IL243167B - Separable multiple illumination sources in optical inspection - Google Patents

Separable multiple illumination sources in optical inspection

Info

Publication number
IL243167B
IL243167B IL243167A IL24316715A IL243167B IL 243167 B IL243167 B IL 243167B IL 243167 A IL243167 A IL 243167A IL 24316715 A IL24316715 A IL 24316715A IL 243167 B IL243167 B IL 243167B
Authority
IL
Israel
Prior art keywords
optical inspection
illumination sources
multiple illumination
separable multiple
separable
Prior art date
Application number
IL243167A
Other languages
Hebrew (he)
Other versions
IL243167A0 (en
Inventor
Gordon Noam
Cohen Itay
Tzhori Amir
Original Assignee
Gordon Noam
Cohen Itay
Tzhori Amir
Cims Suzhou Co Ltd
Camtek Imaging Tech Suzhou Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gordon Noam, Cohen Itay, Tzhori Amir, Cims Suzhou Co Ltd, Camtek Imaging Tech Suzhou Co Ltd filed Critical Gordon Noam
Publication of IL243167A0 publication Critical patent/IL243167A0/en
Publication of IL243167B publication Critical patent/IL243167B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Input (AREA)
IL243167A 2014-12-18 2015-12-16 Separable multiple illumination sources in optical inspection IL243167B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201462093477P 2014-12-18 2014-12-18

Publications (2)

Publication Number Publication Date
IL243167A0 IL243167A0 (en) 2016-02-29
IL243167B true IL243167B (en) 2021-02-28

Family

ID=56822577

Family Applications (1)

Application Number Title Priority Date Filing Date
IL243167A IL243167B (en) 2014-12-18 2015-12-16 Separable multiple illumination sources in optical inspection

Country Status (3)

Country Link
CN (1) CN205562358U (en)
IL (1) IL243167B (en)
TW (1) TWI711816B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024224393A1 (en) * 2023-04-24 2024-10-31 Camtek Ltd Inspection system for edge and bevel inspection of semiconductor structures

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017115658A1 (en) * 2017-07-12 2019-01-17 Carl Zeiss Microscopy Gmbh Flickering at angle-variable illumination
CN109030495A (en) * 2018-06-26 2018-12-18 大连鉴影光学科技有限公司 A kind of optical element defect inspection method based on machine vision technique
CN111610195A (en) * 2019-02-22 2020-09-01 上海微电子装备（集团）股份有限公司 Defect detection device
CN115015275B (en) * 2022-07-11 2025-05-23 凌云光技术股份有限公司 Defect detection device
TWI881588B (en) * 2023-12-11 2025-04-21 家碩科技股份有限公司 Optical detection system of eliminating surface metallic texture on circuits

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101283297A (en) * 2005-11-28 2008-10-08 日东电工株式会社 Polarizing plate with optical compensation layer and image display device using same
US7567344B2 (en) * 2006-05-12 2009-07-28 Corning Incorporated Apparatus and method for characterizing defects in a transparent substrate
KR101697240B1 (en) * 2008-04-04 2017-01-17 난다 테크놀로지스 게엠베하 Optical inspection system and method
CN203490180U (en) * 2013-09-13 2014-03-19 楚天科技股份有限公司 Impurity detection device of automatic light inspection machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024224393A1 (en) * 2023-04-24 2024-10-31 Camtek Ltd Inspection system for edge and bevel inspection of semiconductor structures
US12315206B2 (en) 2023-04-24 2025-05-27 Camtek Ltd Inspection system for edge and bevel inspection of semiconductor structures

Also Published As

Publication number Publication date
CN205562358U (en) 2016-09-07
TWI711816B (en) 2020-12-01
TW201629470A (en) 2016-08-16
IL243167A0 (en) 2016-02-29

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