TWI489598B - A heater for a bonding device and a cooling method thereof - Google Patents

A heater for a bonding device and a cooling method thereof Download PDF

Info

Publication number
TWI489598B
TWI489598B TW102106499A TW102106499A TWI489598B TW I489598 B TWI489598 B TW I489598B TW 102106499 A TW102106499 A TW 102106499A TW 102106499 A TW102106499 A TW 102106499A TW I489598 B TWI489598 B TW I489598B
Authority
TW
Taiwan
Prior art keywords
capillary
heater
cooling
insulating material
heat insulating
Prior art date
Application number
TW102106499A
Other languages
English (en)
Chinese (zh)
Other versions
TW201405731A (zh
Inventor
瀬山耕平
千田恭弘
角谷修
Original Assignee
新川股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 新川股份有限公司 filed Critical 新川股份有限公司
Publication of TW201405731A publication Critical patent/TW201405731A/zh
Application granted granted Critical
Publication of TWI489598B publication Critical patent/TWI489598B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • B23K1/0016—Soldering of electronic components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00—Tools, devices or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/04—Heating appliances
    • B23K3/047—Heating appliances electric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00—Tools, devices or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/08—Auxiliary devices therefor
    • B23K3/085—Cooling, heat sink or heat shielding means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
    • H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
    • H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
    • H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/20—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater
    • H05B3/22—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible
    • H05B3/26—Heating elements having extended surface area substantially in a two-dimensional [2D] plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H10W72/07152—Means for cooling

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Wire Bonding (AREA)
  • Resistance Heating (AREA)
TW102106499A 2012-07-20 2013-02-25 A heater for a bonding device and a cooling method thereof TWI489598B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012161304A JP5793473B2 (ja) 2012-07-20 2012-07-20 ボンディング装置用ヒータ及びその冷却方法

Publications (2)

Publication Number Publication Date
TW201405731A TW201405731A (zh) 2014-02-01
TWI489598B true TWI489598B (zh) 2015-06-21

Family

ID=49948601

Family Applications (2)

Application Number Title Priority Date Filing Date
TW102106499A TWI489598B (zh) 2012-07-20 2013-02-25 A heater for a bonding device and a cooling method thereof
TW104117385A TW201535635A (zh) 2012-07-20 2013-02-25 接合裝置用加熱器及其冷卻方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW104117385A TW201535635A (zh) 2012-07-20 2013-02-25 接合裝置用加熱器及其冷卻方法

Country Status (7)

Country Link
US (1) US10350692B2 (https=)
JP (1) JP5793473B2 (https=)
KR (2) KR101559741B1 (https=)
CN (1) CN104520980B (https=)
SG (1) SG11201500238RA (https=)
TW (2) TWI489598B (https=)
WO (1) WO2014013764A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI834007B (zh) * 2019-11-19 2024-03-01 日商新川股份有限公司 半導體裝置的製造裝置及製造方法

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9093549B2 (en) * 2013-07-02 2015-07-28 Kulicke And Soffa Industries, Inc. Bond heads for thermocompression bonders, thermocompression bonders, and methods of operating the same
US9659902B2 (en) * 2014-02-28 2017-05-23 Kulicke And Soffa Industries, Inc. Thermocompression bonding systems and methods of operating the same
JP6176542B2 (ja) * 2015-04-22 2017-08-09 パナソニックＩｐマネジメント株式会社 電子部品ボンディングヘッド
JP6457905B2 (ja) * 2015-08-31 2019-01-23 株式会社イチネンジコー ヒータ
JP6529865B2 (ja) * 2015-08-31 2019-06-12 株式会社イチネンジコー ヒータ
JP6632856B2 (ja) * 2015-10-16 2020-01-22 東レエンジニアリング株式会社 ボンディングヘッドおよび実装装置
JP6836317B2 (ja) * 2015-10-16 2021-02-24 東レエンジニアリング株式会社 ボンディングヘッドおよび実装装置
CN109196629B (zh) * 2016-03-24 2021-12-07 株式会社新川 接合装置
CN107825011A (zh) * 2017-11-10 2018-03-23 普尔思（苏州）无线通讯产品有限公司 一种能够控制温度的焊接系统
JP6680930B2 (ja) * 2019-05-15 2020-04-15 株式会社イチネンジコー ヒータ
JP6850854B2 (ja) * 2019-11-18 2021-03-31 東レエンジニアリング株式会社 ボンディングヘッドおよび実装装置
WO2022029916A1 (ja) 2020-08-05 2022-02-10 株式会社新川 実装装置及び実装方法
KR102604789B1 (ko) * 2020-11-30 2023-11-21 세메스 주식회사 히터 조립체 및 이를 포함하는 본딩 헤드
CN114981939B (zh) * 2020-12-28 2026-01-30 雅马哈智能机器株式会社 安装头
TWI791287B (zh) * 2021-09-16 2023-02-01 日商新川股份有限公司 封裝裝置以及封裝方法
TWI876430B (zh) * 2023-07-19 2025-03-11 日月光半導體製造股份有限公司 熱壓組件
US20250326073A1 (en) * 2024-04-23 2025-10-23 Asmpt Singapore Pte. Ltd. Bond head heater incorporating fluid chamber for cooling

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1988763A (zh) * 2005-12-09 2007-06-27 通用电气公司 制造电子设备冷却系统的方法
JP2007329306A (ja) * 2006-06-08 2007-12-20 Matsushita Electric Ind Co Ltd 熱圧着装置

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5592363A (en) 1992-09-30 1997-01-07 Hitachi, Ltd. Electronic apparatus
US5453641A (en) * 1992-12-16 1995-09-26 Sdl, Inc. Waste heat removal system
JP3255871B2 (ja) * 1997-03-31 2002-02-12 住友大阪セメント株式会社 パルスヒーター及び半導体チップ実装ボードの製法
JPH11204994A (ja) 1998-01-14 1999-07-30 Hitachi Ltd 素子搭載装置
JP2000277567A (ja) * 1999-03-25 2000-10-06 Ngk Insulators Ltd ボンディング用ヒータ
JP2002016091A (ja) 2000-06-29 2002-01-18 Kyocera Corp 接触加熱装置
US6414271B2 (en) 2000-05-25 2002-07-02 Kyocera Corporation Contact heating device
JP2002076102A (ja) * 2000-08-31 2002-03-15 Ibiden Co Ltd セラミック基板
JP3801966B2 (ja) * 2002-07-31 2006-07-26 京セラ株式会社 加熱装置
JP2007180505A (ja) 2005-12-02 2007-07-12 Matsushita Electric Ind Co Ltd 電子部品の冷却装置
US20070125526A1 (en) 2005-12-02 2007-06-07 Matsushita Electric Industrial Co., Ltd. Cooling device for electronic components
JP4640170B2 (ja) * 2005-12-28 2011-03-02 株式会社豊田自動織機 半田付け方法及び半導体モジュールの製造方法並びに半田付け装置
JP2007242724A (ja) * 2006-03-06 2007-09-20 Seiko Epson Corp マイクロチャンネル構造体、マイクロチャンネル構造体の製造方法及び電子機器
WO2010131317A1 (ja) * 2009-05-11 2010-11-18 トヨタ自動車株式会社 熱交換器、半導体装置、及び、これらの製造方法
US8637794B2 (en) * 2009-10-21 2014-01-28 Lam Research Corporation Heating plate with planar heating zones for semiconductor processing
JP4808283B1 (ja) * 2010-06-30 2011-11-02 株式会社新川 電子部品実装装置及び電子部品実装方法
US8633423B2 (en) * 2010-10-14 2014-01-21 Applied Materials, Inc. Methods and apparatus for controlling substrate temperature in a process chamber
US9434029B2 (en) * 2011-12-20 2016-09-06 Intel Corporation High performance transient uniform cooling solution for thermal compression bonding process

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1988763A (zh) * 2005-12-09 2007-06-27 通用电气公司 制造电子设备冷却系统的方法
JP2007329306A (ja) * 2006-06-08 2007-12-20 Matsushita Electric Ind Co Ltd 熱圧着装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI834007B (zh) * 2019-11-19 2024-03-01 日商新川股份有限公司 半導體裝置的製造裝置及製造方法
US12176317B2 (en) 2019-11-19 2024-12-24 Shinkawa Ltd. Semiconductor device manufacturing device and manufacturing method

Also Published As

Publication number Publication date
TW201535635A (zh) 2015-09-16
US20150183040A1 (en) 2015-07-02
TW201405731A (zh) 2014-02-01
US10350692B2 (en) 2019-07-16
KR20140128380A (ko) 2014-11-05
WO2014013764A1 (ja) 2014-01-23
CN104520980B (zh) 2017-07-07
KR20150082673A (ko) 2015-07-15
CN104520980A (zh) 2015-04-15
KR101559741B1 (ko) 2015-10-13
JP5793473B2 (ja) 2015-10-14
JP2014022629A (ja) 2014-02-03
SG11201500238RA (en) 2015-03-30

Similar Documents

Publication Publication Date Title
TWI489598B (zh) A heater for a bonding device and a cooling method thereof
KR102228798B1 (ko) 가열가능 및 냉각가능 흡인 부재를 갖춘 본딩 헤드
CN108074890B (zh) 具有带冲击通道和通过基板的通孔的冷却芯片层的电子组件
US20100081191A1 (en) Anisotropic heat spreader for use with a thermoelectric device
CN110880484B (zh) 半导体装置
JP2014022629A5 (https=)
WO2000011717A1 (fr) Dissipateur de chaleur, dispositif laser a semiconducteur, et pile de laser a semiconducteurs utilisant un dissipateur de chaleur
WO2017164385A1 (ja) ボンディング装置
WO2000011922A1 (fr) Dissipateur thermique, laser a semi-conducteurs et piles de dispositifs laser a semi-conducteurs utilisant ce dissipateur
JP6893003B2 (ja) 冷却器、半導体モジュール
JP6047724B2 (ja) ボンディング装置用ヒータ、ボンディング装置用ヒータ組立体及びボンディング装置
TWI751971B (zh) 用於半導體裝置測試之設備及方法以及半導體裝置測試系統
CN108604771A (zh) 用于二极管激光器棒的冷却设备
JP6149241B2 (ja) ボンディング装置用ヒータ及びその冷却方法
JP6454810B1 (ja) ３次元造形装置用のホットエンド
JP2015109485A (ja) ボンディング装置用ヒータ及びその冷却方法
JP6850854B2 (ja) ボンディングヘッドおよび実装装置
KR101893113B1 (ko) 전자부품 냉각장치
TWI743241B (zh) 助焊系統、包括助焊系統的接合機及其操作方法
JP4415795B2 (ja) マイクロ流体チップ装置
JP2021052060A (ja) ヒートシンクおよびヒートシンクを備える電子機器
JP6836317B2 (ja) ボンディングヘッドおよび実装装置
JP2005531133A (ja) 電気部品を冷却するための冷却装置、冷却装置および電気部品から成るモジュール、冷却装置またはモジュールおよび支持体から成る冷却システム
US20250367926A1 (en) Liquid ejection head
JP5888227B2 (ja) インクジェットヘッド及びインクジェットヘッドの製造方法