TWI409848B - Ultraviolet radiation device - Google Patents

Ultraviolet radiation device Download PDF

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Publication number
TWI409848B
TWI409848B TW098114431A TW98114431A TWI409848B TW I409848 B TWI409848 B TW I409848B TW 098114431 A TW098114431 A TW 098114431A TW 98114431 A TW98114431 A TW 98114431A TW I409848 B TWI409848 B TW I409848B
Authority
TW
Taiwan
Prior art keywords
transformers
transformer
irradiation device
ultraviolet irradiation
excimer lamp
Prior art date
Application number
TW098114431A
Other languages
English (en)
Chinese (zh)
Other versions
TW201009888A (en
Inventor
Kenji Yamamori
Original Assignee
Ushio Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Electric Inc filed Critical Ushio Electric Inc
Publication of TW201009888A publication Critical patent/TW201009888A/zh
Application granted granted Critical
Publication of TWI409848B publication Critical patent/TWI409848B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Cleaning In General (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
TW098114431A 2008-06-09 2009-04-30 Ultraviolet radiation device TWI409848B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008150748A JP5195051B2 (ja) 2008-06-09 2008-06-09 紫外線照射装置

Publications (2)

Publication Number Publication Date
TW201009888A TW201009888A (en) 2010-03-01
TWI409848B true TWI409848B (zh) 2013-09-21

Family

ID=41469482

Family Applications (1)

Application Number Title Priority Date Filing Date
TW098114431A TWI409848B (zh) 2008-06-09 2009-04-30 Ultraviolet radiation device

Country Status (4)

Country Link
JP (1) JP5195051B2 (ko)
KR (1) KR101255408B1 (ko)
CN (1) CN101603640B (ko)
TW (1) TWI409848B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5651985B2 (ja) * 2010-04-01 2015-01-14 ウシオ電機株式会社 紫外線照射装置
CN103962346B (zh) * 2014-05-21 2016-08-24 深圳市华星光电技术有限公司 可调整紫外光照射能量的紫外光清洗基板的方法
CN111359994B (zh) * 2020-03-16 2021-06-01 Tcl华星光电技术有限公司 清洗装置
CN114121593B (zh) * 2021-11-29 2024-09-06 智普诺(常州)电子科技有限公司 一种准分子灯头及便携式消毒装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003303694A (ja) * 2002-04-08 2003-10-24 Ushio Inc エキシマ光照射装置
TWI224342B (en) * 2001-08-31 2004-11-21 Honle Ag Uv Technologie Dr UV irradiation device
JP2005101062A (ja) * 2003-09-22 2005-04-14 Ushio Inc 高電圧パルス発生装置並びに高電圧パルス発生装置を備えた放電励起ガスレーザ装置
TW200714839A (en) * 2005-10-13 2007-04-16 Ushio Electric Inc Ultraviolet illuminating device
TW200809977A (en) * 2006-06-26 2008-02-16 Applied Materials Inc Nitrogen enriched cooling air module for UV curing system
JP2008043925A (ja) * 2006-08-21 2008-02-28 Ushio Inc エキシマランプ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08146097A (ja) * 1994-11-24 1996-06-07 Advantest Corp 半導体ｉｃ試験装置用一体型密閉筐体冷却装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI224342B (en) * 2001-08-31 2004-11-21 Honle Ag Uv Technologie Dr UV irradiation device
JP2003303694A (ja) * 2002-04-08 2003-10-24 Ushio Inc エキシマ光照射装置
JP2005101062A (ja) * 2003-09-22 2005-04-14 Ushio Inc 高電圧パルス発生装置並びに高電圧パルス発生装置を備えた放電励起ガスレーザ装置
TW200714839A (en) * 2005-10-13 2007-04-16 Ushio Electric Inc Ultraviolet illuminating device
TW200809977A (en) * 2006-06-26 2008-02-16 Applied Materials Inc Nitrogen enriched cooling air module for UV curing system
JP2008043925A (ja) * 2006-08-21 2008-02-28 Ushio Inc エキシマランプ装置

Also Published As

Publication number Publication date
KR101255408B1 (ko) 2013-04-17
CN101603640B (zh) 2013-05-08
JP2009295923A (ja) 2009-12-17
CN101603640A (zh) 2009-12-16
TW201009888A (en) 2010-03-01
KR20090127804A (ko) 2009-12-14
JP5195051B2 (ja) 2013-05-08

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