TWI373982B - - Google Patents
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- Publication number
- TWI373982B TWI373982B TW094115404A TW94115404A TWI373982B TW I373982 B TWI373982 B TW I373982B TW 094115404 A TW094115404 A TW 094115404A TW 94115404 A TW94115404 A TW 94115404A TW I373982 B TWI373982 B TW I373982B
- Authority
- TW
- Taiwan
- Prior art keywords
- semiconductor substrate
- display device
- organic light
- common electrode
- emitting layer
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 claims description 69
- 239000000758 substrate Substances 0.000 claims description 65
- 239000010410 layer Substances 0.000 claims description 55
- 238000004519 manufacturing process Methods 0.000 claims description 22
- 239000011229 interlayer Substances 0.000 claims description 18
- 239000012535 impurity Substances 0.000 claims description 15
- 239000000126 substance Substances 0.000 claims 2
- 239000010408 film Substances 0.000 description 56
- 239000010409 thin film Substances 0.000 description 18
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 239000013078 crystal Substances 0.000 description 7
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 7
- 229910052732 germanium Inorganic materials 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 229920002098 polyfluorene Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
- G09F9/33—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes
- G09F9/335—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes being organic light emitting diodes [OLED]
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8051—Anodes
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Geometry (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004143373 | 2004-05-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200605716A TW200605716A (en) | 2006-02-01 |
| TWI373982B true TWI373982B (ko) | 2012-10-01 |
Family
ID=35394369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094115404A TW200605716A (en) | 2004-05-13 | 2005-05-12 | Display, and method for fabricating same |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP4673304B2 (ko) |
| KR (1) | KR101071607B1 (ko) |
| CN (1) | CN100466022C (ko) |
| TW (1) | TW200605716A (ko) |
| WO (1) | WO2005111972A1 (ko) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005111972A1 (ja) | 2004-05-13 | 2005-11-24 | Ulvac, Inc. | 表示装置、表示装置の製造方法 |
| DE102008049777A1 (de) * | 2008-05-23 | 2009-11-26 | Osram Opto Semiconductors Gmbh | Optoelektronisches Modul |
| US8513655B2 (en) | 2009-12-22 | 2013-08-20 | Electronics And Telecommunications Research Institute | Organic light emitting diode and manufacturing method thereof |
| CN109390373B (zh) * | 2017-08-08 | 2020-09-29 | 上海视欧光电科技有限公司 | 封装结构及其封装方法 |
| CN107680992B (zh) * | 2017-10-10 | 2020-03-17 | 京东方科技集团股份有限公司 | 显示装置及其制作方法、显示装置的修复方法 |
| KR102523340B1 (ko) * | 2018-01-26 | 2023-04-20 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3571171B2 (ja) * | 1997-05-08 | 2004-09-29 | 出光興産株式会社 | 有機エレクトロルミネッセンス素子 |
| JP3479023B2 (ja) * | 1999-05-18 | 2003-12-15 | シャープ株式会社 | 電気配線の製造方法および配線基板および表示装置および画像検出器 |
| JP2001167887A (ja) * | 1999-09-28 | 2001-06-22 | Canon Inc | 導電性液晶素子及び有機エレクトロルミネッセンス素子 |
| JP5025040B2 (ja) * | 1999-09-30 | 2012-09-12 | 株式会社半導体エネルギー研究所 | 自発光装置 |
| TWI249363B (en) * | 2000-02-25 | 2006-02-11 | Seiko Epson Corp | Organic electroluminescence device and manufacturing method therefor |
| GB2381658B (en) * | 2001-07-25 | 2004-03-03 | Lg Philips Lcd Co Ltd | Active matrix organic electroluminescent device simplifying a fabricating process and a fabricating method thereof |
| JP4058930B2 (ja) * | 2001-10-09 | 2008-03-12 | セイコーエプソン株式会社 | 有機エレクトロルミネッセンス装置及びその製造方法、並びに電子機器 |
| KR100656490B1 (ko) * | 2001-11-26 | 2006-12-12 | 삼성에스디아이 주식회사 | 풀칼라 유기전계 발광표시소자 및 그의 제조방법 |
| JP2003270664A (ja) * | 2002-03-14 | 2003-09-25 | Seiko Epson Corp | 電気光学装置の製造方法 |
| KR100435054B1 (ko) * | 2002-05-03 | 2004-06-07 | 엘지.필립스 엘시디 주식회사 | 유기전계 발광소자와 그 제조방법 |
| JP3999606B2 (ja) * | 2002-08-28 | 2007-10-31 | ローム株式会社 | 有機ｅｌ表示装置およびその製造方法 |
| WO2005111972A1 (ja) | 2004-05-13 | 2005-11-24 | Ulvac, Inc. | 表示装置、表示装置の製造方法 |
-
2005
- 2005-05-11 WO PCT/JP2005/008594 patent/WO2005111972A1/ja active Application Filing
- 2005-05-11 CN CNB2005800012968A patent/CN100466022C/zh not_active Expired - Fee Related
- 2005-05-11 JP JP2006519532A patent/JP4673304B2/ja active Active
- 2005-05-11 KR KR1020067006458A patent/KR101071607B1/ko active IP Right Grant
- 2005-05-12 TW TW094115404A patent/TW200605716A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR20070009967A (ko) | 2007-01-19 |
| TW200605716A (en) | 2006-02-01 |
| CN100466022C (zh) | 2009-03-04 |
| CN1898713A (zh) | 2007-01-17 |
| WO2005111972A1 (ja) | 2005-11-24 |
| JPWO2005111972A1 (ja) | 2008-03-27 |
| JP4673304B2 (ja) | 2011-04-20 |
| KR101071607B1 (ko) | 2011-10-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |