TWI412476B - 面板搭載用架 - Google Patents

面板搭載用架 Download PDF

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Publication number
TWI412476B
TWI412476B TW101146345A TW101146345A TWI412476B TW I412476 B TWI412476 B TW I412476B TW 101146345 A TW101146345 A TW 101146345A TW 101146345 A TW101146345 A TW 101146345A TW I412476 B TWI412476 B TW I412476B
Authority
TW
Taiwan
Prior art keywords
panel
support
restricting portion
movement restricting
peripheral
Prior art date
Application number
TW101146345A
Other languages
English (en)
Chinese (zh)
Other versions
TW201326008A (zh
Inventor
Naofumi Goto
Terufumi Hatakeyama
Original Assignee
Chugai Ro Kogyo Kaisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chugai Ro Kogyo Kaisha Ltd filed Critical Chugai Ro Kogyo Kaisha Ltd
Publication of TW201326008A publication Critical patent/TW201326008A/zh
Application granted granted Critical
Publication of TWI412476B publication Critical patent/TWI412476B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68728—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of separate clamping members, e.g. clamping fingers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Pallets (AREA)
  • Buffer Packaging (AREA)
  • Warehouses Or Storage Devices (AREA)
TW101146345A 2012-10-02 2012-12-10 面板搭載用架 TWI412476B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012220055A JP5180403B1 (ja) 2012-10-02 2012-10-02 パネル搭載用ラック

Publications (2)

Publication Number Publication Date
TW201326008A TW201326008A (zh) 2013-07-01
TWI412476B true TWI412476B (zh) 2013-10-21

Family

ID=48189461

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101146345A TWI412476B (zh) 2012-10-02 2012-12-10 面板搭載用架

Country Status (4)

Country Link
JP (1) JP5180403B1 (ko)
KR (1) KR101380993B1 (ko)
CN (1) CN103708130B (ko)
TW (1) TWI412476B (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106032014A (zh) * 2015-03-13 2016-10-19 上海理想万里晖薄膜设备有限公司 一种机械手臂
EP3711723B1 (en) * 2017-11-14 2023-06-07 Zuiko Corporation Device replacement in wearable article manufacturing equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201614104U (zh) * 2009-12-18 2010-10-27 台湾淀川化成股份有限公司 玻璃基板运送箱
TWM418901U (en) * 2011-08-11 2011-12-21 Joghon Technology Co Ltd Panel storage device

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3203794B2 (ja) * 1992-09-02 2001-08-27 ソニー株式会社 円盤状部品の搬送方法及びその装置
JP3212890B2 (ja) * 1996-10-15 2001-09-25 九州日本電気株式会社 ウェハキャリア
JP3986027B2 (ja) * 1997-08-29 2007-10-03 大日本印刷株式会社 ガラス板搬送用カセット
TW563680U (en) * 2002-03-12 2003-11-21 Au Optronics Corp Cartridge and carrier structure for transmitting glass substrate
JP2004146578A (ja) * 2002-10-24 2004-05-20 Yodogawa Hu-Tech Kk カセット用基板支持部材および基板用カセット
JP2005340480A (ja) * 2004-05-26 2005-12-08 Nippon Oil Corp 基板カセット用サポートバー
JP2009543374A (ja) * 2006-07-07 2009-12-03 インテグリス・インコーポレーテッド ウエハカセット
KR20080049254A (ko) * 2006-11-30 2008-06-04 엘지디스플레이 주식회사 기판 이송용 카세트
JP2010258170A (ja) * 2009-04-23 2010-11-11 Tokyo Electron Ltd 基板保持部材、基板搬送アーム及び基板搬送装置
KR101212021B1 (ko) * 2010-11-18 2012-12-13 (주) 청심이엔지 기판 수납용 카세트 및 그러한 기판 수납용 카세트를 구비한 기판 슬리밍 장치
CN202219923U (zh) * 2011-08-24 2012-05-16 安徽鑫昊等离子显示器件有限公司 一种装玻璃基板的卡匣

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201614104U (zh) * 2009-12-18 2010-10-27 台湾淀川化成股份有限公司 玻璃基板运送箱
TWM418901U (en) * 2011-08-11 2011-12-21 Joghon Technology Co Ltd Panel storage device

Also Published As

Publication number Publication date
TW201326008A (zh) 2013-07-01
KR101380993B1 (ko) 2014-04-04
CN103708130B (zh) 2016-01-06
CN103708130A (zh) 2014-04-09
JP2014069893A (ja) 2014-04-21
JP5180403B1 (ja) 2013-04-10

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees