TWI711816B - System and method for inspecting object - Google Patents

Abstract

A system for inspecting an object, the system may include a sensing module; a beam splitter; an objective lens; a bright field illumination module that is configured to generate a bright field beam of first predefined parameters and direct the bright field beam towards the beam splitter; a dark field illumination module that is configured to generate a first dark field beam of second predefined parameters and direct the first dark field beam towards the object; wherein there is a difference between the first predefined parameters and the second predefined parameters; wherein the beam splitter is configured to (a) reflect the bright field beam towards the object; (b) receive a reflectance of the bright field beam, (c) direct the reflectance of the bright field beam towards the objective lens; (d) receive a reflectance of the first dark field beam, (e) direct the reflectance of the first dark field beam towards the objective lens; wherein the objective lens is configured to direct the reflectance of the first dark field beam and the reflectance of the bright field beam towards the sensing module; and wherein the sensing module is configured to differentiate between the reflectance of the first dark field beam and the reflectance of the bright field beam based on the difference between the first predefined parameters and the second predefined parameters.

Description

System and method for inspecting objects

This application claims priority from U.S. Provisional Patent 62/093,477 filed on December 18, 2014, which is incorporated herein by reference.

The present invention relates to separable multiple illumination sources in optical inspection.

Many optical and visual inspection systems use multiple illumination sources for the object being inspected. Common examples in microscopes, AOI machines and verification systems use both dark field sources and bright field sources, where the dark field source illuminates the object from an oblique angle or from the side, and the bright field source illuminates from above (ie, coaxial with the imaging path) object. Sometimes they are used together to form uniform illumination with wide angular coverage. At some other times, only one of the sources is used in order to show certain aspects, for example, dark field illumination only emphasizes surface irregularities, while bright field emphasizes discoloration, such as copper oxidation.

In another example, the bright metal conductor illuminating the PCB layer forms a specular reflection that is highly dependent on the incident light angle and the local surface normal direction. Bright field light is mainly reflected from the flat part of the horizontal surface of the conductor, while dark field light is mainly reflected from its hypotenuse and irregularities on the surface.

Therefore, it is followed that there are the geometric shapes, morphologies, materials and possibilities of the inspected object included in each of the selective illumination images. The potential rich information of the defects.

However, in order to maximize throughput and ensure complete coverage of objects, AOI systems usually use all illumination sources at the same time in a single scan, losing some available information only from selective illumination images.

Therefore, it would be advantageous for an AOI system to be able to generate multiple such images simultaneously while still performing only a single scan.

Can provide systems and methods.

The system may include a sensing module, a beam splitter, an objective lens, a bright field irradiation module, and a dark field irradiation module. The bright field irradiation module is configured to generate a bright field light beam with a first predefined parameter and A light beam guiding optical module, the optical module including a beam splitter and an objective lens; the dark field irradiation module is configured to generate a first dark field light beam with a second predefined parameter and guide the first dark field light beam to an object; There is a difference between a predefined parameter and a second predefined parameter; wherein the optical module is configured to (a) reflect the bright field beam toward the object; (b) receive the reflection of the bright field beam, (c) receive the first dark field The reflection of the light beam, (d) the reflection of the first dark field light beam and the reflection of the bright field light beam are directed to the sensing module; and wherein the sensing module is configured to be based on the difference between the first predefined parameter and the second predefined parameter The difference distinguishes the reflection of the first dark field beam and the reflection of the bright field beam.

The system can be used to inspect an object. The system can include a sensing module, a beam splitter, an objective lens, a bright field illumination module, and a dark field illumination module. The bright field illumination module can be configured to generate a first predefined Parameters of the bright field beam and direct the bright field beam to the beam splitter; the dark field irradiation module can be configured Set to generate a first dark field beam with a second predefined parameter and direct the first dark field beam to an object; wherein there may be a difference between the first predefined parameter and the second predefined parameter; wherein the beam splitter can be configured (A) reflect the bright field beam toward the object; (b) receive the reflection of the bright field beam, (c) guide the reflection of the bright field beam to the objective lens, (d) receive the reflection of the first dark field beam, (e) The reflection of a dark field beam is guided to the objective lens; wherein the objective lens may be configured to guide the reflection of the first dark field beam and the reflection of the bright field beam to the sensing module; and wherein the sensing module may be configured to be based on the first preset The difference between the defined parameter and the second predefined parameter distinguishes the reflection of the first dark field beam from the reflection of the bright field beam.

The sensing module may include a polarization camera, and wherein the first predefined parameter and the second predefined parameter for polarization are different from each other.

The sensing module may include a camera, the analyzer may be in front of the camera, and wherein the first predefined parameter and the second predefined parameter for polarization are different from each other.

The sensing module may include an analyzer; wherein the analyzer may include a plurality of analyzer regions of at least a first type and a second type; wherein the analyzer region of the first type is reflected by the bright field beam; and wherein the analyzer region of the second type The analyzer area is reflected by the first dark field beam.

Multiple analyzer areas can be striped.

Multiple analyzer areas can be rectangular.

The shapes and/or sizes of two or more analyzer areas in the analyzer area may be different from each other.

The dark field illumination module can be configured to generate a second dark field beam of a third predefined parameter and direct the second dark field beam to an object; wherein each of the third predefined parameter and the first and second predefined parameters can be Are different; wherein the beam splitter can also be configured to receive the reflection of the second dark field beam and guide the reflection of the second dark field beam to the beam splitter; wherein the objective lens can also be configured to guide the reflection of the second dark field beam A sensing module; and wherein the sensing module can be configured to distinguish between the reflection of the first dark field beam and the second dark based on the difference between the first predefined parameter, the second predefined parameter, and the third predefined parameter The reflection of the field beam and the reflection of the bright field beam.

The sensing module may include an analyzer; wherein the analyzer may include a plurality of analyzer areas of at least a first type and a second type; wherein the analyzer area of the first type passes the reflection of the bright field beam; and wherein the second type The analyzer area allows the reflection of the first dark field beam to pass through.

The sensing module may include a plurality of cameras, a distribution module, and a plurality of analyzers, wherein the analyzer may be in front of each camera; and wherein the distribution module may be configured to reflect the first dark field beam, the second dark The reflection of the field beam and the reflection of the bright field beam are distributed to multiple analyzers.

Each analyzer of the plurality of analyzers may include a plurality of analyzer regions of at least a first type and a second type; wherein the analyzer regions of the first type pass the reflection of the bright-field beam; and wherein the second type of analyzer The filter area allows the reflection of the first dark field beam to pass through.

Multiple analyzer areas can be striped.

Multiple analyzer areas can be rectangular.

The shapes and/or sizes of two or more analyzer regions in the analyzer regions are different from each other.

Different analyzers of the plurality of analyzers may be configured to pass different light beams from the reflection of the first dark field light beam, the reflection of the second dark field light beam, and the reflection of the bright field light beam.

The method may include generating a brightfield beam with a first predefined parameter by a brightfield irradiation module and directing the brightfield beam to an optical module including a beam splitter and an objective lens; and generating a second predefined parameter by the darkfield irradiation module The first dark field beam and the first dark field beam are directed to the object; wherein there is a difference between the first predefined parameter and the second predefined parameter; the bright field beam is reflected by the optical module toward the object; the bright field is received by the optical module The reflection of the light beam; the reflection of the bright field beam is guided by the optical module to the sensing module; the reflection of the first dark field beam is received by the optical module; the reflection of the first dark field beam is guided by the optical module to the sensing module ; And the sensing module distinguishes the reflection of the first dark field beam from the reflection of the bright field beam based on the difference between the first predefined parameter and the second predefined parameter.

The method may include generating a bright field beam of a first predefined parameter by a bright field irradiation module and directing the bright field beam to a beam splitter; generating a first dark field beam of a second predefined parameter by the dark field irradiation module and transferring The first dark field beam is guided to the object; the first predefined parameter and the second predefined parameter can be different; the bright field beam is reflected by the beam splitter toward the object; the reflection of the bright field beam is received by the beam splitter; The beamer guides the reflection of the bright field beam to the objective lens; the beam splitter receives the reflection of the first dark field beam; the beam splitter guides the reflection of the first dark field beam to the objective lens; the objective lens reflects the first dark field beam And the reflection of the bright field beam is guided to the sensing module; the sensing module distinguishes the reflection of the first dark field beam from the reflection of the bright field beam based on the difference between the first predefined parameter and the second predefined parameter.

The sensing module may include a polarization camera, and wherein the first predefined parameter and the second predefined parameter for polarization may be different from each other.

The sensing module may include a camera, the analyzer is in front of the camera, and wherein the first predefined parameter and the second predefined parameter for polarization may be different from each other.

The sensing module may include an analyzer; wherein the analyzer may include a plurality of analyzer areas of at least a first type and a second type; wherein the analyzer area of the first type passes the reflection of the bright field beam; and wherein the second type The analyzer area allows the reflection of the first dark field beam to pass through.

Multiple analyzer areas can be striped.

Multiple analyzer areas can be rectangular.

In the method, wherein the shapes and/or sizes of two or more analyzer regions in the analyzer regions are different from each other.

The method may include generating a second dark-field beam with a third predefined parameter by a dark-field illumination module; directing the second dark-field beam to an object; wherein the third predefined parameter and each of the first and second predefined parameters There may be a difference between one; the reflection of the second dark field beam is received by the beam splitter; the reflection of the second dark field beam is guided to the beam splitter; the reflection of the second dark field beam is guided to the sensing module by the objective lens; and , The sensing module distinguishes the first dark based on the difference between the first predefined parameter, the second predefined parameter, and the third predefined parameter The reflection of the field beam, the reflection of the second dark field beam, and the reflection of the bright field beam.

The sensing module may include an analyzer; wherein the analyzer may include a plurality of analyzer areas of at least a first type and a second type; wherein the analyzer area of the first type passes the reflection of the bright field beam; and wherein the second type The analyzer area allows the reflection of the first dark field beam to pass through.

The sensing module may include a plurality of cameras, a distribution module, and a plurality of analyzers, where the analyzer is in front of each camera; and wherein the method may include the distribution module reflecting the first dark field beam and the second dark field. The reflection of the field beam and the reflection of the bright field beam are distributed to multiple analyzers.

In the method, wherein each of the plurality of analyzers may include a plurality of analyzer regions of at least a first type and a second type; wherein the analyzer regions of the first type pass the reflection of the bright field beam; and wherein The second type of analyzer area passes the reflection of the first dark field beam.

Multiple analyzer areas can be striped.

Multiple analyzer areas can be rectangular.

The shapes and/or sizes of two or more analyzer areas in the analyzer area may be different from each other.

The method may further include passing different light beams other than the reflection of the first dark field light beam, the reflection of the second dark field light beam, and the reflection of the bright field light beam by different analyzers of the plurality of analyzers.

1: table or stage

2: Objects, articles

3: camera

4: Objective lens

5: Bright field source, bright field light source

6: beam splitter

8: Red color filter, bright field repair adjuster

15, 16, 18: camera

17: Analyzer, LCD modulator

71: Dark field source, first dark field light source

72: dark field source, second dark field light source

91: filter, first dark field filter or polarizer

92: filter, second dark field filter or polarizer

101: Brightfield beam, first brightfield beam

102: Dark field beam, first dark field beam

103: Dark field beam, second dark field beam

111, 112, 113: reflection

141: image processor

142: Controller

151: The first additional beam splitter

152: second additional beam splitter

171, 172, 173, 200, 210: analyzer

201, 202, 203, 204: Slim strips, boxes

211, 212, 213, 214: rectangular area, box

400: method

410~460: steps

From the following detailed description in conjunction with the accompanying drawings, the present invention will be more fully understood and understood, in the accompanying drawings: Figure 1A shows an inspection system according to an embodiment of the invention; Figure 1B shows an inspection system according to an embodiment of the invention; Figure 1C shows an inspection system according to an embodiment of the invention; Figure 2 shows An analyzer according to various embodiments of the present invention; and FIG. 3 shows a method according to an embodiment of the present invention.

Because the device for implementing the present invention is composed of electronic components and circuits well known to those skilled in the art in most cases, for the understanding and understanding of the basic concepts of the present invention and in order not to confuse or transfer the teachings of the present invention, compared to the above The explained necessity of consideration will not explain the circuit details to any greater extent.

In the following specification, the present invention will be described with reference to specific examples of embodiments of the present invention. However, it is obvious that various modifications and changes can be made therein without departing from the broad spirit and scope of the present invention as set forth in the scope of the appended application.

A和/或B的意思是只是A、只是B或者是A和B二者。 The term "and/or" means additional or optional. especially

A and/or B means just A, just B, or both A and B.

Provided are methods and systems that can assign different optical properties (for example, colors using color filters or LEDs) to various illumination sources, and use cameras (for example, color cameras) capable of distinguishing between these properties.

In Figures 1A, 1B, and 1C, the beam splitter is shown placed between the object and the objective lens. This does not have to be the case and the objective lens can be placed on the object and Between the beam device. The beam splitter and the objective lens can form an optical module.

In one embodiment, as shown in FIG. 1A, the RGB color line scan camera 3 scans the article 2, which also has three line illumination sources—two dark field sources 71 and 72 from the side, and a beam splitter 6 Bright field source for illumination 5. The bright field source 5 is covered with a red color filter 8, and the dark field sources 71 and 72 are covered with green filters 91 and 92, respectively. Here, the color is selected by way of example, and the color can be selected differently according to the suitability for the application.

The camera outputs RGB color images for analysis. The color composition of each output pixel represents the amount and balance of reflected light from each of the light sources of different selected colors.

Optionally, the filters 91 and 92 may also be of different colors, such as green and blue. This allows further differentiation between light reflected from the right and light reflected from the left, thereby providing more information about the surface orientation in each pixel location.

In Figures 1A-1C, there are references to individual reflections. These reflection spectra can be specular reflection and/or diffuse reflection. The type of reflection (diffuse or specular) may depend on the orientation of the area of the range of the illuminated object. For example, Figures 1A-1C show a substantially horizontal range of illumination. In this case, given the illumination angles of the bright field source and the dark field source, the objective lens 4 collects the specular reflection of the bright field light beam 101 and can receive the diffuse reflection of the dark field light beams 102 and 103.

For example, if the irradiated range includes an area having an orientation of approximately 45 degrees, the objective lens will collect the specular reflection of the first dark field beam 102 and can receive the diffuse reflection of the bright field beam 101 and the second dark field beam 103.

For example, if the illuminated range includes an area having an orientation of approximately minus 45 degrees, the objective lens will collect the specular reflection of the second dark field beam 103 and can receive the diffuse reflection of the bright field beam 101 and the first dark field beam 102.

In Figure 1A, the inspected object (object) is represented as 2, and the system includes:

a. A table or stage 1 for supporting and/or moving an object 2.

b. A brightfield illumination module including a brightfield light source 5 and a brightfield modifier (such as a filter or a polarizer and/or a reducer) 8.

c. A dark field illumination module including a first dark field light source 71, a first dark field filter or polarizer 91, a second dark field light source 72, and a second dark field filter or polarizer 92.

d. Beam splitter 6.

e. Objective 4.

f. Camera 3.

g. Image processor 141.

h. Controller 142 for controlling the system.

The camera 3 may be a polarization camera. Correspondingly-the camera 3 may include an analyzer or an adjustable color filter. Therefore, the camera 3 can receive light of different polarizations and can distinguish between different polarization components.

The objective lens 4 is placed between the camera 3 and the beam splitter 6. The beam splitter 6 is placed between the object 2 and the objective lens 4.

The first brightfield light beam 101 of the first predefined parameter (color and/or polarization) is generated by the brightfield illumination module and guided to the beam splitter 6.

The beam splitter 6 reflects the first bright field beam 101 onto the object 2 in a first angular range. The first angle range includes the normal of the object 2.

The reflection 111 of the first brightfield light beam 101 passes through the beam splitter 6 and passes through the objective lens 4 and irradiates the camera 3.

The first dark field beam 102 of the second predefined parameter (color and/or polarization) is formed by the first dark field light source 71 and the first dark field filter or polarizer 91 and has a second angle range different from the first angle range. The angle range is directed to the object.

The reflection 112 of the first dark field light beam 102 passes through the beam splitter 6 and passes through the objective lens 4 and irradiates the camera 3.

The second dark field light beam 103 of the second predefined parameter (color and/or polarization) is formed by the second dark field light source 72 and the second dark field filter or polarizer 92 and is different from the first and second angular ranges The third angle range is directed to the object.

The reflection 113 of the second dark field light beam 103 passes through the beam splitter 6 and passes through the objective lens 4 and irradiates the camera 3.

The first, second, and third parameters are different from each other and the camera 3 can distinguish the light of the first, second, and third parameters, and thus the camera 3 can receive three different light beams during the same scan of the object 2 ( 101, 102, and 103) illuminate the information generated by the object 2 and distinguish the reflected light generated by each of these light beams illuminating the object 2.

The system of FIG. 1A can perform line scanning of the object 2-during this period, the first bright field beam 101 and the first and second dark field beams 102 and 103 irradiate the object 2 with several rays.

Optionally, the system of FIG. 1A can perform area scanning of the object 2-during this period, the first bright field beam 101 and the first and second dark field beams 102 and 103 irradiate the object 2 with a two-dimensional area of light.

Surface scanning can also be achieved using a surface scan RGB color camera, a coaxial bright field light source with a first color filter, and a dark field halo around the optical axis of a second color filter with a color different from the first color filter. system.

Other optical properties besides color can be used to distinguish, such as polarization orientation. The light source is covered with linear polarizers with different (preferably vertical) orientations, but a camera system capable of acquiring multiple images with different analyzer orientations is used.

Figure 1B shows a system according to an embodiment of the invention.

The system of FIG. 1B is different from the system of FIG. 1A in that it also includes an analyzer (or liquid crystal optical modulator) 17 before the camera 3-between the camera 3 and the objective lens 4.

The polarization camera 3 of FIG. 1A or the liquid crystal modulator 17 of FIG. 1B may include arbitrarily arranged analyzers, as described in FIG. 2 but not limited to these settings.

Figure 2 shows analyzers 200 and 210 in two settings according to various embodiments of the present invention.

The analyzers 200 and 210 may be used in a system such as the system of FIG. 1C and may be used in a system with a single camera such as that shown in FIG. 1B.

In other words, any number of cameras can be used in the system, not just one polarization camera 3 as described in Figure 1A, or not just one Non-polarized camera, or any combination thereof.

偏振取向可以彼此不同)。 Figure 2 shows analyzers with different regions, their polarization properties are different from each other (e.g.

The polarization orientations can be different from each other).

Different regions of the same analyzer can have the same shape and size, but can also be different from each other in shape and/or size.

The analyzer 200 of FIG. 2 has elongated strips 201, 202, 203, and 204, and the polarization parameters of the elongated strips are different from each other. The analyzer can be suitable for line illumination, in which light is used to scan the inspected item and therefore (assuming 4 different areas of the analyzer)-a single scan results in four different images of the inspected item ──Each has its own polarization parameter.

The analyzer 210 of FIG. 2 includes four different types of rectangular regions (211, 212, 213, and 214) arranged in a repeating (mosaic-like) pattern that may be similar to the Bayer pattern of the RGB pixel array. This arrangement can be suitable for surface illumination.

In FIG. 2, the polarization parameters of the cells including wires of different orientations are different from each other. For example, boxes 201 and 211 can represent linear polarizations oriented at 45 degrees, boxes 202 and 212 can represent linear polarizations oriented at 90 degrees, boxes 203 and 213 can represent linear polarizations oriented at 0 degrees, and boxes 204 and 214 can represent analyzers The non-polarized part. It should be noted that the polarization orientation may be different from that in this example and different lines may indicate the difference between other polarization parameters.

The number of different area types can be different from four.

Figure 1C shows a system according to an embodiment of the invention.

The system of Figure 1C includes three cameras 15, 16, and 18 instead of the single camera in Figures 1A and 1B.

The system of FIG. 1C also includes a distribution module (a first additional beam splitter 151 and a second additional beam splitter 152) for distributing the light from the object among the three cameras 15, 16 and 18.

Three analyzers 171, 172, and 173 are in front of cameras 15, 16, and 18—one analyzer in front of each camera.

The first additional beam splitter 151 and the second additional beam splitter 152 split the light from the object between the cameras 15, 16 and 18.

It should be noted that the analyzers 171, 172, and 173 can have adjustable orientations (or any other adjustable polarization parameters), and the orientations of the analyzers 171, 172, and 173 can be different from each other—allowing each camera to receive data from Light from a single source.

Any of the systems of Figures 1A, 1B, and 1C may include a controller (such as the controller 142 of Figures 1A and 1C) that is arranged to coordinate table movement and camera image capture, adjust light sources and polarizers, etc. .

The system may include additional parts, such as a mobile stage/table, a controller, a computer with a frame grabber, image processing (see image processor 141 in FIGS. 1A and 1C), GUI, and so on.

It is possible to provide a method for inspecting an item to be inspected using the system shown above.

Figure 3 shows a method 400 according to an embodiment of the invention.

The method 400 may begin with steps 410 and 415.

Step 410 may include generating a brightfield beam of the first predefined parameter by the brightfield illumination module and directing the brightfield beam to the beam splitter.

Step 410 may be followed by step 420 of reflecting the bright field light beam from the beam splitter toward the object.

Step 420 may be followed by step 430 of receiving the reflection of the bright field beam by the beam splitter.

Step 430 may be followed by step 440 in which the reflected light of the bright field beam is guided by the beam splitter to the objective lens.

Step 415 may include generating a first dark field beam with a second predefined parameter by the dark field irradiation module and directing the first dark field beam to the object. There is a difference between the first predefined parameter and the second predefined parameter.

Step 415 may be followed by step 425 of receiving the reflection of the first dark field light beam by the beam splitter.

Step 425 may be followed by step 435 of the beam splitter guiding the reflection of the first dark field beam to the objective lens.

Steps 440 and 435 may be followed by step 450 of guiding the reflection of the first dark field beam and the reflection of the bright field beam to the sensing module by the objective lens.

Step 450 may be followed by a step 460 in which the sensing module distinguishes the reflection of the first dark field beam from the reflection of the bright field beam based on the difference between the first predefined parameter and the second predefined parameter.

In addition, those skilled in the art will realize that the boundaries between the functions of the operations described above are merely illustrative. The functions of multiple operations can be combined into a single operation, and/or the functions of a single operation can be allocated in additional In operation. In addition, alternative embodiments may include multiple instances of specific operations, and the order of operations may be changed in various other embodiments.

Therefore, it should be understood that the structure described herein is only exemplary, and in fact, many other structures that accomplish the same function can also be implemented. In theory, it is still certain that any arrangement of components that accomplish the same function is effectively "associated" so that the desired function is accomplished. Therefore, any two components combined to accomplish a specific function herein can be regarded as being "associated" with each other to accomplish the desired function, regardless of the structure or intermediate components. Likewise, any two components so related can also be regarded as being "operably connected" or "operably coupled" to each other to accomplish the desired function.

However, other modifications, variations, and replacements are also possible. Therefore, the description and the drawings are regarded as illustrative rather than restrictive.

The word "comprising" does not exclude the existence of those other elements or steps listed later in the claim. It should be understood that the terms used in this way are interchangeable under appropriate circumstances, so that the embodiments of the invention described herein, for example, can be used in other than the orientation shown or described in other ways. Operation in orientation. Any reference to the terms "comprising" and "comprises" should also be interpreted as referring to the term "consisting" (excluding the presence of other elements) and/or to the term "essentially consisting of )” (excluding the existence of other materials or important components).

In addition, the term "a" or "an" as used herein Is defined as one or more than one. Also, the use of introductory phrases in the claim, such as "at least one" and "one or more" should not be interpreted as meaning: through the indefinite article "one (a)" or "one (an)" The introduction of another claim element limits any particular claim that contains the claim element so introduced to an invention that contains only one such element, even when the same claim includes the introductory phrase "one or more" or "at least one "And indefinite articles such as "一 (a)" or "一 (an)". The same applies to the use of definite articles. Unless stated otherwise, terms such as "first" and "second" are used to arbitrarily distinguish between the elements described by such terms.

Therefore, these terms are not necessarily intended to indicate the timing or other order of priority of such elements. The mere fact that certain measures are stated in mutually different claims does not indicate that the combination of these measures cannot be used to advantage.

1: table or stage

2: Objects, articles

3: camera

4: Objective lens

5: Bright field source, bright field light source

6: beam splitter

8: Red color filter, bright field repair adjuster

71: Dark field source, first dark field light source

72: dark field source, second dark field light source

91: filter, first dark field filter or polarizer

92: filter, second dark field filter or polarizer

101: Brightfield beam, first brightfield beam

102: Dark field beam, first dark field beam

103: Dark field beam, second dark field beam

111, 112, 113: reflection

141: image processor

142: Controller

Claims (30)

A system for inspecting an object, the system comprising: a sensing module; a beam splitter; an objective lens; a bright field irradiation module configured to generate a bright field light beam of a first predefined parameter and guide the bright field light beam An optical module including the beam splitter and the objective lens; a dark-field irradiation module configured to generate a first dark-field beam of a second predefined parameter and direct the first dark-field beam to the object Wherein there is a difference between the first predefined parameter and the second predefined parameter; wherein, the optical module is configured to: (a) reflect the bright field light beam toward the object, (b) Receiving the reflection of the bright field light beam, (c) receiving the reflection of the first dark field light beam, (d) guiding the reflection of the first dark field light beam and the reflection of the bright field light beam to the sensing Module; and wherein the sensing module is configured to distinguish the first received during the same scan based on the difference between the first predefined parameter and the second predefined parameter The reflection of the dark field beam and the reflection of the bright field beam. The system according to claim 1, wherein the sensing module includes a polarization camera, and wherein the first predefined parameter for polarization and the The second predefined parameters are different from each other. The system according to claim 1, wherein the sensing module includes a camera, the analyzer is in front of the camera, and wherein the first predefined parameter and the second predefined parameter for polarization are different from each other . The system according to claim 1, wherein the sensing module includes an analyzer; wherein the analyzer includes a plurality of analyzer regions of at least a first type and a second type; wherein the first type of analyzer The area passes the reflection of the bright field beam; and wherein the second type of analyzer area passes the reflection of the first dark field beam. The system according to claim 4, wherein the plurality of analyzer areas are striped. The system according to claim 4, wherein the plurality of analyzer regions are rectangular. The system according to claim 4, wherein two or more of the analyzer areas are different from each other in shape and/or size. The system according to claim 1, wherein the dark field irradiation module is further configured to generate a second dark field beam of a third predefined parameter and direct the second dark field beam to the object; wherein The third predefined parameter is different from each of the first predefined parameter and the second predefined parameter; wherein, the beam splitter is further configured to receive the reflection of the second dark field beam and Guide the reflection of the second dark field beam to the beam splitter; wherein the objective lens is also configured to transfer the second dark field beam Reflection guides the sensing module; and wherein the sensing module is configured to distinguish based on the difference between the first predefined parameter, the second predefined parameter, and the third predefined parameter The reflection of the first dark field light beam, the reflection of the second dark field light beam, and the reflection of the bright field light beam. The system according to claim 8, wherein the sensing module includes an analyzer; wherein the analyzer includes a plurality of analyzer regions of at least a first type and a second type; wherein the first type of analysis The detector area passes the reflection of the bright field beam; and wherein the second type of analyzer area passes the reflection of the first dark field beam. The system according to claim 8, wherein the sensing module includes a plurality of cameras, a distribution module, and a plurality of analyzers, wherein the analyzer is in front of each camera; and wherein the distribution module is configured To distribute the reflection of the first dark field light beam, the reflection of the second dark field light beam, and the reflection of the bright field light beam to the plurality of analyzers. The system according to claim 10, wherein each of the plurality of analyzers includes a plurality of analyzer areas of at least a first type and a second type; wherein the first type of analyzer area is The reflection of the bright field beam passes; and wherein the second type of analyzer region passes the reflection of the first dark field beam. The system according to claim 11, wherein the plurality of analyzer regions are striped. The system according to claim 12, wherein the plurality of analyzer regions are rectangular. The system according to claim 13, wherein two or more of the analyzer areas are different from each other in shape and/or size. The system according to claim 10, wherein different analyzers of the plurality of analyzers are configured to cause reflection from the first dark field beam, reflection from the second dark field beam, and The field beam is reflected by the different beams. A method of inspecting an object includes: generating a bright field beam with a first predefined parameter by a bright field irradiation module and directing the bright field beam to an optical module including a beam splitter and an objective lens; A module for generating a first dark field beam with a second predefined parameter and directing the first dark field beam to an object; wherein there is a difference between the first predefined parameter and the second predefined parameter; by The optical module reflects the bright-field light beam toward the object; the optical module receives the reflection of the bright-field light beam; Reflection guiding sensing module; by the optical module, receiving the reflection of the first dark field light beam; by the optical module, guiding the reflection of the first dark field light beam to the sensing module Group, and guide the reflection of the first dark field beam and the reflection of the bright field beam to the sensing module at the same time; and by the sensing module, based on the first predefined parameter and the The difference between the second predefined parameters distinguishes the reflection of the first dark field light beam and the reflection of the bright field light beam received during the same scan. The method according to claim 16, wherein the sensing module includes a polarization camera, and wherein the first predefined parameter and the second predefined parameter for polarization are different from each other. The method of claim 16, wherein the sensing module includes a camera, and the analyzer is before the camera, and wherein the first predefined parameter and the second predefined parameter for polarization are different from each other . The method according to claim 16, wherein the sensing module includes an analyzer; wherein the analyzer includes a plurality of analyzer regions of at least a first type and a second type; wherein the first type of analyzer The area passes the reflection of the bright field beam; and wherein the second type of analyzer area passes the reflection of the first dark field beam. The method according to claim 19, wherein the plurality of analyzer regions are striped. The method according to claim 19, wherein the plurality of analyzer regions are rectangular. The method according to claim 19, wherein two or more of the analyzer regions are different from each other in shape and/or size. The method according to claim 16, comprising: generating a second dark field light beam with a third predefined parameter by the dark field illumination module; directing the second dark field light beam to the object; wherein The third predefined parameter and the first predefined parameter and the first Each of the two predefined parameters is different; by the beam splitter, the reflection of the second dark field beam is received; the reflection of the second dark field beam is directed to the beam splitter; The objective lens guides the reflection of the second dark field light beam to the sensing module; and by the sensing module, based on the first predefined parameter, the second predefined parameter and the third The difference between the predefined parameters distinguishes the reflection of the first dark field light beam, the reflection of the second dark field light beam, and the reflection of the bright field light beam. The method according to claim 23, wherein the sensing module includes an analyzer; wherein the analyzer includes a plurality of analyzer regions of at least a first type and a second type; wherein the first type of analyzer The area passes the reflection of the bright field beam; and wherein the second type of analyzer area passes the reflection of the first dark field beam. The method according to claim 23, wherein the sensing module includes a plurality of cameras, a distribution module, and a plurality of analyzers, wherein an analyzer is in front of each camera; and the method includes: The distribution module distributes the reflection of the first dark field light beam, the reflection of the second dark field light beam, and the reflection of the bright field light beam to the plurality of analyzers. The method according to claim 25, wherein each of the plurality of analyzers includes a plurality of analyzer areas of at least a first type and a second type; wherein the analyzer areas of the first type enable all The reflection of the bright field beam passes; and wherein the second type of analyzer region passes the reflection of the first dark field beam. The method according to claim 26, wherein the plurality of analyzer regions are striped. The method according to claim 27, wherein the plurality of analyzer regions are rectangular. The method according to claim 28, wherein two or more of the analyzer regions are different from each other in shape and/or size. The method according to claim 25, wherein the method includes: using different analyzers of the plurality of analyzers to make the reflection from the first dark field beam, the reflection from the second dark field beam, and the Brightfield beams are reflected by different beams.

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