TWI372244B - Method for characterizing defects in a transparent substrate - Google Patents

Method for characterizing defects in a transparent substrate

Info

Publication number
TWI372244B
TWI372244B TW096116996A TW96116996A TWI372244B TW I372244 B TWI372244 B TW I372244B TW 096116996 A TW096116996 A TW 096116996A TW 96116996 A TW96116996 A TW 96116996A TW I372244 B TWI372244 B TW I372244B
Authority
TW
Taiwan
Prior art keywords
transparent substrate
characterizing defects
characterizing
defects
transparent
Prior art date
Application number
TW096116996A
Other languages
English (en)
Other versions
TW200809185A (en
Inventor
Robert Leblanc Philip
Marino Schneider Vitor
Rober Ustanik Correy
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of TW200809185A publication Critical patent/TW200809185A/zh
Application granted granted Critical
Publication of TWI372244B publication Critical patent/TWI372244B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8812—Diffuse illumination, e.g. "sky"
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G01N2021/8825—Separate detection of dark field and bright field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8835—Adjustable illumination, e.g. software adjustable screen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
TW096116996A 2006-05-12 2007-05-11 Method for characterizing defects in a transparent substrate TWI372244B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US79989906P 2006-05-12 2006-05-12

Publications (2)

Publication Number Publication Date
TW200809185A TW200809185A (en) 2008-02-16
TWI372244B true TWI372244B (en) 2012-09-11

Family

ID=38692080

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096116996A TWI372244B (en) 2006-05-12 2007-05-11 Method for characterizing defects in a transparent substrate

Country Status (7)

Country Link
US (1) US7567344B2 (zh)
EP (1) EP2018542A2 (zh)
JP (1) JP5175842B2 (zh)
KR (1) KR101326455B1 (zh)
CN (1) CN101473218B (zh)
TW (1) TWI372244B (zh)
WO (1) WO2007133581A2 (zh)

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* Cited by examiner, † Cited by third party
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KR101326455B1 (ko) 2013-11-20
US7567344B2 (en) 2009-07-28
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EP2018542A2 (en) 2009-01-28
CN101473218B (zh) 2012-09-19
JP2009537022A (ja) 2009-10-22
CN101473218A (zh) 2009-07-01
TW200809185A (en) 2008-02-16
US20070263206A1 (en) 2007-11-15
WO2007133581A2 (en) 2007-11-22
WO2007133581A3 (en) 2008-02-14

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