JP5544461B1 - Attitude correction device, electronic component transfer device, and electronic component transfer device - Google Patents

Abstract

  Provided is a posture correction method capable of improving the degree of freedom of operation of a holding means in posture correction of an electronic component. The posture correction device includes a collet 51 on which the electronic component D is placed, a Z-axis moving mechanism 55 that moves the collet 51 in the Z-axis direction toward the suction nozzle 13, and two XY that are orthogonal to the Z-axis. An X-axis movement mechanism 53 that moves in the axial direction, a Y-axis movement mechanism 54, and a θ-axis rotation mechanism 56 that rotates the collet 51 around the Z-axis. Then, the electronic component D is picked up by the suction nozzle 13 on the transport path 11 to receive the electronic component D, and the posture of the electronic component D is corrected.

Description

  The present invention relates to an attitude correction device that corrects the attitude of an electronic component, an electronic component transport apparatus including the same, and an electronic component transfer apparatus.

  Electronic parts such as semiconductor elements are subjected to various process processes such as appearance inspection, electrical characteristic inspection, and marking process, and are classified according to the inspection results, and then are accommodated in a carrier tape or the like and shipped. Appearance inspection, electrical property inspection, and marking processing are based on the proper posture of the electronic component. Therefore, the posture correction processing of the electronic component is performed before these process steps.

  An apparatus for performing such a process is generally configured by attaching a plurality of holding means capable of holding and releasing electronic components to the outer periphery of a table that is swiveled by a direct drive motor (for example, a device that can move up and down) (for example, , See Patent Document 1).

  In this apparatus, the outer periphery of the table is a conveyance path. The holding means holding the electronic component moves along the transport path. A unit for performing process processing is arranged immediately below the conveyance path. The holding means moves up and down so as to be temporarily separated from the conveyance path, and delivers the electronic component to the unit. The unit performs a process on the received electronic component, and the holding unit re-detaches from the conveyance path and picks up the electronic component from the unit again. The holding means that has picked up the electronic component moves to the next stop position along the transport path.

  FIG. 13 is a timing chart showing a general operation of the holding means in the posture correction of the electronic component. As shown in FIG. 13, as a first step, the holding means horizontally moves on the conveyance path to the position immediately below the posture correction unit while holding the electronic component. When the movement to the posture correction unit is completed, as a second step, the posture correction unit is lowered from the retracted position to the delivery position. When the descent is completed, as a third step, electronic components are transferred to and from the posture correction unit. When the delivery is completed, as the fourth step, the ascent is moved up to the conveyance path for the purpose of saving. When the ascent on the transport path is completed, as a fifth step, the position is again lowered with respect to the attitude correction unit after the attitude correction of the electronic component is completed. When the descent is completed again, as a sixth step, the electronic component is taken out from the posture correction unit. When the taking-up of the electronic component is completed, it rises again up to the conveyance path as the seventh step. When the re-raising on the conveyance path is completed, as an eighth step, the movement on the conveyance path is resumed while holding the electronic component whose posture correction has been completed.

JP 2006-202851 A

  Recently, as commoditization of electronic components progresses, electronic components are exposed to intense price competition, and further improvement in mass productivity of electronic components is required. However, the holding means for holding the electronic component is responsible for all the movement of the electronic component. That is, the electronic component holding means is involved in horizontal movement on the transport path, movement away from the transport path and ascending and descending toward the posture correction unit, and delivery of the electronic component to and from the posture correction unit.

  That is, the degree of freedom of operation of the holding means is limited. For this reason, there is no room for devising the operation of the holding means, and it has been difficult to improve the productivity of electronic components at that point. In other words, if even a part of the operation performed by the holding means can be transferred, the degree of freedom of operation of the holding means can be improved, and the operation of the holding means can be given a range of choice. It is possible to further improve the productivity of parts.

  The present invention has been proposed to solve the above-described problems of the prior art, and an attitude correction apparatus capable of improving the degree of freedom of operation of the holding means in the attitude correction of an electronic component, and It is an object of the present invention to provide an electronic component transport device and an electronic component transfer device that are provided.

  An electronic component transport apparatus according to the present invention is an electronic component transport apparatus that performs various process processes while transporting an electronic component, and holds the electronic component along the transport path while holding the electronic component. Holding means for intermittently moving, and posture correcting means for picking up the electronic component to receive the electronic component to the holding means on the transport path and correcting the posture of the electronic component, and the posture correction The means includes a stage on which the electronic component is placed, a Z-axis moving mechanism that moves the stage in the first axis direction toward the holding means, and the stage in a biaxial direction perpendicular to the first axis. An XY-axis moving mechanism for moving, and a θ-axis rotating mechanism for rotating the stage around the first axis are provided.

  The Z-axis moving mechanism overlaps with the movement of the holding means along the transport path, and moves the stage toward a position where the holding means is scheduled to stop. The mechanism and the θ-axis rotating mechanism, after sandwiching the electronic component between the stage and the holding means, overlap with the lowering of the stage, move the stage in the XY direction, and rotate the θ-axis, The holding means sandwiches the electronic component that has finished the movement in the XY direction and the θ-axis rotation together with the stage that has been raised again, and then overlaps with the lowering of the stage to move along the conveyance path. May be started.

  The Z-axis moving mechanism includes a voice coil motor, a shaft in the first axial direction, a coil bobbin of the voice coil motor that supports the stage, and a frame in which the voice coil motor is mounted in the first axial direction. A motor that applies a force to move the stage, and the voice coil motor provides a counter thrust that antagonizes a load applied to the coil bobbin when the stage does not reach the electronic component. Good.

  The Z-axis moving mechanism may uniformly set the rotation speed and rotation angle of the rotary motor for electronic components having different thicknesses.

  An electronic component transfer apparatus according to the present invention is an electronic component transfer apparatus that conveys an electronic component from one container to the other container, the holding means for holding the electronic component at the tip, and the holding means Are arranged around the rotation axis, and are arranged so as to face the front end of the holding means, and a rotary table that intermittently rotates by a predetermined angle around the rotation axis so that the front end always faces outward. A posture correction means for picking up the electronic component and receiving the electronic component and correcting the posture of the electronic component; and the posture correction means includes a stage on which the electronic component is placed; A Z-axis moving mechanism for moving the stage in the first axis direction toward the holding means; an XY-axis moving mechanism for moving the stage in two axial directions orthogonal to the first axis; and the stage for moving the first axis Times And a pivot mechanism θ rotated in, characterized by.

  The Z-axis moving mechanism overlaps with the movement of the holding means by the rotary table, and moves the stage toward a position where the holding means is scheduled to stop, the Z-axis moving mechanism, the XY-axis moving mechanism, And the θ-axis rotating mechanism sandwiches the electronic component between the stage and the holding unit, and then overlaps with the lowering of the stage, moves the stage in the XY direction, and rotates the θ-axis to rotate the holding unit. Is inserted in the XY direction and the electronic component that has finished the θ-axis rotation together with the stage that has been raised again, and then overlaps with the lowering of the stage, and starts to move by the rotary table. It may be.

  The Z-axis moving mechanism includes a voice coil motor, a shaft in the first axial direction, a coil bobbin of the voice coil motor that supports the stage, and a frame in which the voice coil motor is mounted in the first axial direction. A motor that applies a force to move the stage, and the voice coil motor provides a counter thrust that antagonizes a load applied to the coil bobbin when the stage does not reach the electronic component. Good.

  The Z-axis moving mechanism may uniformly set the rotation speed and rotation angle of the rotary motor for electronic components having different thicknesses.

  An attitude correction apparatus according to the present invention is an attitude correction apparatus that receives an electronic component from a holding unit that intermittently moves on a conveyance path while holding the electronic component, and corrects the attitude of the electronic component. A stage that is placed, a Z-axis movement mechanism that moves the stage in a first axis direction toward the holding means, an XY-axis movement mechanism that moves the stage in two axial directions perpendicular to the first axis, A θ-axis rotation mechanism that rotates the stage about the first axis, and picks up the electronic component to the holding means on the transport path to receive the electronic component, and corrects the posture of the electronic component It is characterized by doing.

  The Z-axis moving mechanism includes a voice coil motor, a shaft in the first axial direction, a coil bobbin of the voice coil motor that supports the stage, and a frame in which the voice coil motor is mounted in the first axial direction. A motor that applies a force to move the stage, and the voice coil motor provides a counter thrust that antagonizes a load applied to the coil bobbin when the stage does not reach the electronic component. Good.

  The Z-axis moving mechanism may uniformly set the rotation speed and rotation angle of the rotary motor for electronic components having different thicknesses.

  According to the present invention, the essential operation of the holding means is reduced to the horizontal movement on the transport path and the delivery of the electronic component to the stage, and the movement operation toward the stage in the meantime can be eliminated. As a result, various measures for improving the conveyance speed can be taken, and the productivity of electronic components can be improved.

It is a top view which shows the structure of an electronic component conveying apparatus. It is a side view which shows the structure of an electronic component conveying apparatus. It is a side view which shows operation | movement of an attitude | position correction apparatus. It is a detailed block diagram of an attitude | position correction apparatus. It is a flowchart which shows the 1st example of an attitude | position correction process. It is a timing chart which shows the 1st example of a posture correction process. It is a schematic diagram which shows operation | movement of the electronic component conveying apparatus which concerns on the 2nd example of an attitude | position correction process. It is a timing chart which shows the 2nd example of a posture correction process. It is a schematic diagram which shows the movement operation | movement of the coil bobbin of a voice coil motor in an attitude | position correction process. It is a timing chart which shows the rotation angle and rotation speed of the rotary motor which concern on the Z-axis movement of a collet according to the thickness of an electronic component. It is a front view which shows the structure of an electronic component transfer apparatus. It is a flowchart which shows the attitude | position correction process of an electronic component transfer apparatus. It is a timing chart which shows the conventional operation | movement of the holding | maintenance means in the attitude | position correction | amendment of an electronic component.

  Hereinafter, embodiments of an attitude correction device, an electronic component transport device, and an electronic component transfer device according to the present invention will be described in detail with reference to the drawings.

(First embodiment)
(Electronic component conveyor)
(Constitution)
In FIG. 1, the whole structure of the electronic component conveying apparatus 1 is shown. The electronic component transport apparatus 1 has a transport path 11 for the electronic component D, aligns and transports the electronic components D along the transport path 11, and sequentially performs various process processes on the transport path 11. A supply unit 2 that supplies an electronic component D is provided at the start end of the conveyance path 11, and a storage unit 3 that accommodates the electronic component D is provided at the end of the conveyance path 11. The process processing unit U is provided.

  The electronic component D is a component used for an electrical product. Examples of the electronic component D include a semiconductor element and a resistor or capacitor other than the semiconductor element. Examples of the semiconductor element include discrete semiconductors such as transistors, diodes, LEDs, capacitors, and thyristors, and integrated circuits such as ICs and LSIs.

  The conveyance path 11 is the outer periphery of the conveyance table 12 that rotates intermittently by a predetermined angle. A suction nozzle 13 that is a holding means for the electronic component D is supported on the outer periphery of the transport table 12. The electronic component D moves along the outer periphery of the conveyance table 12 by intermittently rotating the conveyance table 12 while holding the electronic component D by the suction nozzle 13.

  Specifically, the transfer table 12 has a shape such as a disk or a star that radially expands around one point. The transport table 12 is pivotally supported at the radiation center by the rotation shaft of the motor 12a. A plurality of suction nozzles 13 are provided at the same distance from the circumferentially equidistant position along the outer periphery of the transport table 12 and the radiation center of the transport table 12.

  The suction nozzle 13 is hollow inside and has one end opened. The inside of the suction nozzle 13 communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump or an ejector. The suction nozzle 13 sucks the electronic component D at one end of the opening by generating a negative pressure in the pneumatic circuit, and separates the electronic component D by vacuum break or release to the atmosphere.

  Further, the motor 12a of the transfer table 12 is controlled to rotate intermittently by one pitch. The rotation pitch of the transport table 12 is equal to the arrangement interval of the suction nozzles 13. That is, the suction nozzle 13 follows a common movement locus and stops at a common stop position 14.

  The process processing unit U is disposed at the stop position 14 of the suction nozzle 13. The process processing unit U receives the electronic component D at the stop position 14 and performs process processing on the received electronic component D. Examples of process processing include appearance inspection, electrical property inspection, posture confirmation, posture correction, marking, and other various types.

  In this embodiment, the posture confirmation unit 4 for confirming the posture of the electronic component D and the posture correction unit 5 for correcting the posture of the electronic component D are provided at two adjacent stop positions 14. The posture confirmation unit 4 captures the electronic component D, and detects the posture deviation of the electronic component D, that is, the position represented by the XY axis direction and the direction represented by the θ-axis rotation by image processing. Posture includes position and orientation. The XY axis direction refers to the direction in which the suction surface of the electronic component D expands. A direction orthogonal to the suction surface of the electronic component D is referred to as a Z-axis direction.

  The detection result of the attitude confirmation unit 4 is output as information indicating the positional deviation amount of the electronic component D in the X-axis direction, the positional deviation amount in the Y-axis direction, and the orientation deviation amount in the θ-axis direction. The attitude correction unit 5 refers to the information on the positional deviation amount and the orientation deviation amount, and moves the electronic component D in the XY axis direction and rotates it around the θ axis so as to eliminate the attitude deviation of the electronic component D. Thus, the posture of the electronic component D is corrected.

  FIG. 2 shows a principle delivery method of the electronic component D between the suction nozzle 13 and the process processing unit U in the electronic component conveying apparatus 1. First, as shown in FIG. 2, the suction nozzle 13 can be moved up and down by extending one end of the opening to the lower side (Z-axis direction) of the transport table 12 and being held by a sleeve or the like.

  Further, an advancing / retreating drive device 15 facing the other end of the suction nozzle 13 is fixed immediately above the stop position 14. The process processing unit U is disposed immediately below the stop position 14 with one end of the suction nozzle 13 facing the stage. The advancing / retreating drive device 15 includes, for example, a rod 15a that pushes the suction nozzle 13 downward and a spring 15b that biases the suction nozzle 13 upward.

  The other end of the suction nozzle 13 is pushed downward by the rod 15a, and the suction nozzle 13 is lowered until the electronic component D is placed on the stage of the process unit U against the biasing force of the spring 15b. Conversely, by releasing the pushing force of the rod 15a against the suction nozzle 13, the suction nozzle 13 is lifted by releasing the biasing force of the spring 15b, and the electronic component D is picked up from the stage of the process processing unit U.

  FIG. 3 shows a delivery method between the suction nozzle 13 and the posture correction unit 5. As shown in FIG. 3A, the suction nozzle 13 is not lowered when the posture correction unit 5 is delivered. Instead, the collet 51 provided in the posture correction unit 5 is raised. The collet 51 is a stage that corrects the attitude of the electronic component D. That is, the posture correction unit 5 approaches the suction nozzle 13 and picks up the electronic component D by itself. Therefore, it is not necessary to provide the advance / retreat drive device 15 immediately above the stop position 14 where the posture correction unit 5 is disposed.

  Then, as shown in FIG. 3B, the posture correction unit 5 causes the collet 51 to move downward and overlap the lowering and re-raising while separating the electronic component D from the suction nozzle 13. The posture of the electronic component D is corrected by moving 51 to the left and right (XY axis direction) and further rotating the collet 51 by θ.

(Attitude correction unit)
FIG. 4 shows a detailed configuration of the posture correction unit 5, (a) is a side view, and (b) is a front view. As shown in FIG. 4, the posture correction unit 5 includes a gantry 52. The collet 51 is mounted on the gantry 52. The gantry 52 is mounted with a Z-axis moving mechanism 55 that moves the collet 51 in the Z-axis direction. The collet 51 is mounted on the gantry 52 via the Z-axis moving mechanism 55. The gantry 52 includes an X-axis moving mechanism 53 and a Y-axis moving mechanism 54, and is movable in the X-axis and Y-axis directions. Further, the gantry 52 is equipped with a θ-axis rotating mechanism 56 that rotates the collet 51 around the θ-axis.

  The collet 51 is a substantially cone formed of rubber or metal. The vertex of the collet 51 is a flat surface. The electronic component D is placed on the flat surface of the collet 51. The collet 51 is formed with an internal passage leading to a flat surface, and the internal passage communicates with a pneumatic circuit of a negative pressure generating device such as a vacuum pump or an ejector. By generating a negative pressure in the pneumatic circuit, the collet 51 holds the electronic component D on a flat surface, and releases the electronic component D by vacuum break or release to the atmosphere.

  The X-axis moving mechanism 53 and the Y-axis moving mechanism 54 each include a rail and a slider. The rail of the X-axis moving mechanism 53 extends in the X-axis direction, and the rail of the Y-axis moving mechanism 54 extends in the Y-axis direction. The slider of the X-axis moving mechanism 53 is fixed to the gantry 52 side, and the rail of the X-axis moving mechanism 53 is fixed to the slider of the Y-axis moving mechanism 54. The rail of the Y-axis moving mechanism 54 is fixed to the base 57 of the posture correction unit 5.

  The gantry 52 moves in the X-axis direction by sliding on the rail with the slider of the X-axis moving mechanism 53, and moves in the Y-axis direction by sliding on the rail with the slider of the Y-axis moving mechanism 54. As the gantry 52 moves in the X-axis and Y-axis directions, the collet 51 mounted on the gantry 52 also moves in the X-axis and Y-axis directions.

  The Z-axis moving mechanism 55 includes a cam mechanism 6, a voice coil motor 7, and a compression spring 8. The cam mechanism 6 moves the collet 51 toward the suction nozzle 13 in the Z axis, and the compression spring 8 moves the collet 51 in the direction away from the suction nozzle 13. The voice coil motor 7 absorbs an excessive load on the electronic component D sandwiched between the collet 51 and the suction nozzle 13 and applies a predetermined load to the electronic component D.

  Specifically, the collet 51 is fixed to the upper end of the shaft 55a extending in the Z-axis direction on the bottom surface. The shaft 55a is fixed to the floating plate 55b through the floating plate 55b extending in the horizontal direction. The floating plate 55 b is supported from below by a coil bobbin 71 of the voice coil motor 7. One end of a compression spring 55c that assists the thrust of the voice coil motor 7 is fixed to the bottom surface of the floating plate 55b. The voice coil motor 7 and the compression spring 55c are fixed to the support frame 55d. A rail 55e extending in the Z-axis direction is fixed to the gantry 52, and the support frame 55d is movable in the Z-axis direction via a slider 55f that slides on the rail 55e.

  A cylindrical cam follower 61 having a length in the X-axis direction is fixed to the support frame 55d. The peripheral surface of the cylindrical cam 62 is in contact with the peripheral surface of the cam follower 61 from below in the Z-axis direction. The cylindrical cam 62 has an axis extending in the X-axis direction, has a cross-sectional egg shape, and is pivotally supported by a rotation shaft of a rotary motor 63 fixed to the gantry 52. The circumferential surface of the cylindrical cam 62 is a cam surface, that is, a bulging portion 62a that enlarges the diameter of the cylindrical cam 62 is formed in part on the cam surface.

  Furthermore, above the floating plate 55b, an arm 55g serving as a bearing for the shaft 55a is fixed to the gantry 52 and extends. The compression spring 8 connects the bottom surface of the arm 55g and the floating plate 55b, and pushes the floating plate 55b downward.

  In this Z-axis moving mechanism 55, when the rotary motor 63 is driven, the cylindrical cam 62 rotates, and the distance between the rotation center of the cylindrical cam 62 and the cam follower 61 when the cam follower 61 climbs the bulging portion 62a of the cam surface. Will spread. Since the cylindrical cam 62 is in contact with the cam follower 61 from the lower side in the Z-axis direction, the cam follower 61 is pushed away so as to rise along the Z-axis direction. Since the cam follower 61, the support frame 55d, the voice coil motor 7, the floating plate 55b, the shaft 55a, and the collet 51 are connected to each other, when the cam follower 61 rises along the Z-axis direction, the collet 51 is also driven and the Z-axis Ascend along the direction.

  The compression spring 8 stores an urging force in the extension direction. When the cam follower 61 passes the bulging portion 62a of the cam surface, the pushing force by the cylindrical cam 62 is also reduced, and the urging force stored in the compression spring 8 pushes down the floating plate 55b. Since the floating plate 55b, the shaft 55a, and the collet 51 are connected to each other, when the floating plate 55b is pushed down along the Z-axis direction, the collet 51 is also driven and descends along the Z-axis direction.

  The voice coil motor 7 generates a counter thrust that antagonizes the load applied to the coil bobbin 71 simultaneously with the drive for raising the collet 51 along the Z-axis direction by the cam mechanism 6. The counter thrust antagonizes the load applied to the coil bobbin 71 in a situation where the collet 51 has not reached the electronic component D. The load applied to the coil bobbin 71 is a difference in urging force between the compression spring 8 and the compression spring 55c.

  Therefore, when the coil bobbin 71 has not reached the electronic component D, the coil bobbin 71 maintains the relative positional relationship with the voice coil motor 7, and when the coil bobbin 71 reaches the electronic component D, It is defeated by the load received from the electronic component D and retracts along the Z-axis direction so as to be buried in the voice coil motor 7. That is, the voice coil motor 7 absorbs an excessive load generated in the electronic component D when the electronic component D and the collet 51 come into contact with each other and further advance.

  The θ-axis rotation mechanism 56 includes a rotation motor 63, a pulley supported on the rotation shaft of the rotation motor 63, and a belt wound around the pulley and the shaft 55a. When the rotary motor 63 is driven, the belt rotates, and the rotational force is transmitted to the shaft 55a to rotate the shaft 55a. The shaft 55a and the collet 51 are in a fixed relationship, and the collet 51 rotates about the axis by the θ axis following the rotation of the shaft 55a.

(Function)
In such an electronic component transport apparatus 1, the suction nozzle 13 does not move up and down to be separated from the transport path 11, so the degree of freedom of operation of the suction nozzle 13 increases and various postures for improving the production of the electronic component D. Correction operation becomes possible. Hereinafter, some of the posture correction processes will be exemplified.

(Posture correction example 1)
First, the suction nozzle 13 present at the stop position 14 where the supply unit 2 is arranged receives the electronic component D from the supply unit 2. As a specific example, the supply unit 2 is, for example, a parts feeder. The parts feeder includes a bowl-shaped bowl portion in which a spiral groove extending from the bottom surface to the upper edge is formed in the inner peripheral surface, and a chute portion in which a straight groove toward the transfer table 12 is formed. By swinging and moving the part and the chute part, the electronic component D put into the bowl part is guided directly below the stop position 14 of the transport table 12 via the chute part.

  An advancing / retreating drive device 15 is also arranged at the stop position 14 where the supply unit 2 is arranged. The advancing / retreating drive device 15 pushes down the rod 15a to bring the rod 15a into contact with the upper end of the suction nozzle 13, and further pushes down the rod 15a to push the suction nozzle 13 downward. The suction nozzle 13 descends toward the electronic component D directly below, and when the one end of the opening is brought into contact with the electronic component D, the electronic component D is sucked by generation of a negative pressure. When the suction of the electronic component D is completed, the advance / retreat driving device 15 returns the rod 15a to its original state. When the rod 15a returns to its original position, the force that pushes down the suction nozzle 13 is released, and the suction nozzle 13 is lifted by the biasing force of the spring 15b.

  When the suction nozzle 13 is lifted, the transport table 12 is intermittently rotated by a predetermined angle to move the electronic component D along the transport path 11. When the suction nozzle 13 holding the electronic component D stops at the stop position 14 where the posture confirmation unit 4 is disposed, the posture confirmation unit 4 captures the electronic component D and performs image processing in the X-axis direction of the electronic component D. Posture confirmation is performed by calculating a positional shift amount, a positional shift amount in the Y-axis direction, and a direction shift amount in the θ-axis direction.

  When the posture confirmation of the electronic component D is completed by calculating each shift amount, the transport table 12 rotates by one pitch, and the suction nozzle 13 holding the electronic component D for which the posture confirmation is performed is disposed in the posture correction unit 5. The stop position 14 is located. At this stop position 14, the posture of the electronic component D is referred to by referring to information indicating the positional deviation amount of the electronic component D in the X-axis direction, the positional deviation amount in the Y-axis direction, and the orientation deviation amount in the θ-axis direction. A correction process is performed.

  FIG. 5 is a flowchart showing the posture correction process of the electronic component transport apparatus 1. As shown in FIG. 5, in parallel with the horizontal conveyance (step S <b> 01) of the electronic component D to the attitude correction unit 5 by the conveyance table 12, the attitude correction unit 5 faces the collet 51 toward the planned stop position of the suction nozzle 13. Is raised (step S02).

  When the suction nozzle 13 holding the electronic component D is moved directly above the collet 51 and the collet 51 is lifted, and the electronic component D is sandwiched between the suction nozzle 13 and the collet 51, the collet 51 is caused by the generation of negative pressure. The electronic component D is adsorbed, and the adsorption nozzle 13 causes the electronic component D to be detached due to atmospheric destruction. Thereby, the electronic component D is delivered to the attitude | position correction | amendment unit 5 (step S03).

  When the collet 51 holds the electronic component D, the posture correction unit 5 lowers the collet 51 so as to retract the electronic component D from the suction nozzle 13 (step S04). Further, in parallel with the lowering, the posture correction unit 5 collets so as to eliminate the positional deviation amount of the electronic component D in the X-axis direction, the positional deviation amount in the Y-axis direction, and the orientation deviation amount in the θ-axis direction. 51 is moved in the XY-axis direction, and the collet 51 is rotated around the Z-axis (step S05). During the lowering by the collet 51, the XY-axis movement, and the θ-axis rotation, the suction nozzle 13 does not descend and stands by at the stop position 14.

  Further, the posture correction unit 5 raises the collet 51 toward the suction nozzle 13 in parallel with the posture correction of the electronic component D (step S06). However, the posture correction of the electronic component D is completed before the electronic component D is sandwiched between the collet 51 and the suction nozzle 13 due to the rise.

  Then, the electronic component D is sandwiched again between the collet 51 and the suction nozzle 13, the collet 51 separates the electronic component D due to atmospheric destruction, and the suction nozzle 13 sucks the electronic component D due to the generation of negative pressure. Thereby, the electronic component D returns to the suction nozzle 13 (step S07).

  When the holding of the electronic component D by the suction nozzle 13 is completed again, the posture correction unit 5 lowers the collet 51 so as to retract the electronic component D from the collet 51 (step S08). Furthermore, in parallel with the lowering of the collet 51, the transport table 12 transports the electronic component D whose posture correction has been completed to the next stop position 14 (step S09).

  At the next stop position 14, for example, a contact unit for inspecting the characteristics of the electronic component D is arranged. The electronic component D is inspected for electrical characteristics at the stop position 14 and is transported to the end point of the transport path 11 by intermittent transport after the next pitch. The accommodation unit 3 is disposed at the end point of the transport path 11. The accommodation unit 3 is a taping unit, for example. The taping unit intermittently feeds the tape with the embossed pockets to move the empty pockets directly below the transport table 12 and accommodates the electronic component D.

  FIG. 6 shows a timing chart of the posture correction process of the electronic component D in the electronic component transport apparatus 1 as described above. (A) shows the timing chart of the conventional attitude | position correction process as a comparative example, (b) has shown the timing chart of the attitude | position correction process by the above operation examples.

  As shown in FIG. 6, the content of the posture correction process is the same between the conventional example and the operation example of this embodiment. However, in this embodiment, the posture correction unit 5 raises and lowers the collet 51 to welcome the electronic component D. Thus, the horizontal movement operation of the suction nozzle 13 to the stop position 14 and the operation of sandwiching the electronic component D by the collet 51 and the suction nozzle 13 can be overlapped. Conventionally, the suction nozzle 13 cannot be pushed down unless the suction nozzle 13 is positioned directly below the advancing / retreating drive device 15. Therefore, the sandwiching operation cannot be started until the horizontal movement operation is finished.

  Conventionally, it has been necessary to carry out the posture correction operation of the electronic component D after the suction nozzle 13 has been lifted from the electronic component D for saving. However, in this embodiment, the lowering operation of the collet 51 for retracting the suction nozzle 13 from the electronic component D and the attitude correction operation of the electronic component D can be overlapped.

  Further, conventionally, after the suction nozzle 13 is lowered, the electronic component D is received from the collet 51, and the suction nozzle 13 is lifted again, the horizontal movement operation of the suction nozzle 13 to the next stop position 14 is performed. There was a need. However, in the present embodiment, after the collet 51 is lifted and the electronic component D is delivered to the suction nozzle 13 by the collet 51, the collet 51 is lowered and the suction nozzle 13 is moved horizontally to the next stop position 14. Can be overlapped.

  Therefore, in the operation example of the present embodiment, compared to the conventional posture correction operation, the movement of the suction nozzle 13 holding the electronic component D to the posture correction unit 5 is started after the electronic component D after the posture correction is finished. The tact time until the movement to the stop position 14 can be reduced by about 30%.

(Posture correction example 2)
In such an electronic component transport apparatus 1, first, the suction nozzle 13 present at the stop position 14 where the supply unit 2 is arranged receives the electronic component D from the supply unit 2. The electronic component D is received by every other suction nozzle 13 as shown in FIG. That is, the odd-numbered suction nozzle 13 receives the electronic component D from the supply unit 2, and the even-numbered suction nozzle 13 does not receive the electronic component D from the supply unit 2.

  Then, as shown in FIG. 7B, when the suction nozzle 13 holding the electronic component D is positioned at the stop position 14 where the posture correction unit 5 is disposed, the suction nozzle 13 positions the electronic component D. It is handed over to the correction unit 5 and moves along the transport path 11 without receiving the posture-corrected electronic component D and leaves the posture correction unit 5.

  Further, as shown in FIG. 7C, when the suction nozzle 13 that does not hold the electronic component D stops at the stop position 14 where the posture correction unit 5 is disposed, the suction nozzle 13 performs posture correction. After the received electronic component D is received from the posture correction unit 5, it moves along the transport path 11 and leaves the posture correction unit 5.

  FIG. 8 shows a timing chart of the posture correction process of the electronic component D in such an electronic component transport apparatus 1. In the figure, delivery (a) shows the delivery timing of the suction nozzle 13 that holds the electronic component D and moves immediately above the posture correction unit 5, and delivery (b) shows the suction nozzle that does not hold the electronic component D. The timing of 13 attitude | position correction processes is shown.

  As shown in FIG. 8, the suction nozzle 13 only needs to stay immediately above the posture correction unit 5 for the time that the electronic component D is sandwiched between the collet 51 and delivered, so the suction nozzle 13 stops immediately above the posture correction unit 5. Time can be reduced to a minimum.

(Example of torque control)
FIG. 9 is a schematic diagram showing the moving operation of the coil bobbin 71 of the voice coil motor 7 in the posture correction process. As shown in FIG. 9, the coil bobbin 71 of the voice coil motor 7 receives the biasing force Fr1 of the compression spring 8 and the biasing force Fr2 of the compression spring 55c while the collet 51 is rising and the electronic component D is not reached. A load necessary to lift the floating plate 55b, the shaft 55a, and the collet 51 against the difference (Fr1-Fr2) is applied. On the other hand, the voice coil motor 7 generates a counter thrust Fopp (= Fr1-Fr2) that antagonizes the load applied to the coil bobbin 71. Therefore, Fopp + Fr2 = Fr1, and the load applied to the coil bobbin 71 is offset, and the coil bobbin 71 is relatively stationary with respect to the voice coil motor 7.

  In other words, when a further load (Fd) is applied to the coil bobbin 71, Fopp + Fr2 <Fr1 + Fd, and the coil bobbin 71 moves in the direction of embedding into the voice coil motor 7 so as to absorb the load (Fd). . Therefore, after the collet 51 comes into contact with the electronic component D, while the Z-axis moving mechanism 55 is driven to move the collet 51, the distance that the coil bobbin 71 is supposed to move within the stroke allowable range. Even if an error occurs, an excessive load is not applied to the electronic component D.

  Therefore, as shown in FIG. 10, the Z-axis moving mechanism 55 does not need to set and change the rotation angle control and rotation speed control of the rotary motor 63 with high accuracy according to the thickness of the electronic component D. Even if the thickness changes, the rotation angle and rotation speed can be made uniform regardless of the thickness of the electronic component D.

(effect)
As described above, the posture correction unit 5 according to the present embodiment moves the collet 51, which is a stage on which the electronic component D is placed, in the Z direction toward the suction nozzle 13 that is a holding unit, so that the suction nozzle 13 is moved. The electronic component D held by the pickup nozzle 13 is picked up and the electronic component D is received from the suction nozzle 13. Then, the posture of the electronic component D is corrected by moving the collet 51 in the XY axis direction orthogonal to the Z axis and rotating around the Z axis.

  Thereby, the essential operation | movement of the suction nozzle 13 is reduced to the horizontal movement on the conveyance path | route 11, and delivery of the electronic component D with the collet 51. FIG. That is, it is possible to eliminate the up-and-down movement away from the transport path 11 from the essential operation of the suction nozzle 13. Therefore, the freedom degree of operation | movement of the suction nozzle 13 increases, As a result, the improvement measures of various conveyance speed can be taken and productivity improvement of the electronic component D can be aimed at.

  For example, in the electronic component transport apparatus 1, the Z-axis moving mechanism 55 overlaps the movement of the suction nozzle 13 along the transport path 11 and moves the collet 51 toward the position where the suction nozzle 13 is scheduled to stop. Further, the Z-axis moving mechanism 55, the X-axis moving mechanism 53, the Y-axis moving mechanism 54, and the θ-axis rotating mechanism 56 sandwich the electronic component D between the collet 51 and the suction nozzle 13, and then the collet 51 descends and overlaps. Then, the collet 51 is moved in the XY directions and rotated by the θ axis. Further, the suction nozzle 13 sandwiches the electronic component D that has finished moving in the XY direction and rotating the θ axis together with the collet 51 that has risen again, and then overlaps with the lowering of the collet 51, along the transport path 11. Started moving. Accordingly, some of the process contents of the posture correction process can be overlapped and performed in parallel, the time required for the posture correction process can be shortened, and the productivity of the electronic component D can be improved.

  For example, in the electronic component transport apparatus 1, the suction nozzles 13 hold the electronic components D every other one. Then, the suction nozzle 13 that has moved toward the posture correction unit 5 while holding the electronic component D passes the electronic component D to the collet 51 that has moved up, and does not receive the electronic component D, and then proceeds to the next stop position 14. Resume moving. Further, the suction nozzle 13 that has moved toward the posture correction unit 5 without holding the electronic component D receives the electronic component D from the collet 51 that has delivered the electronic component D, and then moves to the next stop position 14. To resume. Thereby, the stop time at the stop position 14 of the suction nozzle 13 can be minimized.

  It should be noted that the productivity can be further improved by using both the overlap of the process contents in the posture correction process and the shortening of the stop position stay time.

  The Z-axis moving mechanism 55 extends through a coil bobbin 71 that extends in the Z-axis direction and supports the suction nozzle 13, a voice coil motor 7 that applies thrust to the coil bobbin 71, and a support frame 55 d that mounts the voice coil motor 7. And a rotary motor 63 for moving the collet 51. The voice coil motor 7 is configured to provide a counter thrust that antagonizes the load applied to the coil bobbin 71 in a situation where the collet 51 does not reach the electronic component D. Thereby, even if the Z-axis movement of the collet 51 is not controlled with high accuracy, the adverse effect on the electronic component D can be reduced, the speed of the Z-axis movement can be improved, and the productivity of the electronic component D is improved.

  Further, the Z-axis moving mechanism 55 is configured to uniformly set the rotation speed and rotation angle of the rotary motor 63 for the electronic components D having different thicknesses. Thereby, even if the kind of the electronic component D to be processed is changed, the time required for the setting change operation of the electronic component transport apparatus 1 can be reduced, and the productivity of the electronic component D is improved. In particular, when a variety of electronic parts D are processed in small lots, the productivity is dramatically improved.

(Second Embodiment)
Next, an electronic component transfer device will be described as an example of mounting the posture correction unit 5. In this electronic component transfer apparatus, the same configurations and functions as those of the electronic component transport apparatus 1 according to the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

(Electronic component transfer device)
As shown in FIG. 11, the electronic component transfer apparatus 10 takes out the electronic component D from one container and mounts it on the other container D after undergoing posture correction. The container is, for example, a packaging container such as a wafer sheet, a lead frame, an organic substrate, an inorganic substrate, an adhesive tray, a substrate, a parts feeder, or a tape, a tray, or a classification bin formed with pockets. In the present embodiment, the electronic component D is taken out from the wear sheet, moved on the conveyance path 11, the attitude of the electronic component D is corrected by the attitude correction unit 5 installed on the conveyance path 11, and then transferred to the tray. Change.

  The electronic component transfer device 10 includes a rotary table 16 having a rotation surface perpendicular to the installation surface. The outer periphery of the rotary table 16 is a transport path 11, and the rotary table 16 transports the electronic component D along the outer periphery by intermittent rotation. That is, the rotary table 16 includes a plurality of suction nozzles 13 that hold and detach the electronic component D at the tip. The suction nozzles 13 are installed at equal circumferential positions on the same circumference, and extend along the radial direction from the circumference center. The suction nozzle 13 is arranged with its tip facing outward. The rotary table 16 rotates the suction nozzle 13 holding the electronic component D by a predetermined angle through an axis orthogonal to the radial direction through the circumferential center.

  Further, the rotary table 16 is provided with an advance / retreat driving device 15 (not shown) for moving the suction nozzle 13 forward and backward in the radial direction of the table. The advancing / retreating drive device 15 is installed at a stop position 14 where the supply unit 2 that supports the container from which the electronic component D is taken out is installed, and a stop position where the accommodation unit 3 where the electronic component D is accommodated. 14. The supply unit 2 that supports the wear sheet is, for example, a ring holder, and is installed beside the rotary table 16. The accommodation unit 3 that supports the tray is, for example, an XY stage device, and is installed directly below the rotary table 16.

  Further, the posture correction unit 5 is disposed at the top of the rotary table 16 and a collet 51 is disposed below so as to face the tip of the suction nozzle 13 that stops at the top. The posture correction unit 5 also includes an X-axis movement mechanism 53, a Y-axis movement mechanism 54, a Z-axis movement mechanism 55, and a θ-axis rotation mechanism 56. The Z-axis movement mechanism 55 is also provided with a voice coil motor 7. . That is, this attitude correction unit 5 also moves the collet 51 toward the suction nozzle 13 so as to pick up the electronic component D, absorbs an excessive load by the voice coil motor 7, and does not depend on the thickness of the electronic component D. The rotation motor 63 is driven at a uniform rotation speed and rotation angle.

(Function)
(Posture correction example)
In such an electronic component transfer apparatus 10, first, the suction nozzle 13 present at the stop position 14 arranged in the supply unit 2 receives the electronic component D from the supply unit 2. As a specific example, the supply unit 2 is a ring holder. The ring holder supports the wafer sheet placed vertically, and moves the wafer sheet along the plane of the wafer sheet so that the electronic component D to be picked up faces the suction nozzle 13. Then, the electronic component D is sandwiched between the suction nozzle 13 and the push-up pin by the advancement of the suction nozzle 13 by the advance / retreat drive device 15 and the push-up of the electronic component D by the push-up pin provided in the ring holder. To do.

  The suction nozzle 13 is returned to the center side in the table radial direction by the advance / retreat drive device 15, the rotary table 16 is intermittently rotated by a predetermined angle, and the electronic component D is moved along the transport path 11. When the suction nozzle 13 holding the electronic component D stops at the apex, the posture correction unit 5 performs posture correction processing of the electronic component D.

  In the posture correction process, as shown in FIG. 12, the posture correction unit 5 performs the planned stop position of the suction nozzle 13 in parallel with the rotary conveyance of the electronic component D to the posture correction unit 5 (step S <b> 11). The collet 51 is lowered toward (step S12). When the suction nozzle 13 holding the electronic component D is moved immediately below the collet 51 and the collet 51 is lowered, and the electronic component D is sandwiched between the suction nozzle 13 and the collet 51, the collet 51 is caused by the generation of negative pressure. The electronic component D is adsorbed, and the adsorption nozzle 13 causes the electronic component D to be detached due to atmospheric destruction. Thereby, the electronic component D is delivered to the attitude | position correction | amendment unit 5 (step S13).

  When the collet 51 holds the electronic component D, the posture correction unit 5 raises the collet 51 so as to retract the electronic component D from the suction nozzle 13 (step S14). Further, in parallel with this rise, the posture correction unit 5 collets so as to eliminate the positional deviation amount of the electronic component D in the X-axis direction, the positional deviation amount in the Y-axis direction, and the orientation deviation amount in the θ-axis direction. 51 is moved in the XY-axis direction, and the collet 51 is rotated around the axis (step S15). During the lowering by the collet 51, the XY-axis movement, and the θ-axis rotation, the suction nozzle 13 stands by at the stop position 14 without advancing.

  Further, the posture correction unit 5 lowers the collet 51 again toward the suction nozzle 13 in parallel with the posture correction of the electronic component D (step S16). This descending timing is a timing at which the posture correction of the electronic component D is completed before the electronic component D is sandwiched again between the collet 51 and the suction nozzle 13.

  When the electronic component D is sandwiched again between the collet 51 and the suction nozzle 13, the collet 51 separates the electronic component D due to atmospheric destruction, and the suction nozzle 13 sucks the electronic component D due to the generation of negative pressure. Thereby, the electronic component D returns to the suction nozzle 13 (step S17).

  When the holding of the electronic component D by the suction nozzle 13 is completed, the posture correction unit 5 raises the collet 51 so as to retract the electronic component D from the collet 51 (step S18). Further, the rotary table 16 sequentially conveys the electronic components D whose posture correction has been completed to the respective stop positions 14 in parallel with the raising of the collet 51 (step S19).

  The XY stage device located directly below the rotary table 16 includes a flat stage facing one end of the suction nozzle 13 that stops right below, and the electronic component D is to be placed by moving the stage horizontally. The empty area is positioned directly below the suction nozzle 13. Then, the suction nozzle 13 is lowered toward the XY stage device by the advance / retreat driving device 15 and places the electronic component D in the empty area.

(effect)
As described above, also in the electronic component transfer apparatus 10, the essential operation of the suction nozzle 13 is reduced to the horizontal movement on the transport path 11 and the delivery of the electronic component D to the collet 51. That is, it is possible to eliminate the outward movement away from the conveyance path 11 from the essential operation of the suction nozzle 13. Therefore, the degree of freedom of operation of the suction nozzle 13 is increased, and the range of operation selection other than the movement operation of the electronic component D is expanded. As a result, various measures for improving the conveyance speed can be taken, and the production of the electronic component D can be performed. It is possible to improve the performance.

  In addition, some of the process contents of the posture correction process can be overlapped and performed in parallel, the time required for the posture correction process can be shortened, and the productivity of the electronic component D can be improved. Also, the stop time of the suction nozzle 13 at the stop position 14 can be minimized. Further productivity improvement can be achieved by using both in combination.

  In addition, the voice coil motor 7 controls the movement of the collet 51 in the Z axis with high accuracy by applying a counter thrust that antagonizes the load applied to the coil bobbin 71 under the condition that the collet 51 does not reach the electronic component D. Even if not, the adverse effect on the electronic component D can be reduced, the speed of the Z-axis movement can be improved, and the productivity of the electronic component D is improved.

  Furthermore, if the Z-axis moving mechanism 55 uniformly sets the rotation speed and rotation angle of the rotary motor 63 for the electronic components D having different thicknesses, the type of the electronic component D subjected to the process processing is changed. In addition, the time required for the setting change operation of the electronic component conveying apparatus 1 can be reduced, and the productivity of the electronic component D is improved. In particular, when a variety of electronic parts D are processed in small lots, the productivity is dramatically improved.

(Other embodiments)
Although the embodiments of the present invention have been described above, various omissions, replacements, and changes can be made without departing from the scope of the invention. And this embodiment and its deformation | transformation are included in the invention described in the claim, and its equivalent range while being included in the range and summary of invention.

  For example, in the present embodiment, the suction nozzle 13 is described as an example of the holding unit, but an electrostatic suction method, a Bernoulli chuck method, or a chuck mechanism that mechanically clamps the electronic component D may be provided. The conveyance path 11 may be formed by a linear conveyance system, or a plurality of conveyance tables 12 and a rotary table 16 may constitute one conveyance path 11. Various process processing units U can be arranged, and the arrangement order can be changed as appropriate. The stage included in the posture correction unit 5 is not limited to the collet 51, and may be a flat plate in which an opening hole for suction is formed.

DESCRIPTION OF SYMBOLS 1 Electronic component transfer apparatus 10 Electronic component transfer apparatus 11 Transfer path 12 Transfer table 12a Motor 13 Suction nozzle 14 Stop position 15 Advance / retreat drive apparatus 15a Rod 15b Spring 16 Rotary table 2 Supply unit 3 Accommodating unit 4 Attitude confirmation unit 5 Attitude correction unit 51 Collet 52 Base 53 X-axis Movement Mechanism 54 Y-axis Movement Mechanism 55 Z-axis Movement Mechanism 55a Shaft 55b Floating Plate 55c Compression Spring 55d Support Frame 55e Rail 55f Slider 55g Arm 56 θ-axis Rotation Mechanism 57 Base 6 Cam Mechanism 61 Cam Follower 62 Cylinder Cam 62a bulging portion 63 Rotating motor 7 Voice coil motor 71 Coil bobbin 8 Compression spring D Electronic component U Process processing unit Fopp Counter thrust Fr1, Fr2 Energizing force Fd Load

Claims (11)

An electronic component transport apparatus that performs various process processes while transporting an electronic component,
A transport path of the electronic component;
Holding means for holding the electronic component and intermittently moving along the conveyance path;
Attitude correction means for picking up the electronic component to the holding means on the transport path, receiving the electronic component, and correcting the attitude of the electronic component;
With
The posture correcting means includes
A stage on which the electronic component is placed;
A Z-axis moving mechanism for moving the stage in a first axial direction toward the holding means;
An XY-axis moving mechanism that moves the stage in two axial directions perpendicular to the first axis;
A θ-axis rotation mechanism that rotates the stage about the first axis;
Providing
An electronic component conveying device characterized by the above. The Z-axis moving mechanism is
Overlapping the movement of the holding means along the transport path, the stage is moved toward the position where the holding means is scheduled to stop,
The Z-axis moving mechanism, the XY-axis moving mechanism, and the θ-axis rotating mechanism are
After sandwiching the electronic component between the stage and the holding means, overlap the descent of the stage, move the stage in the XY direction, and rotate the θ axis,
The holding means is
Along with the stage that has risen again, after sandwiching the electronic component that has finished moving in the XY direction and rotating the θ axis, overlaps with the descent of the stage, and starts moving along the transport path. ,
The electronic component conveying apparatus according to claim 1. The Z-axis moving mechanism is
A voice coil motor,
A coil bobbin of the voice coil motor having an axis in the first axial direction and supporting the stage;
A motor for moving the stage by applying a force in the first axial direction to a frame on which the voice coil motor is mounted;
With
The voice coil motor provides a counter thrust that antagonizes a load applied to the coil bobbin under a situation where the stage does not reach the electronic component;
The electronic component carrying device according to claim 1 or 2. The Z-axis moving mechanism uniformly sets the rotation speed and rotation angle of the rotary motor for electronic components having different thicknesses;
The electronic component conveying apparatus according to claim 3. An electronic component transfer device for transporting an electronic component from one container to the other container,
Holding means for holding the electronic component at the tip;
A plurality of the holding means are arranged around the rotation axis, and a rotary table that intermittently rotates by a predetermined angle around the rotation axis so that the tip always faces outward,
A posture correcting means that is arranged to face the tip of the holding means, receives the electronic component by picking up the electronic component to the holding means, and corrects the posture of the electronic component;
With
The posture correcting means includes
A stage on which the electronic component is placed;
A Z-axis moving mechanism for moving the stage in a first axial direction toward the holding means;
An XY-axis moving mechanism that moves the stage in two axial directions perpendicular to the first axis;
A θ-axis rotation mechanism that rotates the stage about the first axis;
Providing
An electronic component transfer device characterized by the above. The Z-axis moving mechanism is
Overlapping with the movement of the holding means by the rotary table, the stage is moved toward the position where the holding means is scheduled to stop,
The Z-axis moving mechanism, the XY-axis moving mechanism, and the θ-axis rotating mechanism are
After sandwiching the electronic component between the stage and the holding means, overlap the descent of the stage, move the stage in the XY direction, and rotate the θ axis,
The holding means is
Along with the stage that has been raised again, after sandwiching the electronic component that has finished moving in the XY direction and rotating the θ axis, overlaps with the lowering of the stage, and starts moving by the rotary table,
The electronic component transfer apparatus according to claim 5. The Z-axis moving mechanism is
A voice coil motor,
A coil bobbin of the voice coil motor having an axis in the first axial direction and supporting the stage;
A motor for moving the stage by applying a force in the first axial direction to a frame on which the voice coil motor is mounted;
With
The voice coil motor provides a counter thrust that antagonizes a load applied to the coil bobbin under a situation where the stage does not reach the electronic component;
The electronic component transfer apparatus according to claim 5 or 6. The Z-axis moving mechanism uniformly sets the rotation speed and rotation angle of the rotary motor for electronic components having different thicknesses;
The electronic component transfer apparatus according to claim 7. An attitude correction device that receives an electronic component from a holding unit that intermittently moves on the conveyance path while holding the electronic component, and corrects the attitude of the electronic component,
A stage on which the electronic component is placed;
A Z-axis moving mechanism for moving the stage in a first axial direction toward the holding means;
An XY-axis moving mechanism that moves the stage in two axial directions perpendicular to the first axis;
A θ-axis rotation mechanism that rotates the stage about the first axis;
With
Picking up the electronic component to the holding means on the transport path, receiving the electronic component, and correcting the posture of the electronic component;
An attitude correction device characterized by the above. The Z-axis moving mechanism is
A voice coil motor,
A coil bobbin of the voice coil motor having an axis in the first axial direction and supporting the stage;
A motor for moving the stage by applying a force in the first axial direction to a frame on which the voice coil motor is mounted;
With
The voice coil motor provides a counter thrust that antagonizes a load applied to the coil bobbin under a situation where the stage does not reach the electronic component;
The posture correction apparatus according to claim 9. The Z-axis moving mechanism uniformly sets the rotation speed and rotation angle of the rotary motor for electronic components having different thicknesses;
The posture correction apparatus according to claim 10.