carrier tape 100
  • the base block 22 presses the carrier tape 100 from below the travel line of the carrier tape 100.
  • the heater block 21 moves so as to be able to contact or leave the traveling line of the carrier tape 100.
  • the sealing tape 102 is supplied to the sealing portion 2 so as to overlap the carrier tape 100.
  • the heater block 21 and the base block 22 are pressed to bring the seal tape 102 and the carrier tape 100 into pressure contact, and the heater block 21 further supplies heat to the pressure contact surfaces of the seal tape 102 and the carrier tape 100.
  • the seal tape reel 3 pulls out the seal tape 102 toward the carrier tape 100 as a taping device, and winds the seal tape 102 away from the carrier tape 100 as a detaper device.
  • the seal tape reel 3 is positioned above the travel line of the carrier tape 100 and includes a motor 31 and a pressing roller 32.
  • the motor 31 rotates the seal tape reel 3 via the timing belt.
  • the seal tape reel 3 is capable of normal rotation and reverse rotation, and is, for example, a servo motor having an H bridge circuit.
  • the holding roller 32 is positioned near the running line of the carrier tape 100 and guides the seal tape 102 to the carrier tape 100.
  • the restraining roller 32 moves so as to be able to approach or leave the traveling line of the carrier tape 100.
  • the carrier tape traveling device 1 functions as a taping device, as shown in FIG. 1, the carrier tape traveling device 1 approaches the traveling line of the carrier tape 100 and presses the seal tape 102 against the carrier tape 100.
  • the carrier tape travel device 1 functions as a detaper, the carrier tape travels away from the travel line of the carrier tape 100 as shown in FIG.
  • the holding roller 32 moves away from the travel line of the carrier tape 100, the angle ⁇ between the carrier tape 100 and the seal tape 102 at the separation base point 9 between the carrier tape 100 and the seal tape 102 becomes gentle.
  • the carrier tape traveling device 1 that travels the carrier tape 100 in both directions includes a suction portion 8 below the traveling line of the carrier tape 100.
  • the carrier tape 100 has a hole on the bottom surface of each pocket 101.
  • the suction unit 8 sucks the electronic component 104 inside the pocket 101 through the hole and attaches it to the bottom surface of the pocket 101.
  • the suction unit 8 has a container 81 having a suction groove 82 formed on the traveling line side of the carrier tape 100, and a plurality of suction holes 83 are formed in the bottom of the container 81. Yes.
  • the suction groove 82 is opened along the traveling line immediately below the traveling line of the carrier tape 100.
  • the groove width of the suction groove 82 is not less than the diameter of the hole formed in the pocket 101 of the carrier tape 100 and less than the band width of the carrier tape 100.
  • the suction hole 83 communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump.
  • the inside of the container 81 is decompressed through the suction hole 83, and the electronic part 104 in the pocket 101 is attached to the bottom surface of the pocket 101 through the hole formed in the suction groove 82 and the pocket 101 of the carrier tape 100. Yes.
  • the taping operation of the carrier tape traveling device 1 is as follows.
  • the carrier tape traveling device 1 causes the timing belts 51a and 52a to travel by the forward rotation of the motors 51 and 52, and causes the sprockets 41 and 42 to rotate forward.
  • the sprockets 41 and 42 hook the protrusions 43 on the sprocket holes and cause the carrier tape 100 to travel to the reel 200 side.
  • the carrier tape traveling device 1 intermittently rotates the motors 51 and 52 to intermittently feed the carrier tape 100 to the reel 200 side, thereby positioning the empty pockets 101 to the delivery position 6 in order.
  • Each holding means 311 holds the electronic components 104 one by one and stops at the transfer position 6 in order, and accommodates the electronic components 104 in the empty pocket 101 existing at the transfer position 6.
  • the seal tape reel 3 draws the seal tape 102 toward the carrier tape 100 by the normal rotation of the motor 31.
  • the restraining roller 32 guides the seal tape 102 drawn from the seal tape reel 3 to the surface of the carrier tape 100 and superimposes the seal tape 102 on the surface of the carrier tape 100 where the pocket 101 opens.
  • the sealing unit 2 has the heater block 21 in contact with the travel line of the carrier tape 100 in advance.
  • the seal tape 102 and the carrier tape 100 are overlapped and shared.
  • the sealing unit 2 sandwiches the carrier tape 100 and the seal tape 102 between the heater block 21 and the base block 22 and adheres the seal tape 102 to the carrier tape 100 by pressurization and heating. Thereby, the electronic component 104 in the pocket 101 is sealed by the seal tape 102 and the inner wall of the pocket 104.
  • the carrier tape 100 is sealed with the seal tape 102, the carrier tape 100 is guided to the reel 200 by further intermittent running and wound around the reel 200.
  • the detaping operation of the carrier tape traveling device 1 is as follows.
  • the carrier tape traveling device 1 causes the timing belts 51a and 52a to travel by intermittent reverse rotation of the motors 51 and 52, and reversely rotates the sprockets 41 and 42.
  • the sprockets 41 and 42 hook the protrusions 43 into the sprocket holes and intermittently pull out the carrier tape 100 from the reel 200.
  • the protrusion 43 has a round shape and an involute shape.
  • the involute shape facilitates the rotation of the gear by generally bringing the gear teeth into contact with each other at a constant angle and a constant area and forming an appropriate play.
  • vibrations associated with traveling of the carrier tape 100 are suppressed, and traveling stability is increased.
  • the transmission mechanism between the motors 51 and 52 and the sprockets 41 and 42 is changed from a ratchet wheel generally used in a detaper device to timing belts 51a and 52a, thereby suppressing vibration associated with the travel of the carrier tape 100, Driving stability has increased.
  • the seal tape reel 3 winds the seal tape 102 at the same speed, the same amount, and the same timing as the reverse running of the carrier tape 100.
  • the carrier tape 100 runs backward in the horizontal direction, and the seal tape 102 is pulled up above the running line of the carrier tape 100. For this reason, the carrier tape 100 and the seal tape 102 are bifurcated in different directions, and the seal tape 102 is peeled off from the carrier tape 100.
  • the sealing unit 2 retracts the heater block 21 upward to make room for the carrier tape 100 and the sealing tape 102 to be divided into two forks from a location close to the reel 200. Further, the seal tape reel 3 keeps the holding roller 32 moved upward during the detaping operation. As a result, the carrier tape 100 and the seal tape 102 are peeled at a gentle angle ⁇ .
  • the contact area between the carrier tape 100 and the seal tape 102 is small, so the force required for peeling is small in this area. If a certain force is applied to the peeling, peeling will occur in this area at once. Advances. Moreover, when the area where the pocket 101 is opened is passed, a relatively large force is required for peeling, and conversely, the progress of peeling decreases. For this reason, the carrier tape 100 may be vibrated greatly during the detaping operation.
  • the carrier tape traveling device 1 drives the suction unit 8 during the detaping operation.
  • the suction unit 8 decompresses the container 81 through the suction hole 83, and sucks the electronic component 104 in the pocket 101 through the suction groove 82 and the hole of the pocket 101. Therefore, during the intermittent reverse running of the carrier tape 100, the electronic component 104 is attracted to and integrated with the carrier tape 100, and the swing of the electronic component 104 within the pocket 101 is suppressed, so that the carrier tape 100 runs. Stabilize.
  • the suction portion 8 has an action of attracting the carrier tape 100, and vibrations generated in the carrier tape 100 when the seal tape 102 is peeled off are alleviated.
  • each empty holding means 311 sequentially stops at the transfer position 6 and takes out the electronic component 104 existing at the transfer position 6.
  • the electronic component transport apparatus 300 includes a transport path 301 for electronic components 104, and aligns and transports a plurality of electronic components 104 along the transport path 301.
  • the electronic component transport apparatus 300 includes a wafer ring holder 320, a plurality of observation apparatuses 340, and a plurality of taping travel apparatuses 1 arranged in parallel along the transport path 301.
  • a pickup device 330 is interposed between the wafer ring holder 320 and the transfer path 301.
  • the conveyance path 301 is formed by a conveyance table 310.
  • the transfer table 310 has a shape such as a disk or a star that radially expands around one point, and rotates intermittently by a predetermined angle in the circumferential direction.
  • a holding means 311 is attached to the outer periphery of the transfer table 310. The holding means 311 can be moved up and down along the axial direction.
  • a plurality of holding means 311 are attached at equal circumferential positions along the outer periphery of the transfer table 310 and at the same distance from the center of the transfer table 310.
  • the holding means 311 is, for example, a suction nozzle.
  • the suction nozzle is hollow and has one end opened, extends downward from the transfer table 310, and faces the open end downward.
  • the inside of the suction nozzle communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump or an ejector.
  • a negative pressure generator such as a vacuum pump or an ejector.
  • the power source of the transfer table 310 is a direct drive motor 312.
  • the direct drive motor 312 rotates intermittently by one pitch.
  • the rotation distance of the conveyance table 310 with respect to the rotation pitch of the direct drive motor 312 is equal to the arrangement interval of the holding means 311. That is, the holding unit 311 follows a common movement locus with the intermittent rotation of the transport table 310 and stops at a common stop position. At this stop position, the wafer ring holder 320, the observation device 340, and the taping travel device 1 are installed.
  • the wafer ring holder 320 holds the wafer ring 103 and moves the wafer ring 103 parallel to the surface.
  • the wafer ring 103 is a ring to which a wafer sheet is attached, and the wafer sheet is a sheet to which a wafer obtained by dicing the electronic component 104 into individual pieces is attached.
  • the ring holder 320 places the wafer ring 103 vertically with the attachment surface of the electronic component 104 facing the outer edge of the transfer table 310.
  • the wafer ring holder 320 includes a protrusion pin 321 that protrudes the wafer ring 103 from the back side toward the pickup device 330.
  • the pickup device 330 picks up the electronic component 104 from the wafer ring 103 and supplies it to the conveyance path 301.
  • the pickup device 330 has arms 331 that extend radially from one point on the same plane.
  • the radiation surface of the arm 331 is orthogonal to the moving surface of the holding means 311 and the vertical surface where the wafer ring expands.
  • a suction nozzle is attached to the tip of the arm 331.
  • the suction nozzle extends along the axis of the arm 331 and directs the opening end that sucks the electronic component 104 outward in the radial direction.
  • the pickup device 330 enters under the transfer table 310, is installed at a position where the apex of the pickup device 330 and the transfer path 301 overlap, and faces the wafer ring 103 directly beside.
  • the pickup device 330 rotates the arm 331 intermittently about the radiation center.
  • Wafer ring holder 320 pushes up electronic component 104 from the back side with push-up pins 321, and passes electronic component 104 to arm 331 facing wafer ring 103.
  • the arm 331 of the pickup device 330 that has received the electronic component 104 faces the holding means 311 of the transfer table 310 at the apex of the pickup device 330, and passes the electronic component 104 to the transfer table 310.
  • the observation device 340 observes the appearance and electrical characteristics of the electronic component 104, or assists the position correction of the electronic component 104 for this observation. That is, the observation apparatus 340 mounts a camera having an imaging element such as a CCD or CMOS and a lens, an electrical characteristic measuring apparatus having a contact for injecting current or applying a voltage in contact with a terminal of the electronic component 104, or the electronic component 104. Thus, the position correction device changes the orientation and position of the electronic component 104 by rotating and moving in a plane.
  • FIG. 5 shows a first mode in which the electronic component 104 of the electronic component transport apparatus 300 is transported.
  • the electronic component conveying apparatus 300 includes one wafer ring holder 320 and two carrier tape traveling apparatuses 1 along the conveying path 301.
  • the carrier tape traveling device 1 is used for non-defective product ranks and for others.
  • the wafer ring holder 320 holds the wafer ring 103 to be inspected.
  • the wafer ring holder 320 moves the wafer ring 103 in parallel, sequentially moves each electronic component 104 to the pickup position, and pushes it up toward the pickup device 330 with the push-up pins 321.
  • the pickup device 330 picks up the electronic component 104 at the pickup position with the arm 331 and delivers it to the holding means 311 of the transfer table 310.
  • the wafer ring holder 320 and the pickup device 330 repeat the movement of the electronic component 104 to the pickup position and the pick-up of the electronic component 104 at the pickup position and delivery to the holding means 311.
  • the conveyance table 310 is intermittently rotated by the direct drive motor 312, and the holding unit 311 moves on the conveyance path 301 while holding the electronic component 104.
  • each observation device 340 performs observation processing of the electronic component 104.
  • the electronic components are position-corrected in preparation for the inspection by the position correction device, and the appearance inspection and the electronic device are performed by the camera and the electrical property measurement device. Electrical property measurement is inspected.
  • the electronic component 104 is classified into a non-defective product and a non-defective product according to the results of the appearance inspection and the electrical characteristic measurement inspection.
  • the holding means 311 holding the electronic component 104 is: The electronic component 104 is removed.
  • a non-defective carrier tape travel device 1 is provided with a sealing portion 2 and functions as a taping device.
  • the good carrier tape traveling device 1 stores the electronic component 104 in the pocket 101 of the carrier tape 100 and seals it with the seal tape 102 while the carrier tape 100 travels in the direction of the reel 200.
  • the reel 200 winds up the carrier tape 100 sealed with the seal tape 102.
  • the holding means 311 holding the electronic component 104 releases the electronic component 104.
  • the non-defective carrier tape travel device 1 is provided with a sealing portion 2 and functions as a taping device.
  • the non-defective carrier tape traveling device 1 stores the electronic component 104 in the pocket 101 of the carrier tape 100 at the delivery position 6 while the carrier tape 100 travels in the direction of the reel 200 and seals it with the seal tape 102.
  • the reel 200 winds up the carrier tape 100 sealed with the seal tape 102.
  • the electronic component 104 classified as a non-defective product is re-inspected.
  • the worker checks the data obtained by the observation device 340, and re-determines the electronic component 104 classified as non-defective and non-defective.
  • the carrier tape traveling device 1 for non-defective products is detapered by removing the sealing portion 2 and setting the peeling portion 3. Then, the electronic component transport apparatus 300 is in a reclassification mode, and the carrier tape traveling apparatus 1 for non-defective products unwinds the carrier tape 100 from the reel 200 as a detaper, and peels the seal tape 102 from the carrier tape 100. The electronic component 104 is exposed to the transfer position 6.
  • the holding means 311 holds the electronic component 104 at the delivery position 6 and moves on the conveyance path 301 along with the intermittent rotation of the conveyance table 310.
  • the wafer ring holder 320 packages electronic components other than non-defective products, and the other carrier tape traveling device 1 different from the detapered carrier tape traveling device 1 continues to package non-defective products as a taping device.
  • the holding means 311 holding the electronic component 104 re-determined as a non-defective product reaches the wafer ring holder 320, the push-up pins 321 of the wafer ring holder 320 push up the sheet of the wafer ring 103 and pick up the electronic component 104, The electronic component 104 re-determined as a non-defective product is attached to the sheet.
  • the holding means 311 releases the adsorption of the electronic component 104 by atmospheric destruction or vacuum destruction, and delivers the electronic component 104 to the wafer ring 103.
  • the holding means 311 that holds the electronic component 104 that has been re-determined as a non-defective product reaches the non-defective carrier tape traveling device 1 with the sealing portion 2 mounted by intermittent rotation of the transfer table 310, and is thus subjected to atmospheric destruction or vacuum.
  • the suction of the electronic component 104 is released by destruction, and the electronic component 104 is separated into the pocket 101 at the transfer position 6.
  • the non-defective carrier tape traveling device 1 stores the electronic component 104 in the pocket 101 of the carrier tape 100 at the delivery position 6 and seals it with the seal tape 102.
  • the reel 200 winds up the carrier tape 100 sealed with the seal tape 102.
  • the electronic component 104 is classified into the carrier tape traveling device 1 for the non-defective product and the carrier tape traveling device 1 other than the non-defective product from the wafer ring 103. Then, after re-determination, the electronic component 104 classified as the non-defective carrier tape 100 becomes a taping device at the time of classification, and the carrier tape traveling device 1 containing the non-defective electronic component 104 is re-determined as a detaper device.
  • the non-defective carrier tape traveling device 1 that is supplied and continues to be a taping device and the wafer ring holder 320 for non-defective products are reclassified.
  • the carrier tape traveling device 1 travels by hooking the carrier tape 100 with the sprockets 41 and 42.
  • the sprockets 41 and 42 are rotated by motors 51 and 52 that rotate forward and backward.
  • the seal tape reel 3 around which the seal tape 102 to be attached to the carrier tape 100 is wound, and the seal tape 102 drawn out from the seal tape reel 3 and the carrier tape 100 are sandwiched, and the seal tape 102 is attached to the carrier tape 100.
  • a heater block 21 and a base block 22 are provided.
  • the carrier tape traveling device 1 seals the carrier tape 100 with the seal tape 102 by rotating the motors 51 and 52 forward, pulling out the seal tape 102 from the seal tape reel 3, and bringing the pair of blocks 21 and 22 close to each other. It becomes a taping device. Further, the motors 51 and 52 are reversed, the seal tape 102 is drawn into the seal tape reel 3, and the pair of blocks 21 and 22 are separated from each other, whereby a detapering device that peels the seal tape 102 from the carrier tape 100 is obtained.
  • the carrier tape traveling device 1 can be used as both a taping device and a detaper device. Therefore, it is not necessary to prepare a taping device and a detaper device separately, and the cost of the equipment can be reduced. For example, it is not necessary to install a dedicated detapering device in the electronic component conveying device 300. In addition, since the detaper device is not installed, the area occupied by the electronic component transport device 300 is reduced, and the electronic component production efficiency per area of the facility is improved.
  • the container holding means is, for example, a wafer ring holder 320, and the container is the wafer ring 103.
  • the container is a tray in which a plane is partitioned in a lattice shape and the electronic component 104 is accommodated in the lattice.
  • the container holding means for holding the tray is a stage for moving the tray in a plane.
  • the electronic component transport apparatus 300 has a classification mode and a reclassification mode in which the container holding unit and the carrier tape traveling device 1 are used as a supply unit of the electronic component 104 or a classification unit as a classification destination of the electronic component.
  • the container holding means is a supply means, and all the carrier tape traveling devices 1 become taping devices and become the classification means.
  • a part of the carrier tape traveling device 1 may be a detapering device and serving as a supply unit, and the other of the carrier tape traveling device 1 may be a taping device and serving as a classification unit.
  • the container holding means in addition to the carrier tape traveling device 1 that has become a detaper device, the container holding means may be the classification means.
  • the sprockets 41 and 42 are formed with protrusions 43 on the peripheral surface, and rotate by hooking the protrusions into the sprocket holes formed in the carrier tape 100.
  • the protrusion 43 has an involute shape.
  • timing belts 51 a and 52 a are used as a transmission mechanism between the sprockets 41 and 42 and the motors 51 and 52.
  • vibration is less likely to be generated from the transmission mechanism during reverse running of the carrier tape 100, and the electronic component 104 can be prevented from jumping out of the pocket 101. improves.
  • a restraining roller 32 is interposed between the seal tape reel 3 and the travel line of the carrier tape 100 to guide the seal tape 102 to the vicinity of the carrier tape 100.
  • the pressing roller 32 approaches the vicinity of the carrier tape 100 when the sealing tape 102 is stuck to the carrier tape 100.
  • the sealing roller 102 is peeled off from the carrier tape 100, the holding roller 32 is separated from the carrier tape 100, and the angle formed between the carrier tape 100 and the sealing tape 102 at the peeling base point 9 is gentler than that at the time of sticking. I tried to do it. As a result, vibration due to peeling of the seal tape 102 from the carrier tape 100 can be suppressed, the electronic component 104 can be prevented from jumping out of the pocket 101, and the production efficiency is improved.
  • the suction part 8 for sucking the electronic component 104 accommodated in the pocket 101 is provided through a hole formed in the bottom surface of the pocket 101.
  • the suction unit 8 attracts the electronic component 104 to the carrier tape 100 while the carrier tape 100 is running.
  • the carrier tape 100 and the electronic component 104 are integrated, and even when the carrier tape 100 is vibrated, the electronic component 104 is less likely to move in the pocket 101, and the vibration of the carrier tape 100 is reduced.
  • the electronic component 104 can be prevented from jumping out of the pocket 101, and the production efficiency is improved.
  • the suction nozzle has been described as an example of the holding means 311, an electrostatic suction method, a Bernoulli chuck method, or a chuck mechanism that mechanically clamps the electronic component 104 may be provided.
  • the electronic component 104 may be any as long as it can be packed on the carrier tape 100.
  • examples of the electronic component 104 include a semiconductor element and a resistor or capacitor other than the semiconductor element.
  • the semiconductor element include discrete semiconductors such as transistors, diodes, LEDs, and thyristors, and integrated circuits such as ICs and LSIs.
  • the carrier tape 100 is caused to travel by the two motors 51 and 52.
  • any one of the motors 51 and 52 is provided, and the carrier tape 100 is caused to travel by the motor. Also good.
  • any one of the sprockets 41 and 42 may be provided, and the other may be a pinless roller for guiding the carrier tape 100.

Abstract

Provided are: a carrier tape-running device that can be used both as a taping device and a de-taping device; and an electronic part-conveying apparatus. The carrier tape-running device 1 runs a carrier tape 100 by hooking same with sprockets 41, 42 that are rotated by motors 51, 52 that rotate in the normal direction and in reverse. A sealing tape 102 is attached to the carrier tape 100 by clamping same with a heater block 21 and a base block 22. The carrier tape-running device becomes a taping device that seals the carrier tape 100 with the sealing tape 102 by rotating the motors 51, 52 in the normal direction, drawing out the sealing tape 102 and bringing the pair of blocks 21, 22 towards each other. The carrier tape-running device becomes a de-taping device that peels the sealing tape 102 from the carrier tape 100 by rotating the motors 51, 52 in reverse, drawing the sealing tape 102 into a reel cover reel 3, and separating the pair of blocks 21, 22.

Description

キャリアテープ走行装置及び電子部品搬送装置Carrier tape traveling device and electronic component conveying device
　本発明は、電子部品のキャリアテープへの収容用途と電子部品のキャリアテープからの取り出し用途に切り替えて使用されるキャリアテープ走行技術に関する。 The present invention relates to a carrier tape running technique that is used by switching between the use of storing electronic parts in a carrier tape and the use of taking out electronic parts from the carrier tape.
　電子部品は、その製造過程で各種検査を経て良品や不良品に分類され、梱包の後、出荷される。検査の基準が厳しいと、良品であった電子部品を不良品の収容体に分類してしまうオーバーキル率が高まり、生産効率が低下する。検査の基準が緩いと、不良品であった電子部品を良品として出荷してしまい、品質にバラツキが生じ、検査の信頼性が低下してしまう。一部品当たりの単価の高いＩＣやＬＳＩ等の集積回路の電子部品においては、オーバーキル率が高かったり、品質にバラツキが生じたりすることは特に問題である。 Electronic parts are classified into non-defective products and defective products through various inspections in the manufacturing process, and are shipped after packing. If the standard of inspection is severe, the overkill rate that classifies a non-defective electronic component as a defective container increases, and the production efficiency decreases. If inspection standards are loose, defective electronic parts are shipped as non-defective products, resulting in variations in quality and reducing the reliability of inspection. In an electronic component of an integrated circuit such as an IC or LSI having a high unit price per component, a high overkill ratio or a variation in quality is particularly problematic.
　そこで、検査及び分類の工程では、良品群に不良品が含まれていないか、又は不良品群に良品が含まれていないか、それらを検査項目、検査手法又は検査精度を代えて再検査し、そして、再検査結果を反映させて良品群又は不良品群を再分類し、再梱包の後、出荷する場合もある。 Therefore, in the inspection and classification process, whether or not the non-defective product is included in the non-defective product group or the non-defective product is not included in the defective product group is re-inspected by changing the inspection item, inspection method or inspection accuracy. In some cases, the non-defective product group or the defective product group is reclassified by reflecting the re-inspection result, and then shipped after repacking.
　電子部品を検査し、分類し、再検査し、そして再分類する電子部品搬送装置は、複数のテーピング装置と１機のディテーパ装置を含むシステムとして構成される。この電子部品搬送装置は、搬送経路に電子部品を載せて検査を行い、品質のランクに応じて用意された複数のテーピング装置に電子部品を分類していく。電子部品の分類が終了すると、再検査対象となるランクが梱包されたリールをテーピング装置からディテーパ装置に移し、搬送経路に電子部品を再度載せて再検査を行い、品質のランクに応じて用意された複数のテーピング装置に電子部品を分類していく。 The electronic component transport device that inspects, classifies, reinspects, and reclassifies electronic components is configured as a system that includes a plurality of taping devices and one detaper device. This electronic component transport device places an electronic component on a transport path for inspection, and classifies the electronic components into a plurality of taping devices prepared according to quality ranks. When the classification of the electronic parts is completed, the reel packed with the rank to be re-inspected is moved from the taping device to the detaper device, the electronic component is re-inspected by re-inspecting it on the transport path, and prepared according to the quality rank. The electronic components are classified into a plurality of taping devices.
　テーピング装置は、キャリアテープを巻き取るリールに向けてキャリアテープを間欠的に走行させる装置である(例えば特許文献１参照)。キャリアテープは、ポケットが長手方向に沿ってエンボス加工されている。テーピング装置がキャリアテープを停止させている間にマニピュレータ等が電子部品をポケットに入れていく。テーピング装置は、キャリアテープにシールテープを重ねて圧着することで、ポケットに収容された電子部品を封止していく。 The taping device is a device that intermittently runs the carrier tape toward a reel that winds up the carrier tape (see, for example, Patent Document 1). As for the carrier tape, the pocket is embossed along the longitudinal direction. While the taping device stops the carrier tape, a manipulator or the like puts electronic components in the pockets. The taping device seals the electronic component accommodated in the pocket by stacking and sealing the sealing tape on the carrier tape.
　ディテーパ装置は、リールからキャリアテープを引き出しながら間欠的に走行させる装置である(例えば特許文献２参照)。ディテーパ装置がキャリアテープを停止させている間にマニピュレータ等で電子部品をポケットから取り出していく。このディテーパ装置は、キャリアテープとシールテープとの間に爪を差し込み、キャリアテープからシールテープを剥離させ、電子部品を露出させていく。 The detaper device is a device that runs intermittently while pulling out the carrier tape from the reel (see, for example, Patent Document 2). While the detaper device stops the carrier tape, the manipulator or the like takes out the electronic component from the pocket. In this detaper device, a claw is inserted between the carrier tape and the seal tape, the seal tape is peeled off from the carrier tape, and the electronic components are exposed.
特開２００７－１３７４２６号公報JP 2007-137426 A 特開２００９－１４０９９４号公報JP 2009-140994 A
　検査、分類、再検査及び再分類が可能な電子部品搬送装置は、テーピング装置の他にディテーパ装置を搭載しており、頻繁に再検査及び再分類を実施しない場合は、ディテーパ装置は装置のコストを上げ、製造設備を大きく占有して製造設備の単位面積当たりの生産効率を落とすだけである。しかしながら、再検査及び再分類は、全く必要のない工程ではないので、ディテーパ装置を廃止するわけにも行かない。 Electronic component transport devices that can be inspected, classified, re-inspected, and re-classified are equipped with a detaper device in addition to the taping device. The production efficiency per unit area of the production equipment is reduced by occupying a large amount of production equipment. However, since re-inspection and re-classification are not unnecessary processes, the detaper device cannot be eliminated.
　本発明は、上記のような問題点を解決するために提案されたもので、テーピング装置とディテーパ装置とを兼用できるキャリアテープ走行装置と、そのキャリアテープ走行装置を備えた電子部品搬送装置を提供することを目的とする。 The present invention has been proposed to solve the above-described problems, and provides a carrier tape traveling device that can be used as both a taping device and a detaper device, and an electronic component conveying device including the carrier tape traveling device. The purpose is to do.
　上記課題を解決すべく、本発明に係るキャリアテープ走行装置は、電子部品を収納するためのポケットを等間隔で形成したキャリアテープを長手方向に走行させるキャリアテープ走行装置であって、前記キャリアテープを引っ掛けて走行させるスプロケットと、正転及び逆転し、前記スプロケットを回転させるモータと、前記キャリアテープに貼着するシールテープを巻回したリールと、前記キャリアテープの走行ラインに対して接触又は離反可能に移動し、前記リールから引き出された前記シールテープと前記キャリアテープを挟み込んで、前記キャリアテープに前記シールテープを貼着する一対のブロックと、前記キャリアテープの走行ラインに対して接近又は離反可能な抑えローラと、を備え、前記モータを正転させ、前記リールから前記シールテープを引き出し、前記抑えローラを前記キャリアテープの走行ラインに接近させ、前記一対のブロックを接近させることで、前記キャリアテープを前記シールテープで封止するテーピング装置となり、前記モータを逆転させ、前記リールへ前記シールテープを引き込み、前記一対のブロックを離反させ、前記抑えローラを前記キャリアテープの走行ラインから離反させることで、前記キャリアテープから前記シールテープを剥離するディテーパ装置となること、を特徴とする。 In order to solve the above problems, a carrier tape traveling device according to the present invention is a carrier tape traveling device that travels in the longitudinal direction a carrier tape in which pockets for storing electronic components are formed at equal intervals. A sprocket that is hooked to travel, a motor that rotates forward and reverse, and rotates the sprocket, a reel wound with a seal tape that is attached to the carrier tape, and a travel line of the carrier tape. A pair of blocks that move in a possible manner and sandwich the seal tape drawn out from the reel and the carrier tape and adhere the seal tape to the carrier tape, and approach or separate from the carrier tape travel line A holding roller that is capable of rotating the motor forward and rotating the reel. Pulling out the sealing tape, bringing the holding roller closer to the carrier tape travel line, and bringing the pair of blocks closer to each other results in a taping device that seals the carrier tape with the sealing tape, and reverses the motor. A detapering device for peeling the seal tape from the carrier tape by pulling the seal tape into the reel, separating the pair of blocks, and separating the holding roller from the carrier tape travel line; It is characterized by.
　前記スプロケットは、周面にピン状の突起を形成してなり、前記キャリアテープに形成されているスプロケット孔に突起を引っ掛けて回転し、前記突起は、ピン先がインボリュート形状を有しているようにしてもよい。 The sprocket is formed with pin-shaped protrusions on the peripheral surface, and rotates by hooking the protrusions into sprocket holes formed in the carrier tape, and the protrusions have an involute shape at the pin tip. It may be.
　前記スプロケットと前記モータとの間の伝動機構としてタイミングベルトを備えるようにしてもよい。 A timing belt may be provided as a transmission mechanism between the sprocket and the motor.
　前記リールと前記キャリアテープの走行ラインとの間に介在し、前記シールテープを前記キャリアテープの近傍に案内する抑えローラを備え、前記抑えローラは、前記キャリアテープに前記シールテープを貼着する際、前記キャリアテープの近傍に接近し、前記キャリアテープから前記シールテープを剥離する際、前記キャリアテープから離れ、剥離基点における前記キャリアテープと前記シールテープとの成す角を、前記貼着の際と比べて緩やかにするようにしてもよい。 A pressing roller is interposed between the reel and the carrier tape running line and guides the sealing tape to the vicinity of the carrier tape, and the pressing roller attaches the sealing tape to the carrier tape. When approaching the vicinity of the carrier tape and peeling the seal tape from the carrier tape, the carrier tape is separated from the carrier tape, and the angle formed by the carrier tape and the seal tape at the peeling base point You may make it loose compared with.
　前記ポケットの底面に形成された孔を通して、前記ポケット内に収容されている電子部品を吸引する吸引部を備え、
　前記吸引部は、前記キャリアテープの走行中、前記キャリアテープに前記電子部品を引き付けるようにしてもよい。 Through a hole formed in the bottom surface of the pocket, comprising a suction part that sucks the electronic component accommodated in the pocket,
The suction part may attract the electronic component to the carrier tape while the carrier tape is running.
　上記課題を解決すべく、本発明に係る電子部品搬送装置は、前記キャリアテープ走行装置を備え、電子部品を搬送経路に沿って搬送する電子部品搬送装置であって、前記搬送経路を形成する搬送テーブルと、前記搬送テーブルの周囲に配置され、電子部品の収容体を保持する収容体保持手段と、前記搬送テーブルの周囲に配置され、前記搬送経路内の電子部品を観察する観察手段と、前記搬送テーブルの周囲に配置される複数の前記キャリアテープ走行装置と、を備え、前記収容体保持手段と前記キャリアテープ走行装置を電子部品の供給手段又は電子部品の分類先となる分類手段とする分類モードと再分類モードを有し、前記分類モードでは、前記収容体保持手段は、前記供給手段であり、全ての前記キャリアテープ走行装置が前記テーピング装置となって前記分類手段であり、前記再分類モードでは、前記キャリアテープ走行装置のうちの一部が前記ディテーパ装置となって前記供給手段であり、前記キャリアテープ走行装置のうちの他が前記テーピング装置となって前記分類手段であること、を特徴とする。 In order to solve the above problems, an electronic component transport apparatus according to the present invention is an electronic component transport apparatus that includes the carrier tape travel device and transports an electronic component along a transport path, and transports the transport path. A table, a container holding unit that is arranged around the transfer table and holds a container of electronic components, an observation unit that is arranged around the transfer table and observes the electronic components in the transfer path, and A plurality of the carrier tape traveling devices arranged around the transport table, and the container holding unit and the carrier tape traveling device are classified as electronic component supply means or electronic component classification means Mode and reclassification mode, wherein in the classification mode, the container holding means is the supply means, and all the carrier tape running devices are In the reclassification mode, a part of the carrier tape travel device becomes the detaper device and serves as the supply means, and the other of the carrier tape travel devices The taping device is the classification means.
　前記再分類モードでは、前記ディテーパ装置となった前記キャリアテープ走行装置に加えて、前記収容体保持手段も前記分類手段であるようにしてもよい。 In the reclassification mode, in addition to the carrier tape travel device that has become the detaper device, the container holding means may also be the classification means.
　前記収容体保持手段は、電子部品をアレイ状に並べたウェハリングを保持するウェハリング保持部、又は平面を格子状に仕切って電子部品をアレイ状に並べたトレイを保持するトレイ保持部であるようにしてもよい。 The container holding means is a wafer ring holding unit that holds a wafer ring in which electronic components are arranged in an array, or a tray holding unit that holds a tray in which electronic parts are arranged in an array by partitioning a plane in a lattice shape. You may do it.
　本発明によれば、キャリアテープ走行装置はテーピング装置とディテーパ装置として兼用できるので、テーピング装置とディテーパ装置を別途用意する必要はなく、設備のコストを低減することができる。 According to the present invention, since the carrier tape traveling device can be used as both a taping device and a detaper device, it is not necessary to separately prepare the taping device and the detaper device, and the cost of the equipment can be reduced.
キャリアテープ走行装置のテーピング装置としての内部構造図である。It is an internal structure figure as a taping apparatus of a carrier tape travel device. キャリアテープ走行装置のディテーパ装置としての内部構造図である。It is an internal structure figure as a detaper device of a carrier tape travel device. キャリアテープ走行装置が備える吸引部の構造図であり、（ａ）は上面図、（ｂ）は側面図である。It is structural drawing of the suction part with which a carrier tape running device is provided, (a) is a top view and (b) is a side view. キャリアテープ走行装置を備える電子部品搬送装置の構成図である。It is a block diagram of an electronic component conveying apparatus provided with a carrier tape traveling apparatus. 電子部品搬送装置の電子部品搬送経路を示す模式図である。It is a schematic diagram which shows the electronic component conveyance path | route of an electronic component conveying apparatus.
　本発明の実施形態に係るキャリアテープ走行装置、及び該キャリアテープ走行装置を備える電子部品搬送装置について、図面を参照しつつ詳細に説明する。 DESCRIPTION OF EMBODIMENTS A carrier tape traveling device according to an embodiment of the present invention and an electronic component conveying device including the carrier tape traveling device will be described in detail with reference to the drawings.
　（キャリアテープ走行装置）
　（構成）
　図１に示すように、キャリアテープ走行装置１は、ポケット１０１に電子部品１０４を収容するためのキャリアテープ１００を長手方向に走行させる。このキャリアテープ走行装置１は、リール２００側へキャリアテープ１００を走行させてテーピング装置として機能するとともに、リール２００側からキャリアテープ１００を引き出すように逆走行させてディテーパ装置として機能する。 (Carrier tape travel device)
(Constitution)
As shown in FIG. 1, the carrier tape running device 1 runs a carrier tape 100 for housing an electronic component 104 in a pocket 101 in the longitudinal direction. The carrier tape traveling device 1 functions as a taping device by traveling the carrier tape 100 to the reel 200 side, and functions as a detaper device by traveling backward so as to pull out the carrier tape 100 from the reel 200 side.
　キャリアテープ走行装置１は、シールテープ１０２を巻回するシールテープリール３と、封止部２とを備えており、テーピング装置として、リール２００側へキャリアテープ１００を走行させながら、シールテープリール３からシールテープ１０２を引き出し、シールテープ１０２をキャリアテープ１００に貼着する。また、キャリアテープ走行装置１は、ディテーパ装置として、封止部２をキャリアテープ１００の走行ラインから退避させて、リール２００側からキャリアテープ１００を引き出すように逆走行させながら、シールテープリール３にシールテープ１０２を巻き取らせ、シールテープ１０２をキャリアテープ１００から剥離する。 The carrier tape travel device 1 includes a seal tape reel 3 around which the seal tape 102 is wound, and a sealing portion 2. As the taping device, the carrier tape 100 travels toward the reel 200 while the seal tape reel 3 Then, the seal tape 102 is pulled out and the seal tape 102 is attached to the carrier tape 100. Further, the carrier tape running device 1 is a detapering device that retracts the sealing portion 2 from the running line of the carrier tape 100 and moves the seal tape reel 3 to the seal tape reel 3 while running backward to pull out the carrier tape 100 from the reel 200 side. The seal tape 102 is wound up, and the seal tape 102 is peeled off from the carrier tape 100.
　このキャリアテープ走行装置１は、２機のスプロケット４１、４２を備える。２機のスプロケット４１、４２は、周面に沿って突起４３が突設される同径の円盤である。スプロケット４１、４２は、それぞれ対応のモータ５１、５２の出力軸とタイミングベルト５１ａ、５２ａを介して接続され、同一周方向、同一回転量及び同一タイミングで間欠回転する。 This carrier tape traveling device 1 includes two sprockets 41 and 42. The two sprockets 41 and 42 are disks having the same diameter and having protrusions 43 protruding along the circumferential surface. The sprockets 41 and 42 are connected to the output shafts of the corresponding motors 51 and 52 through timing belts 51a and 52a, respectively, and rotate intermittently at the same circumferential direction, the same rotation amount, and the same timing.
　両スプロケット４１、４２には、キャリアテープ１００が掛け渡される。キャリアテープ１００には、帯片側に長手方向に沿って等間隔でスプロケット孔が開口している。両スプロケット４１、４２の突起４３は、このスプロケット孔に噛合する。スプロケット４１、４２は、突起４３をスプロケット孔に引っ掛けて回転し、キャリアテープ１００を長手方向に走行させる。この突起４３は、丸型形状を有し、インボリュート形状に加工されている。突起４３の直径は、キャリアテープ１００のスプロケット孔よりもやや小さい。 The carrier tape 100 is stretched over both the sprockets 41 and 42. In the carrier tape 100, sprocket holes are opened at equal intervals along the longitudinal direction on the strip side. The protrusions 43 of both the sprockets 41 and 42 mesh with the sprocket holes. The sprockets 41 and 42 rotate by hooking the protrusions 43 into the sprocket holes, and cause the carrier tape 100 to run in the longitudinal direction. The protrusion 43 has a round shape and is processed into an involute shape. The diameter of the protrusion 43 is slightly smaller than the sprocket hole of the carrier tape 100.
　両スプロケット４１、４２は、同一鉛直面上に並び、回転軸が平行且つ同一高さである。そのため、キャリアテープ１００は、延び方向を水平に保ったまま、リール２００側又はリール２００から離れる方向に走行する。 Both the sprockets 41 and 42 are arranged on the same vertical plane, the rotation axes are parallel and have the same height. Therefore, the carrier tape 100 runs in the direction away from the reel 200 or in the direction away from the reel 200 while keeping the extending direction horizontal.
　モータ５１、５２の回転ピッチは、ポケット１０１の配置間隔に対応する。キャリアテープ１００は、エンボス加工されたポケット１０１を長手方向に等間隔に有する。つまり、モータ５１、５２は、ポケット１００を共通の停止位置で停止させる。共通の停止位置のうちの一箇所は、電子部品１０４の授受位置６に設定されている。 The rotation pitch of the motors 51 and 52 corresponds to the arrangement interval of the pockets 101. The carrier tape 100 has embossed pockets 101 at equal intervals in the longitudinal direction. That is, the motors 51 and 52 stop the pocket 100 at a common stop position. One of the common stop positions is set at the transfer position 6 of the electronic component 104.
　授受位置６の直上には、吸着ノズル等の保持手段３１１が昇降可能に存在する。キャリアテープ走行装置１は、ポケット１０１を授受位置６に順次合致させることで、テーピング装置として、保持手段３１１が離脱させる電子部品１０４をキャリアテープ１００に収容させ、又は、ディテーパとして、ポケット１０１内の電子部品１０４を保持手段３１１に取り出させる。 A holding means 311 such as a suction nozzle can be moved up and down just above the delivery position 6. The carrier tape traveling device 1 causes the electronic tape 104 to be detached by the holding means 311 to be accommodated in the carrier tape 100 as a taping device by sequentially matching the pocket 101 to the delivery position 6 or as a detaper in the pocket 101. The electronic component 104 is taken out by the holding means 311.
　このモータ５１、５２は、テーピング装置として正転し、ディテーパ装置として逆転する。このモータ５１、５２は、例えば、Ｈブリッジ回路を有するサーボモータである。モータ５１、５２は、回転方向、回転量及び回転タイミングを制御するモータドライバ７により、テーピングかディテープかに応じて制御される。モータドライバ７は、キャリアテープ走行装置１に備えられてもよいし、保持手段３１１等を統合制御する制御装置側に備えられていてもよい。 The motors 51 and 52 rotate forward as a taping device and reverse as a detaper device. The motors 51 and 52 are, for example, servo motors having an H bridge circuit. The motors 51 and 52 are controlled according to whether they are taping or detaping by a motor driver 7 that controls the rotation direction, rotation amount, and rotation timing. The motor driver 7 may be provided in the carrier tape traveling device 1 or may be provided on the control device side that integrally controls the holding means 311 and the like.
　封止部２は、図１に示すように、ヒーターブロック２１とベースブロック２２を備える。ヒーターブロック２１とベースブロック２２は、キャリアテープ１００の走行ラインを挟んで対向配置される。ヒーターブロック２１は、キャリアテープ１００の走行ラインの上からキャリアテープ１００を押さえ、ベースブロック２２は、キャリアテープ１００の走行ラインの下からキャリアテープ１００を押さえる。図１及び図２に示すように、ヒーターブロック２１は、キャリアテープ１００の走行ラインに対して接触又は離反可能に移動する。 The sealing unit 2 includes a heater block 21 and a base block 22 as shown in FIG. The heater block 21 and the base block 22 are arranged to face each other across the travel line of the carrier tape 100. The heater block 21 presses the carrier tape 100 from above the travel line of the carrier tape 100, and the base block 22 presses the carrier tape 100 from below the travel line of the carrier tape 100. As shown in FIGS. 1 and 2, the heater block 21 moves so as to be able to contact or leave the traveling line of the carrier tape 100.
　この封止部２には、シールテープ１０２がキャリアテープ１００と重ねて供給される。ヒーターブロック２１とベースブロック２２は、挟み込みにより、シールテープ１０２とキャリアテープ１００を圧接し、ヒーターブロック２１は、更にシールテープ１０２とキャリアテープ１００の圧接面に熱を供給する。 The sealing tape 102 is supplied to the sealing portion 2 so as to overlap the carrier tape 100. The heater block 21 and the base block 22 are pressed to bring the seal tape 102 and the carrier tape 100 into pressure contact, and the heater block 21 further supplies heat to the pressure contact surfaces of the seal tape 102 and the carrier tape 100.
　シールテープリール３は、テーピング装置として、シールテープ１０２をキャリアテープ１００に向けて引き出し、ディテーパ装置として、シールテープ１０２をキャリアテープ１００から離れる方向に巻き取る。このシールテープリール３は、キャリアテープ１００の走行ラインよりも上方に位置し、モータ３１と抑えローラ３２を備えている。 The seal tape reel 3 pulls out the seal tape 102 toward the carrier tape 100 as a taping device, and winds the seal tape 102 away from the carrier tape 100 as a detaper device. The seal tape reel 3 is positioned above the travel line of the carrier tape 100 and includes a motor 31 and a pressing roller 32.
　モータ３１は、タイミングベルトを介してシールテープリール３を回転させる。シールテープリール３は、正転及び逆転が可能であり、例えばＨブリッジ回路を有するサーボモータである。抑えローラ３２は、キャリアテープ１００の走行ライン近傍に位置し、シールテープ１０２をキャリアテープ１００へ案内する。 The motor 31 rotates the seal tape reel 3 via the timing belt. The seal tape reel 3 is capable of normal rotation and reverse rotation, and is, for example, a servo motor having an H bridge circuit. The holding roller 32 is positioned near the running line of the carrier tape 100 and guides the seal tape 102 to the carrier tape 100.
　図１及び図２に示すように、抑えローラ３２は、キャリアテープ１００の走行ラインに対して、接近又は離反可能に移動する。キャリアテープ走行装置１がテーピング装置として機能する際は、図１に示すように、キャリアテープ１００の走行ラインに近づき、シールテープ１０２をキャリアテープ１００に対して押さえつける。キャリアテープ走行装置１がディテーパとして機能する際は、図２に示すように、キャリアテープ１００の走行ラインから離れる。抑えローラ３２がキャリアテープ１００の走行ラインから離れることにより、キャリアテープ１００とシールテープ１０２との剥離基点９における、キャリアテープ１００とシールテープ１０２との成す角度θが緩やかになる。 As shown in FIGS. 1 and 2, the restraining roller 32 moves so as to be able to approach or leave the traveling line of the carrier tape 100. When the carrier tape traveling device 1 functions as a taping device, as shown in FIG. 1, the carrier tape traveling device 1 approaches the traveling line of the carrier tape 100 and presses the seal tape 102 against the carrier tape 100. When the carrier tape travel device 1 functions as a detaper, the carrier tape travels away from the travel line of the carrier tape 100 as shown in FIG. When the holding roller 32 moves away from the travel line of the carrier tape 100, the angle θ between the carrier tape 100 and the seal tape 102 at the separation base point 9 between the carrier tape 100 and the seal tape 102 becomes gentle.
　また、図１に示すように、このキャリアテープ１００を両方向に走行させるキャリアテープ走行装置１は、キャリアテープ１００の走行ライン下方に吸引部８を備えている。キャリアテープ１００は、各ポケット１０１の底面に孔部を有する。吸引部８は、この孔部を通じてポケット１０１内部の電子部品１０４を吸引し、ポケット１０１の底面に貼り付ける。 As shown in FIG. 1, the carrier tape traveling device 1 that travels the carrier tape 100 in both directions includes a suction portion 8 below the traveling line of the carrier tape 100. The carrier tape 100 has a hole on the bottom surface of each pocket 101. The suction unit 8 sucks the electronic component 104 inside the pocket 101 through the hole and attaches it to the bottom surface of the pocket 101.
　図３に示すように、この吸引部８は、キャリアテープ１００の走行ライン側に吸引溝８２が開設された容器８１を有し、容器８１の底には複数の吸引孔８３が穿設されている。吸引溝８２は、キャリアテープ１００の走行ライン直下に走行ラインに沿って開設されている。吸引溝８２の溝幅は、キャリアテープ１００のポケット１０１に開けられた孔部の直径以上、キャリアテープ１００の帯幅未満である。吸引孔８３は、真空ポンプ等の負圧発生装置の空気圧回路と連通している。 As shown in FIG. 3, the suction unit 8 has a container 81 having a suction groove 82 formed on the traveling line side of the carrier tape 100, and a plurality of suction holes 83 are formed in the bottom of the container 81. Yes. The suction groove 82 is opened along the traveling line immediately below the traveling line of the carrier tape 100. The groove width of the suction groove 82 is not less than the diameter of the hole formed in the pocket 101 of the carrier tape 100 and less than the band width of the carrier tape 100. The suction hole 83 communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump.
　この吸引部８は、吸引孔８３を通じて容器８１内が減圧され、吸引溝８２とキャリアテープ１００のポケット１０１に形成された孔部を通してポケット１０１内の電子部品１０４をポケット１０１の底面に貼り付けている。 The inside of the container 81 is decompressed through the suction hole 83, and the electronic part 104 in the pocket 101 is attached to the bottom surface of the pocket 101 through the hole formed in the suction groove 82 and the pocket 101 of the carrier tape 100. Yes.
　（動作）
　このキャリアテープ走行装置１のテーピング動作は次の通りである。キャリアテープ走行装置１は、モータ５１、５２の正転によりタイミングベルト５１ａ、５２ａを走行させ、スプロケット４１、４２を正転させる。スプロケット４１、４２は、突起４３をスプロケット孔に引っ掛けて、キャリアテープ１００をリール２００側へ走行させる。 (Operation)
The taping operation of the carrier tape traveling device 1 is as follows. The carrier tape traveling device 1 causes the timing belts 51a and 52a to travel by the forward rotation of the motors 51 and 52, and causes the sprockets 41 and 42 to rotate forward. The sprockets 41 and 42 hook the protrusions 43 on the sprocket holes and cause the carrier tape 100 to travel to the reel 200 side.
　キャリアテープ走行装置１は、モータ５１、５２を間欠的に回転させることにより、キャリアテープ１００を間欠的にリール２００側へ送り、空のポケット１０１を順番に授受位置６へ位置させる。各保持手段３１１は、一つずつ電子部品１０４を保持して順番に授受位置６に停止し、授受位置６に存在する空のポケット１０１に電子部品１０４を収容していく。 The carrier tape traveling device 1 intermittently rotates the motors 51 and 52 to intermittently feed the carrier tape 100 to the reel 200 side, thereby positioning the empty pockets 101 to the delivery position 6 in order. Each holding means 311 holds the electronic components 104 one by one and stops at the transfer position 6 in order, and accommodates the electronic components 104 in the empty pocket 101 existing at the transfer position 6.
　シールテープリール３は、モータ３１の正転によりシールテープ１０２をキャリアテープ１００側へ引き出していく。抑えローラ３２は、シールテープリール３から引き出されたシールテープ１０２をキャリアテープ１００の表面へ案内し、シールテープ１０２をキャリアテープ１００のポケット１０１が開口する面に重ね合わせていく。 The seal tape reel 3 draws the seal tape 102 toward the carrier tape 100 by the normal rotation of the motor 31. The restraining roller 32 guides the seal tape 102 drawn from the seal tape reel 3 to the surface of the carrier tape 100 and superimposes the seal tape 102 on the surface of the carrier tape 100 where the pocket 101 opens.
　封止部２は、予め、ヒーターブロック２１をキャリアテープ１００の走行ラインに接触させておく。封止部２には、シールテープ１０２とキャリアテープ１００が重ね合わされて共有される。封止部２は、ヒーターブロック２１とベースブロック２２でキャリアテープ１００とシールテープ１０２を挟み込み、加圧と加熱によってシールテープ１０２をキャリアテープ１００に貼着する。これにより、ポケット１０１内の電子部品１０４は、シールテープ１０２とポケット１０４の内壁とによって封止される。 The sealing unit 2 has the heater block 21 in contact with the travel line of the carrier tape 100 in advance. In the sealing part 2, the seal tape 102 and the carrier tape 100 are overlapped and shared. The sealing unit 2 sandwiches the carrier tape 100 and the seal tape 102 between the heater block 21 and the base block 22 and adheres the seal tape 102 to the carrier tape 100 by pressurization and heating. Thereby, the electronic component 104 in the pocket 101 is sealed by the seal tape 102 and the inner wall of the pocket 104.
　キャリアテープ１００は、シールテープ１０２によって封止された後、更なる間欠的な走行によりリール２００に案内され、リール２００に巻き取られる。 After the carrier tape 100 is sealed with the seal tape 102, the carrier tape 100 is guided to the reel 200 by further intermittent running and wound around the reel 200.
　キャリアテープ走行装置１のディテープ動作は次の通りである。キャリアテープ走行装置１は、モータ５１、５２の間欠的な逆転によりタイミングベルト５１ａ、５２ａを走行させ、スプロケット４１、４２を逆転させる。スプロケット４１、４２は、突起４３をスプロケット孔に引っ掛けて、キャリアテープ１００をリール２００から間欠的に引き出していく。 The detaping operation of the carrier tape traveling device 1 is as follows. The carrier tape traveling device 1 causes the timing belts 51a and 52a to travel by intermittent reverse rotation of the motors 51 and 52, and reversely rotates the sprockets 41 and 42. The sprockets 41 and 42 hook the protrusions 43 into the sprocket holes and intermittently pull out the carrier tape 100 from the reel 200.
　ここで、突起４３は、丸型でインボリュート形状となっている。インボリュート形状は、一般に、歯車の歯同士を一定角度及び一定面積で接触させ、また適切な遊びを形成することで、歯車の回転を容易化するものである。このインボリュート形状を突起４３に適用すると、キャリアテープ１００の走行に伴う振動が抑制され、走行の安定性が増している。 Here, the protrusion 43 has a round shape and an involute shape. The involute shape facilitates the rotation of the gear by generally bringing the gear teeth into contact with each other at a constant angle and a constant area and forming an appropriate play. When this involute shape is applied to the protrusions 43, vibrations associated with traveling of the carrier tape 100 are suppressed, and traveling stability is increased.
　また、モータ５１、５２とスプロケット４１、４２との間の伝動機構を、ディテーパ装置に一般的なラチェットホイールからタイミングベルト５１ａ、５２ａとすることにより、キャリアテープ１００の走行に伴う振動が抑制され、走行の安定性が増している。 Further, the transmission mechanism between the motors 51 and 52 and the sprockets 41 and 42 is changed from a ratchet wheel generally used in a detaper device to timing belts 51a and 52a, thereby suppressing vibration associated with the travel of the carrier tape 100, Driving stability has increased.
　一方、シールテープリール３は、キャリアテープ１００の逆走行と同一速度、同一量、同一タイミングでシールテープ１０２を巻き取っていく。キャリアテープ１００は水平に逆走行し、シールテープ１０２は、キャリアテープ１００の走行ラインよりも上方に引き上げられていく。このため、キャリアテープ１００とシールテープ１０２とは、異なる方向に二股に分かれ、シールテープ１０２は、キャリアテープ１００から剥離していく。 On the other hand, the seal tape reel 3 winds the seal tape 102 at the same speed, the same amount, and the same timing as the reverse running of the carrier tape 100. The carrier tape 100 runs backward in the horizontal direction, and the seal tape 102 is pulled up above the running line of the carrier tape 100. For this reason, the carrier tape 100 and the seal tape 102 are bifurcated in different directions, and the seal tape 102 is peeled off from the carrier tape 100.
　このとき、封止部２は、ディテープ動作中、ヒーターブロック２１を上方に退避させ、リール２００に近い場所から、キャリアテープ１００とシールテープ１０２が二股に分かれる余地を作る。また、シールテープリール３は、ディテープ動作中、抑えローラ３２を上方に移動させておく。これにより、キャリアテープ１００とシールテープ１０２は、緩やかな角度θで剥離していく。 At this time, during the detaping operation, the sealing unit 2 retracts the heater block 21 upward to make room for the carrier tape 100 and the sealing tape 102 to be divided into two forks from a location close to the reel 200. Further, the seal tape reel 3 keeps the holding roller 32 moved upward during the detaping operation. As a result, the carrier tape 100 and the seal tape 102 are peeled at a gentle angle θ.
　ポケット１０１が開口する領域では、キャリアテープ１００とシールテープ１０２との密着面積が小さいため、この領域で剥離に必要な力は小さく、剥離に一定の力をかけていると、この領域で一気に剥離が進む。また、ポケット１０１が開口する領域を過ぎると剥離に相対的に大きな力が必要となり、逆に剥離の進行が低下する。このため、キャリアテープ１００には、ディテープ動作中、大きな振動が生じる虞がある。 In the area where the pocket 101 is open, the contact area between the carrier tape 100 and the seal tape 102 is small, so the force required for peeling is small in this area. If a certain force is applied to the peeling, peeling will occur in this area at once. Advances. Moreover, when the area where the pocket 101 is opened is passed, a relatively large force is required for peeling, and conversely, the progress of peeling decreases. For this reason, the carrier tape 100 may be vibrated greatly during the detaping operation.
　しかし、このキャリアテープ走行装置１では、キャリアテープ１００とシールテープ１０２は緩やかな角度θで剥離するので、ポケット１０１が開口する領域での剥離の進行が緩み、ディテープ動作時のキャリアテープ１００の振動が弱くなり、キャリアテープ１００の逆走行が安定化する。 However, in this carrier tape traveling device 1, since the carrier tape 100 and the seal tape 102 are peeled at a gentle angle θ, the progress of peeling in the region where the pocket 101 opens is loosened, and the carrier tape 100 vibrates during the detaping operation. Becomes weaker and the reverse running of the carrier tape 100 is stabilized.
　また、キャリアテープ走行装置１は、ディテープ動作中、吸引部８を駆動させる。吸引部８は、吸引孔８３を通して容器８１を減圧し、吸引溝８２とポケット１０１の孔を通して、ポケット１０１内の電子部品１０４を吸引している。そのため、キャリアテープ１００の間欠的な逆走行中、電子部品１０４がキャリアテープ１００に引き付けられて一体的になり、電子部品１０４のポケット１０１内での揺動が抑制され、キャリアテープ１００の走行が安定化する。また、吸引部８がキャリアテープ１００を引き付ける作用を生じ、シールテープ１０２を剥離する際にキャリアテープ１００に発生する振動も緩和される。 Further, the carrier tape traveling device 1 drives the suction unit 8 during the detaping operation. The suction unit 8 decompresses the container 81 through the suction hole 83, and sucks the electronic component 104 in the pocket 101 through the suction groove 82 and the hole of the pocket 101. Therefore, during the intermittent reverse running of the carrier tape 100, the electronic component 104 is attracted to and integrated with the carrier tape 100, and the swing of the electronic component 104 within the pocket 101 is suppressed, so that the carrier tape 100 runs. Stabilize. In addition, the suction portion 8 has an action of attracting the carrier tape 100, and vibrations generated in the carrier tape 100 when the seal tape 102 is peeled off are alleviated.
　そして、シールテープ１０２のキャリアテープ１００からの剥離によって露出したポケット１０１は、モータ５１、５２の間欠的に逆転により、順番に授受位置６に位置する。空の各保持手段３１１は、順番に授受位置６に停止し、授受位置６に存在する電子部品１０４を取り出していく。 Then, the pockets 101 exposed by the peeling of the seal tape 102 from the carrier tape 100 are sequentially positioned at the transfer position 6 due to intermittent reverse rotation of the motors 51 and 52. Each empty holding means 311 sequentially stops at the transfer position 6 and takes out the electronic component 104 existing at the transfer position 6.
　（電子部品搬送装置）
　（構成）
　このキャリアテープ走行装置１を備える電子部品搬送装置について図面を参照しつつ詳細に説明する。図４に示すように、電子部品搬送装置３００は、電子部品１０４の搬送経路３０１を配設し、搬送経路３０１に沿って電子部品１０４を複数同時に整列搬送する。また、電子部品搬送装置３００は、搬送経路３０１に沿って、ウェハリングホルダ３２０、複数の観測装置３４０及び複数のテーピング走行装置１を並設している。ウェハリングホルダ３２０と搬送経路３０１との間には、ピックアップ装置３３０が介在している。 (Electronic component conveyor)
(Constitution)
An electronic component transport device including the carrier tape traveling device 1 will be described in detail with reference to the drawings. As shown in FIG. 4, the electronic component transport apparatus 300 includes a transport path 301 for electronic components 104, and aligns and transports a plurality of electronic components 104 along the transport path 301. In addition, the electronic component transport apparatus 300 includes a wafer ring holder 320, a plurality of observation apparatuses 340, and a plurality of taping travel apparatuses 1 arranged in parallel along the transport path 301. A pickup device 330 is interposed between the wafer ring holder 320 and the transfer path 301.
　搬送経路３０１は、搬送テーブル３１０により形成される。搬送テーブル３１０は、一点を中心にして放射状に拡がる円盤又は星形等の形状を有し、周方向に間欠的に所定角度ずつ回転する。搬送テーブル３１０の外周には、保持手段３１１が取り付けられている。保持手段３１１は、その軸線方向に沿って昇降可能となっている。この保持手段３１１は、搬送テーブル３１０の外周に沿って円周等配位置で、且つ搬送テーブル３１０の中心から同一距離に複数取り付けられる。 The conveyance path 301 is formed by a conveyance table 310. The transfer table 310 has a shape such as a disk or a star that radially expands around one point, and rotates intermittently by a predetermined angle in the circumferential direction. A holding means 311 is attached to the outer periphery of the transfer table 310. The holding means 311 can be moved up and down along the axial direction. A plurality of holding means 311 are attached at equal circumferential positions along the outer periphery of the transfer table 310 and at the same distance from the center of the transfer table 310.
　保持手段３１１は、例えば吸着ノズルである。吸着ノズルは、内部が中空で一端が開口し、搬送テーブル３１０から下方へ延び、開口端を下方に向けている。吸着ノズルの内部は真空ポンプやエジェクタ等の負圧発生装置の空気圧回路と連通している。空気圧回路を通じて吸着ノズルの内部に負圧を発生させることにより、開口端で電子部品１０４を吸引保持し、真空破壊や大気解放によって吸引を解除して、電子部品１０４を解放する。 The holding means 311 is, for example, a suction nozzle. The suction nozzle is hollow and has one end opened, extends downward from the transfer table 310, and faces the open end downward. The inside of the suction nozzle communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump or an ejector. By generating a negative pressure inside the suction nozzle through the pneumatic circuit, the electronic component 104 is sucked and held at the open end, and the suction is released by vacuum break or atmospheric release, and the electronic component 104 is released.
　搬送テーブル３１０の動力源はダイレクトドライブモータ３１２である。ダイレクトドライブモータ３１２は、１ピッチずつ間欠回転する。ダイレクトドライブモータ３１２の回転ピッチに対する搬送テーブル３１０の回転距離は、保持手段３１１の配置間隔に等しい。すなわち、保持手段３１１は、搬送テーブル３１０の間欠回転に伴って共通の移動軌跡を辿り、共通の停止位置で停止する。この停止位置に、ウェハリングホルダ３２０、観測装置３４０及びテーピング走行装置１が設置される。 The power source of the transfer table 310 is a direct drive motor 312. The direct drive motor 312 rotates intermittently by one pitch. The rotation distance of the conveyance table 310 with respect to the rotation pitch of the direct drive motor 312 is equal to the arrangement interval of the holding means 311. That is, the holding unit 311 follows a common movement locus with the intermittent rotation of the transport table 310 and stops at a common stop position. At this stop position, the wafer ring holder 320, the observation device 340, and the taping travel device 1 are installed.
　ウェハリングホルダ３２０は、ウェハリング１０３を保持し、該ウェハリング１０３を面と平行に移動させる。ウェハリング１０３は、ウェハシートが張り付けられたリングであり、ウェハシートは、電子部品１０４が個片にダイシングされたウェハが貼り付けられたシートである。リングホルダ３２０は、電子部品１０４の貼着面を搬送テーブル３１０の外縁に向けてウェハリング１０３を縦置きする。このウェハリングホルダ３２０は、ウェハリング１０３を裏側からピックアップ装置３３０へ向けて突き出す突き出しピン３２１を備えている。 The wafer ring holder 320 holds the wafer ring 103 and moves the wafer ring 103 parallel to the surface. The wafer ring 103 is a ring to which a wafer sheet is attached, and the wafer sheet is a sheet to which a wafer obtained by dicing the electronic component 104 into individual pieces is attached. The ring holder 320 places the wafer ring 103 vertically with the attachment surface of the electronic component 104 facing the outer edge of the transfer table 310. The wafer ring holder 320 includes a protrusion pin 321 that protrudes the wafer ring 103 from the back side toward the pickup device 330.
　ピックアップ装置３３０は、ウェハリング１０３から電子部品１０４をピックアップして搬送経路３０１に供給する。このピックアップ装置３３０は、１点から同一平面上を放射状に延びるアーム３３１を有する。アーム３３１の放射面は、保持手段３１１の移動面とウェハリングが拡がる鉛直面に直交する。アーム３３１先端には吸着ノズルが付設される。吸着ノズルは、軸をアーム３３１に沿わせて延設され、電子部品１０４を吸着する開口端を放射方向外方に向ける。このピックアップ装置３３０は、搬送テーブル３１０の下方に潜り込み、ピックアップ装置３３０の頂点と搬送経路３０１とが重なる位置に設置され、真横でウェハリング１０３と向かい合う。 The pickup device 330 picks up the electronic component 104 from the wafer ring 103 and supplies it to the conveyance path 301. The pickup device 330 has arms 331 that extend radially from one point on the same plane. The radiation surface of the arm 331 is orthogonal to the moving surface of the holding means 311 and the vertical surface where the wafer ring expands. A suction nozzle is attached to the tip of the arm 331. The suction nozzle extends along the axis of the arm 331 and directs the opening end that sucks the electronic component 104 outward in the radial direction. The pickup device 330 enters under the transfer table 310, is installed at a position where the apex of the pickup device 330 and the transfer path 301 overlap, and faces the wafer ring 103 directly beside.
　ピックアップ装置３３０は、アーム３３１を放射中心で間欠回転させる。ウェハリングホルダ３２０は、突き上げピン３２１で電子部品１０４を裏側から突き上げ、ウェハリング１０３と向き合うアーム３３１に電子部品１０４を渡す。電子部品１０４を受け取ったピックアップ装置３３０のアーム３３１は、搬送テーブル３１０の保持手段３１１とピックアップ装置３３０の頂点で向き合い、この搬送テーブル３１０に電子部品１０４を渡す。 The pickup device 330 rotates the arm 331 intermittently about the radiation center. Wafer ring holder 320 pushes up electronic component 104 from the back side with push-up pins 321, and passes electronic component 104 to arm 331 facing wafer ring 103. The arm 331 of the pickup device 330 that has received the electronic component 104 faces the holding means 311 of the transfer table 310 at the apex of the pickup device 330, and passes the electronic component 104 to the transfer table 310.
　観測装置３４０は、電子部品１０４の外観や電気特性を観察し、又はこの観察のために電子部品１０４の位置補正等を補助する。すなわち、観測装置３４０は、ＣＣＤやＣＭＯＳ等の撮像素子とレンズを有するカメラ、電子部品１０４の端子と接触して電流注入や電圧印加するコンタクトを有する電気特性測定装置、又は電子部品１０４を載置して、回転及び平面移動することで、電子部品１０４の向きと位置を変更する位置補正装置である。 The observation device 340 observes the appearance and electrical characteristics of the electronic component 104, or assists the position correction of the electronic component 104 for this observation. That is, the observation apparatus 340 mounts a camera having an imaging element such as a CCD or CMOS and a lens, an electrical characteristic measuring apparatus having a contact for injecting current or applying a voltage in contact with a terminal of the electronic component 104, or the electronic component 104. Thus, the position correction device changes the orientation and position of the electronic component 104 by rotating and moving in a plane.
　（動作）
　図５は、この電子部品搬送装置３００の電子部品１０４を搬送する第１の態様である。図５に示すように、この電子部品搬送装置３００は、一機のウェハリングホルダ３２０と２機のキャリアテープ走行装置１を搬送経路３０１に沿って備える。キャリアテープ走行装置１は、良品ランク用と其れ以外用となっている。ウェハリングホルダ３２０には、検査対象のウェハリング１０３が保持されている。 (Operation)
FIG. 5 shows a first mode in which the electronic component 104 of the electronic component transport apparatus 300 is transported. As shown in FIG. 5, the electronic component conveying apparatus 300 includes one wafer ring holder 320 and two carrier tape traveling apparatuses 1 along the conveying path 301. The carrier tape traveling device 1 is used for non-defective product ranks and for others. The wafer ring holder 320 holds the wafer ring 103 to be inspected.
　ウェハリングホルダ３２０は、ウェハリング１０３を平行移動させて、各電子部品１０４をピックアップ位置へ順次移動させ、突き上げピン３２１でピックアップ装置３３０へ向けて突き上げる。ピックアップ装置３３０は、アーム３３１でピックアップ位置の電子部品１０４をピックアップし、搬送テーブル３１０の保持手段３１１に引き渡す。ウェハリングホルダ３２０とピックアップ装置３３０は、電子部品１０４のピックアップ位置への移動と、ピックアップ位置の電子部品１０４のピックアップ及び保持手段３１１への引渡しを繰り返す。 The wafer ring holder 320 moves the wafer ring 103 in parallel, sequentially moves each electronic component 104 to the pickup position, and pushes it up toward the pickup device 330 with the push-up pins 321. The pickup device 330 picks up the electronic component 104 at the pickup position with the arm 331 and delivers it to the holding means 311 of the transfer table 310. The wafer ring holder 320 and the pickup device 330 repeat the movement of the electronic component 104 to the pickup position and the pick-up of the electronic component 104 at the pickup position and delivery to the holding means 311.
　搬送テーブル３１０は、ダイレクトドライブモータ３１２により間欠回転し、保持手段３１１は、電子部品１０４を保持しつつ、搬送経路３０１上を移動する。保持手段３１１が各観測装置３４０を通過する際、各観測装置３４０は、電子部品１０４の観測処理を行う。例えば、観測装置３４０として、位置補正装置、カメラ及び電気特性測定装置が設置されている場合、電子部品は、位置補正装置で検査に備えて位置補正され、カメラ及び電気特性測定装置で外観検査及び電気特性測定検査される。電子部品１０４は、外観検査と電気特性測定検査の結果に応じて、良品と良品以外にランク分けされる。 The conveyance table 310 is intermittently rotated by the direct drive motor 312, and the holding unit 311 moves on the conveyance path 301 while holding the electronic component 104. When the holding unit 311 passes through each observation device 340, each observation device 340 performs observation processing of the electronic component 104. For example, when a position correction device, a camera, and an electrical property measurement device are installed as the observation device 340, the electronic components are position-corrected in preparation for the inspection by the position correction device, and the appearance inspection and the electronic device are performed by the camera and the electrical property measurement device. Electrical property measurement is inspected. The electronic component 104 is classified into a non-defective product and a non-defective product according to the results of the appearance inspection and the electrical characteristic measurement inspection.
　搬送テーブル３１０がダイレクトドライブモータ３１２により更に間欠回転し、良品とランク分けされた電子部品１０４が良品用のキャリアテープ走行装置１に到達すると、その電子部品１０４を保持している保持手段３１１は、電子部品１０４を離脱させる。 When the transfer table 310 is further intermittently rotated by the direct drive motor 312 and the electronic component 104 ranked as a non-defective product reaches the non-defective carrier tape travel device 1, the holding means 311 holding the electronic component 104 is: The electronic component 104 is removed.
　良品用のキャリアテープ走行装置１には、封止部２が取り付けられてテーピング装置として機能している。この良品用のキャリアテープ走行装置１は、キャリアテープ１００をリール２００の方向に走行させながら、キャリアテープ１００のポケット１０１に電子部品１０４を収納し、シールテープ１０２で封止する。リール２００は、シールテープ１０２で封止されたキャリアテープ１００を巻き取っていく。 A non-defective carrier tape travel device 1 is provided with a sealing portion 2 and functions as a taping device. The good carrier tape traveling device 1 stores the electronic component 104 in the pocket 101 of the carrier tape 100 and seals it with the seal tape 102 while the carrier tape 100 travels in the direction of the reel 200. The reel 200 winds up the carrier tape 100 sealed with the seal tape 102.
　良品以外のランクに分類された電子部品１０４が良品以外用のキャリアテープ走行装置１に到達すると、その電子部品１０４を保持している保持手段３１１は、電子部品１０４を離脱させる。 When the electronic component 104 classified into a rank other than a non-defective product reaches the carrier tape traveling device 1 for a non-defective product, the holding means 311 holding the electronic component 104 releases the electronic component 104.
　良品以外用のキャリアテープ走行装置１には、封止部２が取り付けられてテーピング装置として機能している。この良品用のキャリアテープ走行装置１は、キャリアテープ１００をリール２００の方向に走行させながら、授受位置６でキャリアテープ１００のポケット１０１に電子部品１０４を収納し、シールテープ１０２で封止する。リール２００は、シールテープ１０２で封止されたキャリアテープ１００を巻き取っていく。 The non-defective carrier tape travel device 1 is provided with a sealing portion 2 and functions as a taping device. The non-defective carrier tape traveling device 1 stores the electronic component 104 in the pocket 101 of the carrier tape 100 at the delivery position 6 while the carrier tape 100 travels in the direction of the reel 200 and seals it with the seal tape 102. The reel 200 winds up the carrier tape 100 sealed with the seal tape 102.
　ウェハリング１０３の各電子部品１０４を良品又は良品以外に分類し、キャリアテープ１００への梱包が完了すると、良品以外と分類された電子部品１０４は再検査される。再検査では、観測装置３４０で得られたデータを作業員がチェックして、良品以外と分類された電子部品１０４を良品と良品以外とに再判定し直す。 When each electronic component 104 of the wafer ring 103 is classified as a non-defective product or a non-defective product and the packaging on the carrier tape 100 is completed, the electronic component 104 classified as a non-defective product is re-inspected. In the re-inspection, the worker checks the data obtained by the observation device 340, and re-determines the electronic component 104 classified as non-defective and non-defective.
　再判定の後、良品以外用のキャリアテープ走行装置１は、封止部２が取り外されて、剥離部３がセットされることで、ディテーパとなる。そして、電子部品搬送装置３００は、再分類モードとなり、良品以外用のキャリアテープ走行装置１は、ディテーパとして、リール２００からキャリアテープ１００を巻き出し、シールテープ１０２をキャリアテープ１００から剥離しつつ、電子部品１０４を授受位置６に露出させていく。 After the re-determination, the carrier tape traveling device 1 for non-defective products is detapered by removing the sealing portion 2 and setting the peeling portion 3. Then, the electronic component transport apparatus 300 is in a reclassification mode, and the carrier tape traveling apparatus 1 for non-defective products unwinds the carrier tape 100 from the reel 200 as a detaper, and peels the seal tape 102 from the carrier tape 100. The electronic component 104 is exposed to the transfer position 6.
　保持手段３１１は、授受位置６の電子部品１０４を保持し、搬送テーブル３１０の間欠回転に伴って、搬送経路３０１上を移動していく。再分類モードにおいて、ウェハリングホルダ３２０は良品以外の電子部品を梱包し、ディテーパとなったキャリアテープ走行装置１とは異なるもう一方のキャリアテープ走行装置１は、引き続きテーピング装置として良品を梱包する。 The holding means 311 holds the electronic component 104 at the delivery position 6 and moves on the conveyance path 301 along with the intermittent rotation of the conveyance table 310. In the reclassification mode, the wafer ring holder 320 packages electronic components other than non-defective products, and the other carrier tape traveling device 1 different from the detapered carrier tape traveling device 1 continues to package non-defective products as a taping device.
　良品以外と再判定された電子部品１０４を保持した保持手段３１１がウェハリングホルダ３２０に到達すると、ウェハリングホルダ３２０の突き上げピン３２１はウェハリング１０３のシートを突き上げて電子部品１０４を迎えにいき、良品以外と再判定された電子部品１０４をシートに貼着させる。保持手段３１１は、大気破壊又は真空破壊により電子部品１０４の吸着を解放し、電子部品１０４をウェハリング１０３に引き渡す。 When the holding means 311 holding the electronic component 104 re-determined as a non-defective product reaches the wafer ring holder 320, the push-up pins 321 of the wafer ring holder 320 push up the sheet of the wafer ring 103 and pick up the electronic component 104, The electronic component 104 re-determined as a non-defective product is attached to the sheet. The holding means 311 releases the adsorption of the electronic component 104 by atmospheric destruction or vacuum destruction, and delivers the electronic component 104 to the wafer ring 103.
　良品と再判定された電子部品１０４を保持した保持手段３１１は、搬送テーブル３１０の間欠回転により封止部２が装着されたままの良品用のキャリアテープ走行装置１に到達し、大気破壊又は真空破壊により電子部品１０４の吸着を解放し、電子部品１０４を授受位置６のポケット１０１内に離脱させる。 The holding means 311 that holds the electronic component 104 that has been re-determined as a non-defective product reaches the non-defective carrier tape traveling device 1 with the sealing portion 2 mounted by intermittent rotation of the transfer table 310, and is thus subjected to atmospheric destruction or vacuum. The suction of the electronic component 104 is released by destruction, and the electronic component 104 is separated into the pocket 101 at the transfer position 6.
　良品用のキャリアテープ走行装置１は、授受位置６でキャリアテープ１００のポケット１０１に電子部品１０４を収納し、シールテープ１０２で封止する。リール２００は、シールテープ１０２で封止されたキャリアテープ１００を巻き取っていく。 The non-defective carrier tape traveling device 1 stores the electronic component 104 in the pocket 101 of the carrier tape 100 at the delivery position 6 and seals it with the seal tape 102. The reel 200 winds up the carrier tape 100 sealed with the seal tape 102.
　これにより、電子部品１０４は、ウェハリング１０３から良品用のキャリアテープ走行装置１と良品以外のキャリアテープ走行装置１に分類される。そして、良品以外のキャリアテープ１００に分類された電子部品１０４は、再判定の後、分類の際にテーピング装置となって良品以外の電子部品１０４を収容したキャリアテープ走行装置１からディテーパ装置として再供給され、引き続きテーピング装置となっている良品用のキャリアテープ走行装置１と良品以外用となったウェハリングホルダ３２０に再分類される。 Thereby, the electronic component 104 is classified into the carrier tape traveling device 1 for the non-defective product and the carrier tape traveling device 1 other than the non-defective product from the wafer ring 103. Then, after re-determination, the electronic component 104 classified as the non-defective carrier tape 100 becomes a taping device at the time of classification, and the carrier tape traveling device 1 containing the non-defective electronic component 104 is re-determined as a detaper device. The non-defective carrier tape traveling device 1 that is supplied and continues to be a taping device and the wafer ring holder 320 for non-defective products are reclassified.
　（効果）
　このように、本実施形態に係るキャリアテープ走行装置１は、スプロケット４１、４２でキャリアテープ１００を引っ掛けて走行させる。スプロケット４１、４２は、正転及び逆転するモータ５１、５２によって回転する。また、キャリアテープ１００に貼着するシールテープ１０２を巻回したシールテープリール３と、シールテープリール３から引き出されたシールテープ１０２とキャリアテープ１００を挟み込んで、キャリアテープ１００にシールテープ１０２を貼着するヒーターブロック２１とベースブロック２２とを備える。 (effect)
As described above, the carrier tape traveling device 1 according to the present embodiment travels by hooking the carrier tape 100 with the sprockets 41 and 42. The sprockets 41 and 42 are rotated by motors 51 and 52 that rotate forward and backward. Further, the seal tape reel 3 around which the seal tape 102 to be attached to the carrier tape 100 is wound, and the seal tape 102 drawn out from the seal tape reel 3 and the carrier tape 100 are sandwiched, and the seal tape 102 is attached to the carrier tape 100. A heater block 21 and a base block 22 are provided.
　このキャリアテープ走行装置１は、モータ５１、５２を正転させ、シールテープリール３からシールテープ１０２を引き出し、一対のブロック２１、２２を接近させることで、キャリアテープ１００をシールテープ１０２で封止するテーピング装置となる。また、モータ５１、５２を逆転させ、シールテープリール３へシールテープ１０２を引き込み、一対のブロック２１、２２を離反させることで、キャリアテープ１００からシールテープ１０２を剥離するディテーパ装置となる。 The carrier tape traveling device 1 seals the carrier tape 100 with the seal tape 102 by rotating the motors 51 and 52 forward, pulling out the seal tape 102 from the seal tape reel 3, and bringing the pair of blocks 21 and 22 close to each other. It becomes a taping device. Further, the motors 51 and 52 are reversed, the seal tape 102 is drawn into the seal tape reel 3, and the pair of blocks 21 and 22 are separated from each other, whereby a detapering device that peels the seal tape 102 from the carrier tape 100 is obtained.
　これにより、キャリアテープ走行装置１は、テーピング装置とディテーパ装置として兼用できるようになった。そのため、テーピング装置とディテーパ装置を別途用意する必要はなく、設備のコストを低減することができる。例えば、電子部品搬送装置３００に、専用のディテーパ装置を設置する必要がなくなる。また、ディテーパ装置を設置しない分、電子部品搬送装置３００の占有面積は少なくなり、設備の面積あたりの電子部品生産効率が向上する。 As a result, the carrier tape traveling device 1 can be used as both a taping device and a detaper device. Therefore, it is not necessary to prepare a taping device and a detaper device separately, and the cost of the equipment can be reduced. For example, it is not necessary to install a dedicated detapering device in the electronic component conveying device 300. In addition, since the detaper device is not installed, the area occupied by the electronic component transport device 300 is reduced, and the electronic component production efficiency per area of the facility is improved.
　電子部品搬送装置３００としては、搬送経路３０１を形成する搬送テーブル３１０の周りに、電子部品１０４の収容体を保持する収容体保持手段と、搬送経路３０１内の電子部品１０４を観察する観察装置３４０と、複数のキャリアテープ走行装置１を設置する。収容体保持手段は、例えばウェハリングホルダ３２０であり、その収容体はウェハリング１０３である。その他、収容体としては、平面が格子状に仕切られ、その格子内に電子部品１０４を収容するトレイである。トレイを保持する収容体保持手段としては、トレイを平面移動させるステージである。 As the electronic component conveying apparatus 300, a container holding unit that holds a container for the electronic component 104 around the conveying table 310 that forms the conveying path 301, and an observation apparatus 340 that observes the electronic component 104 in the conveying path 301. A plurality of carrier tape traveling devices 1 are installed. The container holding means is, for example, a wafer ring holder 320, and the container is the wafer ring 103. In addition, the container is a tray in which a plane is partitioned in a lattice shape and the electronic component 104 is accommodated in the lattice. The container holding means for holding the tray is a stage for moving the tray in a plane.
　この電子部品搬送装置３００は、収容体保持手段とキャリアテープ走行装置１を電子部品１０４の供給手段又は電子部品の分類先となる分類手段とする分類モードと再分類モードを有する。そして、分類モードでは、収容体保持手段は供給手段であり、全てのキャリアテープ走行装置１がテーピング装置となって分類手段となる。再分類モードでは、キャリアテープ走行装置１のうちの一部がディテーパ装置となって供給手段であり、キャリアテープ走行装置１のうちの他がテーピング装置となって分類手段とすればよい。また、再分類モードでは、ディテーパ装置となったキャリアテープ走行装置１に加えて、収容体保持手段も分類手段としてもよい。 The electronic component transport apparatus 300 has a classification mode and a reclassification mode in which the container holding unit and the carrier tape traveling device 1 are used as a supply unit of the electronic component 104 or a classification unit as a classification destination of the electronic component. In the classification mode, the container holding means is a supply means, and all the carrier tape traveling devices 1 become taping devices and become the classification means. In the reclassification mode, a part of the carrier tape traveling device 1 may be a detapering device and serving as a supply unit, and the other of the carrier tape traveling device 1 may be a taping device and serving as a classification unit. In the reclassification mode, in addition to the carrier tape traveling device 1 that has become a detaper device, the container holding means may be the classification means.
　このような電子部品搬送装置３００では、再分類のためにテーピング装置からディテーパ装置へリール２００を移し変える必要もなくなるので、設備コストの低下、生産効率の向上の他、作業員の労力低減にも繋がる。 In such an electronic component conveying device 300, it is not necessary to transfer the reel 200 from the taping device to the detaper device for reclassification, so that the equipment cost is reduced, the production efficiency is improved, and the labor of the worker is reduced. Connected.
　更に、スプロケット４１、４２は、周面に突起４３を形成してなり、キャリアテープ１００に形成されているスプロケット孔に突起を引っ掛けて回転する。この突起４３は、インボリュート形状を有しているようにした。これにより、キャリアテープ１００の走行に際して振動が低減し、ポケット１０１から電子部品１０４が飛び出してしまうことを防止でき、生産効率が向上する。 Furthermore, the sprockets 41 and 42 are formed with protrusions 43 on the peripheral surface, and rotate by hooking the protrusions into the sprocket holes formed in the carrier tape 100. The protrusion 43 has an involute shape. As a result, vibration is reduced during the traveling of the carrier tape 100, the electronic component 104 can be prevented from jumping out of the pocket 101, and the production efficiency is improved.
　また、スプロケット４１、４２とモータ５１、５２との間の伝動機構としてタイミングベルト５１ａ、５２ａとした。これにより、伝動機構をラチェットホイールとしていた場合と比べて、キャリアテープ１００の逆走行時に伝動機構から振動が発生し難くなり、ポケット１０１から電子部品１０４が飛び出してしまうことを防止でき、生産効率が向上する。 Also, timing belts 51 a and 52 a are used as a transmission mechanism between the sprockets 41 and 42 and the motors 51 and 52. As a result, compared to the case where the transmission mechanism is a ratchet wheel, vibration is less likely to be generated from the transmission mechanism during reverse running of the carrier tape 100, and the electronic component 104 can be prevented from jumping out of the pocket 101. improves.
　また、シールテープリール３とキャリアテープ１００の走行ラインとの間に抑えローラ３２を介在させ、シールテープ１０２をキャリアテープ１００の近傍に案内する。この抑えローラ３２は、キャリアテープ１００にシールテープ１０２を貼着する際、キャリアテープ１００の近傍に接近する。 Further, a restraining roller 32 is interposed between the seal tape reel 3 and the travel line of the carrier tape 100 to guide the seal tape 102 to the vicinity of the carrier tape 100. The pressing roller 32 approaches the vicinity of the carrier tape 100 when the sealing tape 102 is stuck to the carrier tape 100.
　一方、抑えローラ３２は、キャリアテープ１００からシールテープ１０２を剥離する際、キャリアテープ１００から離れ、剥離基点９におけるキャリアテープ１００とシールテープ１０２との成す角を、貼着の際と比べて緩やかにするようにした。これにより、キャリアテープ１００からシールテープ１０２を剥離することによる振動を抑制でき、ポケット１０１から電子部品１０４が飛び出してしまうことを防止でき、生産効率が向上する。 On the other hand, when the sealing roller 102 is peeled off from the carrier tape 100, the holding roller 32 is separated from the carrier tape 100, and the angle formed between the carrier tape 100 and the sealing tape 102 at the peeling base point 9 is gentler than that at the time of sticking. I tried to do it. As a result, vibration due to peeling of the seal tape 102 from the carrier tape 100 can be suppressed, the electronic component 104 can be prevented from jumping out of the pocket 101, and the production efficiency is improved.
　また、ポケット１０１の底面に形成された孔を通して、ポケット１０１内に収容されている電子部品１０４を吸引する吸引部８を備えるようにした。この吸引部８は、キャリアテープ１００の走行中、キャリアテープ１００に電子部品１０４を引き付ける。これにより、キャリアテープ１００と電子部品１０４が一体的になり、キャリアテープ１００の走行に振動が生じても、ポケット１０１内で電子部品１０４が遥動しにくくなり、またキャリアテープ１００の振動が緩和され、ポケット１０１から電子部品１０４が飛び出してしまうことを防止でき、生産効率が向上する。 Further, the suction part 8 for sucking the electronic component 104 accommodated in the pocket 101 is provided through a hole formed in the bottom surface of the pocket 101. The suction unit 8 attracts the electronic component 104 to the carrier tape 100 while the carrier tape 100 is running. As a result, the carrier tape 100 and the electronic component 104 are integrated, and even when the carrier tape 100 is vibrated, the electronic component 104 is less likely to move in the pocket 101, and the vibration of the carrier tape 100 is reduced. Thus, the electronic component 104 can be prevented from jumping out of the pocket 101, and the production efficiency is improved.
　以上のように本発明の実施形態を説明したが、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。そして、この実施形態やその変形は、発明の範囲や要旨に含まれるとともに、請求の範囲に記載された発明とその均等の範囲に含まれる。 Although the embodiments of the present invention have been described above, various omissions, replacements, and changes can be made without departing from the spirit of the invention. And this embodiment and its deformation | transformation are included in the range of the invention, the summary, and the invention described in the claim, and its equivalent range.
　例えば、保持手段３１１として吸着ノズルを例に採り説明したが、静電吸着方式、ベルヌーイチャック方式、又は電子部品１０４を機械的に挟持するチャック機構を配してもよい。また、電子部品１０４としては、キャリアテープ１００に梱包可能であるならば、何れであってもよい。例えば、電子部品１０４としては、半導体素子、及び半導体素子以外の抵抗やコンデンサ等を挙げることができる。半導体素子としては、トランジスタ、ダイオード、ＬＥＤ、及びサイリスタ等のディスクリート半導体、ＩＣやＬＳＩ等の集積回路等を挙げることができる。 For example, although the suction nozzle has been described as an example of the holding means 311, an electrostatic suction method, a Bernoulli chuck method, or a chuck mechanism that mechanically clamps the electronic component 104 may be provided. Further, the electronic component 104 may be any as long as it can be packed on the carrier tape 100. For example, examples of the electronic component 104 include a semiconductor element and a resistor or capacitor other than the semiconductor element. Examples of the semiconductor element include discrete semiconductors such as transistors, diodes, LEDs, and thyristors, and integrated circuits such as ICs and LSIs.
　また、本実施形態では、二機のモータ５１、５２によってキャリアテープ１００を走行させるようにしたが、モータ５１、５２の何れか一機を設け、そのモータでキャリアテープ１００を走行させるようにしてもよい。更に、スプロケット４１、４２についても、何れか１個を設け、他方は、キャリアテープ１００を案内するピン無しのローラとしてもよい。 In the present embodiment, the carrier tape 100 is caused to travel by the two motors 51 and 52. However, any one of the motors 51 and 52 is provided, and the carrier tape 100 is caused to travel by the motor. Also good. Further, any one of the sprockets 41 and 42 may be provided, and the other may be a pinless roller for guiding the carrier tape 100.
１　キャリアテープ走行装置
２　封止部
２１　ヒーターブロック
２２　ベースブロック
３　シールテープリール
３１　モータ
３２　抑えローラ
４１　スプロケット
４２　スプロケット
４３　突起
５１　モータ
５１ａ　タイミングベルト
５２　モータ
５２ａ　タイミングベルト
６　授受位置
７　モータドライバ
７１　制御テーブル
７２　テーピングパラメータ
７３　ディテープパラメータ
８　吸引部
８１　容器
８２　吸引溝
８３　吸引孔
９　剥離基点
１００　キャリアテープ
１０１　ポケット
１０２　シールテープ
１０３　ウェハリング
１０４　電子部品
２００　リール
３００　電子部品搬送装置
３０１　搬送経路
３１０　搬送テーブル
３１１　保持手段
３１２　ダイレクトドライブモータ
３２０　ウェハリングホルダ
３２１　突き上げピン
３３０　ピックアップ装置
３３１　アーム
３４０　観測装置 DESCRIPTION OF SYMBOLS 1 Carrier tape travel apparatus 2 Sealing part 21 Heater block 22 Base block 3 Seal tape reel 31 Motor 32 Stopping roller 41 Sprocket 42 Sprocket 43 Protrusion 51 Motor 51a Timing belt 52 Motor 52a Timing belt 6 Transfer position 7 Motor driver 71 Control table 72 Taping parameter 73 Detape parameter 8 Suction part 81 Container 82 Suction groove 83 Suction hole 9 Release base point 100 Carrier tape 101 Pocket 102 Seal tape 103 Wafer ring 104 Electronic component 200 Reel 300 Electronic component transport device 301 Transport path 310 Transport table 311 Holding means 312 Direct drive motor 320 Wafer ring holder 321 Push-up pin 330 Pickup device 331 Arm 340 Observation device

Claims (8)

  1. 　電子部品を収納するためのポケットを等間隔で形成したキャリアテープを長手方向に走行させるキャリアテープ走行装置であって、
    　前記キャリアテープを引っ掛けて走行させるスプロケットと、
    　正転及び逆転し、前記スプロケットを回転させるモータと、
    　前記キャリアテープに貼着するシールテープを巻回したリールと、
    　前記キャリアテープの走行ラインに対して接触又は離反可能に移動し、前記リールから引き出された前記シールテープと前記キャリアテープを挟み込んで、前記キャリアテープに前記シールテープを貼着する一対のブロックと、
    　前記キャリアテープの走行ラインに対して接近又は離反可能な抑えローラと、
    　を備え、
    　前記モータを正転させ、前記リールから前記シールテープを引き出し、前記抑えローラを前記キャリアテープの走行ラインに接近させ、前記一対のブロックを接近させることで、前記キャリアテープを前記シールテープで封止するテーピング装置となり、
    　前記モータを逆転させ、前記リールへ前記シールテープを引き込み、前記一対のブロックを離反させ、前記抑えローラを前記キャリアテープの走行ラインから離反させることで、前記キャリアテープから前記シールテープを剥離するディテーパ装置となること、
    　を特徴とするキャリアテープ走行装置。     A carrier tape running device for running a carrier tape in which pockets for storing electronic components are formed at equal intervals in the longitudinal direction,
    A sprocket that hooks and runs the carrier tape;
    A motor that rotates forward and backward and rotates the sprocket;
    A reel wound with a sealing tape to be attached to the carrier tape;
    A pair of blocks that move so as to be in contact with or separated from the running line of the carrier tape, sandwich the seal tape drawn out from the reel and the carrier tape, and adhere the seal tape to the carrier tape;
    A holding roller that can approach or leave the carrier tape travel line;
    With
    The carrier tape is sealed with the seal tape by rotating the motor forward, pulling out the seal tape from the reel, bringing the holding roller closer to the carrier tape travel line, and bringing the pair of blocks closer to each other. And taping device
    A detaper that peels off the seal tape from the carrier tape by reversing the motor, pulling the seal tape into the reel, separating the pair of blocks, and separating the holding roller from the travel line of the carrier tape. Becoming a device,
    A carrier tape traveling device characterized by the above.
  2. 　前記スプロケットは、
    　周面に突起を形成してなり、
    　前記キャリアテープに形成されているスプロケット孔に前記突起を引っ掛けて回転し、
    　前記突起は、インボリュート形状を有していること、
    　を特徴とする請求項１記載のキャリアテープ走行装置。     The sprocket is
    Protrusions are formed on the peripheral surface,
    Rotate by hooking the protrusion on the sprocket hole formed in the carrier tape,
    The protrusion has an involute shape;
    The carrier tape travel device according to claim 1.
  3. 　前記スプロケットと前記モータとの間の伝動機構としてタイミングベルトを備えること、
    　を特徴とする請求項１又は２記載のキャリアテープ走行装置。     A timing belt as a transmission mechanism between the sprocket and the motor;
    The carrier tape traveling device according to claim 1, wherein:
  4. 　前記リールと前記キャリアテープの走行ラインとの間に介在し、前記シールテープを前記キャリアテープの近傍に案内する抑えローラを備え、
    　前記抑えローラは、
    　前記キャリアテープに前記シールテープを貼着する際、前記キャリアテープの近傍に接近し、
    　前記キャリアテープから前記シールテープを剥離する際、前記キャリアテープから離れ、剥離基点における前記キャリアテープと前記シールテープとの成す角を、前記貼着の際と比べて緩やかにすること、
    　を特徴とする請求項１乃至３の何れかに記載のキャリアテープ走行装置。     A holding roller interposed between the reel and a running line of the carrier tape and guiding the seal tape to the vicinity of the carrier tape;
    The holding roller is
    When sticking the seal tape to the carrier tape, approach the vicinity of the carrier tape,
    When peeling the seal tape from the carrier tape, away from the carrier tape, the angle formed by the carrier tape and the seal tape at the peeling base point is made gentler than that at the time of the sticking,
    The carrier tape travel device according to any one of claims 1 to 3.
  5. 　前記ポケットの底面に形成された孔を通して、前記ポケット内に収容されている電子部品を吸引する吸引部を備え、
    　前記吸引部は、前記キャリアテープの走行中、前記キャリアテープに前記電子部品を引き付けること、
    　を特徴とする請求項１乃至４の何れかに記載のキャリアテープ走行装置。     Through a hole formed in the bottom surface of the pocket, comprising a suction part that sucks the electronic component accommodated in the pocket,
    The suction part attracts the electronic component to the carrier tape during the running of the carrier tape;
    The carrier tape travel device according to claim 1, wherein
  6. 　請求項１乃至５の何れかに記載のキャリアテープ走行装置を備え、電子部品を搬送経路に沿って搬送する電子部品搬送装置であって、
    　前記搬送経路を形成する搬送テーブルと、
    　前記搬送テーブルの周囲に配置され、電子部品の収容体を保持する収容体保持手段と、
    　前記搬送テーブルの周囲に配置され、前記搬送経路内の電子部品を観察する観察手段と、
    　前記搬送テーブルの周囲に配置される複数の前記キャリアテープ走行装置と、
    　を備え、
    　前記収容体保持手段と前記キャリアテープ走行装置を電子部品の供給手段又は電子部品の分類先となる分類手段とする分類モードと再分類モードを有し、
    　前記分類モードでは、
    　前記収容体保持手段は、前記供給手段であり、
    　全ての前記キャリアテープ走行装置が前記テーピング装置となって前記分類手段であり、
    　前記再分類モードでは、
    　前記キャリアテープ走行装置のうちの一部が前記ディテーパ装置となって前記供給手段であり、
    　前記キャリアテープ走行装置のうちの他が前記テーピング装置となって前記分類手段であること、
    　を特徴とする電子部品搬送装置。     An electronic component transport apparatus comprising the carrier tape traveling device according to any one of claims 1 to 5 and transporting an electronic component along a transport path,
    A transport table that forms the transport path;
    A container holding means arranged around the transfer table and holding a container of electronic components;
    Observation means arranged around the transfer table and observing electronic components in the transfer path;
    A plurality of the carrier tape travel devices disposed around the transport table;
    With
    A classification mode and a reclassification mode in which the container holding means and the carrier tape traveling device are classified as electronic component supply means or electronic component classification destination,
    In the classification mode,
    The container holding means is the supply means;
    All the carrier tape traveling devices are the taping devices and the classification means,
    In the reclassification mode,
    A part of the carrier tape traveling device becomes the detaper device and is the supply means,
    The other of the carrier tape traveling device is the taping device and the classification means,
    An electronic component conveying device characterized by the above.
  7. 　前記再分類モードでは、
    　前記ディテーパ装置となった前記キャリアテープ走行装置に加えて、前記収容体保持手段も前記分類手段であること、
    　を特徴とする請求項６記載の電子部品搬送装置。     In the reclassification mode,
    In addition to the carrier tape travel device that has become the detaper device, the container holding means is also the classification means,
    The electronic component conveying apparatus according to claim 6.
  8. 　前記収容体保持手段は、
    　電子部品をアレイ状に並べたウェハリングを保持するウェハリング保持部、又は平面を格子状に仕切って電子部品をアレイ状に並べたトレイを保持するトレイ保持部であること、
    　を特徴とする請求項６又は７記載の電子部品搬送装置。
     

          The container holding means is
    A wafer ring holding unit for holding a wafer ring in which electronic components are arranged in an array, or a tray holding unit for holding a tray in which electronic parts are arranged in an array by partitioning a plane in a grid pattern,
    The electronic component carrying device according to claim 6 or 7.


PCT/JP2015/080323 2014-11-19 2015-10-28 Carrier tape-running device and electronic part-conveying apparatus WO2016080162A1 (en)

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TW201625474A (en) 2016-07-16

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