TW200616057A - Apparatus for treating substrates (2) - Google Patents

Apparatus for treating substrates (2)

Info

Publication number
TW200616057A
TW200616057A TW094130357A TW94130357A TW200616057A TW 200616057 A TW200616057 A TW 200616057A TW 094130357 A TW094130357 A TW 094130357A TW 94130357 A TW94130357 A TW 94130357A TW 200616057 A TW200616057 A TW 200616057A
Authority
TW
Taiwan
Prior art keywords
processing tank
substrate
take
face
reinforcement frame
Prior art date
Application number
TW094130357A
Other languages
Chinese (zh)
Other versions
TWI389185B (en
Inventor
Hideki Sueyoshi
Akinori Iso
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW200616057A publication Critical patent/TW200616057A/en
Application granted granted Critical
Publication of TWI389185B publication Critical patent/TWI389185B/en

Links

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Liquid Crystal (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Tables And Desks Characterized By Structural Shape (AREA)

Abstract

The objective of the present invention is to provide a processor whose rigidity improved without thickening a plate forming a processing tank. The processor for processing a substrate is provided with: the processing tank which is formed in a box shape where an upper face is opened by the plate, and in which a take-in port of the substrate is made on one side face and a take-out port on the other side face; a reinforcement frame which is integrally installed along an outer peripheral face at an upper part of the processing tank and forms the processing tank; and a lid member which is fitted to the reinforcement frame so that it can turn and opens/closes an upper opening of the processing tank.
TW094130357A 2004-09-22 2005-09-05 Apparatus for treating substrates TWI389185B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004275755A JP4641168B2 (en) 2004-09-22 2004-09-22 Substrate processing equipment

Publications (2)

Publication Number Publication Date
TW200616057A true TW200616057A (en) 2006-05-16
TWI389185B TWI389185B (en) 2013-03-11

Family

ID=36234027

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094130357A TWI389185B (en) 2004-09-22 2005-09-05 Apparatus for treating substrates

Country Status (4)

Country Link
JP (1) JP4641168B2 (en)
KR (1) KR101160535B1 (en)
CN (1) CN100514543C (en)
TW (1) TWI389185B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MX2009006723A (en) 2006-12-20 2009-06-30 Saint Gobain Ceramics Composite materials having improved thermal performance.
JP2009266962A (en) * 2008-04-23 2009-11-12 Hitachi Kokusai Electric Inc Substrate processing apparatus and method for manufacturing semiconductor device
JP5490395B2 (en) * 2008-10-07 2014-05-14 大日本スクリーン製造株式会社 Substrate processing apparatus and manufacturing method thereof
JP2010225687A (en) * 2009-03-19 2010-10-07 Shibaura Mechatronics Corp Apparatus for processing of substrate
JP2013026490A (en) * 2011-07-22 2013-02-04 Tokyo Electron Ltd Substrate processor
JP6732213B2 (en) * 2016-11-16 2020-07-29 日本電気硝子株式会社 Glass substrate manufacturing method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03284386A (en) * 1990-03-30 1991-12-16 Shibaura Eng Works Co Ltd Cleaning tank
JPH08318169A (en) * 1995-05-26 1996-12-03 Sanyo Electric Co Ltd Draft device
JP3211147B2 (en) * 1996-05-29 2001-09-25 株式会社荏原製作所 Equipment exhaust structure
JP3556110B2 (en) * 1998-12-22 2004-08-18 大日本スクリーン製造株式会社 Substrate processing equipment
KR100574140B1 (en) * 1999-07-02 2006-04-25 동경 엘렉트론 주식회사 Semiconductor manufacture equipment, and method and apparatus for semiconductor manufacture
JP2003260422A (en) * 2002-03-12 2003-09-16 J P C:Kk Part cleaning system
JP4136826B2 (en) * 2002-08-19 2008-08-20 住友精密工業株式会社 Elevating type substrate processing apparatus and substrate processing system having the same

Also Published As

Publication number Publication date
TWI389185B (en) 2013-03-11
JP4641168B2 (en) 2011-03-02
KR20060051450A (en) 2006-05-19
KR101160535B1 (en) 2012-06-28
CN1753150A (en) 2006-03-29
CN100514543C (en) 2009-07-15
JP2006093339A (en) 2006-04-06

Similar Documents

Publication Publication Date Title
TW200616057A (en) Apparatus for treating substrates (2)
TW200720432A (en) Cell culture vessel
DE60336268D1 (en) ETRÄNKEDOSE
NO20065867L (en) Dustproof lid
TW200727384A (en) Substrate container and method of manufacturing same
TW200706172A (en) Closure system and method of enclosing a liquid material in a vial
WO2010062105A3 (en) Apparatus for opening and closing the shield plate of automated teller machine
TW200622073A (en) Handle for mounting in an opening
EP2100504A3 (en) A bait station for eliminating rodents
PL1715312T3 (en) Wind protection for a balance.
ATE425100T1 (en) EASY TO OPEN CASE
ATE449010T1 (en) CLOSURE LID FOR OPEN CONTAINER
DK1958882T3 (en) Cans and cans and lids
BR0312925A (en) Process of connecting plastic to a metal section and part manufactured by means of this
ATE519685T1 (en) FOOD PACKAGING WITH LID AND CLOSURE SYSTEM FOR PACKAGING
ATE476896T1 (en) POT-SHAPED, OPEN-TOP CONTAINER
DE602007003242D1 (en) Shut-off
DE602007012345D1 (en) Electromagnetic shields and related manufacturing process
TW200731391A (en) Vacuum chamber and vacuum processing apparatus
ZA200406979B (en) Door frame of a shaft door with a control arrangement for a lift shaft and method for access to a control unit
MX2009003498A (en) Closure.
TW200726825A (en) Etching composition for ITO film
HK1140991A1 (en) Protective box for transporting or storing a part in the form of a plate pierced by an opening
DE602004020559D1 (en) Paint box closing device with improved fastening means
PL1966054T3 (en) Container with lid for packaging pourable products