TWI526573B - 用於無電金屬化之安定催化劑 - Google Patents

用於無電金屬化之安定催化劑 Download PDF

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TWI526573B
TWI526573B TW101129864A TW101129864A TWI526573B TW I526573 B TWI526573 B TW I526573B TW 101129864 A TW101129864 A TW 101129864A TW 101129864 A TW101129864 A TW 101129864A TW I526573 B TWI526573 B TW I526573B
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metal
catalyst
copper
palladium
gallic acid
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克里斯騰M 米勒姆
丹奈德E 克利瑞
瑪莉亞 安娜 齊尼克
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羅門哈斯電子材料有限公司
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Description

用於無電金屬化之安定催化劑
本發明係針對用於無電金屬化之安定水性催化劑。更具體而言,本發明係針對用於無電金屬化之安定水性催化劑,其係不含錫且係經沒食子酸、沒食子酸衍生物和其鹽予以安定者。
無電金屬沉積係已知在基板表面沉積金屬層之過程。介電質表面之無電鍍覆需要催化劑的前處理。最常使用的催化或活化介電質(例如用於印刷電路板製造之層合基板的非導電區)的方法係使用酸性氯化物介質中之水性錫/鈀膠體處理該基板。該膠體結構已被廣泛研究。該膠體普遍包括以錫(II)離子之安定用層包圍的鈀金屬核心,該安定用層為實質上SnCl3 -錯合物殼其作為表面安定基,以避免在懸浮液中之膠體聚凝集。
在活化過程中,錫/鈀膠體催化劑被吸附到介電質基板上,例如包含環氧或聚亞醯胺之基板,以活化無電金屬沉積。催化劑理論上在無電金屬鍍覆浴中,係於自還原劑到金屬離子之電子轉移路徑中作為載體的功能。雖然無電鍍覆之性能係受許多因素影響,例如鍍覆溶液的添加劑組成物,活化步驟係控制無電鍍覆之速率和機制的關鍵。
近年來,隨著尺寸減小和對電子裝置之性能的需求增加,在電子封裝產業中對無缺陷的電子電路需求已變的更高。幾十年來,雖然錫/鈀膠體業已商用作為無電金屬鍍覆 之活化劑並已給予可接受的服務,其仍具有許多缺點,而這些缺點由於增加更高品質之電子裝置的需求而變得更加明顯。錫/鈀膠體之安定性係為主要的考量。如上述,錫/鈀膠體係藉由錫(II)離子層安定之,而其相對陰離子層可避免鈀凝集。催化劑係對空氣敏感且容易氧化成錫(IV),因此該膠體無法維持其膠體結構。在無電鍍覆期間增加溫度和攪動會進一步促進此氧化。若錫(II)的濃度下降到臨界水準,例如接近零,鈀金屬粒子生長而尺寸變大、凝聚和沉澱,從而變成無催化活性。結果增加對於更安定催化劑之需求。此外,鈀的高且波動之成本已促進產業尋找低成本的金屬。
為了找到新穎和經改量的催化劑已作出相當大的努力。因為鈀的高成本,許多努力已轉向發展無鈀催化劑,例如膠體銀催化劑。由於氯化亞錫是昂貴的且氧化錫需要獨立的加速步驟,已採取的另一個方向的研究是朝向不含錫之鈀催化劑。除了在整個無電過程增加一個步驟,在加速步驟使用的材料通常自待鍍覆基板剝除催化劑,而在無電鍍覆中留下不欲之空隙。這在典型用於印刷電路板製造之玻璃纖維基板上特別常見。然而,此不含錫催化劑於印刷電路板製造中之通孔無電鍍覆已顯示不足活性和不可靠。而且此催化劑在存儲時通常變的逐步減少活性,從而使催化劑不可靠和不切實際於商業用途。
錫錯合物之替代安定用部分(stabilizing moiety),例如聚乙烯吡咯啶酮(PVP)和樹枝狀聚合物已被研究。許多 研究團隊已在文獻中報導安定和均勻之經PVP保護的奈米粒子。亦在文獻中報導其中鈀係由更不昂貴金屬部分置換之其它金屬銀/鈀和銅/鈀膠體;然而至今仍沒有錫/鈀膠體催化劑之商業上可接受的替代品。於是,仍然需要安定和可靠的無電金屬鍍覆催化劑。
方法包括:a)提供基板;b)將水性催化劑溶液施加至基板,該水性催化劑溶液包括一種或多種選自銀、金、鉑、鈀、銥、銅、鋁、鈷、鎳和鐵之金屬和一種或多種選自沒食子酸、沒食子酸衍生物和其鹽之化合物的奈米粒子,該催化劑係不含錫的;以及c)使用無電金屬鍍覆浴來無電沉積金屬到基板上。
該催化劑可用於無電鍍覆金屬到基板上,包括介電材料之基板,且因為該催化劑相較於傳統錫/鈀催化劑不易氧化,在存儲上以及在無電鍍覆期間係安定的。該催化劑係生物可降解,因此它們不存在對環境的危害。除了氯化錫在處理上之沒食子酸、沒食子酸衍生物和其鹽不存在對環境的危害,沒食子酸、沒食子酸衍生物和其鹽起到如同在傳統錫/鈀催化劑中氯化亞錫的安定劑功能。沒食子酸、沒食子酸衍生物和其鹽亦在奈米粒子形成上作為還原劑及作為抗氧化劑,以改善催化劑使用期限。經沒食子酸、沒食子酸衍生物和其鹽予以安定之金屬催化劑使得無電金屬鍍覆可不需加速步驟且使得可將金屬鍍覆於基板上,甚至是印刷電路板的通孔壁上。
如本說明書中全文中所用的,除非上下文清楚另行指示,否則下述縮寫具有以下含義:g=公克;mg=毫克;ml=毫升;L=公升;cm=公分;m=米;mm=毫米;μm=微米;nm=奈米;ppm=每百萬份之一;℃=攝氏度;g/L=每升克數;DI=去離子;wt%=重量百分比,和Tg=玻璃轉化溫度。
此說明書全文中術語「印刷電路板」和「印刷線路板」係可互換使用。此說明書全文中術語「鍍覆」和「沉積」係可互換使用。除非另有說明,所有含量係重量百分比。所有的數值範圍係包含邊界值且可以任何順序組合,除了邏輯上此數值範圍受限於加起來和為100%。
水性催化劑溶液包括選自銀、金、鉑、鈀、銥、銅、鋁、鈷、鎳和鐵之金屬和一種或多種選自沒食子酸、沒食子酸衍生物和其鹽之安定用化合物的奈米粒子。較佳之金屬係選自銀、鈀和金,更佳之金屬係選自銀和鈀,最佳之金屬係銀。較佳地,安定用化合物係具有下列通式: 其中R係-H或-(CH2)x-CH3且x係自2至4之整數;以及 R1、R2、R3、R4和R5係-H或-OH且係相同或不同,限制條件為至少一個或R1、R2、R3、R4和R5係-OH,R較佳係-H,R更佳係-H以及R2、R3和R4係-OH。例示性的化合物包括沒食子酸、二羥基苯甲酸、羥基苯甲酸、2,4,6-三羥基苯甲酸和沒食子酸酯,例如沒食子酸丙酯。通常,鹽係鈉或鉀鹽。較佳的化合物係沒食子酸。
安定用化合物係以足以提供所欲之安定及金屬鍍覆的含量包括在水性催化劑中。可進行實驗以得到用以安定催化劑和金屬鍍覆所需之具體安定劑或安定劑組合之量。一種或多種安定用化合物普遍係以50ppm至1000ppm之量包括於水性催化劑中,較佳係自100ppm至500ppm。
視需要地,除了包含沒食子酸或沒食子酸衍生物外,可包括一種或多種還原劑以將金屬離子還原成金屬。可使用已知的傳統還原劑將金屬離子還原成金屬。此還原劑包括,但不侷限於,二甲基胺硼烷、硼氫化鈉、抗壞血酸、異抗壞血酸、次磷酸鈉、水合肼、甲酸和甲醛。還原劑係以實質上將所有金屬離子還原成金屬的量被包含。此量係一般傳統量且係熟習該技藝人士所熟知者。
金屬之來源包括任何該技藝和文獻已知的傳統的水可溶金屬鹽,其提供具有催化活性的金屬。可使用兩種或更多種催化金屬之混合物。所包括之鹽提供100ppm至2000ppm之量的金屬,較佳係自300ppm至1500ppm。銀鹽包括,但不侷限於,硝酸銀、乙酸銀、三氟乙酸銀、對甲苯磺酸銀、三氟甲磺酸銀、氟化銀、氧化銀、硫代硫酸銀 鈉和氰化銀鉀。鈀鹽包括,但不侷限於,氯化鈀、乙酸鈀、氯化鈀鉀、氯化鈀鈉和硝酸鈀。金鹽包括,但不侷限於,氰化金、三氯化金、三溴化金、氯化金鉀、氰化金鉀、氯化金鈉和氰化金鈉。鉑鹽包括,但不侷限於,氯化鉑和硫酸鉑。銥鹽包括,但不侷限於,三溴化銥和氯化銥鉀。銅鹽包括,但不侷限於,硫酸銅和氯化銅。鎳鹽包括,但不侷限於,氯化鎳和硫酸鎳。鈷鹽包括,但不侷限於,乙酸鈷、氯化鈷、溴化鈷和硫酸鈷銨。鋁鹽包括,但不侷限於,硫酸鋁和硫酸鋁鈉。鐵鹽包括,但不侷限於,檸檬酸亞鐵銨、草酸亞鐵銨和硫酸亞鐵銨。金屬鹽通常係銀、鈀和金。金屬鹽較佳係銀和鈀。該鹽更佳係銀。
構成水性催化劑之組分可以任何順序結合。可使用任何該技藝和文獻已知的合適的方法以製備水性催化劑。雖然具體的參數和組分之量可能於不同方法間有變化,一種或多種安定用化合物普遍係首先以足夠量水溶解。作為水性溶液之一種或多種金屬的來源係與安定劑溶液在劇烈攪拌下組合以形成均勻的混合物。視需要地,包含一種或多種還原劑之水性溶液可與安定劑之混合物和金屬鹽在劇烈攪拌下混合。通常在室溫下完成製程步驟和溶液;然而可變換溫度以協助溶解反應組分和促進金屬離子之還原。於不受限於任何理論,安定劑可塗覆或圍繞金屬之部分或大部分以安定催化劑溶液。金屬和安定劑粒子之直徑,尺寸範圍自至少1nm,通常自1nm至1000nm或例如自2nm至500nm。粒子尺寸範圍較佳係自2nm至300nm,更佳係自2nm 至100nm和最佳係自2nm至10nm。
剛合成的催化劑pH範圍可自酸性至弱鹼性。若催化劑係鹼性,在使用催化劑來進行無電金屬化之前,該pH被還原至7以下。可添加一種或多種酸或其鹽至催化劑以提供小於7之pH範圍,較佳係自1至6.5,更佳係自2至6。可使用足夠量的無機或有機酸或其鹽以保持pH在所欲範圍。亦可使用無機和有機酸和鹽之混合物。無機酸之實例係氫氯酸、硫酸和硝酸。有機酸包括單-和多羧酸,例如二羧酸。有機酸之實例係苯甲酸、抗壞血酸、異抗壞血酸、羥丁二酸、丁烯二酸、草酸、乙酸、檸檬酸和酒石酸。
催化劑可用於無電金屬鍍覆各種基板。此基板包括,但不侷限於,包括無機和有機物質之材料例如玻璃、陶瓷、瓷器、樹脂、紙、布及其組合。以金屬包層和無金屬包層之材料亦係為使用催化劑之金屬鍍覆的基版。
基板亦包括印刷電路板。此印刷電路板包括有熱固性樹脂、熱塑性樹脂及其組合之以金屬包層和無金屬包層者,包括纖維,例如玻璃纖維,和以前述浸染的具體實施例。
熱塑性樹脂包括,但不侷限於,縮醛樹脂、丙烯酸系,例如丙烯酸甲酯、纖維素系樹脂,例如乙酸乙酯、丙酸纖維素、乙酸丁酸纖維素和硝酸纖維素、聚醚、尼龍、聚乙烯、聚苯乙烯、苯乙烯摻合物,例如丙烯腈苯乙烯和共聚合物和丙烯腈-丁二烯苯乙烯共聚合物、聚碳酸酯、聚氯三氟乙烯、和乙烯基聚合物和共聚合物,例如乙酸乙烯酯、 乙烯醇、乙烯丁縮醛、氯乙烯、氯乙酸乙烯酯共聚合物、氯化亞乙烯和乙烯甲縮醛。
熱固性樹脂包括,但不侷限於,酞酸烯丙酯、呋喃、三聚氰胺-甲醛、酚-甲醛和酚-糠醛共聚合物,其係單獨使用或與丁二烯丙烯腈共聚合物或丙烯腈-丁二烯-苯乙烯共聚合物、聚丙烯酸酯、矽氧樹脂、尿素醛、環氧樹脂、烯丙基樹脂、酞酸甘油酯和聚酯組合使用。
多孔材料包括,但不侷限於,紙、木、玻璃纖維、布和纖維,例如天然和合成的纖維,例如棉纖維和聚酯纖維。
催化劑可用於鍍覆低Tg和高Tg樹脂。低Tg樹脂具有Tg低於160℃而高Tg樹脂具有Tg為160℃或高於160℃。通常高Tg樹脂具有Tg為160℃至280℃或例如170℃至240℃。高Tg聚合物樹脂包括,但不侷限於,聚四氟乙烯(PTFE)和聚四氟乙烯摻合物。此摻合物包括,例如,具有聚氧伸苯醚和氰酸酯之PTFE。包括具有高Tg之樹脂的聚合物樹脂的其它種類包括,但不限於,環氧樹脂,例如雙官能和多官能環氧樹脂、雙馬來亞醯胺/三和環氧樹脂(BT環氧)、環氧/聚氧伸苯醚樹脂、丙烯腈丁二烯苯乙烯、聚碳酸酯(PC)、聚氧伸苯醚(polyphenylene oxides,PP0)、聚苯醚(Polyphenylene ether,PPE)、聚苯硫醚(PPS)、聚碸(PS)、聚醯胺、聚酯例如聚酞酸乙二酯(PET)和聚酞酸丁二酯(PBT)、聚醚酮(PEEK)、液晶聚合物、聚氨酯、聚醚醯亞胺、環氧樹脂和其組合物。
催化劑可用於在印刷電路板之通孔壁上或孔壁沉積金 屬。催化劑可用於製造印刷電路板之水平和垂直的製程中。
水性催化劑可與傳統無電金屬鍍覆浴組合使用。雖然可以想像的是催化劑可用於無電沉積任何可經無電鍍覆之金屬,該金屬典型係選自銅、銅合金、鎳或鎳合金。更典型地,該金屬係選自銅和銅合金,最典型地,係使用銅。商業可得之無電銅鍍覆浴的實例係CIRCUPOSITTM 880無電銅浴(可得自羅門哈斯電子材料(Rohm and Haas Electronic Materials,LLC,Marlborough,MA))。
典型銅離子的來源包括,但不侷限於,銅之水可溶鹵化物、硝酸鹽、乙酸鹽、硫酸鹽和銅之其它有機和無機鹽。此等銅鹽之一種或多種混合物可用於提供銅離子。實例包括銅硫酸,例如五水合硫酸銅、氯化銅、硝酸銅、氫氧化銅和氨基磺酸銅。傳統量之銅鹽可用於組成物中。於該組成物中銅離子濃度範圍普遍為0.5 g/L至30 g/L。
一種或多種合金金屬亦可包括於無電組成物中。此合金金屬包括,但不侷限於,鎳和錫。銅合金之實例包括銅/鎳和銅/錫。典型地,銅合金係銅/鎳。
用於鎳和鎳合金無電浴之鎳離子的來源可包括一種或多種鎳之傳統水可溶的鹽。鎳離子的來源包括,但不侷限於,硫酸鎳和鹵化鎳。鎳離子的來源可採傳統用量而包含於無電合金組成物中。所包含之鎳離子的來源的量典型係0.5 g/L至10 g/L。
使用於金屬化基板方法之步驟可依據待鍍覆之表面是金屬或介電質而改變。具體步驟和步驟順序亦可於不同方 法間有變化。用於無電金屬鍍覆基板的傳統步驟可與該催化劑組合使用;然而,經沒食子酸和沒食子酸安定之水性金屬催化劑不需如許多傳統無電鍍覆過程之加速步驟。於是,當使用催化劑時較佳係排除促進步驟。催化劑普遍施用至待以金屬無電鍍覆之基板表面上,隨後施用金屬鍍覆浴。無電金屬鍍覆參數,例如溫度和時間可以為傳統者。可使用傳統基板的準備方法,例如清潔或除脂(degress)基板表面,粗糙化或微粗糙化表面,蝕刻或微蝕刻表面,溶劑膨脹施用,將通孔除膠渣(degrease)和各種清洗和抗鏽處理。此方法和製劑係該技藝習知和文獻揭露者。
典型地,當待金屬鍍覆的基板係介電質材料,例如在印刷電路板表面或在通孔壁,以水清洗和清潔和除脂該電路板並隨後將通孔壁除膠渣。典型地預備或軟化介電質表面或將通孔除膠渣係始於溶劑膨脹之施用。
可使用任何傳統溶劑膨脹劑。具體類型可依據介電質材料的類型可能有所不同。介電質為上述揭露之實例。可完成少量實驗以決定哪個溶劑膨脹劑係合適於特殊的介電質材料。介電質之Tg通常決定待使用的溶劑膨脹劑類型。溶劑膨脹劑包括,但不侷限於,二醇醚和其相關的醚乙酸酯。可使用傳統量之二醇醚和其相關的醚乙酸酯。可商購的溶劑膨脹劑之實例係CIRCUPOSITTM Conditioner 3302、CIRCUPOSITTM Hole Prep 3303和CIRCUPOSITTM Hole Prep 4120(得自羅門哈斯電子材料)。
視需要地,以水清洗基板和通孔。然後施用促進劑。 可使用傳統促進劑。此促進劑包括硫酸、鉻酸、鹼性過錳酸鹽或電漿蝕刻。典型地使用鹼性過錳酸鹽作為促進劑。可商購的促進劑實例係CIRCUPOSITTM Promoter 4130和CIRCUPOSITTM MLB Promoter 3308(得自羅門哈斯電子材料)。
視需要地,再次以水清洗基板和通孔。然後施用中和劑以中和促進劑留下之任何殘留物。可使用傳統中和劑。典型地,中和劑係水性鹼性溶液,其包含一種或多種胺或3wt%過氧化物和3wt%硫酸之溶液。可商購的中和劑實例係CIRCUPOSITTM MLB Neutralizer 216-5。視需要地,以水清洗基板和通孔然後乾燥。
在溶劑膨脹和除膠渣後可施用酸性或鹼性調和劑(conditioner)。可使用傳統調和劑。此調和劑可包括一種或多種陽離子界面活性劑、非離子界面活性劑、錯合劑和pH調節劑或緩衝劑。可商購的酸性調和劑實例係CIRCUPOSITTM Conditioner 3320和CIRCUPOSITTM Conditioner 3327(得自羅門哈斯電子材料)。合適的鹼性調和劑包括,但不侷限於,包含一種或多種四級胺和多胺之水性鹼性界面活性劑溶液。可商購的鹼性界面活性劑實例係CIRCUPOSITTM Conditioner 231、3325、813和860。視需要地,以水清洗基板和通孔。
調節可隨後微蝕刻。可使用傳統微蝕刻組成物。微蝕刻被設計在裸露金屬上提供微糙化金屬表面(如內層和表面蝕刻)以增進經沉積之無電和之後的電解鍍覆間之黏 合。微蝕刻劑包括,但不侷限於,60 g/L至120 g/L過硫酸鈉或氧基單過硫酸鈉或鉀和硫酸(2%)混合物、或一般硫酸/過氧化氫。可商購的微蝕刻組成物之實例係CIRCUPOSITTM Microetch 3330和PREPOSITTM 748,視需要地,以水清洗基板。
然後可施用預浸至經微蝕刻之基板和通孔上。預浸的實例包括2%至5%氫氯酸或25 g/L至75 g/L氯化鈉之酸性溶液。可商購的預浸係CATAPREPTM 404(得自羅門哈斯電子材料)。
然後施用經沒食子酸或沒食子酸衍生物或其鹽安定之催化劑至基板和通孔上。可以1至10分鐘完成以催化劑打底(priming),典型為2至8分鐘。溫度範圍可自室溫至80℃,或例如30℃至60℃。在催化劑的施用後,可視需要地以水清洗基板和通孔。
然後經金屬鍍覆之基板和通孔壁,例如以無電浴鍍覆之銅、銅合金、鎳或鎳合金。典型地,銅係鍍覆在通孔壁上。鍍覆時間和溫度可為傳統的。典型地完成金屬沉積係在20℃至80℃之溫度,更典型係在30℃至60℃。基板可沉浸在無電鍍覆浴或可將無電鍍覆浴噴到基板上。典型地,於5秒至30分鐘完成鍍覆;然而鍍覆時間可依基板上之金屬厚度改變。
視需要地,可施用抗鏽劑至金屬。可使用傳統抗鏽組成物。抗鏽劑的實例係ANTI TARNISHTM 7130(得自羅門哈斯電子材料)。可視需要地清洗基板然後乾燥該板。
進一步加工可包括藉由光成像之傳統加工和進一步在基板上的金屬沉積,例如銅、銅合金、錫和錫合金之電解金屬沉積。
可使用催化劑以無電鍍覆金屬至基板上(包括介電材料之基板),且因為它們相較於傳統錫/鈀催化劑不易氧化,在存儲上以及在無電金屬鍍覆期間係安定的。催化劑係可生物降解,因此它們不存在環境的危害。沒食子酸、沒食子酸衍生物和其鹽起到如同氯化亞錫在傳統錫/鈀催化劑的安定劑的功能,除了沒食子酸、沒食子酸衍生物和其鹽不存在於丟棄氯化亞錫時對環境的危害。沒食子酸、沒食子酸衍生物和其鹽亦作為在奈米粒子形成中之還原劑,以作為抗氧化劑以改善催化劑使用期限。經沒食子酸、沒食子酸衍生物和其鹽安定之金屬催化劑,使得可無電金屬鍍覆而不需加速步驟且使得可於基板甚至是印刷電路板的通孔壁上金屬鍍覆。
以下實施例進一步說明本發明,但不欲限制其本發明範圍。
實施例1
提供2組各具有複數個通孔的6種不同層合板:NP-175、370 HR、TUC-752、SY-1141、SY-1000-2和FR-408。NP-175自南亞(Nanya)獲得。370 HR和FR4-408自Isola獲得。TUC-752自台耀科技(Taiwan Union Technology)獲得,以及SY-1141和SY-1000-2自生益(Shengyi)獲得。層合板的Tg值範圍自140℃至180℃。各層合板係5cm× 12cm。如下述處理各層合板之通孔:
1.以CIRCUPOSITTM MLB Conditioner 211將各層合板之通孔於78℃除膠渣7分鐘;
2.然後以流動的自來水清洗各層合板之通孔4分鐘;
3.然後通孔於78℃以pH13的CIRCUPOSITTM MLB Promoter 213水性過錳酸鹽溶液處理10分鐘;
4.然後以流動的自來水清洗通孔4分鐘;
5.然後於46℃以CIRCUPOSITTM MLB Neutralizer 216-5溶液處理通孔5分鐘;
6.然後以流動的自來水清洗各層合板之通孔4分鐘;
7.然後以包含3% CIRCUPOSITTM Conditioner 231鹼性調和劑之水性浴於40℃處理通孔5分鐘;
8.然後以流動的自來水清洗各層合板之通孔4分鐘;
9.然後以PREPOSTTM 748於室溫處理通孔2分鐘;
10.然後以流動的自來水清洗各層合板之通孔4分鐘;
11.然後以pH 2.9且催化劑粒子大小範圍自7至10nm的之經150ppm沒食子酸安定且來自硝酸銀的300ppm銀催化劑於40℃打底其中6個層合板之通孔5分鐘;同時於室溫以CATAPREPTM 404孔製備組成物處理其他6個層合板之通孔1分鐘,隨後於40℃以包含100ppm鈀與過量氯化亞錫之傳統膠體鈀/錫催化劑處理5分鐘。
12.然後以流動的自來水清洗通孔4分鐘;
13.然後將層合板沉浸在於38℃且pH 13之 CIRCUPOSITTM 880無電銅鍍覆浴中15分鐘,而將銅沉積在通孔壁上;
14.然後以冷水清洗銅鍍覆的層合板4分鐘;
15.然後以壓縮空氣乾燥各經銅鍍覆的層合板;以及
16.使用下述之背光製程檢驗層合板之通孔壁的銅鍍覆覆蓋率。
每塊板係橫向剖開以暴露通孔之經銅鍍覆的壁。取各板切片的十個通孔壁之1mm厚度之橫切區段來判斷通孔壁覆蓋率。使用歐洲背光分級標準(European Backlight Grading Scale)。將各板1mm區段放置在傳統50倍之放大倍率的光學顯微鏡下。銅沉積物之品質以顯微鏡下所觀察到之光的量判斷。如果沒有光被觀察到,且該區段是完全黑色的,並在背光分級上評分為5,指示通孔壁之完全的銅覆蓋率。如果光通過整個區段且沒有任何暗區,此指示非常少至沒有銅金屬沉積在壁上且該區段評分為0。如果區段有部分暗區域以及光區域,它們被評分為0和5之間。
第1圖係背光評級分佈圖,其顯示用於各經鍍覆之六種板的兩種催化劑的背光性能,在該圖的菱形圖形指示各板之10個通孔區段的95%信賴區間,穿越各菱形中間的水平線指示經測量的10個通孔區段各組之平均背光值,除以銀/沒食子酸催化劑處理之NP-175板外,以銀/沒食子酸催化劑實質上表現與具有4.5或大於4.5背光值的傳統鈀/錫膠體催化劑相同。典型地,4.5或大於4.5的背光值係表示在鍍覆工業上為商業可接受的催化劑。
實施例2
重複實施例1之方法,除了銀/沒食子酸催化劑包括來自乙酸銀的400ppm銀、200ppm之沒食子酸和作為pH調節劑的草酸。該pH係2.7且該銀/沒食子酸奈米粒子的大小範圍自7至10nm。此外,層合板於45℃在催化劑中有7分鐘的暫留時間和於40℃有20分鐘的鍍覆時間。在施用催化劑之步驟之前與之後,以去離子水替代自來水清洗層合板。背光結果顯示於第2圖。
所有銀/沒食子酸催化劑之背光結果,除了NP-175層合板外,實質上係於4.5標識之上,NP-175之結果與實施例1中者係相同等級。相對的,傳統鈀/錫膠體催化劑的背光鍍覆結果係主要在4.5邊界線上,其中在FR-408層合板上的結果大約為4.3且低於可接受的範圍。整體而言,銀/沒食子酸催化劑比傳統催化劑具有較佳的鍍覆結果。
第1圖係300ppm Ag/150ppm沒食子酸之經安定的催化劑與傳統錫/鈀催化劑之背光評級;以及第2圖係400ppm Ag/200ppm沒食子酸之經安定的催化劑與傳統錫/鈀催化劑之背光評級
由於第1圖和第2圖皆為分析結果數據,不宜作為本案代表圖,故本案無指定代表圖。

Claims (3)

  1. 一種無電沉積金屬之方法,包括:a)提供基板;b)將水性催化劑溶液施加至該基板,該水性催化劑溶液包括一種或多種選自銀、金、鉑、鈀、銥、銅、鋁、鈷、鎳和鐵之金屬和一種或多種選自沒食子酸、沒食子酸衍生物和其鹽之安定用化合物的奈米粒子,其中,該水性催化劑溶液係不含錫,該奈米粒子的直徑係至少1nm,以及該一種或多種安定用化合物的量係50ppm至1000ppm;以及c)使用無電金屬鍍覆浴來無電沉積金屬到該基板上,其中,該無電沉積的金屬係銅、銅合金、鎳或鎳合金。
  2. 如申請專利範圍第1項所述之方法,其中,該奈米粒子之金屬係選自銀和鈀。
  3. 如申請專利範圍第1項所述之方法,其中,該安定用化合物係選自沒食子酸、二羥基苯甲酸、羥基苯甲酸、2,4,6-三羥基苯甲酸和沒食子酸酯。
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Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9441300B2 (en) * 2013-03-15 2016-09-13 Rohm And Haas Electronic Materials Llc Stable catalysts for electroless metallization
US20150024123A1 (en) * 2013-07-16 2015-01-22 Rohm And Haas Electronic Materials Llc Catalysts for electroless metallization containing iminodiacetic acid and derivatives
TWI484065B (zh) * 2013-10-15 2015-05-11 Univ Nat Cheng Kung 可撓性透明導電膜之製作方法
JP6365835B2 (ja) * 2014-08-29 2018-08-01 国立大学法人 東京大学 電極形成方法
US9506150B2 (en) 2014-10-13 2016-11-29 Rohm And Haas Electronic Materials Llc Metallization inhibitors for plastisol coated plating tools
WO2016097083A2 (en) * 2014-12-17 2016-06-23 Atotech Deutschland Gmbh Plating bath composition and method for electroless plating of palladium
SG11201706122SA (en) * 2015-03-20 2017-10-30 Atotech Deutschland Gmbh Activation method for silicon substrates
US20170171988A1 (en) * 2015-12-14 2017-06-15 Rohm And Haas Electronic Materials Llc Environmentally friendly stable catalysts for electroless metallization of printed circuit boards and through-holes
EP3181724A3 (en) * 2015-12-14 2017-08-16 Rohm and Haas Electronic Materials LLC Environmentally friendly stable catalysts for electroless metallization of printed circuit boards and through-holes
US20170171987A1 (en) * 2015-12-14 2017-06-15 Rohm And Haas Electronic Materials Llc Environmentally friendly stable catalysts for electroless metallization of printed circuit boards and through-holes
US20170251557A1 (en) * 2016-02-29 2017-08-31 Rohm And Haas Electronic Materials Llc Horizontal method of electroless metal plating of substrates with ionic catalysts
US10151035B2 (en) 2016-05-26 2018-12-11 Rohm And Haas Electronic Materials Llc Electroless metallization of through-holes and vias of substrates with tin-free ionic silver containing catalysts
WO2020083794A1 (en) 2018-10-25 2020-04-30 Basf Se Compositions, comprising silver nanoplatelets
CN113811409A (zh) 2019-05-06 2021-12-17 巴斯夫欧洲公司 包含银纳米片的组合物
CN115279518A (zh) 2020-04-23 2022-11-01 巴斯夫欧洲公司 包含片状过渡金属颗粒的组合物
CN116547090A (zh) 2020-11-10 2023-08-04 巴斯夫欧洲公司 包含银纳米片的组合物
EP4288229A1 (en) 2021-02-03 2023-12-13 Basf Se Compositions, comprising silver nanoplatelets
EP4337734A1 (en) 2021-05-12 2024-03-20 Basf Se Compositions, comprising platelet-shaped transition metal particles

Family Cites Families (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3900320A (en) * 1971-09-30 1975-08-19 Bell & Howell Co Activation method for electroless plating
JPS4962958A (zh) * 1972-10-23 1974-06-18
US4004051A (en) 1974-02-15 1977-01-18 Crown City Plating Company Aqueous noble metal suspensions for one stage activation of nonconductors for electroless plating
IT1041350B (it) * 1975-07-25 1980-01-10 Alfachimici Spa Soluzione attivante a base di argento per processi di ramatura anelettrica
US4863758A (en) * 1982-05-26 1989-09-05 Macdermid, Incorporated Catalyst solutions for activating non-conductive substrates and electroless plating process
DE3337856A1 (de) * 1983-10-18 1985-04-25 Bayer Ag, 5090 Leverkusen Verfahren zur aktivierung von substraten fuer die stromlose metallisierung
US4652311A (en) 1984-05-07 1987-03-24 Shipley Company Inc. Catalytic metal of reduced particle size
US4725314A (en) * 1984-05-07 1988-02-16 Shipley Company Inc. Catalytic metal of reduced particle size
US4634468A (en) * 1984-05-07 1987-01-06 Shipley Company Inc. Catalytic metal of reduced particle size
JPH02229268A (ja) * 1989-03-03 1990-09-12 Nichibi:Kk 化学メッキ用繊維およびその製法
JPH04215855A (ja) * 1990-04-02 1992-08-06 Nippondenso Co Ltd 触媒処理液、触媒担持方法及び導体形成方法
JPH05222542A (ja) * 1992-02-07 1993-08-31 Hitachi Ltd 無電解金めっき液およびそれを用いた金めっき方法
DE69315765T2 (de) * 1992-08-12 1998-06-10 Koninkl Philips Electronics Nv Verfahren zur stromlosen Herstellung einer "Black Matrix" aus Nickel auf eine passive Platte einer Flüssigkristall-Wiedergabeanordnung
JPH06306624A (ja) * 1993-04-26 1994-11-01 Hitachi Cable Ltd 無電解はんだめっき液
US5424009A (en) * 1994-05-24 1995-06-13 Monsanto Company Catalytic, crosslinked polymeric films for electroless deposition of metal
DE19631370A1 (de) * 1996-08-02 1998-02-05 Hoechst Ag Härtungsmittel für Epoxidharz-Systeme
JP3816241B2 (ja) * 1998-07-14 2006-08-30 株式会社大和化成研究所 金属を還元析出させるための水溶液
GB0025990D0 (en) * 2000-10-24 2000-12-13 Shipley Co Llc Plating catalysts and electronic packaging substrates plated therewith
US20020197404A1 (en) * 2001-04-12 2002-12-26 Chang Chun Plastics Co., Ltd., Taiwan R.O.C. Method of activating non-conductive substrate for use in electroless deposition
JP2003096575A (ja) * 2001-09-25 2003-04-03 Tanaka Kikinzoku Kogyo Kk 無電解金めっき液及び無電解金めっき方法
JP4171604B2 (ja) 2002-03-18 2008-10-22 株式会社大和化成研究所 無電解めっき浴及び該めっき浴を用いて得られた金属被覆物
JP3881614B2 (ja) * 2002-05-20 2007-02-14 株式会社大和化成研究所 回路パターン形成方法
US7166152B2 (en) * 2002-08-23 2007-01-23 Daiwa Fine Chemicals Co., Ltd. Pretreatment solution for providing catalyst for electroless plating, pretreatment method using the solution, and electroless plated film and/or plated object produced by use of the method
TWI318173B (en) * 2004-03-01 2009-12-11 Sumitomo Electric Industries Metallic colloidal solution and inkjet-use metallic ink
JP4632301B2 (ja) * 2005-02-17 2011-02-16 日本ペイント株式会社 無電解メッキ用触媒及び無電解メッキ方法
EP1876262A1 (en) * 2006-07-07 2008-01-09 Rohm and Haas Electronic Materials, L.L.C. Environmentally friendly electroless copper compositions
JP4976886B2 (ja) 2007-03-02 2012-07-18 石原産業株式会社 金属微粒子、それを溶媒に分散した金属コロイド液及びそれらの製造方法
JP5526463B2 (ja) 2007-04-19 2014-06-18 日立化成株式会社 電子部品の無電解金めっき方法及び電子部品
WO2008143190A1 (ja) * 2007-05-22 2008-11-27 Okuno Chemical Industries Co., Ltd. 樹脂成形体に対する無電解めっきの前処理方法、樹脂成形体に対するめっき方法、及び前処理剤
JP4932662B2 (ja) 2007-10-09 2012-05-16 石原産業株式会社 金属微粒子、それを溶媒に分散した金属コロイド液及びそれらの製造方法
JP5139848B2 (ja) 2008-03-14 2013-02-06 Dowaエレクトロニクス株式会社 没食子酸の誘導体に被覆された銀ナノ粒子
JP5305079B2 (ja) * 2008-10-23 2013-10-02 日立化成株式会社 還元型無電解金めっき用前処理液及び無電解金めっき方法
JP5441550B2 (ja) 2009-07-30 2014-03-12 Dowaエレクトロニクス株式会社 金属ナノ粒子分散液
JP5486868B2 (ja) 2009-08-06 2014-05-07 Dowaエレクトロニクス株式会社 金属ナノ粒子分散液および金属ナノ粒子分散液の製造方法

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