TWI389185B - 基板之處理裝置(二) - Google Patents
基板之處理裝置(二) Download PDFInfo
- Publication number
- TWI389185B TWI389185B TW094130357A TW94130357A TWI389185B TW I389185 B TWI389185 B TW I389185B TW 094130357 A TW094130357 A TW 094130357A TW 94130357 A TW94130357 A TW 94130357A TW I389185 B TWI389185 B TW I389185B
- Authority
- TW
- Taiwan
- Prior art keywords
- processing
- substrate
- processing tank
- tank
- treatment tank
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
- F04D29/526—Details of the casing section radially opposing blade tips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Liquid Crystal (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning In General (AREA)
- Tables And Desks Characterized By Structural Shape (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004275755A JP4641168B2 (ja) | 2004-09-22 | 2004-09-22 | 基板の処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200616057A TW200616057A (en) | 2006-05-16 |
TWI389185B true TWI389185B (zh) | 2013-03-11 |
Family
ID=36234027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094130357A TWI389185B (zh) | 2004-09-22 | 2005-09-05 | 基板之處理裝置(二) |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4641168B2 (ko) |
KR (1) | KR101160535B1 (ko) |
CN (1) | CN100514543C (ko) |
TW (1) | TWI389185B (ko) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008079710A2 (en) | 2006-12-20 | 2008-07-03 | Saint-Gobain Ceramics & Plastics, Inc. | Composite materials having improved thermal performance |
JP2009266962A (ja) * | 2008-04-23 | 2009-11-12 | Hitachi Kokusai Electric Inc | 基板処理装置および半導体装置の製造方法 |
JP5490395B2 (ja) * | 2008-10-07 | 2014-05-14 | 大日本スクリーン製造株式会社 | 基板処理装置及びその製造方法 |
JP2010225687A (ja) * | 2009-03-19 | 2010-10-07 | Shibaura Mechatronics Corp | 基板の処理装置 |
JP2013026490A (ja) * | 2011-07-22 | 2013-02-04 | Tokyo Electron Ltd | 基板処理装置 |
JP6732213B2 (ja) * | 2016-11-16 | 2020-07-29 | 日本電気硝子株式会社 | ガラス基板の製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03284386A (ja) * | 1990-03-30 | 1991-12-16 | Shibaura Eng Works Co Ltd | 洗浄用処理槽 |
JPH08318169A (ja) * | 1995-05-26 | 1996-12-03 | Sanyo Electric Co Ltd | ドラフト装置 |
JP3211147B2 (ja) * | 1996-05-29 | 2001-09-25 | 株式会社荏原製作所 | 装置の排気構造 |
JP3556110B2 (ja) * | 1998-12-22 | 2004-08-18 | 大日本スクリーン製造株式会社 | 基板処理装置 |
KR100574140B1 (ko) * | 1999-07-02 | 2006-04-25 | 동경 엘렉트론 주식회사 | 반도체 제조 설비, 반도체 제조 장치 및 반도체 제조 방법 |
JP2003260422A (ja) * | 2002-03-12 | 2003-09-16 | J P C:Kk | 部品洗浄システム |
JP4136826B2 (ja) * | 2002-08-19 | 2008-08-20 | 住友精密工業株式会社 | 昇降式基板処理装置及びこれを備えた基板処理システム |
-
2004
- 2004-09-22 JP JP2004275755A patent/JP4641168B2/ja not_active Expired - Lifetime
-
2005
- 2005-09-05 TW TW094130357A patent/TWI389185B/zh active
- 2005-09-21 KR KR1020050087548A patent/KR101160535B1/ko active IP Right Grant
- 2005-09-22 CN CNB2005101051270A patent/CN100514543C/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN1753150A (zh) | 2006-03-29 |
KR20060051450A (ko) | 2006-05-19 |
KR101160535B1 (ko) | 2012-06-28 |
JP2006093339A (ja) | 2006-04-06 |
CN100514543C (zh) | 2009-07-15 |
JP4641168B2 (ja) | 2011-03-02 |
TW200616057A (en) | 2006-05-16 |
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