TWI422459B - Processing waste treatment device (2) - Google Patents

Processing waste treatment device (2) Download PDF

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Publication number
TWI422459B
TWI422459B TW97149253A TW97149253A TWI422459B TW I422459 B TWI422459 B TW I422459B TW 97149253 A TW97149253 A TW 97149253A TW 97149253 A TW97149253 A TW 97149253A TW I422459 B TWI422459 B TW I422459B
Authority
TW
Taiwan
Prior art keywords
waste liquid
processing
pure water
coolant
purified
Prior art date
Application number
TW97149253A
Other languages
English (en)
Chinese (zh)
Other versions
TW200936297A (en
Inventor
Takeshi Furonaka
Miki Yoshida
Original Assignee
Disco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Disco Corp filed Critical Disco Corp
Publication of TW200936297A publication Critical patent/TW200936297A/zh
Application granted granted Critical
Publication of TWI422459B publication Critical patent/TWI422459B/zh

Links

TW97149253A 2008-02-28 2008-12-17 Processing waste treatment device (2) TWI422459B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008047971A JP5149035B2 (ja) 2008-02-28 2008-02-28 加工廃液処理装置

Publications (2)

Publication Number Publication Date
TW200936297A TW200936297A (en) 2009-09-01
TWI422459B true TWI422459B (zh) 2014-01-11

Family

ID=41079822

Family Applications (1)

Application Number Title Priority Date Filing Date
TW97149253A TWI422459B (zh) 2008-02-28 2008-12-17 Processing waste treatment device (2)

Country Status (3)

Country Link
JP (1) JP5149035B2 (ja)
CN (1) CN101518925B (ja)
TW (1) TWI422459B (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105313230A (zh) * 2014-05-28 2016-02-10 海太半导体（无锡）有限公司 一种半导体切割纯水喷射控制系统
JP6636359B2 (ja) * 2016-03-02 2020-01-29 株式会社ディスコ 定温水供給装置
JP7001496B2 (ja) * 2018-03-01 2022-01-19 株式会社ディスコ 定温水供給装置
CN108655950A (zh) * 2018-04-28 2018-10-16 湖南宇晶机器股份有限公司 磁性材料研磨机砂液冷却与过滤系统
JP7266451B2 (ja) 2019-04-19 2023-04-28 株式会社ディスコ ドライバー
JP7473401B2 (ja) 2020-06-03 2024-04-23 株式会社ディスコ 加工水供給システム

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0457651A (ja) * 1990-06-27 1992-02-25 Makino Milling Mach Co Ltd 工作機械の主軸温度制御方法並びに装置
JP2000157996A (ja) * 1998-11-30 2000-06-13 Disco Abrasive Syst Ltd 加工水コントロールシステム
TW589285B (en) * 2001-03-26 2004-06-01 Mitsubishi Electric Corp Ultrapure water producing apparatus
JP2004230527A (ja) * 2003-01-31 2004-08-19 Disco Abrasive Syst Ltd 加工液循環装置
TW200635863A (en) * 2005-03-18 2006-10-16 Kurita Water Ind Ltd Apparatus for producing pure water
TW200722166A (en) * 2005-09-26 2007-06-16 Matsushita Electric Works Ltd Water treatment device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4714107A (en) * 1981-03-05 1987-12-22 International Laser Systems, Inc. Titanium heat exchanger for laser cooling
JPS59169592A (ja) * 1983-03-15 1984-09-25 Matsushita Electric Ind Co Ltd 有害金属含有水の処理装置
JPH04269165A (ja) * 1991-02-22 1992-09-25 Tokyo Seimitsu Co Ltd 精密研削加工装置
JPH06168033A (ja) * 1992-11-28 1994-06-14 Sony Corp 冷却水循環装置における温度制御装置
JP3341601B2 (ja) * 1996-10-18 2002-11-05 日本電気株式会社 研磨剤の回収再利用方法および装置
JPH10249850A (ja) * 1997-03-07 1998-09-22 Daimoshiya:Kk ダイヤモンドブレードソーにおける冷却水の回収方法及び装置
JP2000218536A (ja) * 1999-01-28 2000-08-08 Tokyo Seimitsu Co Ltd 加工液の熱交換方法及びその装置
MY126790A (en) * 1999-09-16 2006-10-31 Neomax Co Ltd Method and apparatus for grinding magnetic member and method and apparatus for treating waste fluid
JP2002126754A (ja) * 2000-10-27 2002-05-08 Hitachi Zosen Tomioka Machinery Co Ltd スラリー廃液の処理方法
JP4129484B2 (ja) * 2002-10-07 2008-08-06 株式会社スター・クラスター 超音波洗浄装置及び超音波洗浄方法
JP4214387B2 (ja) * 2003-04-15 2009-01-28 トヨタ自動車株式会社 油剤再生装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0457651A (ja) * 1990-06-27 1992-02-25 Makino Milling Mach Co Ltd 工作機械の主軸温度制御方法並びに装置
JP2000157996A (ja) * 1998-11-30 2000-06-13 Disco Abrasive Syst Ltd 加工水コントロールシステム
TW589285B (en) * 2001-03-26 2004-06-01 Mitsubishi Electric Corp Ultrapure water producing apparatus
JP2004230527A (ja) * 2003-01-31 2004-08-19 Disco Abrasive Syst Ltd 加工液循環装置
TW200635863A (en) * 2005-03-18 2006-10-16 Kurita Water Ind Ltd Apparatus for producing pure water
TW200722166A (en) * 2005-09-26 2007-06-16 Matsushita Electric Works Ltd Water treatment device

Also Published As

Publication number Publication date
CN101518925A (zh) 2009-09-02
JP5149035B2 (ja) 2013-02-20
JP2009202295A (ja) 2009-09-10
TW200936297A (en) 2009-09-01
CN101518925B (zh) 2013-07-24

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