TWI521300B - Photosensitive resin composition and display device - Google Patents
Photosensitive resin composition and display device Download PDFInfo
- Publication number
- TWI521300B TWI521300B TW098137789A TW98137789A TWI521300B TW I521300 B TWI521300 B TW I521300B TW 098137789 A TW098137789 A TW 098137789A TW 98137789 A TW98137789 A TW 98137789A TW I521300 B TWI521300 B TW I521300B
- Authority
- TW
- Taiwan
- Prior art keywords
- methyl
- meth
- group
- acrylate
- ether
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims description 56
- -1 glycol dialkyl ether Chemical class 0.000 claims description 159
- 150000001875 compounds Chemical class 0.000 claims description 73
- 238000000576 coating method Methods 0.000 claims description 63
- 239000011248 coating agent Substances 0.000 claims description 61
- 239000002904 solvent Substances 0.000 claims description 50
- 229920005989 resin Polymers 0.000 claims description 40
- 239000011347 resin Substances 0.000 claims description 40
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 29
- 239000003505 polymerization initiator Substances 0.000 claims description 26
- 125000000217 alkyl group Chemical group 0.000 claims description 15
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims description 14
- QYGBYAQGBVHMDD-XQRVVYSFSA-N (z)-2-cyano-3-thiophen-2-ylprop-2-enoic acid Chemical group OC(=O)C(\C#N)=C/C1=CC=CS1 QYGBYAQGBVHMDD-XQRVVYSFSA-N 0.000 claims description 11
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 10
- 229910052799 carbon Inorganic materials 0.000 claims description 10
- JSGVZVOGOQILFM-UHFFFAOYSA-N 3-methoxy-1-butanol Chemical compound COC(C)CCO JSGVZVOGOQILFM-UHFFFAOYSA-N 0.000 claims description 8
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 85
- 239000000470 constituent Substances 0.000 description 32
- 239000000243 solution Substances 0.000 description 27
- 125000004432 carbon atom Chemical group C* 0.000 description 24
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 19
- 238000000034 method Methods 0.000 description 19
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 18
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 18
- 229920001577 copolymer Polymers 0.000 description 17
- 150000002148 esters Chemical class 0.000 description 17
- 125000003700 epoxy group Chemical group 0.000 description 15
- 239000000758 substrate Substances 0.000 description 15
- 239000000178 monomer Substances 0.000 description 14
- 238000006116 polymerization reaction Methods 0.000 description 14
- 239000000203 mixture Substances 0.000 description 13
- 238000006243 chemical reaction Methods 0.000 description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 239000003999 initiator Substances 0.000 description 11
- 239000000049 pigment Substances 0.000 description 11
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 10
- 125000003118 aryl group Chemical group 0.000 description 10
- 238000011161 development Methods 0.000 description 10
- 125000005843 halogen group Chemical group 0.000 description 10
- IMSODMZESSGVBE-UHFFFAOYSA-N 2-Oxazoline Chemical compound C1CN=CO1 IMSODMZESSGVBE-UHFFFAOYSA-N 0.000 description 9
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 9
- 239000002253 acid Substances 0.000 description 9
- 230000000977 initiatory effect Effects 0.000 description 9
- PTJWCLYPVFJWMP-UHFFFAOYSA-N 2-[[3-hydroxy-2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)COCC(CO)(CO)CO PTJWCLYPVFJWMP-UHFFFAOYSA-N 0.000 description 8
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000001035 drying Methods 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 8
- 229920000642 polymer Polymers 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 8
- 239000007787 solid Substances 0.000 description 8
- CBDKQYKMCICBOF-UHFFFAOYSA-N thiazoline Chemical compound C1CN=CS1 CBDKQYKMCICBOF-UHFFFAOYSA-N 0.000 description 8
- 238000002834 transmittance Methods 0.000 description 8
- 239000003513 alkali Substances 0.000 description 7
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- 238000003786 synthesis reaction Methods 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N Methyl ethyl ketone Natural products CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 6
- 125000001931 aliphatic group Chemical group 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 150000007514 bases Chemical class 0.000 description 6
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical group C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 6
- 235000014113 dietary fatty acids Nutrition 0.000 description 6
- 239000000194 fatty acid Substances 0.000 description 6
- 229930195729 fatty acid Natural products 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 6
- 238000003756 stirring Methods 0.000 description 6
- 229910052717 sulfur Inorganic materials 0.000 description 6
- 239000004094 surface-active agent Substances 0.000 description 6
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 6
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 5
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 5
- BAPJBEWLBFYGME-UHFFFAOYSA-N Methyl acrylate Chemical compound COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 5
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical group C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 5
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical group CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 5
- 150000008065 acid anhydrides Chemical class 0.000 description 5
- 125000002723 alicyclic group Chemical group 0.000 description 5
- 150000004292 cyclic ethers Chemical group 0.000 description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 5
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 5
- 125000003566 oxetanyl group Chemical group 0.000 description 5
- 230000009257 reactivity Effects 0.000 description 5
- UAJRSHJHFRVGMG-UHFFFAOYSA-N 1-ethenyl-4-methoxybenzene Chemical compound COC1=CC=C(C=C)C=C1 UAJRSHJHFRVGMG-UHFFFAOYSA-N 0.000 description 4
- SDJHPPZKZZWAKF-UHFFFAOYSA-N 2,3-dimethylbuta-1,3-diene Chemical compound CC(=C)C(C)=C SDJHPPZKZZWAKF-UHFFFAOYSA-N 0.000 description 4
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 4
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 4
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 4
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 4
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 4
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 4
- 150000005215 alkyl ethers Chemical class 0.000 description 4
- 125000002947 alkylene group Chemical group 0.000 description 4
- 125000003277 amino group Chemical group 0.000 description 4
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N benzene Substances C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 4
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 4
- 239000012965 benzophenone Substances 0.000 description 4
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 4
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 4
- 229920006026 co-polymeric resin Polymers 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 4
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 4
- 125000001624 naphthyl group Chemical group 0.000 description 4
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 4
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- KDYFGRWQOYBRFD-UHFFFAOYSA-N succinic acid Chemical compound OC(=O)CCC(O)=O KDYFGRWQOYBRFD-UHFFFAOYSA-N 0.000 description 4
- 229960002317 succinimide Drugs 0.000 description 4
- 239000011593 sulfur Substances 0.000 description 4
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 4
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 4
- RFFLAFLAYFXFSW-UHFFFAOYSA-N 1,2-dichlorobenzene Chemical compound ClC1=CC=CC=C1Cl RFFLAFLAYFXFSW-UHFFFAOYSA-N 0.000 description 3
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 3
- WYGWHHGCAGTUCH-UHFFFAOYSA-N 2-[(2-cyano-4-methylpentan-2-yl)diazenyl]-2,4-dimethylpentanenitrile Chemical compound CC(C)CC(C)(C#N)N=NC(C)(C#N)CC(C)C WYGWHHGCAGTUCH-UHFFFAOYSA-N 0.000 description 3
- LAXBNTIAOJWAOP-UHFFFAOYSA-N 2-chlorobiphenyl Chemical group ClC1=CC=CC=C1C1=CC=CC=C1 LAXBNTIAOJWAOP-UHFFFAOYSA-N 0.000 description 3
- WDQIDQYSOAQPNJ-UHFFFAOYSA-N 3,4-epoxytricyclo[5.2.1.02,6]decyl acrylate Chemical compound C12CC3OC3C2C2(OC(=O)C=C)CC1CC2 WDQIDQYSOAQPNJ-UHFFFAOYSA-N 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Natural products CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 3
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 3
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000002202 Polyethylene glycol Substances 0.000 description 3
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical group CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 244000028419 Styrax benzoin Species 0.000 description 3
- 235000000126 Styrax benzoin Nutrition 0.000 description 3
- 235000008411 Sumatra benzointree Nutrition 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 3
- IPTNXMGXEGQYSY-UHFFFAOYSA-N acetic acid;1-methoxybutan-1-ol Chemical compound CC(O)=O.CCCC(O)OC IPTNXMGXEGQYSY-UHFFFAOYSA-N 0.000 description 3
- 239000003945 anionic surfactant Substances 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 229960002130 benzoin Drugs 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- 239000003093 cationic surfactant Substances 0.000 description 3
- 239000003086 colorant Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000007334 copolymerization reaction Methods 0.000 description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- UAOMVDZJSHZZME-UHFFFAOYSA-N diisopropylamine Chemical compound CC(C)NC(C)C UAOMVDZJSHZZME-UHFFFAOYSA-N 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 3
- 235000019382 gum benzoic Nutrition 0.000 description 3
- OAKJQQAXSVQMHS-UHFFFAOYSA-N hydrazine Substances NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 3
- 125000004029 hydroxymethyl group Chemical group [H]OC([H])([H])* 0.000 description 3
- 150000002576 ketones Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 125000005641 methacryl group Chemical group 0.000 description 3
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- SLCVBVWXLSEKPL-UHFFFAOYSA-N neopentyl glycol Chemical compound OCC(C)(C)CO SLCVBVWXLSEKPL-UHFFFAOYSA-N 0.000 description 3
- 239000002736 nonionic surfactant Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 150000002923 oximes Chemical class 0.000 description 3
- 125000005702 oxyalkylene group Chemical group 0.000 description 3
- 125000006353 oxyethylene group Chemical group 0.000 description 3
- 229920001223 polyethylene glycol Polymers 0.000 description 3
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000010992 reflux Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 125000001424 substituent group Chemical group 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 125000003161 (C1-C6) alkylene group Chemical group 0.000 description 2
- WQONPSCCEXUXTQ-UHFFFAOYSA-N 1,2-dibromobenzene Chemical group BrC1=CC=CC=C1Br WQONPSCCEXUXTQ-UHFFFAOYSA-N 0.000 description 2
- VPBZZPOGZPKYKX-UHFFFAOYSA-N 1,2-diethoxypropane Chemical compound CCOCC(C)OCC VPBZZPOGZPKYKX-UHFFFAOYSA-N 0.000 description 2
- KTADSLDAUJLZGL-UHFFFAOYSA-N 1-bromo-2-phenylbenzene Chemical group BrC1=CC=CC=C1C1=CC=CC=C1 KTADSLDAUJLZGL-UHFFFAOYSA-N 0.000 description 2
- JTPNRXUCIXHOKM-UHFFFAOYSA-N 1-chloronaphthalene Chemical group C1=CC=C2C(Cl)=CC=CC2=C1 JTPNRXUCIXHOKM-UHFFFAOYSA-N 0.000 description 2
- BQTPKSBXMONSJI-UHFFFAOYSA-N 1-cyclohexylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1CCCCC1 BQTPKSBXMONSJI-UHFFFAOYSA-N 0.000 description 2
- 125000004066 1-hydroxyethyl group Chemical group [H]OC([H])([*])C([H])([H])[H] 0.000 description 2
- HIDBROSJWZYGSZ-UHFFFAOYSA-N 1-phenylpyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C1=CC=CC=C1 HIDBROSJWZYGSZ-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 description 2
- JJRUAPNVLBABCN-UHFFFAOYSA-N 2-(ethenoxymethyl)oxirane Chemical compound C=COCC1CO1 JJRUAPNVLBABCN-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- JLBJTVDPSNHSKJ-UHFFFAOYSA-N 4-Methylstyrene Chemical compound CC1=CC=C(C=C)C=C1 JLBJTVDPSNHSKJ-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- HGINCPLSRVDWNT-UHFFFAOYSA-N Acrolein Chemical compound C=CC=O HGINCPLSRVDWNT-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- GKLXZYMUWOOVDQ-UHFFFAOYSA-N C(C1CO1)OCCCC(C(OC)(OC)C)CCCCCCCC Chemical compound C(C1CO1)OCCCC(C(OC)(OC)C)CCCCCCCC GKLXZYMUWOOVDQ-UHFFFAOYSA-N 0.000 description 2
- IEPRKVQEAMIZSS-UHFFFAOYSA-N Di-Et ester-Fumaric acid Natural products CCOC(=O)C=CC(=O)OCC IEPRKVQEAMIZSS-UHFFFAOYSA-N 0.000 description 2
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- FZUGPQWGEGAKET-UHFFFAOYSA-N parbenate Chemical compound CCOC(=O)C1=CC=C(N(C)C)C=C1 FZUGPQWGEGAKET-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- VQSLYBNAHOGNCE-UHFFFAOYSA-N pentan-3-yl propanoate Chemical compound CCC(CC)OC(=O)CC VQSLYBNAHOGNCE-UHFFFAOYSA-N 0.000 description 1
- 229960003742 phenol Drugs 0.000 description 1
- WLVPQQDEYVVXJF-UHFFFAOYSA-N phenyl bicyclo[2.2.1]hept-2-ene-5-carboxylate Chemical compound C1C(C=C2)CC2C1C(=O)OC1=CC=CC=C1 WLVPQQDEYVVXJF-UHFFFAOYSA-N 0.000 description 1
- HPAFOABSQZMTHE-UHFFFAOYSA-N phenyl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)C1=CC=CC=C1 HPAFOABSQZMTHE-UHFFFAOYSA-N 0.000 description 1
- LYXOWKPVTCPORE-UHFFFAOYSA-N phenyl-(4-phenylphenyl)methanone Chemical compound C=1C=C(C=2C=CC=CC=2)C=CC=1C(=O)C1=CC=CC=C1 LYXOWKPVTCPORE-UHFFFAOYSA-N 0.000 description 1
- PJNZPQUBCPKICU-UHFFFAOYSA-N phosphoric acid;potassium Chemical compound [K].OP(O)(O)=O PJNZPQUBCPKICU-UHFFFAOYSA-N 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001228 polyisocyanate Polymers 0.000 description 1
- 239000005056 polyisocyanate Substances 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000011736 potassium bicarbonate Substances 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
- 229910000028 potassium bicarbonate Inorganic materials 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- 239000001508 potassium citrate Substances 0.000 description 1
- 229960002635 potassium citrate Drugs 0.000 description 1
- QEEAPRPFLLJWCF-UHFFFAOYSA-K potassium citrate (anhydrous) Chemical compound [K+].[K+].[K+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QEEAPRPFLLJWCF-UHFFFAOYSA-K 0.000 description 1
- 235000011082 potassium citrates Nutrition 0.000 description 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
- 229940086066 potassium hydrogencarbonate Drugs 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- QTECDUFMBMSHKR-UHFFFAOYSA-N prop-2-enyl prop-2-enoate Chemical compound C=CCOC(=O)C=C QTECDUFMBMSHKR-UHFFFAOYSA-N 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- WPBNLDNIZUGLJL-UHFFFAOYSA-N prop-2-ynyl prop-2-enoate Chemical compound C=CC(=O)OCC#C WPBNLDNIZUGLJL-UHFFFAOYSA-N 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- NCYDRNOBBHFJHE-UHFFFAOYSA-N propane-1,2-diol;prop-1-ene Chemical group CC=C.CC(O)CO NCYDRNOBBHFJHE-UHFFFAOYSA-N 0.000 description 1
- GYOCIFXDRJJHPF-UHFFFAOYSA-N propyl 2-butoxypropanoate Chemical compound CCCCOC(C)C(=O)OCCC GYOCIFXDRJJHPF-UHFFFAOYSA-N 0.000 description 1
- ADOFEJQZDCWAIL-UHFFFAOYSA-N propyl 2-ethoxyacetate Chemical compound CCCOC(=O)COCC ADOFEJQZDCWAIL-UHFFFAOYSA-N 0.000 description 1
- GXKPKHWZTLSCIB-UHFFFAOYSA-N propyl 2-ethoxypropanoate Chemical compound CCCOC(=O)C(C)OCC GXKPKHWZTLSCIB-UHFFFAOYSA-N 0.000 description 1
- ILVGAIQLOCKNQA-UHFFFAOYSA-N propyl 2-hydroxypropanoate Chemical compound CCCOC(=O)C(C)O ILVGAIQLOCKNQA-UHFFFAOYSA-N 0.000 description 1
- FIABMSNMLZUWQH-UHFFFAOYSA-N propyl 2-methoxyacetate Chemical compound CCCOC(=O)COC FIABMSNMLZUWQH-UHFFFAOYSA-N 0.000 description 1
- CYIRLFJPTCUCJB-UHFFFAOYSA-N propyl 2-methoxypropanoate Chemical compound CCCOC(=O)C(C)OC CYIRLFJPTCUCJB-UHFFFAOYSA-N 0.000 description 1
- BMVTVMIDGMNRRR-UHFFFAOYSA-N propyl 2-propoxyacetate Chemical compound CCCOCC(=O)OCCC BMVTVMIDGMNRRR-UHFFFAOYSA-N 0.000 description 1
- HJIYVZIALQOKQI-UHFFFAOYSA-N propyl 3-butoxypropanoate Chemical compound CCCCOCCC(=O)OCCC HJIYVZIALQOKQI-UHFFFAOYSA-N 0.000 description 1
- IYVPXMGWHZBPIR-UHFFFAOYSA-N propyl 3-ethoxypropanoate Chemical compound CCCOC(=O)CCOCC IYVPXMGWHZBPIR-UHFFFAOYSA-N 0.000 description 1
- KNCDNPMGXGIVOM-UHFFFAOYSA-N propyl 3-hydroxypropanoate Chemical compound CCCOC(=O)CCO KNCDNPMGXGIVOM-UHFFFAOYSA-N 0.000 description 1
- JCMFJIHDWDKYIL-UHFFFAOYSA-N propyl 3-methoxypropanoate Chemical compound CCCOC(=O)CCOC JCMFJIHDWDKYIL-UHFFFAOYSA-N 0.000 description 1
- 125000006308 propyl amino group Chemical group 0.000 description 1
- PNXMTCDJUBJHQJ-UHFFFAOYSA-N propyl prop-2-enoate Chemical compound CCCOC(=O)C=C PNXMTCDJUBJHQJ-UHFFFAOYSA-N 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000001057 purple pigment Substances 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000001054 red pigment Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 235000015424 sodium Nutrition 0.000 description 1
- 229910000030 sodium bicarbonate Inorganic materials 0.000 description 1
- 235000017557 sodium bicarbonate Nutrition 0.000 description 1
- 229960004599 sodium borate Drugs 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- 235000011083 sodium citrates Nutrition 0.000 description 1
- AJPJDKMHJJGVTQ-UHFFFAOYSA-M sodium dihydrogen phosphate Chemical compound [Na+].OP(O)([O-])=O AJPJDKMHJJGVTQ-UHFFFAOYSA-M 0.000 description 1
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 1
- 235000010339 sodium tetraborate Nutrition 0.000 description 1
- MWZFQMUXPSUDJQ-KVVVOXFISA-M sodium;[(z)-octadec-9-enyl] sulfate Chemical compound [Na+].CCCCCCCC\C=C/CCCCCCCCOS([O-])(=O)=O MWZFQMUXPSUDJQ-KVVVOXFISA-M 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- BZBMBZJUNPMEBD-UHFFFAOYSA-N tert-butyl bicyclo[2.2.1]hept-2-ene-5-carboxylate Chemical compound C1C2C(C(=O)OC(C)(C)C)CC1C=C2 BZBMBZJUNPMEBD-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- CIHOLLKRGTVIJN-UHFFFAOYSA-N tert‐butyl hydroperoxide Chemical compound CC(C)(C)OO CIHOLLKRGTVIJN-UHFFFAOYSA-N 0.000 description 1
- LVEOKSIILWWVEO-UHFFFAOYSA-N tetradecyl 3-(3-oxo-3-tetradecoxypropyl)sulfanylpropanoate Chemical compound CCCCCCCCCCCCCCOC(=O)CCSCCC(=O)OCCCCCCCCCCCCCC LVEOKSIILWWVEO-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- LDHQCZJRKDOVOX-UHFFFAOYSA-N trans-crotonic acid Natural products CC=CC(O)=O LDHQCZJRKDOVOX-UHFFFAOYSA-N 0.000 description 1
- ZIBGPFATKBEMQZ-UHFFFAOYSA-N triethylene glycol Chemical compound OCCOCCOCCO ZIBGPFATKBEMQZ-UHFFFAOYSA-N 0.000 description 1
- WUUHFRRPHJEEKV-UHFFFAOYSA-N tripotassium borate Chemical compound [K+].[K+].[K+].[O-]B([O-])[O-] WUUHFRRPHJEEKV-UHFFFAOYSA-N 0.000 description 1
- BSVBQGMMJUBVOD-UHFFFAOYSA-N trisodium borate Chemical compound [Na+].[Na+].[Na+].[O-]B([O-])[O-] BSVBQGMMJUBVOD-UHFFFAOYSA-N 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000001052 yellow pigment Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Description
本發明係有關感光性樹脂組成物及顯示裝置。
近年來隨著液晶顯示面板等基板尺寸的大型化,一般為了於基板面上形成表層等透明膜或圖型,係利用旋轉塗布法、縫隙&旋轉法等塗布感光性樹脂組成物而形成。
又就提升生產性、對應大型畫面等觀點曾研究感光性樹脂組成物溶液的省液化,及形成高品質均勻之塗膜的方法。
該背景下為了形成優良品質之塗膜曾模索選擇溶劑種。例如曾揭示利用,使用溶劑為丙二醇一甲醚乙酸酯、3-乙氧基乙基丙酸酯、3-甲氧基1-丁醇及3-甲氧基丁基乙酸酯之混合物的感光性樹脂組成物(例如專利文獻1)。
專利文獻:特開2008-181087號公報 段落91
但使用上述溶劑之感光性樹脂組成物利用的代表性塗布方法為縫模塗布法等時,會發生霧斑、縱紋及針跡,因此現狀上無法得到高品質之塗膜。
故本發明之目的為,提供可抑制霧斑、縱紋及針跡發生,使塗膜整體均勻可形成高品質塗膜的感光性樹脂組成物,及使用其之顯示裝置等。
即,本發明係提供下述[1]至[8]項。
(1)一種感光性樹脂組成物,其為含有樹脂(A)、聚合性化合物(B)、聚合引發劑(C)及溶劑(D),其中溶劑(D)為含有,具有碳數1至3之伸烷基及碳數1至4之烷基的二烷撐二醇二烷醚,與碳數1至6之醇的溶劑。
[2]如[1]之感光性樹脂組成物,其中溶劑(D)為,相對於溶劑全量含有30至90質量%之二烷撐二醇二烷醚。
[3]如[1]或[2]之感光性樹脂組成物,其中溶劑(D)為,相對於溶劑全量含有10至50質量%之碳數1至6的醇。
[4]如[1]至[3]中任何一項之感光性樹脂組成物,其中二烷撐二醇二烷醚為二乙二醇乙基甲醚。
[5]如[1]至[4]中任何一項之感光性樹脂組成物,其中碳數1至6之醇為3-甲氧基丁醇。
[6]一種塗膜,其為使用如[1]至[5]中任何一項之感光性樹脂組成物形成。
[7]一種圖型,其為使用如[1]至[5]中任何一項之感光性樹脂組成物形成。
[8]一種顯示裝置,其為含有如[6]之塗膜及如[7]之圖型所成群中所選出的至少1種。
發明之效果
本發明可形成,能抑制霧斑、縱紋及針跡發生,塗膜整體均勻之高品質的塗膜。
又,利用該感光性樹脂組成物可得高品質之顯示裝置等。
實施發明之形態
本發明之感光性樹脂組成物為,含有樹脂(A)、聚合性化合物(B)、聚合引發劑(C)及溶劑(D)。又本說明書中各成份之化合物例並無特別限定,可單獨或組合使用。
本發明之感光性樹脂組成物所使用的樹脂(A)如,具有鹼溶解性之樹脂(A1)、具有鹼溶解性及藉由光或熱中至少任何一方之作用的反應性之樹脂(A2)等。
具有鹼溶解性之樹脂(A1)如,不飽和羧酸及不飽和羧酸酐所成群中所選出之至少1種(a)(以下稱為「(a)」),或(a)與可共聚合之單體(c)(以下稱為「(c)」)的共聚物等。
(a)之具體例如,丙烯酸、甲基丙烯酸、巴豆酸、o-、m-、p-乙烯基苯甲酸等不飽和一羧酸類;1,4-環己烷二羧酸、甲基-5-降莰烯-2,3-二羧酸等不飽和二羧酸類;馬來酸、富馬酸、檸康酸、中康酸、衣康酸、3-乙烯基酞酸、4-乙烯基酞酸、3,4,5,6-四氫酞酸、1,2,3,6-四氫酞酸、二甲基四氫酞酸等不飽和二羧酸類;其不飽和二羧酸類之酐;琥珀酸一[2-(甲基)丙烯醯氧基乙酯]、酞酸一[2-(甲基)丙烯醯氧基乙基]等2價以上之多價羧酸的不飽和一[(甲基)丙烯醯氧基烷基]酯類;α-(羥基甲基)丙烯酸等同一分子中具有羥基及羥基之不飽和丙烯酸酯類等。
其中就共聚合反應性及鹼溶解性之觀點較佳為使用丙烯酸、甲基丙烯酸、馬來酸酐等。
(c)如,甲基(甲基)丙烯酸酯、乙基(甲基)丙烯酸酯、n-丁基(甲基)丙烯酸酯、sec-丁基(甲基)丙烯酸酯、tert-丁基(甲基)丙烯酸酯等(甲基)丙烯酸烷酯類;環己基(甲基)丙烯酸酯、2-甲基環己基(甲基)丙烯酸酯、三環[5.2.1.02,6]癸烷-8-基(甲基)丙烯酸酯(該技術領域慣用名稱為二環戊烷基(甲基)丙烯酸酯)、二環戊烷氧基乙基(甲基)丙烯酸酯、異甲硼烷基(甲基)丙烯酸酯等(甲基)丙烯酸環狀烷酯類;環己基丙烯酸酯、2-甲基環己基丙烯酸酯、三環[5.2.1.02,6]癸烷-8-基丙烯酸酯(該技術領域慣用名稱為二環戊烷基丙烯酸酯)、二環五氧乙基丙烯酸酯、異甲硼烷基丙烯酸酯等丙烯酸環狀烷酯類;苯基(甲基)丙烯酸酯、苄基(甲基)丙烯酸酯等(甲基)丙烯酸芳酯類;苯基丙烯酸酯、苄基丙烯酸酯等丙烯酸芳酯類;馬來酸二乙酯、富馬酸二乙酯、衣康酸二乙酯等二羧酸二酯;2-羥基乙基(甲基)丙烯酸酯、2-羥基丙基(甲基)丙烯酸酯等羥基烷酯類;二環[2.2.1]庚-2-烯、5-甲基二環[2.2.1]庚-2-烯、5-乙基二環[2.2.1]庚-2-烯、5-羥基二環[2.2.1]庚-2-烯、5-羧基二環[2.2.1]庚-2-烯、5-羥基甲基二環[2.2.1]庚-2-烯、5-(2’-羥基乙基)二環[2.2.1]庚-2-烯、5-甲氧基二環[2.2.1]庚-2-烯、5-乙氧基二環[2.2.1]庚-2-烯、5,6-二羥基二環[2.2.1]庚-2-烯、5,6-二羧基二環[2.2.1]庚-2-烯、5,6-二(羥基甲基)二環[2.2.1]庚-2-烯、5,6-二(2’-羥基乙基)二環[2.2.1]庚-2-烯、5,6-二甲氧基二環[2.2.1]庚-2-烯、5,6-二乙氧基二環[2.2.1]庚-2-烯、5-羥基-5-甲基二環[2.2.1]庚-2-烯、5-羥基-5-乙基二環[2.2.1]庚-2-烯、5-羧基-5-甲基二環[2.2.1]庚-2-烯、5-羧基-5-乙基二環[2.2.1]庚-2-烯、5-羥基甲基-5-甲基二環[2.2.1]庚-2-烯、5-羧基-6-甲基二環[2.2.1]庚-2-烯、5-羧基-6-乙基二環[2.2.1]庚-2-烯、5,6-二羧基二環[2.2.1]庚-2-烯酐(雙環庚烯二甲酸酐)、5-tert-丁氧基羰基二環[2.2.1]庚-2-烯、5-環己氧基羰基二環[2.2.1]庚-2-烯、5-苯氧基羰基二環[2.2.1]庚-2-烯、5,6-二(tert-丁氧基羰基)二環[2.2.1]庚-2-烯、5,6-二(環己氧基羰基)二環[2.2.1]庚-2-烯等二環不飽和化合物類;N-苯基馬來醯亞胺、N-環己基馬來醯亞胺、N-苄基馬來醯亞胺、N-琥珀醯酵亞胺基-3-馬來醯亞胺苯甲酸酯、N-琥珀醯酵亞胺基-4-馬來醯亞胺丁酸酯、N-琥珀醯酵亞胺基-6-馬來醯亞胺己酸酯、N-琥珀醯酵亞胺基-3-馬來醯亞胺丙酸酯、N-(9-吖啶基)馬來醯亞胺等二羰基醯亞胺衍生物類;苯乙烯、α-甲基苯乙烯、m-甲基苯乙烯、p-甲基苯乙烯、乙烯基甲苯、p-甲氧基苯乙烯、丙烯腈、甲基丙烯腈、氯乙烯、偏氯乙烯、丙烯醯胺、甲基丙烯醯胺、乙酸乙烯、1,3-丁二烯、異戊二烯、2,3-二甲基-1,3-丁二烯等。
其中就共聚合反應性及鹼溶解性之觀點較佳為苯乙烯、N-苯基馬來醯亞胺、N-環己基馬來醯亞胺、N-苄基馬來醯亞胺、二環[2.2.1]庚-2-烯等。
(a)及(c)可單獨或組合使用。
又,本說明書中(甲基)丙烯酸酯係指丙烯酸酯及/或甲基丙烯酸酯。
自(a)及(c)共聚合而得之共聚物中,由各自導致之構成成份的比率,以構成前述共聚物之構成成份的合計莫耳數為100莫耳%時較佳為下述範圍。
由(a)導致之構成單位;2至40莫耳%
由(c)導致之構成單位;60至98莫耳%
又,前述構成成份之比率更佳為下述範圍。
由(a)導致之構成單位;5至35莫耳%
由(c)導致之構成單位;65至95莫耳%
前述構成比率為上述範圍時,傾向可得良好的保存安定性、顯像性及耐溶劑性。
前述具有鹼溶解性之樹脂(A1)如,參考文獻「高分子合成之實驗法」(大津隆行著發行所(股)化學同人第1版第1刷1972年3月1日發行)所記載之方法及該文獻所記載之引用文獻等製造。
具體例如,將一定量之構成共聚物用的單位(a)及(c)、聚合引發劑及溶劑等放入反應容器中,藉由氮取代氧,於不存在氧下進行攪拌、加熱、保溫之方法。此時所使用的聚合引發劑及溶劑等並無特別限定,可使用該領域一般使用之物中任何一種。例如可使用後述之聚合引發劑及溶劑等。
又,所得的共聚物可直接作為反應後之溶液用,或可使用濃縮或稀釋後之溶液,及可使用經再沈澱等方法而得的固體(粉體)物。特別是聚合時所使用的溶劑為後述溶劑(D)時,可直接作為反應後之溶液用,故可簡略製造步驟(以下之樹脂(A2)也相同)。
前述具有鹼溶解性之樹脂(A1)的聚苯乙烯換算之重量平均分子量較佳為3,000~100,000,更佳為5,000至50,000。具有鹼溶解性之樹脂(A1)的重量平均分子量為前述範圍時,傾向可得良好塗布性,且顯像時不易減膜,傾向使顯像時可得良好的非畫素部分拔除性而為佳。
具有鹼溶解性之樹脂(A1)的分子量分布[重量平均分子量(Mw)/數平均分子量(Mn)]較佳為1.1至6.0,更佳為1.2至4.0。分子量分布為前述範圍時,傾向可得優良顯像性而為佳。
本發明之感光性樹脂組成物所使用的具有鹼溶解性之樹脂(A1)的含量,相對於感光性樹脂組成物中之固體成份,質量分率較佳為5至90質量%,更佳為10至70質量%。具有鹼溶解性之樹脂(A1)的含量為前述範圍時,對顯像液具有充分溶解性,不易於非畫素部分之基板上發生顯像殘渣,且顯像時不易使曝光部之畫素部分減膜,傾向可得良好的非曝光部分拔除性而為佳。
具有鹼溶解性及藉由光與熱中至少一方之作用的反應性之樹脂(A2)如,樹脂(A2-1):(a)、(c)及具有碳數2至4之環狀醚構造的化合物(b)(以下稱為「(b)」)之共聚物,樹脂(A2-2):(a)及(c)之共聚物與(b)反應而得的共聚物,樹脂(A2-3):(a)及(b)之共聚物等。
(b)為具有碳數2至4之環狀醚構造的化合物,即具有環氧基、氧雜環丁烷基及四氫呋喃基所成群中所選出之至少1種基的聚合性化合物。(b)較佳為具有碳數2至4之環狀醚構造,且具有乙烯性碳-碳不飽和鍵之化合物,更佳為具有碳數2至4之環狀醚構造,且具有丙烯醯基或甲基丙烯醯基之化合物。
(b)如,具有環氧基之單體(b1)(以下稱為「(b1)」)、具有氧雜環丁烷基之單體(b2)(以下稱為「(b2)」)、具有四氫呋喃基之單體等。
(b1)如,具有脂肪族環氧基及脂環式環氧基所成群中所選出的至少1種基之聚合性化合物。該具有環氧基之單體較佳為具有脂肪族環氧基及脂環式環氧基所成群中所選出的至少1種基,且具有乙烯性碳-碳不飽和鍵之化合物,更佳為具有脂肪族環氧基及脂環式環氧基所成群中所選出的至少1種構造,且具有丙烯醯基或甲基丙烯醯基之化合物。
其中脂肪族環氧基係指,單環之茂烷基。脂環式環氧基係指,具有脂環式碳化氫之環與茂烷環縮合而得之構造的基。
(A2)之(b1)中具有脂肪族環氧基,且具有乙烯性碳-碳不飽和鍵之化合物的具體例如,縮水甘油基(甲基)丙烯酸酯、β-甲基縮水甘油基(甲基)丙烯酸酯、β-乙基縮水甘油基(甲基)丙烯酸酯、縮水甘油基乙烯醚、特開平7-248625號公報所記載之下述式所示的化合物等。
(式中,R11至R13各自獨立為氫原子或碳原子數1至10之烷基,m為1至5之整數)。
前述式所示之化合物如,o-乙烯基苄基縮水甘油醚、m-乙烯基苄基縮水甘油醚、p-乙烯基苄基縮水甘油醚、α-甲基-o-乙烯基苄基縮水甘油醚、α-甲基-m-乙烯基苄基縮水甘油醚、α-甲基-p-乙烯基苄基縮水甘油醚、2,3-二環氧丙氧基甲基苯乙烯、2,4-二環氧丙氧基甲基苯乙烯、2,5-二環氧丙氧基甲基苯乙烯、2,6-二環氧丙氧基甲基苯乙烯、2,3,4-三環氧丙氧基甲基苯乙烯、2,3,5-三環氧丙氧基甲基苯乙烯、2,3,6-三環氧丙氧基甲基苯乙烯、3,4,5-三環氧丙氧基甲基苯乙烯、2,4,6-三環氧丙氧基甲基苯乙烯等。
(A2)之(b1)中具有脂環式環氧基,且具有乙烯性碳-碳不飽和鍵之化合物如,乙烯基環己烯一氧化物1,2-環氧-4-乙烯基環己烷(例如Ceroxide 2000;DAICEL化學工業(股)製)、3,4-環氧環己基甲基丙烯酸酯(例如Cyclomer A400;DAICEL化學工業(股)製)、3,4-環氧環己基甲基甲基丙烯酸酯(例如Cyclomer M100;泰歇爾化學工業(股)製),或式(I)所表示之化合物及式(II)所表示之化合物所成群中所選出的至少1種化合物。
[式(I)及式(II)中,R及R’各自獨立為氫原子或可被羥基取代的碳數1至4之烷基。
X及X’各自獨立為單鍵、C1-6伸烷基、氧基-C1-6伸烷基、硫基-C1-6伸烷基、胺基-C1-6伸烷基、C1-6伸烷基-氧基、C1-6伸烷基-硫基或C1-6伸烷基-胺基]。
烷基之具體例如,甲基、乙基、n-丙基、異丙基、n-丁基、sec-丁基、tert-丁基等。
羥基烷基如,羥基甲基、1-羥基乙基、2-羥基乙基、1-羥基-n-丙基、2-羥基-n-丙基、3-羥基-n-丙基、1-羥基-異丙基、2-羥基-異丙基、1-羥基-n-丁基、2-羥基-n-丁基、3-羥基-n-丁基、4-羥基-n-丁基等。
取代基R及R’較佳如氫原子、甲基、羥基甲基、1-羥基乙基、2-羥基乙基,更佳如氫原子、甲基。
伸烷基如,伸甲基、伸乙基、伸丙基等。
氧化烯基如,氧化甲烯基、氧化乙烯基、氧化丙烯基等。
環氧烷基如,環氧甲烷基、環氧乙烷基、環氧丙烷基等。
硫伸烷基如,硫伸甲基、硫伸乙基、硫伸丙基等。
伸烷基硫基如,伸甲基硫基、伸乙基硫基、伸丙基硫基等。
胺基伸烷基如,胺基伸甲基、胺基伸乙基、胺基伸丙基等。
伸烷基胺基如,伸甲基胺基、伸乙基胺基、伸丙基胺基等。
取代基X及X’較佳如單鍵、伸甲基、伸乙基、氧化甲烯基、氧化乙烯基,更佳如單鍵、氧化乙烯基。
式[I]所表示之化合物如,式(I-1)至式(I-15)所表示之化合物等。較佳為式(I-1)、式(I-3)、式(I-5)、式(I-7)、式(I-9)、式(I-11)至式(I-15)。更佳為式(I-1)、式(I-7)、式(I-9)、式(I-15)。
式[II]所表示之化合物如,式(II-1)至式(II-15)所表示之化合物等。較佳為式(II-1)、式(II-3)、式(II-5)、式(II-7)、式(II-9)、式(II-11)至式(II-15)。更佳為式(II-1)、式(II-7)、式(II-9)、式(II-15)。
式(I)所表示之化合物及式(II)所表示之化合物所成群中所選出的至少1種化合物可各自單獨使用。又,此等可以任意比率混合。混合時其混合比率之莫耳比較佳為,式(I):式(II)為5:95至95:5,又以10:90至90:10為佳,更佳為20:80至80:20。
共聚物(A2-1)及(A2-2)中具有(b2)之氧雜環丁烷基,且具有不飽和鍵之化合物如,3-甲基-3-甲基丙烯氧基甲基氧雜環丁烷、3-甲基-3-丙烯氧基甲基氧雜環丁烷、3-乙基-3-甲基丙烯氧基甲基氧雜環丁烷、3-乙基-3-丙烯氧基甲基氧雜環丁烷、3-甲基-3-甲基丙烯氧基乙基氧雜環丁烷、3-甲基-3-丙烯氧基乙基氧雜環丁烷、3-乙基-3-甲基丙烯氧基乙基氧雜環丁烷、3-乙基-3-丙烯氧基乙基氧雜環丁烷等。
共聚物(A2-1)中,由各自導致之構成成份的比率,相對於構成共聚物(A2-1)用之構成成份的合計莫耳數之莫耳分率較佳為下述範圍。
由(a)導致之構成單位;2至40莫耳%
由(c)導致之構成單位;1至65莫耳%
由(b1)或(b2)導致之構成單位;2至95莫耳%
又,前述之構成成份的比率更佳為下述範圍。
由(a)導致之構成單位;5至35莫耳%
由(c)導致之構成單位;1至60莫耳%
由(b1)或(b2)導致之構成單位:5至80莫耳%
前述構成比率為上述範圍時,傾向可得良好的保存安定性、顯像性、耐溶劑性、耐熱性及機械強度。
前述具有鹼性溶解性之樹脂(A2-1)例如可參考文獻「高分子合成之實驗法」(大津隆行著發行所(股)化學同人第1版第1刷1972年3月1日發行)所記載之方法及該文獻所記載之引用文獻等製造。
具體如,將一定量構成共聚物用之單位(a)、(c)及導致(b1)或(b2)的化合物、聚合引發劑及溶劑加入反應容器中,藉由氮取代氧,於不存在氧下進行攪拌、加熱、保溫之方法。
樹脂(A2-2)例如可經由二階段之步驟製造。此時也可參考上述文獻「高分子合成之實驗法」(大津隆行著發行所(股)化學同人第1版第1刷1972年3月1日發行)所記載之方法、特開2001-89533號公報所記載之方法等製造。
首先第一階段為,以同上述具有鹼溶解性之樹脂(A1)的製造方法,製造共聚物(即具有鹼可溶性之樹脂)。
此時同上述可引用各種形態。又適用上述之聚苯乙烯換算的重量平均分子量及分子量分布[重量平均分子量(Mw)/數平均分子量(Mn)]。
但由(a)及(c)導致之構成成份的比率,相對於構成前述共聚物用之構成成份的合計莫耳數之莫耳分率較佳為下述範圍。
由(a)導致之構成單位;5至50莫耳%
由(c)導致之構成單位;50至95莫耳%
又,前述之構成成份的比率更佳為下述範圍。
由(a)導致之構成單位;10至45莫耳%
由(c)導致之構成單位;55至90莫耳%
其次第二階段為,使來自所得共聚物的部分(a)羧酸及羧酸酐,與來自前述(b1)或(b2)的環氧基或氧雜環丁烷基反應。
具體例如,接續上述以空氣取代燒瓶內環境中的氮後,將相對於構成成份(a)之莫耳數為5至80莫耳%的構成成份(b1)或(b2),及相對於單體(a)至(c)之合計量,質量基準下為0.001至5%的羧基與環氧基或氧雜環丁烷基之反應觸媒用例如三個二甲基胺基甲基苯酚,及相對於單體(a)至(c)之合計量,質量基準下為0.001至5%的聚合禁止劑用例如氫醌加入燒瓶內,再以60至130℃持續反應1至10小時。如此可得樹脂(A2-2)。又同聚合條件可考量製造設備及聚合時之發熱量等適當調整添加方法及反應溫度。
又,此時(b1)或(b2)之莫耳數相對於(a)之莫耳數較佳為10至75莫耳%,更佳為15至70莫耳%。該範圍下傾向可得良好的保存安定性、顯像性、耐溶劑性、耐熱性、機械強度及敏感度之平衡性。
樹脂(A2-3)中,由各自導致之構成成份的比率相對於構成鹼可溶性樹脂(A2-3)用之構成成份的合計莫耳數,莫耳分率較佳為下述範圍。
由(a)導致之構成單位;5至95莫耳%
由(b1)或(b2)導致之構成單位;5至95莫耳%
又,前述之構成成份的比率更佳為下述範圍。
由(a)導致之構成單位;10至90莫耳%
由(b1)或(b2)導致之構成單位;10至90莫耳%
前述之構成比率為上述範圍時,傾向可得良好的保存安定性、顯像性、耐溶劑性、耐熱性及機械強度。
樹脂(A2-3)例如可參考文獻「高分子合成之實驗法」(大津隆行著發行所(股)化學同人第1版第1刷1972年3月1日發行)所記載之方法及該文獻所記載之引用文獻等製造。
具體例如,將一定量構成共聚物用之單位(a)及導致(b1)或(b2)之化合物、聚合引發劑及溶劑放入反應容器中,以氮取代氧後,於不存在氧下進行攪拌、加熱、保溫可得聚合物。又所得共聚物可直接作為反應後之溶液用,或可使用濃縮或稀釋後之溶液,及可使用經再沈澱等方法而得的固體(粉體)物。
本發明之感光性樹脂組成物所含有的聚合性化合物(B)為具有聚合性下,並無特別限制,例如可為單官能單體、2官能單體、3官能以上之多官能單體等。
單官能單體如,壬基苯基卡必醇(甲基)丙烯酸酯、2-羥基-3-苯氧基丙基(甲基)丙烯酸酯、2-乙基己基卡必醇(甲基)丙烯酸酯、2-(2-乙氧基乙氧基)乙基(甲基)丙烯酸酯、己內酯(甲基)丙烯酸酯、乙氧基化壬基苯酚(甲基)丙烯酸酯、丙氧基化壬基苯酚(甲基)丙烯酸酯等(甲基)丙烯酸酯;苯乙烯、α-、o-、m-、p-甲基苯乙烯、p-甲氧基苯乙烯、p-tert-丁氧基苯乙烯、氯甲基苯乙烯等苯乙烯類;丁二烯、2,3-二甲基丁二烯、異戊二烯等二烯類;(甲基)丙烯酸-甲酯、(甲基)丙烯酸-乙酯、(甲基)丙烯酸-n-丙酯、(甲基)丙烯酸-i-丙酯、(甲基)丙烯酸-n-丁酯、(甲基)丙烯酸-sec-丁酯、(甲基)丙烯酸-tert-丁酯、(甲基)丙烯酸-2-乙基己酯、(甲基)丙烯酸月桂酯、(甲基)丙烯酸十二酯、(甲基)丙烯酸十八酯、(甲基)丙烯酸-二環戊烷酯、(甲基)丙烯酸-異甲硼烷酯、(甲基)丙烯酸-環己酯、(甲基)丙烯酸-2-甲基環己酯、(甲基)丙烯酸-二環己酯、(甲基)丙烯酸-金剛烷酯、(甲基)丙烯酸-烯丙酯、(甲基)丙烯酸-炔丙酯、(甲基)丙烯酸-苯酯、(甲基)丙烯酸-萘酯、(甲基)丙烯酸-蒽酯、(甲基)丙烯酸-環戊酯、(甲基)丙烯酸-呋喃酯、(甲基)丙烯酸-四氫呋喃酯、(甲基)丙烯酸-吡喃酯、(甲基)丙烯酸-苄酯、(甲基)丙烯酸-苯乙酯、(甲基)丙烯酸-甲苯酯、(甲基)丙烯酸-1,1,1-三氟乙酯、(甲基)丙烯酸-全氟乙酯、(甲基)丙烯酸-全氟-n-丙酯、(甲基)丙烯酸-全氟-i-丙酯、(甲基)丙烯酸-三苯基甲酯、(甲基)丙烯酸-金剛烷酯、(甲基)丙烯酸-枯酯等(甲基)丙烯酸烷酯、(甲基)丙烯酸環烷酯或(甲基)丙烯酸芳酯;(甲基)丙烯酸-2-羥基乙酯、(甲基)丙烯酸-2-羥基丙酯等(甲基)丙烯酸羥基烷酯;(甲基)丙烯酸-醯胺、-N,N-二甲基醯胺、-N,N-丙基醯胺等(甲基)丙烯酸醯胺;(甲基)丙烯酸-醯替苯胺、(甲基)丙烯腈、丙烯醛、氯乙烯、偏氯乙烯、N-乙烯基吡咯烷酮、乙酸乙烯等乙烯化合物;馬來酸二乙酯、富馬酸二乙酯、衣康酸二乙酯等不飽和二羧酸二酯;縮水甘油基(甲基)丙烯酸酯、α-乙基縮水甘油基(甲基)丙烯酸酯、α-n-丙基縮水甘油基(甲基)丙烯酸酯、α-n-丁基縮水甘油基(甲基)丙烯酸酯、3,4-環氧丁基(甲基)丙烯酸酯、3,4-環氧庚基(甲基)丙烯酸酯、α-乙基-6,7-環氧基庚基(甲基)丙烯酸酯、烯丙基縮水甘油醚、乙烯基縮水甘油醚等縮水甘油基化合物等。
2官能單體之具體例如,1,3-丁二醇二(甲基)丙烯酸酯、1,3-丁二醇(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、聚乙二醇二丙烯酸酯、雙酚A之雙(丙烯醯氧基乙基)醚、乙氧基化雙酚A二(甲基)丙烯酸酯、丙氧基化新戊二醇二(甲基)丙烯酸酯、乙氧基化新戊二醇二(甲基)丙烯酸酯、3-甲基戊二醇二(甲基)丙烯酸酯等。
3官能以上之多官能單體如,三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、三(2-羥基乙基)三聚異氰酸酯三(甲基)丙烯酸酯、乙氧基化三羥甲基丙烷三(甲基)丙烯酸酯、丙氧基化三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、三季戊四醇四(甲基)丙烯酸酯、三季戊四醇五(甲基)丙烯酸酯、三季戊四醇六(甲基)丙烯酸酯、三季戊四醇七(甲基)丙烯酸酯、三季戊四醇八(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯與酸酐之反應物、二季戊四醇五(甲基)丙烯酸酯與酸酐之反應物、三季戊四醇七(甲基)丙烯酸酯與酸酐己內酯改性三羥甲基丙烷三(甲基)丙烯酸酯、己內酯改性季戊四醇三(甲基)丙烯酸酯、己內酯改性三(2-羥基乙基)三聚異氰酸酯三(甲基)丙烯酸酯、己內酯改性季戊四醇四(甲基)丙烯酸酯、己內酯改性二季戊四醇五(甲基)丙烯酸酯、己內酯改性二季戊四醇六(甲基)丙烯酸酯、己內酯改性三季戊四醇四(甲基)丙烯酸酯、己內酯改性三季戊四醇五(甲基)丙烯酸酯、己內酯改性三季戊四醇六(甲基)丙烯酸酯、己內酯改性三季戊四醇七(甲基)丙烯酸酯、己內酯改性三季戊四醇八(甲基)丙烯酸酯、己內酯改性季戊四醇三(甲基)丙烯酸酯與酸酐之反應物、己內酯改性二季戊四醇五(甲基)丙烯酸酯與酸酐之反應物、己內酯改性三季戊四醇七(甲基)丙烯酸酯與酸酐等。其中較佳為使用2官能以上之單體。
聚合性化合物(B)之含量相對於樹脂(A)及聚合性化合物(B)之合計量,質量分率較佳為1至70質量%,更佳為5至60質量%。聚合性化合物(B)之含量為前述範圍時,傾向可得良好的敏感性、塗膜及圖型之強度及平滑性、信賴性、機械強度而為佳。
本發明之感光性樹脂組成物所含的聚合引發劑(C)可為,藉由光或熱之作用可引發聚合之化合物,並無特別限定,可使用已知之聚合引發劑。
聚合引發劑(C)較佳如,二咪唑系化合物、乙醯苯系化合物、三嗪系化合物、醯基膦氧化物系化合物、肟系化合物。又可使用特開2008-181087號公報所記載之光及/或熱陽離子聚合引發劑(例如由鎓鹽陽離子及來自路易斯酸之陰離子所構成之物)。其中又以具有優良敏感度之二咪唑系化合物更佳。
前述二咪唑化合物如,2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(2,3-二氯苯基)-4,4’,5,5’-四苯基二咪唑(例如參考特開平6-75372號公報、特開平6-75373號公報等)、2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(烷氧基苯基)二咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(二烷氧基苯基)二咪唑、2,2’-雙(2-氯苯基)-4,4’,5,5’-四(三烷氧基苯基)二咪唑(例如參考特公昭48-38403號公報、特開昭62-174204號公報等)、4,4’,5,5’-位之苯基被碳烷氧基取代之咪唑化合物(例如參考特開平7-10913號公報等)等。較佳為2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(2,3-二氯苯基)-4,4’,5,5’-四苯基二咪唑、2,2’-雙(2,4-二氯苯基)-4,4’,5,5’-四苯基二咪唑。
前述乙醯苯系化合物如,二乙氧基乙醯苯、2-羥基-2-甲基-1-苯基丙烷-1-酮、苄基二甲縮酮、2-羥基-1-[4-(2-羥基乙氧基)苯基]-2-甲基丙烷-1-酮、2-羥基-1-{4-[4-(2-羥基-2-甲基-丙醯基)-苄基]-苯基}-2-甲基-丙烷-1-酮、1-羥基環己基苯基酮、2-甲基-1-(4-甲基硫苯基)-2-嗎啉基丙烷-1-酮、2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)丁烷-1-酮、2-(2-甲基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(3-甲基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(4-甲基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(2-乙基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(2-丙基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(2-丁基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(2,3-二甲基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(2,4-二甲基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(2-氯苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(2-溴苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(3-氯苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(4-氯苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(3-溴苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(4-溴苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(2-甲氧基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(3-甲氧基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(4-甲氧基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(2-甲基-4-甲氧基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(2-甲基-4-溴苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-(2-溴-4-甲氧基苄基)-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮、2-羥基-2-甲基-1-[4-(1-甲基乙烯基)苯基]丙烷-1-酮之低聚物等。
前述三嗪系化合物如,2,4-雙(三氯甲基)-6-(4-甲氧基苯基)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-(4-甲氧基萘基)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-胡椒基-1,3,5-三嗪、2,4-雙(三氯甲基)-6-(4-甲氧基苯乙烯基)-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(5-甲基呋喃-2-基)乙烯基]-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(呋喃-2-基)乙烯基]-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(4-二乙基胺基-2-甲基苯基)乙烯基]-1,3,5-三嗪、2,4-雙(三氯甲基)-6-[2-(3,4-二甲氧基苯基)乙烯基]-1,3,5-三嗪等。
前述醯基膦氧化物系引發劑如,2,4,6-三甲基苯醯二苯基膦氧化物等。
前述肟化合物如,O-乙氧基羰基-α-氧亞胺基-1-苯基丙烷-1-酮、式(III)所表示之化合物、式(IV)所表示之化合物等。
又,上述聚合引發劑(C)較佳為併用聚合引發助劑(C-1)。聚合引發助劑(C-1)如,式(V)所表示之化合物。
[式(V)中,X所表示之無線為可被鹵原子取代之碳數6至12的芳香環,Y為氧原子、硫原子,R1為碳數1至6之烷基,R2為可被鹵原子取代之碳數1至12的烷基或可被鹵原子取代之芳基]。
鹵原子如,氟原子、氯原子、溴原子等。
碳數6至12之芳香環如,苯環、萘環等。
可被鹵原子取代之碳數6至12的芳香環如,苯環、甲基苯環、三甲基苯環、乙基苯環、丙基苯環、丁基苯環、戊基苯環、己基苯環、環己基苯環、氯苯環、二氯苯環、溴苯環、二溴苯環、苯基苯環、氯苯基苯環、溴苯基苯環、萘環、氯萘環、溴萘環等。
碳數1至6之烷基如,甲基、乙基、n-丙基、異丙基、n-丁基、1-甲基-n-丙基、2-甲基-n-丙基、tert-丁基、n-戊基、1-甲基-n-丁基、2-甲基-n-丁基、3-甲基-n-丁基、1,1-二甲基-n-丙基、1,2-二甲基-n-丙基、2,2-二甲基-n-丙基、n-己基、環己基等。
可被鹵原子取代之碳數1至12的烷基如,甲基、乙基、n-丙基、異丙基、n-丁基、1-甲基-n-丙基、2-甲基-n-丙基、tert-丁基、n-戊基、1-甲基-n-丁基、2-甲基-n-丁基、3-甲基-n-丁基、1,1-二甲基-n-丙基、1,2-二甲基-n-丙基、2,2-二甲基-n-丙基、n-己基、環己基、1-氯-n-丁基、2-氯-n-丁基、3-氯-n-丁基等。
可被鹵原子取代之芳基如,苯基、氯苯基、二氯苯基、溴苯基、二溴苯基、氯溴苯基、聯苯基、氯聯苯基、二氯聯苯基、溴苯基、二溴苯基、萘基、氯萘基、二氯萘基、溴萘基、二溴萘基等。
又,本說明書中任何化學構造式會因碳數而異,並無特別限制,各取代基適用於上述例示。另外可同時為直鏈或支鏈雙方之物也包含此等任何物。
式(V)所表示之化合物的具體例如,2-苯醯伸甲基-3-甲基-萘并[2,1-d]噻唑啉、2-苯醯伸甲基-3-甲基-萘并[1,2-d]噻唑啉、2-苯醯伸甲基-3-甲基-萘并[2,3-d]噻唑啉、2-(2-苯醯伸甲基)-3-甲基苯并噻唑啉、2-(1-苯醯伸甲基)-3-甲基苯并噻唑啉、2-(2-苯醯伸甲基)-3-甲基-5-苯基苯并噻唑啉、2-(1-苯醯伸甲基)-3-甲基-5-苯基苯并噻唑啉、2-(2-苯醯伸甲基)-3-甲基-5-氟苯并噻唑啉、2-(1-苯醯伸甲基)-3-甲基-5-氟苯并噻唑啉、2-(2-苯醯伸甲基)-3-甲基-5-氟苯并噻唑啉、2-(1-苯醯伸甲基)-3-甲基-5-氯苯并噻唑啉、2-(2-苯醯伸甲基)-3-甲基-5-溴苯并噻唑啉、2-(1-苯醯伸甲基)-3-甲基-5-溴苯并噻唑啉、2-(4-聯苯醯伸甲基)-3-甲基苯并噻唑啉、2-(4-聯苯醯伸甲基)-3-甲基-5-苯基苯并噻唑啉、2-(2-萘醯伸甲基)-3-甲基-萘并[2,1-d]噻唑啉、2-(2-萘醯伸甲基)-3-甲基-萘并[1,2-d]噻唑啉、2-(4-聯苯醯伸甲基)-3-甲基-萘并[2,1-d]噻唑啉、2-(4-聯苯醯伸甲基)-3-甲基-萘并[1,2-d]噻唑啉、2-(p-氟苯醯伸甲基)-3-甲基-萘并[2,1-d]噻唑啉、2-(p-氟苯醯伸甲基)-3-甲基-萘并[1,2-d]噻唑啉、2-苯醯伸甲基-3-甲基-萘并[2,1-d]噁唑啉、2-苯醯伸甲基-3-甲基-萘并[1,2-d]噁唑啉、2-苯醯伸甲基-3-甲基-萘并[2,3-d]噁唑啉、2-(2-萘醯伸甲基)-3-甲基苯并噁唑啉、2-(1-萘醯伸甲基)-3-甲基苯并噁唑啉、2-(2-萘醯伸甲基)-3-甲基-5-苯基苯并噁唑啉、2-(1-萘醯伸甲基)-3-甲基-5-苯基苯并噁唑啉、2-(2-萘醯伸甲基)-3-甲基-5-氟苯并噁唑啉、2-(1-萘醯伸甲基)-3-甲基-5-氟苯并噁唑啉、2-(2-萘醯伸甲基)-3-甲基-5-氯苯并噁唑啉、2-(1-萘醯伸甲基)-3-甲基-5-氯苯并噁唑啉、2-(2-萘醯伸甲基)-3-甲基-5-溴苯并噁唑啉、2-(1-萘醯伸甲基)-3-甲基-5-溴苯并噁唑啉、2-(4-聯苯醯伸甲基)-3-甲基苯并噁唑啉、2-(4-聯苯醯伸甲基)-3-甲基-5-苯基苯并噁唑啉、2-(2-萘醯伸甲基)-3-甲基-萘并[2,1-d]噁唑啉、2-(2-萘醯伸甲基)-3-甲基-萘并[1,2-d]噁唑啉、2-(4-聯苯醯伸甲基)-3-甲基-萘并[2,1-d]噁唑啉、2-(4-聯苯醯伸甲基)-3-甲基-萘并[1,2-d]噁唑啉、2-(p-氟苯醯伸甲基)-3-甲基-萘并[2,1-d]噁唑啉、2-(p-氟苯醯伸甲基)-3-甲基-萘并[1,2-d]噁唑啉等。
其中較佳為,式(V-1)所表示之2-(2-萘醯伸甲基)-3-甲基苯并噻唑啉、式(V-2)所表示之2-苯醯伸甲基-3-甲基-萘并[1,2-d]噻唑啉及式(V-3)所表示之2-(4-聯苯醯伸甲基)-3-甲基-萘并[1,2-d]噻唑啉。
使用此等化合物時,所得的感光性樹脂組成物可具有更高敏感度。使用所得的感光性樹脂組成物形成塗膜及圖型時,可提升塗膜及圖型之生產性而為佳、式(V)所表示之化合物不會因塗膜後烤時之熱度而昇華,可藉由光及熱中至少任何一方之作用而退色提升透明性而為佳。
又,聚合引發助劑(C-1)可使用式(VI)及式(VII)所成群中所選出的至少1種所表示之化合物。
[式(VI)及式(VII)中,環X1及環X2各自獨立為可被鹵原子取代之碳數6至12的芳香環或雜環。Y1及Y2為氧原子或硫原子。R1及R2為碳數1至12之烷基或碳數6至12之芳基。此等烷基及芳基可被鹵原子、羥基或碳數1至6之烷氧基取代]。
可被鹵原子取代之芳香環或雜環如,苯環、甲基苯環、二甲基苯環、乙基苯環、丙基苯環、丁基苯環、戊基苯環、己基苯環、環己基苯環、氯苯環、二氯苯環、溴苯環、二溴苯環、苯基苯環、氯苯基苯環、溴苯基苯環、萘環、氯萘環、溴萘環、菲環、環、熒蒽環、苯并[a]芘環、苯并[e]芘環、苝環及此等之衍生物等。
羥基取代烷基如,羥基甲基、羥基乙基、羥基丙基、羥基丁基等。
羥基取代芳基如,羥基苯基、羥基萘基等。
烷氧基取代烷基如,甲氧基甲基、甲氧基乙基、甲氧基丙基、甲氧基丁基、丁氧基甲基、乙氧基乙基、乙氧基丙基、丙氧基丁基等。
烷氧基取代芳基如,甲氧基苯基、乙氧基萘基等。
式(VI)及式(VII)所表示之化合物的具體例如,二甲氧基萘、二乙氧基萘、二丙氧基萘、二異丙氧基萘、二丁氧基萘等二烷氧基萘類;二甲氧基蒽、二乙氧基蒽、二丙氧基蒽、二異丙氧基蒽、二丁氧基蒽、二戊氧基蒽、二己氧基蒽、甲氧基乙氧基蒽、甲氧基丙氧基蒽、甲氧基異丙氧基蒽、甲氧基丁氧基蒽、乙氧基丙氧基蒽、乙氧基異丙氧基蒽、乙氧基丁氧基蒽、丙氧基異丙氧基蒽、丙氧基丁氧基蒽、異丙氧基丁氧基蒽等二烷氧基蒽類;二甲氧基丁省、二乙氧基丁省、二丙氧基丁省、二異丙氧基丁省、二丁氧基丁省等二烷氧基丁省類等。
又,上述聚合引發劑(C)可使用光聚合引發劑。
光聚合引發劑如,苯偶因系化合物、二苯甲酮系化合物、噻噸酮系化合物、蒽系化合物等。
苯偶因系化合物如,苯偶因、苯偶因甲醚、苯偶因乙醚、苯偶因異丙醚、苯偶因異丁醚等。
前述二苯甲酮系化合物如,二苯甲酮、o-苯醯苯甲酸甲酯、4-苯基二苯甲酮、4-苯醯-4’-甲基二苯基硫化物、3,3’,4,4’-四(tert-丁基過氧化羰基)二苯甲酮、2,4,6-三甲基二苯甲酮等。
前述噻噸酮系化合物如,2-異丙基噻噸酮、4-異丙基噻噸酮、2,4-二乙基噻噸酮、2,4-二氯噻噸酮、1-氯-4-丙氧基噻噸酮等。
前述蒽系化合物如,9,10-二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧基蒽、2-乙基-9,10-二乙氧基蒽等。
又,可以10-丁基-2-氯吖啶酮、2-乙基蒽醌、苄酯、9,10-菲醌、莰醌、苯基乙醛酸甲酯、茂鈦化合物等作為光聚合引發劑。
又,具有可鏈轉移之基的光聚合引發劑可使用特表2002-544205號公報所記載之光聚合引發劑。
前述具有可鏈轉移之基的光聚合引發劑如,下述式(1)至(6)之光聚合引發劑。
前述具有可鏈轉移之基的光聚合引發劑可作為構成樹脂(A)之成份用。
又,上述聚合引發劑較佳為併用聚合引發助劑(C-2)。
聚合引發助劑(C-2)如,胺化合物及羧酸化合物等。
胺化合物如,三乙醇胺、甲基二乙醇胺、三異丙醇胺等脂肪族胺化合物、4-二甲基胺基苯甲酸甲酯、4-二甲基胺基苯甲酸乙酯、4-二甲基胺基安息香酸異戊酯、4-二甲基胺基苯甲酸2-乙基己酯、苯甲酸2-二甲基胺基乙酯、N,N-二甲基對甲苯胺、4,4’-雙(二甲基胺基)二苯甲酮(通稱米蚩酮)、4,4’-雙(二乙基胺基)二苯甲酮般芳香族胺化合物。
羧酸化合物如,苯基硫乙酸、甲基苯基硫乙酸、乙基苯基硫酸、甲基乙基苯基硫乙酸、二甲基苯基硫乙酸、甲氧基苯基硫乙酸、二甲氧基苯基硫乙酸、氯苯基硫乙酸、二氯苯基硫乙酸、N-苯基胺基乙酸、苯氧基乙酸、萘基硫乙酸、N-萘基胺基乙酸、萘氧基乙酸等芳香族雜乙酸類。
聚合引發劑(C)之含量相對於樹脂(A)及聚合性化合物(B)的合計量,質量分率較佳為0.1至40質量%,更佳為1至30質量%。
聚合引發劑(C)之合計量為該範圍時,可使感光性樹脂組成物具有高敏感性,又使用該感光性樹脂組成物形成的塗膜及圖型傾向可得良好的強度及表面平滑性而為佳。
聚合引發助劑(C-1)及/或(C-2)之使用量相對於樹脂(A)及聚合性化合物(B)的合計量,質量分率較佳為0.01至50質量%,更佳為0.1至40質量%。
聚合引發助劑(C-1)及/或(C-2)之量為該範圍時,可進一步提高所得感光性樹脂組成物之敏感度,又傾向可提升使用該感光性樹脂組成物形成圖型基板之生產性而為佳。
特別是使用式(V)所表示之化合物時,其含量相對於聚合引發助劑(C-1)之含量較佳為50至100%,更佳為60至100%,特佳為65至100%。式(V)所表示之化合物含量為該範圍時,使用含其之感光性樹脂組成物形成塗膜時,塗膜可得良好的透明性而為佳。
又,本發明之感光性樹脂組成物可另含有多官能硫醇化合物(T)。該多官能硫醇化合物(T)為,分子內具有2個以上硫烷基之化合物。其中使用具有2個以上的鍵結2個以上脂肪族碳化氫基之碳原子的硫烷基之化合物時,可提高本發明之感光性樹脂組成物的敏感度而為佳。
多官能硫醇化合物(T)之具體例如,己烷二硫醇、癸烷二硫醇、1,4-二甲基巰基苯、丁二醇雙硫丙酸酯、丁二醇雙巰基乙酸酯、乙二醇雙巰基乙酸酯、三羥甲基丙烷三巰基乙酸酯、丁二醇雙硫丙酸酯、三羥甲基丙烷三硫丙酸酯、三羥甲基丙烷三巰基乙酸酯、季戊四醇四硫丙酸酯、季戊四醇四巰基乙酸酯、三羥基乙基三硫丙酸酯、季戊四醇四(3-巰基丁酸酯)、1,4-雙(3-巰基丁醯氧基)丁烷等。
多官能硫醇化合物(T)之含量相對於聚合引發助劑(C)的質量分率較佳為0.5至100質量%,更佳為1至90質量%。又多官能硫醇化合物之含量相對於黏合劑樹脂(A)及光聚合性化合物(C)的合計量,質量分率較佳為0.1至20質量%,更佳為1至10質量%。多官能硫醇化合物(T)之含量為該範圍時會提高敏感度,又傾向可得良好的顯像性而為佳。
本發明之感光性樹脂組成物所使用的溶劑(D)較佳為,可均勻溶解樹脂(A)、聚合性化合物(B)及聚合引發劑(C)等構成成份,且不會與各成份反應之物。溶劑(D)更佳為,至少含有特定之二烷撐二醇二烷醚,及特定之醇雙方的溶劑。又二烷撐二醇二烷醚及醇可各自單獨使用,或2種以上併用。
二烷撐二醇二烷醚為,各自含有2個以上碳數1至3之伸烷基及碳數1至4之烷基的溶劑,伸烷基及烷基可各自相同或相異。
該類二烷撐二醇二烷醚如,二乙二醇二甲醚、二乙二醇乙基甲醚、二乙二醇二乙醚、二乙二醇二-n-丙醚、二乙二醇異丙基甲醚、二乙二醇丁基甲醚、二乙二醇二丁醚、二丙二醇二甲醚、二丙二醇乙基甲醚、二丙二醇二乙醚、二丙二醇甲基丙醚、二丙二醇丁基甲醚、二丙二醇乙基丙醚、二丙二醇丁基乙醚、二丙二醇丁基丙醚、二丙二醇二丁醚等。其中較佳為二乙二醇乙基甲醚。
二烷撐二醇二烷醚相對於溶劑(D)全量較佳為含有30至90質量%,更佳為30至80質量%,特佳為30至70質量%。該範圍時可抑制塗膜之乾燥斑。即,乾燥塗膜時,一般係以減壓乾燥法乾燥溶劑,但為了縮短乾燥時間,需以短時間進行減壓。此時會造成溶劑突沸,而成為發生乾燥斑之原因,但使用該範圍之二烷撐二醇二烷醚時,可有效防止塗膜之乾燥斑。
醇較佳為碳數1至6之醇。該醇可為單醇或2價以上之多價醇。
該類醇如,甲醇、乙醇、丙醇、丁醇、戊醇、己醇、環己醇、丙二醇甲醚、丙二醇乙醚、丙二醇丙醚、乙二醇、乙二醇-甲醚、乙二醇-乙醚、乙二醇-丙醚、乙二醇-丁醚、乳酸甲酯、乳酸乙酯、乳酸丙酯、2-甲基乳酸甲酯、二丙酮醇、3-甲氧基丁醇、甘油、2-羥基丙酸乙酯、2-羥基-2-甲基丙酸甲酯、2-羥基-2-甲基丙酸乙酯、3-羥基丙酸甲酯、3-羥基丙酸乙酯、3-羥基丙酸丙酯、羥基乙酸甲酯、羥基乙酸乙酯、羥基乙酸丁酯等。其中較佳為3-甲氧基丁醇。
乙醇相對於溶劑(D)全量較佳為含有10至50質量%,更佳為10至45質量%,特佳為15至40質量%。
含有該範圍之醇時,樹脂等可得充分溶解性,且可適當調整黏度使所得塗膜具有均勻性。又既使使用縫隙模頭塗布機塗布感光性樹脂組成物,也可防止噴嘴前端乾燥,抑制由乾燥物析出異物,而確實防止起因於異物之縱紋。
又,必要時可另併用下述溶劑。
例如,甲基溶纖劑乙酸酯、乙基溶纖劑乙酸酯、乙二醇-丁醚乙酸酯、乙二醇-乙醚乙酸酯等乙二醇烷醚乙酸酯類;丙二醇-甲醚乙酸酯、丙二醇-乙醚乙酸酯、丙二醇-丙醚乙酸酯、甲氧基丁基乙酸酯、甲氧基戊基乙酸酯等烷二醇烷醚乙酸酯類;丙二醇-丁醚等碳數7以上之丙二醇-烷醚類;丙二醇二甲醚、丙二醇二乙醇、丙二醇乙基甲醚、丙二醇二丙醚丙二醇丙基甲醚、丙二醇乙基丙醚等丙二醇二烷醚類;丙二醇甲醚丙酸酯、丙二醇乙醚丙酸酯、丙二醇丙醚丙酸酯、丙二醇丁醚丙酸酯等丙二醇烷醚丙酸酯類;丙氧基丁醇、丁氧基丁醇等碳數7以上之丁二醇一烷醚類;甲氧基丁基乙酸酯、乙氧基丁基乙酸酯、丙氧基丁基乙酸酯、丁氧基丁基乙酸酯等丁二醇一烷醚乙酸酯類;甲氧基丁基丙酸酯、乙氧基丁基丙酸酯、丙氧基丁基丙酸酯、丁氧基丁基丙酸酯等丁二醇一烷醚丙酸酯類;苯、甲苯、二甲苯、等芳香族碳化氫類;甲基乙基酮、丙酮、甲基戊酮、甲基異丁酮、環己酮等酮類;乙酸甲酯、乙酸乙酯、乙酸丙酯、乙酸丁酯、甲氧基乙酸甲酯、甲氧基乙酸乙酯、甲氧基乙酸丙酯、甲氧基乙酸丁酯、乙氧基乙酸甲酯、乙氧基乙酸乙酯、乙氧基乙酸丙酯、乙氧基乙酸丁酯、丙氧基乙酸甲酯、丙氧基乙酸乙酯、丙氧基乙酸丙酯、丙氧基乙酸丁酯、丁氧基乙酸甲酯、丁氧基乙酸乙酯、丁氧基乙酸丙酯、丁氧基乙酸丁酯、2-甲氧基丙酸甲酯、2-甲氧基丙酸乙酯、2-甲氧基丙酸丙酯、2-甲氧基丙酸丁酯、2-乙氧基丙酸甲酯、2-乙氧基丙酸乙酯、2-乙氧基丙酸丙酯、2-乙氧基丙酸丁酯、2-丁氧基丙酸甲酯、2-丁氧基丙酸乙酯、2-丁氧基丙酸丙酯、2-丁氧基丙酸丁酯、3-甲氧基丙酸甲酯、3-甲氧基丙酸乙酯、3-甲氧基丙酸丙酯、3-甲氧基丙酸丁酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、3-乙氧基丙酸丙酯、3-乙氧基丙酸丁酯、3-丙氧基丙酸甲酯、3-丙氧基丙酸乙酯、3-丙氧基丙酸丙酯、3-丙氧基丙酸丁酯、3-丁氧基丙酸甲酯、3-丁氧基丙酸乙酯、3-丁氧基丙酸丙酯、3-丁氧基丙酸丁酯等酯類;乳酸丁酯、3-羥基丙酸丁酯、2-羥基-3-甲基丁酸甲酯等碳數7以上之含羥基的酯類;四氫呋喃、吡喃等環狀醚類;γ-丁內酯等環狀酯類等。
上述溶劑中就塗布性、乾燥性觀點、又以沸點為100℃至200℃之有機溶劑為佳。其中較佳為烷二醇烷醚乙酸酯類、酮類、丁二醇烷醚乙酸酯類、碳數7以上之丁二醇一烷醚類、3-乙氧基丙酸乙酯、3-甲氧基丙酸甲酯等酯類,更佳為丙二醇一甲醚乙酸酯、丙二醇一乙醚乙酸酯、環己酮、甲氧基丁基乙酸酯、3-乙氧基丙酸乙酯、3-甲氧基丙酸甲酯。
但以僅使用上述二烷撐二醇二烷醚及醇為佳。
本發明之感光性樹脂組成物中溶劑(D)之含量相對於感光性樹脂組成物的質量分率較佳為60至90質量%,更佳為65至85質量%。溶劑(D)之含量為該範圍時,相對於旋塗機、縫隙&旋塗機、縫隙塗機(也稱為模頭塗機、簾流塗機)、油噴機、輥塗機、浸塗機等各種塗布裝置可得良好塗布性。
本發明之感光性樹脂組成物為,實質上不含顏料及染料等著色劑。即,本發明之感光性樹脂組成物中相對於組成物全體的著色劑之含量例如,質量分率未達1質量%,較佳為未達0.5質量%。
例如,本發明之感光性樹脂組成物實質上不含該領域所使用的下述著色劑。
色彩索引(The Society of Dyers and Colourists出版)分類為顏料(Pigment)之化合物,具體例如,C.I.顏料黃1、3、12、13、14、15、16、17、20、24、31、53、83、86、93、94、109、110、117、125、128、137、138、139、147、148、150、153、154、166、173、194、214等黃色顏料;C.I.顏料橘13、31、36、38、40、42、43、51、55、59、61、64、65、71、73等橘色顏料;C.I.顏料紅9、97、105、122、123、144、149、166、168、176、177、180、192、209、215、216、224、242、254、255、264、265等紅色顏料;C.I.顏料藍15、15:3、15:4、15:6、60等藍色顏料;C.I.顏料紫1、19、23、29、32、36、38等紫色顏料;C.I.顏料綠7、36等綠色顏料;C.I.顏料褐23、25等褐色顏料;C.I.顏料黑1、7等黑色顏料。
本發明之感光性樹脂組成物於必要時可併用填充劑、其他高分子化合物、表面活性劑、密合促進劑、防氧化劑、紫外線吸收劑、光安定劑、鏈轉移劑等各種添加劑。
填充劑如,玻璃、二氧化矽、氧化鋁等。
其他高分子化合物如,環氧樹脂、馬來醯亞胺樹脂等硬化性樹脂聚乙烯醇、聚丙烯酸、聚乙二醇一烷醚、聚氟烷基丙烯酸酯、聚酯、聚胺基甲酸乙酯等熱可塑性樹脂等。
表面活性劑可為聚矽氧烷系、氟系、酯系、陽離子系、陰離子系、非離子系、兩性等表面活性劑等任何物。具體例如,聚環氧乙烷烷醚類、聚環氧乙烷烷基苯醚類、聚乙二醇二酯類、山梨糖醇酐脂肪酸酯類、脂肪酸改性聚酯類、3級胺改性聚胺基甲酸乙酯類、聚吖丙啶類等,及市售表面活性劑。例如,商品名KP(信越化學工業(股)製)、Polyflow(共榮化學(股)製)、Ftop(三菱材料電子化成(股))、Megafac(DIC(股)製)、Fluorad(住友3M(股)製)、Surflon(AGC Semi-Chemical(股)製)、Solsperse(Zeneca(股)製)、EFKA(CIBA公司製)、Ajisupa PB821(味之素(股)製)等。
密合促進劑如,乙烯基三甲氧基甲烷、乙烯基三乙氧基矽烷、乙烯基三(2-甲氧基乙氧基)矽烷、N-(2-胺基乙基)-3-胺基丙基甲基二甲氧基矽烷、N-(2-胺基乙基)-3-胺基丙基三甲氧基矽烷、3-胺基丙基三乙氧基矽烷、3-環氧丙氧基丙基三甲氧基矽烷、3-環氧丙氧基丙基甲基二甲氧基矽烷、3-環氧丙氧基丙基甲基二甲氧基矽烷、2-(3,4-環氧環己基)乙基三甲氧基矽烷、3-氯丙基甲基二甲氧基矽烷、3-氯丙基三甲氧基矽烷、3-甲基丙烯醯氧基丙基三甲氧基矽烷、3-巰基丙基三甲氧基矽烷等。
防氧化劑如,2-tert-丁基-6-(3-tert-丁基-2-羥基-5-甲基苄基)-4-甲基苯基丙烯酸酯、2-[1-(2-羥基-3,5-二-tert-戊基苯基)乙基]-4,6-二-tert-戊基苯基丙烯酸酯、6-[3-(3-tert-丁基-4-羥基-5-甲基苯基)丙氧基]-2,4,8,10-四-tert-丁基二苯并[d,f][1,3,2]二氧雜磷雜頻、3,9-雙[2-{3-(3-tert-丁基-4-羥基-5-甲基苯基)丙醯氧基}-1,1-二甲基乙基]-2,4,8,10-四氧雜螺[5.5]十一烷、2,2’-伸甲基雙(6-tert-丁基-4-甲基苯酚)、4,4’-亞丁基雙(6-tert-丁基-3-甲基苯酚)、4,4’-硫雙(2-tert-丁基-5-甲基苯酚)、2,2’-硫雙(6-tert-丁基-4-甲基苯酚)、二月桂基3,3’-硫二丙酸酯、二肉豆蔻基3,3’-硫二丙酸酯、二硬脂醯3,3’-硫二丙酸酯、季戊四醇四(3-月桂基硫丙酸酯)、1,3,5-三(3,5-二-tert-丁基-4-羥基苄基)-1,3,5-三嗪-2,4,6(1H,3H,5H)-三酮、3,3’,3”,5,5’,5”-六-tert-丁基-a,a’,a”-(-2,4,6-三基)三-p-甲酚、季戊四醇四[3-(3,5-二-tert-丁基-4-羥基苯基)丙酸酯]、2,6-二-tert-丁基-4-甲基苯酚等。
紫外線吸收劑如,2-(2-羥基-5-tert-丁基苯基)-2H-苯并三唑、辛基-3-[3-tert-丁基-4-羥基-5-(5-氯-2H-苯并三唑-2-基)苯基]丙酸酯、2-[4-[(2-羥基-3-十二烷氧基丙基)氧基]-2-羥基苯基]-4,6-雙(2,4-二甲基苯基)-1,3,5-三嗪、2-[4-[(2-羥基-3-(2’-乙基)己基)氧基]-2-羥基苯基]-4,6-雙(2,4-二甲基苯基)-1,3,5-三嗪、2,4-雙(2-羥基-4-丁氧基苯基)-6-(2,4-雙-丁氧基苯基)-1,3,5-三嗪、2-(2-羥基-4-[1-辛氧基羰基乙氧基]苯基)-4,6-雙(4-苯基苯基)-1,3,5-三嗪、2-(2H-苯并三唑-2-基)-4,6-雙(1-甲基-1-苯基乙基)苯酚、2-(2H-苯并三唑-2-基)-6-(1-甲基-1-苯基乙基)-4-(1,1,3,3-四甲基丁基)苯酚、2-(3-tert-丁基-2-羥基-5-甲基苯基)-5-氯苯并三唑、烷氧基二苯甲酮等。
光安定劑如,自琥珀酸及(4-羥基-2,2,6,6-四甲基哌啶-1-基)乙醇形成之高分子、N,N’,N”,N”’-四(4,6-雙(丁基(N-甲基-2,2,6,6-四甲基哌唑-4-基)胺基)三嗪-2-基)-4,7-二氮雜癸烷-1,10-二胺、癸烷二雙酸,及雙(2,2,6,6-四甲基-1-(辛氧基)-4-哌啶基)酯,及1,1-二甲基乙基氫過氧化物之反應性、雙(1,2,2,6,6-五甲基-4-哌啶基)-[[3,5-雙(1,1-二甲基乙基)-4-羥基苯基]甲基]丁基丙二酸酯、2,4-雙[N-丁基-N-(1-環己氧基-2,2,6,6-四甲基哌啶-4-基)胺基]-6-(2-羥基乙基胺)-1,3,5-三嗪、雙(1,2,2,6,6-五甲基-4-哌啶基)癸二酸酯、甲基(1,2,2,6,6-五甲基-4-哌啶基)癸二酸酯等。
鏈轉移劑如,十二烷基硫醇、2,4-二苯基-4-甲基-1-戊烯等。
本發明之感光性樹脂組成物可如後述,藉由塗布於基材,例如玻璃、金屬、塑料等基板、彩色濾光器、形成各種絕緣膜或導電膜、驅動回路等之此等基板上形成塗膜。塗膜較佳為乾燥及硬化之物。又所得塗膜可製圖為希望之形狀而得圖型。另外此等塗膜及/或圖型可作為顯示裝置等構成構件之一部分使用。
又,將本發明之硬化性樹脂組成物填入光路長1cm之石英單元中,使用分光光度計測定測定波長400至700nm之條件下的透光率時,平均透光率較佳為70%以上,更佳為75%以上。如此可形成可視光領域中透明之圖型及塗膜。
首先,將本發明之感光性樹脂組成物塗布於基材上。
塗布時可如上述使用旋塗機、縫隙&旋塗機、縫隙塗布機、油墨噴塗機、輥塗機、浸塗機等各種塗布裝置進行。其中就溶解性、防乾燥、防異物發生等較佳為使用縫隙塗布法塗布,即較佳為利用縫隙&旋塗機及縫隙塗布機等進行塗布。
其次進行乾燥及/或預烤,以去除溶劑等揮發成份為佳。如此可得平滑未硬化塗膜。
此時之塗膜膜厚並無特別限制,可依所使用之材料、用途等適當調整,例如1至6μm。
接著介由形成目的圖型用之圖罩,將光線,例如自水銀燈、發光二極管發生的紫外線等照射於所得的未硬化塗膜上。此時圖罩之形狀並無特別限定,可為各種形狀。又線幅等可藉由圖罩尺寸等適當調整。
近年來曝光機可利用切除未達350nm之光線的濾光器切除該波長域的同時,利用能取出436nm附近、408nm附近、365nm附近之光線的譜帶透過濾光器選擇性取出此等波長域,均勻將平行光線照射於曝光面全體。此時為了使圖罩及基材以正確位置分體,可使用圖罩光刻機、進階機等裝置。
其後使塗膜接觸鹼水溶液以溶解一定部分,例如非曝光部,顯像後可得目的之圖型形狀。
顯像方法可為盛液法、浸漬法、噴霧法等任何一種。另外顯像時可以任意角度傾斜基材。
顯像所使用的顯像液一般為,含有鹼性化合物及表面活性劑之水溶液。
鹼性化合物可為無機及有機之鹼性化合物中任何一種。
無機鹼性化合物之具體例如,氫氧化鈉、氫氧化鉀、磷酸氫二鈉、磷酸二氫鈉、磷酸氫二銨、磷酸二氫銨、磷酸二氫鉀、矽酸鈉、矽酸鉀、碳酸鈉、碳酸鉀、碳酸氫鈉、碳酸氫鉀、硼酸鈉、硼酸鉀、氨等。
又,有機鹼性化合物如,四甲基銨氫氧化物、2-羥基乙基三甲基銨氫氧化物、一甲基胺、二甲基胺、三甲基胺、一乙基胺、二乙基胺、三乙基胺、一異丙基胺、二異丙基胺、乙醇胺等。
此等無機及有機鹼性化合物於鹼顯像液中之濃度較佳為0.01至10質量%,更佳為0.03至5質量%。
表面活性劑可為非離子系表面活性劑、陰離子系表面活性劑或陽離子系表面活性劑。
非離子系表面活性劑如,聚環氧乙烷烷醚、聚環氧乙烷芳醚、聚環氧乙烷烷基芳醚、其他聚環氧乙烷衍生物、環氧乙烷/環氧丙烷嵌段共聚物、山梨糖醇酐脂肪酸酯、聚環氧乙烷山梨糖醇酐脂肪酸酯、聚環氧乙烷山梨糖醇脂肪酸酯、甘油脂肪酸酯、聚環氧乙烷脂肪酸酯、聚環氧乙烷烷基胺等。
陰離子系表面活性劑如,月桂醇硫酸酯鈉及油醇硫酸酯鈉等高級醇硫酸酯鹽類、月桂基硫酸鈉及月桂基硫酸銨等烷基硫酸鹽類、十二烷基苯磺酸鈉及十二烷基萘磺酸鈉等烷基芳基磺酸鹽類等。
陽離子系表面活性劑如,硬脂醯胺鹽酸鹽及月桂基三甲基銨氯化物等胺鹽或四級銨鹽等。
鹼顯像液中表面活性劑之濃度較佳為0.01至10質量%,更佳為0.05至8質量%,特佳為0.1至5質量%。
顯像後進行水洗,又必要時可進行後烤。後烤例如可於150至230℃下進行10至180分鐘。
本發明之硬化性樹脂組成物較佳為,加熱硬化(例如150至250℃、0.1至3小時)後使用分光光度計測定厚3μm之塗膜於測定波長400至700nm之條件下的透光率時,透光率為90%以上,更佳為95%以上。如此可形成可視光領域中透明之圖型及塗膜。
將由此而得的圖型及塗膜使用於例如液晶顯示裝置時,適用為光調距器,可製圖之保護膜。又對未硬化塗膜實施製圖曝光時,可使用形成孔用光圖罩形成孔,而適用為層間絕緣膜。另外對未硬化塗膜實施曝光時,不使用光圖罩下可藉由實施全面曝光及加熱硬化或僅實施加熱硬化而形成透明膜。該透明膜適用為保護膜。又可使用於觸控面板等顯示裝置。如此可以高合格率製造備有高品質之塗膜或圖型的顯示裝置。
本發明之感光性樹脂組成物適用為形成各種膜及圖型用之材料,例如透明膜,特別是構成彩色濾光器之一部分的透明膜、圖型、光調距器、保護膜、絕緣膜、控制液晶配向用突出物、微透鏡、組合不同之膜厚的著色圖型、保護層等。又可利用於備有該構成構件之一部分用的此等塗膜或圖型的彩色濾光器、數組基板等,或備有此等彩色濾光器及/或數組基板等之顯示裝置,例如液晶顯示裝置、有機EL裝置等。
實施例
下面將以實施例更詳細說明本發明之感光性樹脂組成物,但本發明非限定於此等實施例。又下述實施例及比較例中,無特別註明下表示含量或使用量之%及份為質量基準。
合成例1
以流速0.02L/分使氮流動於備有回流冷卻器、滴液漏斗及攪拌機之1L燒瓶內,放入二乙二醇乙基甲醚140份後攪拌下加熱至70℃。其次調製甲基丙烯酸40份、3,4-環氧三環[5.2.1.02,6]癸基丙烯酸酯(式(I-1)所表示之化合物及式(II-1)所表示之化合物的莫耳比50:50之混合物)360份溶解於二乙二醇乙基甲醚190份之溶液,再使用滴液唧筒以4小時將所得的溶解液滴入保溫為70℃之燒瓶內。
又,使用另一滴液漏斗以5小時將聚合引發劑2,2’-偶氮雙(2,4-二甲基戊腈)30份溶解於二乙二醇乙基甲醚240份之溶液滴入燒瓶內。結束聚合引發劑溶液滴液後,保持於70℃下4小時,再冷卻至室溫,得固體成份42.6%、酸價60mg-KOH/g之共聚物(樹脂Aa)溶液。所得樹脂Aa之重量平均分子量(Mw)為8000,分散度為1.91。
合成例2
以流速0.02L/分使氮流動於備有回流冷卻器、滴液漏斗及攪拌機之1L燒瓶內,放入二乙二醇乙基甲醚305份後,攪拌下加熱至70℃。其次調製甲基丙烯酸60份、3,4-環氧三環[5.2.1.02,6]癸基丙烯酸酯(式(I-1)所表示之化合物及式(II-1)所表示之化合物的莫耳比50:50之混合物)240份溶解於二乙二醇乙基甲醚140份之溶液,再使用滴液漏斗以4小時將該溶解液滴入保溫於70℃之燒瓶內。另外使用另一滴液漏斗以4小時將聚合引發劑2,2’-偶氮雙(2,4-二甲基戊腈)30份溶解於二乙二醇乙基甲醚225份之溶液滴入燒瓶內。結束聚合引發劑之溶液滴液後,70℃下保持4小時再冷卻至室溫,得固體成份32.6%、酸價110mg-KOH/g(固體成份換算)之共聚物(樹脂Ab)溶液。所得樹脂Ab之重量平均分子量Mw為13,600,分散度為2.49。
合成例3
以流速0.02L/分使氮流動於備有回流冷卻器、滴液漏斗及攪拌機之1L燒瓶內,放入3-甲氧基-1-丁醇200份及3-甲氧基丁基乙酸酯105份後,攪拌下加熱至70℃。其次調製甲基丙烯酸60份、3,4-環氧三環[5.2.1.02,6]癸基丙烯酸酯(式(I-1)所表示之化合物及式(II-1)所表示之化合物的莫耳比50:50之混合物)240份溶解於3-甲氧基丁基乙酸酯140份之溶液,使用滴液漏斗以4小時將該溶解液滴入保溫於70℃之燒瓶內。另外使用另一滴液漏斗以4小時將聚合引發劑2,2’-偶氮雙(2,4-二甲基戊腈)30份溶解於3-甲氧基丁基乙酸酯225份之溶液滴入燒瓶內。結束聚合引發劑之溶液滴液後,保持於70℃下4小時後冷卻至室溫,得固體成份32.6%、酸價110mg-KOH/g(固體成份換算)之共聚物(樹脂Ac)溶液。所得樹脂Ac之重量平均分子量Mw為13,400,分散度為2.50。
測定共聚物(樹脂Aa至Ac)之重量平均分子量(Mw)及數平均分子量(Mn)係使用GPC法,以下述條件進行。
裝置:K2479(島津製作所(股)製)
柱:SHIMADZU Shim-pack GPC-80M
柱溫度:40℃
溶劑:THF(四氫呋喃)
流速:1.0mL/min
驗出器:RI
以上述所得的聚苯乙烯換算之重量平均分子量及數平均分子量的比值作為分散度(Mw/Mn)。
實施例1至9、比較例1
混合表1之組成物,得感光性樹脂組成物1至10。
<評估霧斑>
使用縫隙模頭塗布機(卓模-100伊藤忠產機(股)製)各自將實施例及比較例所得的感光性樹脂組成物溶液,塗布於15cm角之ITO成膜玻璃基板上,使硬化後之膜厚為5.5μm。
其後使用減壓乾燥機(VCO微技術(股)製)將減壓度減壓乾燥至0.5torr。熱板上以90℃預烤2分鐘形成塗膜。
冷卻後以Na燈照射膜表面,再以目視確認塗膜表面。
明確確認霧斑(雲狀斑)時為×,僅確認時為△,幾乎無法確認時為○。
<評估針跡>
同上述形成塗膜後減壓乾燥。其後將開孔且孔徑為60mm之厚20mm的不銹鋼板載置於設定為90℃之熱板上,預烤2分鐘形成塗膜。
冷卻後以Na燈照射膜表面,再以目視確認塗膜表面。
明確確認針跡時為×,僅確認時為△,幾乎未確認時為○。
同上述形成塗膜。
其後不洗淨噴嘴前端而直接放置,1分鐘後於未洗淨噴嘴下進行同樣塗布。
其次使用減壓乾燥機(VCD微技術(股)製)將減壓度減壓乾燥至0.5torr後,於熱板上以90℃預烤2分鐘形成塗膜。
冷卻後以Na燈照射膜表面,再以目視確認塗膜表面。
明確確認為縱紋時為×,僅確認時為△,幾乎未確認時為○。
<組成物之平均透光率>
使用紫外可視近紅外分光光度計(V-650;日本分光(股)製)(石英單元,光路長:1cm),測定400至700nm之平均透光率(%)。
<圖型之平均透光率>
使用各感光性樹脂組成物,以下述方法製作硬化後膜厚為3μm之硬化膜。
依序以中性洗劑、水及2-丙醇洗淨5cm角之玻璃基板後乾燥。使用旋塗機將組成物塗布於該基板上,使烘烤後之圖型膜厚為3μm。其次使用減壓乾燥機(VCD微技術(股)製)將減壓度減壓乾燥至0.5torr形成塗膜。熱板上以90℃預烤該塗膜2分鐘後,以基板與石英玻璃製光圖罩之間隔為10μm的條件,使用曝光機(TME-150RSK,特普康(股)製,光源:超高壓水銀燈),於大氣下以100mJ/cm2之曝光量(405nm基準)將預烘後之塗膜曝光。又曝光時來自超高壓水銀燈之放射光係通過光學濾光器(LU0400,朝日分光(股)製)照射,且使用形成100μm之線與空間圖型用的光圖罩。曝光後浸漬於23℃之四甲基銨氫氧化物水溶液(水溶液100份中含有2.38份之四甲基銨氫氧化物) 60秒,顯像後水洗,再於熱板上以235℃後烤11分鐘,形成線與空間圖型。
使用顯微分光測光裝置(OSP-SP200;OLYMPUS公司製),測定400至700nm之平均透光率(%)。
透光率較高表示吸收力較小。
表1中各成份如下所述。
聚合性化合物(B):二季戊四六丙烯酸酯(KAYARAD DPHA:日本化藥(股)製)
聚合引發劑(C)Ca:1-(4-苯基硫烷苯基)辛烷-1,2-二酮-2-肟-O-苯甲酸酯(OXE 01:Ciba Japan製)
聚合引發劑(C)Cb:2,2’-雙(2-氯苯基)-4,4’,5,5’-四苯基-1,2’-聯二咪唑(B-CIM:保土谷化學(股)製)
引發助劑C2a:季戊四醇四丙酸酯(SC有機化學(股)製PEMP)
引發助劑C2b:2-(2-萘醯伸甲基)-3-甲基苯并噻唑啉
溶劑Da:3-甲氧基1-丁醇
溶劑Db:丙二醇一甲醚
溶劑Dc:二乙二醇乙基甲醚
溶劑Dd:丙二醇一甲醚乙酸酯
溶劑De:3-甲氧基丁基乙酸酯
溶劑Df:3-乙氧基乙基丙酸酯
如上述使用本發明之感光性樹脂組成物形成塗膜時,既使塗布形成較厚膜厚,也不會發生霧斑、縱紋及針跡,可使塗膜整體均勻平滑,形成高品質塗膜。即,因沸點較低可縮短塗布乾燥時間,而提升生產性。又可抑制縫隙噴嘴前端乾燥,而防止發生起因於乾燥之異物、混入塗布膜及縱紋。
又,樹脂及各種成份之溶解性良好,可提升保存安定性。
使用該感光性樹脂組成物形成圖型及塗膜後,利用此等製造顯示裝置時,可提升合格率。
本發明可形成不會發生霧斑、縱紋及針跡,使塗膜整體均勻之高品質的塗膜。
又,利用本發明之感光性樹脂組成物可得高品質之顯示裝置等。
Claims (7)
- 一種感光性樹脂組成物,其為含有樹脂(A)、聚合性化合物(B)、聚合引發劑(C)及溶劑(D),其中,溶劑(D)為含有具有碳數1至3之伸烷基及碳數1至4之烷基的二烷撐二醇二烷醚(dialkylene glycol dialkyl ether),與3-甲氧基丁醇的溶劑。
- 如申請專利範圍第1項之感光性樹脂組成物,其中溶劑(D)為,相對於溶劑全量含有30至90質量%之二烷撐二醇二烷醚。
- 如申請專利範圍第1或2項之感光性樹脂組成物,其中溶劑(D)為,相對於溶劑全量含有10至50質量%之3-甲氧基丁醇。
- 如申請專利範圍第1或2項之感光性樹脂組成物,其中二烷撐二醇二烷醚為二乙二醇乙基甲醚。
- 一種塗膜,其為使用如申請專利範圍第1或2項之感光性樹脂組成物形成。
- 一種圖型,其為使用如申請專利範圍第1或2項之感光性樹脂組成物形成。
- 一種顯示裝置,其為含有如申請專利範圍第5項之塗膜及如申請專利範圍第6項之圖型所成群中所選出的至少1種。
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JP2009258353A (ja) * | 2008-04-16 | 2009-11-05 | Fujifilm Corp | 感光性樹脂組成物及びフォトスペーサー |
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2009
- 2009-11-06 TW TW098137789A patent/TWI521300B/zh active
- 2009-11-11 JP JP2009257607A patent/JP5735207B2/ja active Active
- 2009-11-13 KR KR1020090109593A patent/KR101676871B1/ko active IP Right Grant
- 2009-11-16 CN CN200910221745.XA patent/CN101738859B/zh active Active
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CN101738859B (zh) | 2014-11-05 |
TW201033731A (en) | 2010-09-16 |
CN101738859A (zh) | 2010-06-16 |
JP2015099390A (ja) | 2015-05-28 |
JP5735207B2 (ja) | 2015-06-17 |
KR101676871B1 (ko) | 2016-11-16 |
JP2010152335A (ja) | 2010-07-08 |
JP5933056B2 (ja) | 2016-06-08 |
KR20100056384A (ko) | 2010-05-27 |
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