TWI474375B - 光照射裝置 - Google Patents

光照射裝置 Download PDF

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Publication number
TWI474375B
TWI474375B TW98107966A TW98107966A TWI474375B TW I474375 B TWI474375 B TW I474375B TW 98107966 A TW98107966 A TW 98107966A TW 98107966 A TW98107966 A TW 98107966A TW I474375 B TWI474375 B TW I474375B
Authority
TW
Taiwan
Prior art keywords
light
tube
hood
irradiation device
adsorption tube
Prior art date
Application number
TW98107966A
Other languages
English (en)
Chinese (zh)
Other versions
TW200943385A (en
Inventor
Tetsuji Kadowaki
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of TW200943385A publication Critical patent/TW200943385A/zh
Application granted granted Critical
Publication of TWI474375B publication Critical patent/TWI474375B/zh

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Landscapes

  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
  • External Artificial Organs (AREA)
TW98107966A 2008-04-08 2009-03-12 光照射裝置 TWI474375B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008100331A JP5112151B2 (ja) 2008-04-08 2008-04-08 光照射装置

Publications (2)

Publication Number Publication Date
TW200943385A TW200943385A (en) 2009-10-16
TWI474375B true TWI474375B (zh) 2015-02-21

Family

ID=41174964

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98107966A TWI474375B (zh) 2008-04-08 2009-03-12 光照射裝置

Country Status (3)

Country Link
JP (1) JP5112151B2 (enExample)
CN (1) CN101556908B (enExample)
TW (1) TWI474375B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011089828A1 (ja) * 2010-01-22 2011-07-28 シャープ株式会社 光照射装置、光照射方法および液晶パネルの製造方法
JP5472616B2 (ja) * 2010-01-27 2014-04-16 ウシオ電機株式会社 光照射装置
JP5373168B2 (ja) * 2012-10-09 2013-12-18 株式会社アルバック 光照射装置
JP6614795B2 (ja) * 2015-05-11 2019-12-04 Ａｉメカテック株式会社 紫外線照射装置、及び基板組立システム
CN108717250B (zh) * 2018-06-05 2021-03-23 江苏永鼎股份有限公司 一种半导体芯片生产用接触式光刻机

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200715513A (en) * 2005-09-23 2007-04-16 Asml Netherlands Bv Contacts to microdevices
TWI282029B (en) * 2002-08-12 2007-06-01 Ushio Electric Inc Adhering device of display panel
TWI290267B (en) * 2003-11-13 2007-11-21 Dms Co Ltd Mask supporting apparatus using vacuum and light exposing system, and method using the same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3094827B2 (ja) * 1995-02-14 2000-10-03 ウシオ電機株式会社 液晶パネルの貼り合わせ方法および装置
JPH1050584A (ja) * 1996-08-07 1998-02-20 Nikon Corp マスク保持装置
JP2001059953A (ja) * 1999-08-23 2001-03-06 Seiko Epson Corp 基板圧着装置及び液晶装置の製造方法
JP3483809B2 (ja) * 1999-08-31 2004-01-06 シャープ株式会社 基板の貼り合わせ方法および貼り合わせ装置並びに液晶表示装置の製造方法
US7365822B2 (en) * 2002-02-20 2008-04-29 Lg.Philips Lcd Co., Ltd. Method for fabricating LCD
JP2004151325A (ja) * 2002-10-30 2004-05-27 Fujitsu Ltd 基板貼り合せ方法
JP4380316B2 (ja) * 2003-12-17 2009-12-09 ウシオ電機株式会社 マスク取り付け治具および該マスク取り付け治具を用いたマスク取り付け方法
JP4572626B2 (ja) * 2004-08-26 2010-11-04 ウシオ電機株式会社 光照射装置
JP4150041B2 (ja) * 2005-12-26 2008-09-17 富士通株式会社 貼合せ基板製造装置
JP4150042B2 (ja) * 2005-12-26 2008-09-17 富士通株式会社 貼合せ基板製造装置及び貼合せ基板製造方法
JP4118922B2 (ja) * 2006-03-24 2008-07-16 富士通株式会社 貼合せ基板製造装置及び貼合せ基板製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI282029B (en) * 2002-08-12 2007-06-01 Ushio Electric Inc Adhering device of display panel
TWI290267B (en) * 2003-11-13 2007-11-21 Dms Co Ltd Mask supporting apparatus using vacuum and light exposing system, and method using the same
TW200715513A (en) * 2005-09-23 2007-04-16 Asml Netherlands Bv Contacts to microdevices

Also Published As

Publication number Publication date
CN101556908B (zh) 2012-05-30
JP5112151B2 (ja) 2013-01-09
JP2009253079A (ja) 2009-10-29
CN101556908A (zh) 2009-10-14
TW200943385A (en) 2009-10-16

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