TWI417130B - 過濾系統 - Google Patents

過濾系統 Download PDF

Info

Publication number
TWI417130B
TWI417130B TW096125276A TW96125276A TWI417130B TW I417130 B TWI417130 B TW I417130B TW 096125276 A TW096125276 A TW 096125276A TW 96125276 A TW96125276 A TW 96125276A TW I417130 B TWI417130 B TW I417130B
Authority
TW
Taiwan
Prior art keywords
filter layer
filter
medium
layer
filtration
Prior art date
Application number
TW096125276A
Other languages
English (en)
Chinese (zh)
Other versions
TW200815091A (en
Inventor
Grayfer Anatoly
P Kishkovich Oleg
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200815091A publication Critical patent/TW200815091A/zh
Application granted granted Critical
Publication of TWI417130B publication Critical patent/TWI417130B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B01D46/0036—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by adsorption or absorption
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
    • B01D46/62—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
    • B01J20/20—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising free carbon; comprising carbon obtained by carbonising processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
    • B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
    • B01J20/28014—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their form
    • B01J20/28033—Membrane, sheet, cloth, pad, lamellar or mat
    • B01J20/28035—Membrane, sheet, cloth, pad, lamellar or mat with more than one layer, e.g. laminates, separated sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J39/00—Cation exchange; Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
    • B01J39/04—Processes using organic exchangers
    • B01J39/05—Processes using organic exchangers in the strongly acidic form
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/20—Organic adsorbents
    • B01D2253/206—Ion exchange resins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B01D2257/553—Compounds comprising hydrogen, e.g. silanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
    • B01D2257/556—Organic compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
    • B01D2257/708—Volatile organic compounds V.O.C.'s
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/402—Further details for adsorption processes and devices using two beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/414—Further details for adsorption processes and devices using different types of adsorbents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/414—Further details for adsorption processes and devices using different types of adsorbents
    • B01D2259/4141—Further details for adsorption processes and devices using different types of adsorbents within a single bed
    • B01D2259/4145—Further details for adsorption processes and devices using different types of adsorbents within a single bed arranged in series
    • B01D2259/4148—Multiple layers positioned apart from each other
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Inorganic Chemistry (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Filtering Materials (AREA)
TW096125276A 2006-07-13 2007-07-11 過濾系統 TWI417130B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83073706P 2006-07-13 2006-07-13

Publications (2)

Publication Number Publication Date
TW200815091A TW200815091A (en) 2008-04-01
TWI417130B true TWI417130B (zh) 2013-12-01

Family

ID=38704806

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096125276A TWI417130B (zh) 2006-07-13 2007-07-11 過濾系統

Country Status (7)

Country Link
US (1) US7922791B2 (enExample)
EP (1) EP2040820B1 (enExample)
JP (1) JP2009543678A (enExample)
KR (1) KR101249093B1 (enExample)
CN (2) CN101489649B (enExample)
TW (1) TWI417130B (enExample)
WO (1) WO2008008497A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2269710A1 (en) 2000-05-05 2011-01-05 Entegris, Inc. Filters employing both acidic polymers and physical-adsorption media
EP3119498B1 (en) 2014-03-19 2023-05-31 Entegris, Inc. Filter stack and method for replacing filters in a filter stack
TWI695017B (zh) * 2018-11-12 2020-06-01 濾能股份有限公司 羧酸聚合物作為氣態醇類去除材料的用途以及用於去除氣態醇類的濾網結構
US20250269354A1 (en) * 2019-09-13 2025-08-28 ChemDAQ Inc. Ethylene oxide scrubbing sheet
CN115485361A (zh) 2020-05-12 2022-12-16 Pbs生物技术公司 材料转移装置和相关的系统和方法
KR102840943B1 (ko) * 2020-12-29 2025-08-01 세메스 주식회사 기판 처리 장치
WO2023192620A1 (en) * 2022-03-31 2023-10-05 Entegris, Inc. Photocatalytic airborne molecular contamination removal system enhanced with passive adsorption
JP2023177972A (ja) * 2022-06-03 2023-12-14 富士フイルムビジネスイノベーション株式会社 微粒子の捕集装置と画像形成装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020078828A1 (en) * 2000-05-05 2002-06-27 Extraction Systems. Inc. Filters employing both acidic polymers and physical-adsorption media

Family Cites Families (90)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3019127A (en) 1957-10-07 1962-01-30 American Air Filter Co Filtering medium and method of making the same
US4224415A (en) 1958-07-18 1980-09-23 Rohm And Haas Company Polymerization processes and products therefrom
US3409691A (en) 1966-02-01 1968-11-05 Dow Chemical Co Porous cation exchange resins as selective sorbents in organic systems
US3607706A (en) 1967-08-04 1971-09-21 Ionics Method of making stable laminated cation-exchange membranes
USRE29410E (en) 1970-05-23 1977-09-20 C. Weinberger & Co., Ltd. Process for manufacturing of deodorizing air filters
GB1373388A (en) 1970-12-24 1974-11-13 Teijin Ltd Thermoplastic polymer fibres
JPS568901Y2 (enExample) 1975-07-23 1981-02-26
US4135896A (en) 1975-12-11 1979-01-23 Cvi Corporation Gas purifier having rechargeable adsorber filter with removeable rechargeable sample canister
US4055075A (en) 1976-04-08 1977-10-25 Flanders Filters, Inc. Method and apparatus for the leak testing of filters
JPS5414478A (en) 1977-07-04 1979-02-02 Kurashiki Boseki Kk Method of uniformly pushing powdery substance to porous material
US4313832A (en) 1980-06-12 1982-02-02 Rohm And Haas Company Method for treatment of aqueous solutions with ion exchange fibers
US4322230A (en) 1980-09-08 1982-03-30 Donaldson Company, Inc. Unitized gas-particulate filter and housing
IT1179369B (it) 1984-05-15 1987-09-16 Ital Idee Srl Gruppo filtrante multiplo, particolarmente per impianti di aerazione e condizionamento per autoveicoli e ambienti chiusi, munito di mezzi di controllo dell'efficienza
US5133864A (en) 1985-09-16 1992-07-28 The Dow Chemical Company Filters employing particulate porous polymers
JPS63119233A (ja) 1986-11-07 1988-05-23 Hitachi Ltd Ｘ線転写装置
AU598606B2 (en) 1986-11-27 1990-06-28 Unitika Ltd. Adsorptive fiber sheet
US4760423A (en) 1987-03-12 1988-07-26 Savin Corporation Apparatus and method for reducing hydrocarbon emissions from a liquid-based electrophotographic copying machine
US5143552A (en) 1988-03-09 1992-09-01 Tokyo Electron Limited Coating equipment
EP0335034A1 (en) 1988-03-30 1989-10-04 Uop An integrated process for the removal of sulfur compounds from fluid streams
DE3813563C2 (de) 1988-04-22 2002-01-17 Mhb Filtration Gmbh & Co Kg Adsorptionsfilter mit hoher Luftdurchlässigkeit
US5023654A (en) 1988-10-31 1991-06-11 Brother Kogyo Kabushiki Kaisha Thermal fixing device for image recording apparatus
JP2736662B2 (ja) 1988-11-04 1998-04-02 東芝セラミックス株式会社 半導体ウェーハの曇防止装置
US5582865A (en) 1988-12-12 1996-12-10 Extraction Systems, Inc. Non-woven filter composite
US5626820A (en) 1988-12-12 1997-05-06 Kinkead; Devon A. Clean room air filtering
IT1229757B (it) 1989-05-18 1991-09-10 Fabrizio Mariani Filtro per la bonifica dell'aria, particolarmente studiato per uffici, abitazioni e ambienti industriali.
JP2954236B2 (ja) 1989-07-05 1999-09-27 保夫 横井 エアーフィルターの製造方法
US4946480A (en) 1989-09-27 1990-08-07 Hauville Francois P Filter apparatus with improved filtration and saturation level detector
US5130743A (en) 1989-10-23 1992-07-14 Brother Kogyo Kabushiki Kaisha Image forming apparatus having means for indicating timing of heat-fixing filter
US5204055A (en) 1989-12-08 1993-04-20 Massachusetts Institute Of Technology Three-dimensional printing techniques
US5387380A (en) 1989-12-08 1995-02-07 Massachusetts Institute Of Technology Three-dimensional printing techniques
US5181819A (en) 1990-10-09 1993-01-26 Tokyo Electron Sagami Limited Apparatus for processing semiconductors
US5219464A (en) 1990-10-09 1993-06-15 Tokyo Electron Limited Clean air apparatus
US5328758A (en) 1991-10-11 1994-07-12 Minnesota Mining And Manufacturing Company Particle-loaded nonwoven fibrous article for separations and purifications
US5166530A (en) 1991-12-20 1992-11-24 General Signal Corporation Illuminator for microlithographic integrated circuit manufacture
US5200554A (en) 1992-01-21 1993-04-06 Nasman Jan Anders H Bisphosphonic acid derivatives and their use
US5430303A (en) 1992-07-01 1995-07-04 Nikon Corporation Exposure apparatus
US5306321A (en) 1992-07-07 1994-04-26 Donaldson Company, Inc. Layered air filter medium having improved efficiency and pleatability
JPH0763578B2 (ja) 1992-08-04 1995-07-12 インターナショナル・ビジネス・マシーンズ・コーポレイション 環状アルキレンカーボネートの洗気による削減方法
JPH0663333A (ja) 1992-08-21 1994-03-08 Sumitomo Chem Co Ltd 空気浄化システム
JP3238495B2 (ja) 1992-11-02 2001-12-17 日本原子力研究所 クリーンルーム内の微量汚染空気の浄化方法
JPH06198123A (ja) 1992-11-05 1994-07-19 Toshiba Eng & Constr Co Ltd 気体の清浄化方法および気体ろ過用フィルタ
EP0825286A3 (en) 1992-11-18 2000-11-02 AQF Technologies LLC Fibrous structure containing immobilized particulate matter and process therefor
US5399377A (en) 1992-12-31 1995-03-21 The Board Of Trustees Of The University Of Illinois Borazine oligomers and composite materials including boron nitride and methods of making the same
US5290345A (en) 1993-01-13 1994-03-01 Donaldson Company, Inc. Refillable gas adsorption bed assembly and counterflow adsorber module
WO1994016802A1 (fr) 1993-01-25 1994-08-04 Daikin Industries, Ltd. Film poreux de polytetrafluorethylene et procede de fabrication
JP3334929B2 (ja) 1993-02-04 2002-10-15 東京エレクトロン株式会社 熱処理装置
US5514196A (en) 1993-02-04 1996-05-07 Tokyo Electron Limited Air cleaning apparatus
KR100242530B1 (ko) 1993-05-18 2000-02-01 히가시 데쓰로 필터장치
US5647356A (en) 1993-07-28 1997-07-15 Donaldson Company, Inc. Respirator cartridge with sealing fit test structure and method of use
JP3448670B2 (ja) 1993-09-02 2003-09-22 株式会社ニコン 露光装置及び素子製造方法
US5772738A (en) 1993-11-30 1998-06-30 Purex Co., Ltd. Multifunctional air filter and air-circulating clean unit with the same incorporated therein
US5607647A (en) 1993-12-02 1997-03-04 Extraction Systems, Inc. Air filtering within clean environments
US5462485A (en) 1993-12-03 1995-10-31 Extraction Systems, Inc. Controlling air quality
DE4407149B4 (de) 1994-03-04 2006-06-29 Mhb Filtration Gmbh & Co. Kg Verfahren zur Herstellung einer mehrlagigen Adsorptionsfilterschicht
SE515506C2 (sv) 1994-06-17 2001-08-20 Mhb Filtration Gmbh & Co Kg Luktfilter för ventilationsutloppshuvar
SE509743C2 (sv) 1994-06-17 1999-03-01 Bluecher Hasso Von Adsorptionsfilterskikt
JPH0824534A (ja) 1994-07-18 1996-01-30 Ebara Corp 再生可能な空気清浄用イオン交換フィルタユニット及びそれを用いる空気清浄方法
US5685895A (en) 1994-08-10 1997-11-11 Nikon Corporation Air cleaning apparatus used for an exposure apparatus
US5675752A (en) 1994-09-15 1997-10-07 Sony Corporation Interactive applications generator for an interactive presentation environment
TW288051B (enExample) 1994-11-22 1996-10-11 Ebara Corp
JPH08168628A (ja) 1994-11-29 1996-07-02 Piyuaretsukusu:Kk 多機能エアフィルター及び該フィルターが組込まれた空気循環式クリーンユニット
US5856198A (en) 1994-12-28 1999-01-05 Extraction Systems, Inc. Performance monitoring of gas-phase air filters
SE9501369D0 (sv) 1995-04-12 1995-04-12 Curt Lindhe Konsult & Foervalt Multiple filter unit
JP3346680B2 (ja) 1995-05-11 2002-11-18 株式会社西部技研 湿気交換用吸着体
US5833726A (en) 1995-05-26 1998-11-10 Extraction System, Inc. Storing substrates between process steps within a processing facility
US5834114A (en) 1995-05-31 1998-11-10 The Board Of Trustees Of The University Of Illinois Coated absorbent fibers
KR100197335B1 (ko) * 1995-12-22 1999-06-15 윤종용 반도체 장치의 가스 세정기 및 이를 이용한 필터링법
KR100197900B1 (ko) 1996-07-24 1999-06-15 윤종용 반도체 청정실용의 공기조화시스템
US5743927A (en) 1996-07-31 1998-04-28 Donaldson Company, Inc. Air filter element; assembly; and, method
JPH10165730A (ja) 1996-12-16 1998-06-23 Takasago Thermal Eng Co Ltd ガス状不純物吸着フィルタ
US6096267A (en) 1997-02-28 2000-08-01 Extraction Systems, Inc. System for detecting base contaminants in air
US5928792A (en) 1997-05-01 1999-07-27 Millipore Corporation Process for making surface modified porous membrane with perfluorocarbon copolymer
US6033573A (en) 1997-05-29 2000-03-07 The United States Of America As Represented By The Secretary Of Agriculture Activated nutshell carbons from agricultural waste
US5964927A (en) 1997-07-11 1999-10-12 Donaldson Company, Inc. Adsorption apparatus
US6056805A (en) 1997-08-15 2000-05-02 Guardian Environmental Technologies, Inc. Method and apparatus for the absorption of non-polar organic molecules on hydrocarbon block copolymers
US6068685A (en) 1997-10-15 2000-05-30 Saes Pure Gas, Inc. Semiconductor manufacturing system with getter safety device
US6013821A (en) * 1998-06-25 2000-01-11 Abbott Laboratories Removal of silylated compounds from solvent and gas waste streams
EP1022043A4 (en) 1998-08-05 2001-11-14 Toray Industries CHEMICAL FILTER UNIT AND GAS CLEANING DEVICE
WO2000010687A1 (en) 1998-08-20 2000-03-02 Extraction Systems, Inc. Filters employing porous strongly acidic polymers
DE19844167A1 (de) 1998-09-25 2000-04-06 Ticona Gmbh Aktivkohlefilter
WO2000025896A1 (en) 1998-11-03 2000-05-11 Donaldson Company, Inc. Gas chemical filter having compression mechanism; and methods
DE19859788C1 (de) 1998-12-23 2000-03-23 Draeger Sicherheitstech Gmbh Vorrichtung und Verfahren zur Anzeige der Erschöpfung eines Gasfilters
US6207460B1 (en) 1999-01-14 2001-03-27 Extraction Systems, Inc. Detection of base contaminants in gas samples
US7540901B2 (en) 2000-05-05 2009-06-02 Entegris, Inc. Filters employing both acidic polymers and physical-adsorption media
JP2001317000A (ja) * 2000-05-08 2001-11-16 Osaka Gas Co Ltd 活性炭含有紙およびエアフィルター
CA2413592A1 (en) 2000-06-23 2002-01-03 Nigel P. Hacker Method to restore hydrophobicity in dielectric films and materials
US6533847B2 (en) * 2001-02-13 2003-03-18 Donaldson Company, Inc. Adsorption apparatus
US7264648B1 (en) * 2003-06-19 2007-09-04 Applied Filter Technology, Inc. Removing siloxanes from a gas using a segmented filtration system customized to the gas composition
US7132011B2 (en) * 2003-09-02 2006-11-07 Entegris, Inc. Reactive gas filter
KR200446239Y1 (ko) 2009-02-24 2009-10-09 (주)에스티에스테크놀로지 반도체 산업용 가스 여과필터

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020078828A1 (en) * 2000-05-05 2002-06-27 Extraction Systems. Inc. Filters employing both acidic polymers and physical-adsorption media

Also Published As

Publication number Publication date
CN101489649B (zh) 2013-09-11
KR20090038870A (ko) 2009-04-21
JP2009543678A (ja) 2009-12-10
WO2008008497A9 (en) 2008-05-02
CN101489649A (zh) 2009-07-22
CN102698560A (zh) 2012-10-03
EP2040820A1 (en) 2009-04-01
US20090320681A1 (en) 2009-12-31
EP2040820B1 (en) 2019-03-27
US7922791B2 (en) 2011-04-12
CN102698560B (zh) 2015-05-20
KR101249093B1 (ko) 2013-04-01
WO2008008497A1 (en) 2008-01-17
TW200815091A (en) 2008-04-01

Similar Documents

Publication Publication Date Title
TWI417130B (zh) 過濾系統
KR100825146B1 (ko) 산성 중합체와 물리적 흡착 매체를 사용하는 필터
US5607647A (en) Air filtering within clean environments
TWI515035B (zh) 可再生皺褶式過濾器媒介
KR100911794B1 (ko) 반도체 프로세싱 시스템에서 오염물을 관측하는 방법
CN108097036A (zh) 气体纯化器
US6793717B2 (en) Apparatus for keeping contamination away from a mask during exposure with light
US7540901B2 (en) Filters employing both acidic polymers and physical-adsorption media
JP3320730B2 (ja) 清浄気体の調製方法および調製装置
JP4369629B2 (ja) ケミカルフィルタ用濾材およびケミカルフィルタユニット
TW201929937A (zh) 使用功能性材料的空氣分子污染酸去除過濾器
JPH078752A (ja) 清浄気体の調製方法および調製装置
JP3552140B2 (ja) 気体の清浄化方法及びその装置
JP3981386B2 (ja) 基材又は基板表面の汚染を防止する方法及び装置
JP3759062B2 (ja) 清浄気体の調整装置
JP2006066929A (ja) 基材又は基板表面の汚染を防止する方法及び装置
JPH0792157A (ja) 炭化水素の検出方法及び基材又は基板表面の汚染防止方法と装置