TWI700487B - System and method for inspecting object - Google Patents

Abstract

A system for inspecting an object, the system comprises: a camera; a focusing lens; a beam splitter that comprises a first area, a second area and a third area that is positioned between the first and second areas of the beam splitter; an objective lens that comprises a first area, a second area and a third area that is positioned between the first and second areas of the objective lens; a bright field illumination module configured to illuminate the first area of the beam splitter with a bright field beam; wherein the first area of the beam splitter is configured to direct the bright field beam towards the first area of the objective lens; wherein the first area of the objective lens is configured to direct the bright field beam towards an area of the object such as to impinge on the area of the object at a first angular range; a dark field illumination module that is configured to illuminate the area of the object with a dark field beam at a second angular range that differs from the first angular range; wherein the objective lens is configured to receive, from the area of the object, at least one specular reflectance from at least one beam out of the bright field beam and the dark field beam; wherein the objective lens is configured to direct the at least one specular reflectance towards the focusing lens; and wherein the focusing lens is configured to focus the at least one specular reflectance onto the camera.

Description

A system and method for inspecting objects Related applications

This application claims priority from US Provisional Patent 62/093,457 filed on December 18, 2014, which is incorporated herein by reference.

The invention relates to a system for inspecting objects.

Background of the invention

In uneven substrates such as PCB-s, semiconductor wafers, electronic substrates, etc., including portions with angled surfaces such as PCB layers whose copper signal lines have a trapezoidal profile, the inspection system of the prior art method It is not arranged to collect specular reflections from all surface corners.

In addition, some of the known methods of analyzing the reflection polarization state are only effective when the incident angle is significantly different from the normal included angle. Therefore, brightfield or coaxial light parallel to the imaging axis and perpendicular to the flat panel being inspected is not available.

Therefore, in inspecting the background of non-flat substrates, there is a need to provide a system and method that allows the collection of specular reflections from a wide range of surface angles and makes the incident angle not the normal included angle, but as a possible example One of them, which can be quite close to Brewster corner.

Summary of the invention

According to the embodiment of the present invention, a system and a method can be provided law.

The system is used for inspecting objects and may include a camera; a focusing lens; a beam splitter, which may include a first area, a second area, and a third area that can be positioned between the first area and the second area of the beam splitter An objective lens, which may include a first area, a second area, and a third area that can be positioned between the first area and the second area of the objective lens; a bright field illumination module, which is configured to illuminate the components with a bright field beam The first area of the beamer; wherein the first area of the beam splitter may be configured to direct the bright field beam to the first area of the objective lens; wherein the first area of the objective lens may be configured to direct the bright field beam to the object area in order to The first angle range illuminates the area of the object; the dark field illumination module can be configured to illuminate the area of the object with a dark field beam in a second angle range different from the first angle range; wherein, the objective lens can be configured as At least one specular reflection of at least one beam emitted from a bright field beam and a dark field beam is received from the area of the object; wherein the objective lens may be configured to guide at least one specular reflection to a focusing lens; wherein the focusing lens may be configured to direct at least one The specular reflection focuses on the camera.

When the area of the object may include a region having a first orientation, the objective lens may be configured to receive specular reflection of a bright field beam; and wherein, when the area of the object may include a region having a second orientation different from the first orientation At this time, the objective lens can be configured to receive the specular reflection of the dark field beam.

The bright field illumination module may be configured to change at least one of the phase and polarization of the dark field light beam with the passage of time.

The dark field illumination module may be configured to change at least one of the phase and polarization of the dark field light beam as time passes.

The system may include a collection path phase and polarization control module for controlling at least one of the phase and polarization of the light sensed by the camera.

The camera may be configured to control at least one of the phase and polarization of the light sensed by the camera.

The bright field lighting module may include a bright field light source, followed by a blocking element.

The blocking element may have a ring shape or any other shape.

The bright field illumination module may be configured to illuminate the second area of the beam splitter with a second bright field light beam; wherein the second area of the beam splitter may be configured to direct the second bright field light beam to the second area of the objective lens; wherein The second area of the objective lens may be configured to direct the second bright field light beam to the object so as to irradiate the object with a third angle range different from the first angle range and the second angle range.

The dark field illumination module may include a dark field light source and a reflector; and wherein the reflector may be configured to receive the dark field light beam from the dark field light source and guide the dark field light beam to the object.

The mirror can be positioned between the objective lens and the object.

The bright field illumination module may be configured to illuminate the fifth area of the beam splitter with a fourth bright field light beam; wherein the fifth area of the beam splitter may be configured to direct the fourth bright field light beam to the fifth area of the objective lens; wherein The fifth area of the objective lens may be configured to direct the fourth bright field light beam to the object.

The system can include a second additional lens that can be positioned between the camera and the beam splitter.

The bright field lighting module may include a blocking element that may be positioned at the focal plane of the bright field light source of the bright field lighting module.

The optical axis of the dark field lighting module can be oriented to the optical axis of the bright field lighting module.

The dark field illumination module can be configured to (a) control the phase and polarization of the second dark field beam, and (b) illuminate the object with the second dark field beam; and the third area of the objective lens can be configured to The diffuse reflection of the dark field beam is directed to the third area of the objective lens.

The method can be used to inspect the object, and the method can include irradiating the first area of the beam splitter with the bright field light beam by the bright field illumination module; directing the bright field light beam to the first area of the objective lens by the first area of the beam splitter; The first area guide can be configured to direct the bright field light beam to the area of the object so as to illuminate the area of the object in a first angle range; the dark field illumination module uses the dark field light beam to have a second angle different from the first angle range At least one specular reflection of at least one light beam emitted from a bright field beam and a dark field beam is received by the objective lens and from the area of the object; at least one specular reflection is guided by the objective lens to the focusing lens; A specular reflection focuses on the camera.

The method may include receiving, by the objective lens, the specular reflection of the bright field beam when the area of the object may include a region having a first orientation; and, when the area of the object may include a region having a second orientation different from the first orientation , The specular reflection of the dark field beam is received by the objective lens.

The method may include changing at least one of the phase and polarization of the bright field light beam over time.

The method may include changing at least one of the phase and the polarization of the dark field light beam over time.

The method may include controlling at least one of the phase and polarization of the light sensed by the camera by the collection path phase and polarization control module.

The method may include controlling, by the camera, at least one of the phase and polarization of the light sensed by the camera.

The bright field lighting module may include a bright field light source followed by a blocking element.

The blocking element may have a ring shape.

The method may include irradiating the second area of the beam splitter with the second bright field light beam by the bright field illumination module; directing the second bright field light beam to the second area of the objective lens by the second area of the beam splitter; The area directs the second bright field light beam to the object so as to irradiate the object with a third angle range different from the first angle range and the second angle range.

The dark field illumination module may include a dark field light source and a reflector; and wherein the method may include receiving the dark field light beam by the reflector and from the dark field light source; and directing the dark field light beam to the object by the reflector.

The mirror can be positioned between the objective lens and the object.

The method may include irradiating the fifth area of the beam splitter with the fourth bright field beam by the bright field illumination module; guiding the fourth bright field beam to the fifth area of the objective lens by the fifth area of the beam splitter; Five areas direct the fourth bright field beam to the object.

The system can include a second additional lens that can be positioned between the camera and the beam splitter.

The bright field lighting module may include a blocking element that may be positioned at the focal plane of the bright field light source of the bright field lighting module.

The optical axis of the dark field lighting module can be oriented to the optical axis of the bright field lighting module.

The method may include controlling the phase and polarization of the second dark field light beam by the dark field illumination module; illuminating the object with the second dark field light beam; and directing the diffuse reflection of the second dark field light beam to the third area of the objective lens by the third area of the objective lens. area.

1: table

2: Object to be checked

2’: Object

3: Objective lens

4: camera

5: beam splitter

6: Brightfield light source

7: Dark field light source

9: Adjustable polarizer

10: Adjustable phase compensator

11: Focusing lens; blocking element

30: The central area of the objective lens; the third area of the beam splitter

31: Left area of objective lens (first area)

32: The area of the right objective lens (the second area)

41: Guide the first area of the camera

50: Central area of the beam splitter (third area)

51: Left area of beam splitter (first area)

52: Right area of beam splitter (second area)

53: The third area of the beam splitter

54: The fourth area of the beam splitter

61: The first additional lens

62: second additional lens

71, 72: mirror

101: First brightfield beam

102, 122: Specular reflection of brightfield beams

104: Diffuse reflection of brightfield beam

111, 112: dark field beam

114: Diffuse reflection of dark field beams

115: Specular reflection of dark field beam

121: second brightfield beam

122: Specular reflection of the second brightfield beam

141: image processor

142: Controller

201: First brightfield beam

202: second brightfield beam

203: third brightfield beam

204: The fourth brightfield beam

211: Specular reflection of the first brightfield beam

212: Specular reflection of the second brightfield beam

213: Specular reflection of the third brightfield beam

214: Specular reflection of the fourth brightfield beam

301, 302: dark field beam

303: dark field beam diffuse reflection

400: method

410~435: steps

The present invention will be more fully understood and recognized based on the following detailed description combined with the accompanying drawings, in which Figure 1A shows a system according to an embodiment of the invention; Figure 1B shows a system according to an embodiment of the invention; Figure 1C shows a system according to an embodiment of the present invention; Figure 2 shows a system according to an embodiment of the present invention; Figure 3 shows a system according to an embodiment of the present invention; Figure 4 shows a system according to an embodiment of the present invention Part of the system of FIG. 3 of an embodiment; FIG. 5 shows a system according to an embodiment of the invention; and FIG. 6 shows a method according to an embodiment of the invention;

Detailed description of the preferred embodiment

Because the device implementing the present invention is largely composed of electronic components and circuits known to those skilled in the art, it is for the understanding and recognition of the fundamental concepts of the present invention and in order not to obscure or divide the teaching of the present invention. Mind, the details of the circuit will not be explained to any greater degree than deemed necessary as explained above.

In the following specification, the present invention will be described with reference to specific examples of embodiments of the present invention. However, it will be obvious that various modifications and changes can be made therein without departing from the broader spirit and scope of the present invention as set forth in the scope of the appended application.

A system that can utilize an objective lens is provided. The objective lens can be large and inclined aperture brightfield light enters the beam splitter so that one side of the objective lens projects light at an angle, while the opposite side of the lens collects reflections. The provided system additionally utilizes dark field illumination to provide wide-angle coverage. Therefore, a system with the ability to inspect most of the specular reflections from non-planar objects (eg, patterned PCB layers) is provided.

Thereby, a system with the ability to utilize different physical methods (such as ellipsometry) with this requirement is provided, and the method is used for inspection of the entire object including the part with an angled surface (such as PCB signal line).的边) and the horizontally flat part. The system can be applied to coaxial or microscope optical devices, which can be varied in the various figures described in detail below.

Figure 1A shows a system according to an embodiment of the present invention and an object under inspection with a non-flat surface.

The following reference digits are used in Figure 1:

a.1- Table (used to support the object being inspected).

b.2- The object to be inspected.

c.3-Objective lens.

d.4-Camera.

e.5- Beam splitter.

f.6-Bright field light source.

g.7-Dark field light source.

h.9-Adjustable polarizer.

i.10-Adjustable phase compensator.

j.11-Focusing lens.

k. 31, 30, and 32-Left (first) area, central (third) area, and right (second) area of the objective lens.

1. 51, 50 and 52-Left (first) area, central (third) area and right (second) area of the beam splitter.

m.101-Brightfield beam.

n.102-Specular reflection of bright field beams.

o.104-Diffuse reflection of brightfield beam.

p.111 and 112-Dark field beam.

q.114-Diffuse reflection of dark field beams.

r.115-Specular reflection of dark field beams.

s.141-Image processor.

t.142-controller.

The controller 142 is configured to control the operation of the system. The controller 142 and the camera 4 are coupled to the image processor 141. The controller 142 is also coupled to various components (and controls their operation) such as the bright field light source 6, the dark field light source 7, the adjustable polarizer 9, and the adjustable phase compensator 10.

In FIG. 1A, a preferred collimated brightfield light source 6, an adjustable polarizer 9 and an adjustable phase compensator 10 form a brightfield illumination module, which is configured to (a) control the phase of the first brightfield beam 101 And polarization and (b) use The bright field beam illuminates the first area of the beam splitter.

In FIG. 1A, each of the dark field light source 7, the adjustable polarizer 9 and the adjustable phase compensator 10 forms a dark field illumination module, which is configured to (a) control the dark field light beams (111 and 112) The phase and polarization of, and (b) the dark field beam (111 and 112) is used to illuminate the object in a second angular range different from the first angular range.

In FIG. 1A, the dark field light source 7 illuminates the object 2 under inspection at a low angle (relative to the x-axis), so that the objective lens 3 collects the specular reflection from the angled part of the object 2 under inspection, and the reflected light from the object can pass through Pass through any area (30, 31 or 32) of the objective lens 3.

Figure 1A shows two dark field light sources 7 (a right dark field light source and a left dark field light source) positioned in a symmetrical manner with respect to the optical axis. It should be noted that there may be only a single dark field light source, the dark field light source may be positioned in an asymmetric manner, there may be more than two dark field light sources, and so on.

In FIG. 1A, the bright field light source 6 irradiates the left area 51 of the beam splitter 5 with the first bright field light beam 101. The left area 51 of the beam splitter 5 reflects the first bright field beam 101 to the left area 31 of the objective lens 3. The objective lens 3 focuses the first bright field beam 101 and directs the first bright field beam 101 to the object 2 at a certain angle. On the left side of the imaginary y-axis that extends along the optical axis of the camera.

The specular reflection 102 of the first brightfield light beam 101 is reflected from the object 2 to the right area 32 of the objective lens 3. The specular reflection 102 may occur from the area of the object being inspected that is oriented in a substantially horizontal manner. The specular reflection 102 passes through the right area 52 of the beam splitter 5 and is focused on the camera 4 by the focusing lens 11.

In Figure 1A, the first dark field beam and the second dark field beam 111 and 112 illuminates the horizontal part of the object 2 and their specular reflections (not shown) are not collected by the objective lens 3.

FIG. 1A shows that the diffuse reflection 114 of the first dark field light beam and/or the second dark field light beam 111 and 112 can be directed to the third area (central area) 30 of the objective lens 3. The diffuse reflection 114 passes through the third area 50 of the beam splitter 50 and is focused on the camera 4 by the focusing lens 11 (not shown).

By using polarizers and/or phase compensators (such as quarter wave retarders) in the illumination path or the collection path (before the camera, included in the camera) or in both the illumination path and the collection path, many analysis methods The polarization characteristics of materials and specular reflection can be used.

Therefore, the system can use adjustable (or non-adjustable) polarization elements such as an adjustable polarizer 9 and/or an adjustable phase compensator and allow them to be rotated. These can also be rotated electronically/mechanically or can utilize controllable liquid crystal polarizers.

The focusing lens 11 is positioned between the beam splitter 5 and the camera 4 and focuses the light from the beam splitter onto the camera 4. In FIG. 1A, the focusing lens 11 focuses the specular reflection 102.

The analyzer (polarizer on the camera side) function can also be incorporated into the camera sensor, liquid crystal variable polarizer, or other implementations of them.

In FIG. 1B, the camera 4 has an adjustable polarizer 9 and an adjustable phase compensator 10 before it. These components can be included in the camera 4.

The camera may be a line camera such as CCD or CMOS and the illumination may include one line illumination bright field light source and two line dark field light sources.

Area scanning camera with area lighting system can be provided It can also include one or more bright-field light sources and dark-field illumination rings surrounding the objective lens. Other arrangements of dark field light sources can be provided.

As described above, the camera-side polarizer (analyzer) can optionally be implemented as part of the camera primitive sensor or in the liquid crystal. Similarly, the illumination side of the polarizing element is optional and can be implemented in various ways.

The system can also be used for enhanced visualization purposes instead of automatic inspection, in the case of automatic inspection, appropriate GUI and/or viewing devices should be added.

The system may include a controller arranged to coordinate table movement and camera image capture, adjust light and polarizers, etc.

The system may include additional parts such as a mobile station/table, a controller, a computer with a frame grabber, image processing, and GUI.

Notably, many ellipsometry methods can rely on different analyzer orientations to image the object under inspection and analyze the image simultaneously.

This can be done in several passes or with specific cameras, which are oriented with different analyzers-use specific sensors or high frequency alternating liquid crystal polarizers to capture multiple images simultaneously.

Figure 1C shows a system according to an embodiment of the invention.

In Fig. 1C, the first bright field beam 101, the first dark field beam and the second dark field beams 111 and 112 irradiate the non-horizontal area of the object 2'with a positive slope.

The specular reflection (not shown) of the first bright field beam 101 and the specular reflection (not shown) of the second dark field beam 112 are not collected by the objective lens 3.

The specular reflection 115 of the first dark field beam 111 is directed toward the first of the objective lens 30 Three regions (central region) 30 spread. The specular reflection 115 passes through the third area 50 of the beam splitter 50 and is focused on the camera 4 by the focusing lens 11.

FIG. 1C shows that the diffuse reflection 104 of the first brightfield light beam 101 can be guided to the second region 32 of the objective lens 3. The diffuse reflection 104 passes through the second region 52 of the beam splitter 50 and is focused on the camera 4 by a focusing lens (not shown).

It should be noted that in any figure, only some of the diffuse reflections may be shown.

Figure 2 shows a system according to an embodiment of the invention.

In Figure 2, there are two preferred collimated brightfield beams 101 and 121 to replace the single brightfield light in Figure 1, and there are specular reflections 102 of the first brightfield beam 101 and specular reflections of the second brightfield beam 121 122.

In FIG. 2, the bright field light source 6, the adjustable polarizer 9 and the adjustable phase compensator 10 are followed by a blocking element 11, which is configured to prevent the bright field beam from irradiating the third area of the beam splitter 5. 50 and split the single brightfield beam into two brightfield beams.

The bright field illumination module of FIG. 2 includes a blocking element 11 and is configured to irradiate the second region 52 of the beam splitter 5 with a second bright field beam 121.

The second area 52 of the beam splitter 5 is configured to guide the second bright field beam 121 to the second area 32 of the objective lens 3.

The second area 32 of the objective lens 3 is configured to direct the second bright field beam 121 to the object 2 so as to irradiate the object with a third angle range different from the first angle range and the second angle range.

The first area 31 of the objective lens 3 is configured to receive the specular reflection 122 of the second bright field beam and guide the specular reflection 122 of the second bright field beam to the split beam 器的第一区51。 The first area 51.

The first area 51 of the beam splitter is configured to direct the specular reflection 122 of the second bright field beam to the camera 4.

In addition, the first area 51 of the beam splitter 5 is configured to guide the first bright field light beam 101 to the first area 31 of the objective lens.

The first area 31 of the objective lens is configured to direct the first bright field beam 101 to the object 2 so as to illuminate the object in a first angular range.

In some environments (e.g. when illuminating the first oriented area-as shown in Figure 2), the second area 32 of the objective lens can be configured to receive the specular reflection 102 of the first brightfield beam The specular reflection 102 is directed to the second region 52 of the beam splitter.

In some environments, the second area 52 of the beam splitter is configured to direct the specular reflection 102 of the first brightfield beam toward the first area 41 of the camera.

In some environments, the third area 30 of the objective lens is configured to direct the diffuse reflection 114 of the dark field beams 111 and 112 to the third area 30 of the objective lens.

In some environments, the third region 30 of the beam splitter is configured to direct the diffuse reflection 114 of the dark field beam to the camera 4.

It should be noted that the camera 4 may receive one or more (or one) according to the orientation of the area of the area illuminated by the first bright field beam 101, the first dark field beam 111, and the second dark field beam 112 at a given time. There is also no) diffuse reflection and/or specular reflection of light beams 101, 111 and 112.

When the area of the object is illuminated, different areas of the area with different orientations of the object can specularly reflect the light from different light sources. The area of the area may include one or more points of the area. Unlimited irradiated areas of different orientations Examples of the system are provided in Figures 1A and 1C. Figures 1A and 1C may show different cross-sections of wires that are irradiated at the same time or at different times.

In Figure 1A, the illuminated area is shown to include a horizontal zone and the specular reflection is the specular reflection of the bright field beam. In FIG. 1C, the illuminated area is shown as including an oblique area and the specular reflection is the specular reflection of the first dark field beam. It should be noted that the illuminated area may include a first oriented area and a second oriented area, so that the specular reflection of the bright field beam and the specular reflection of the dark field beam can be collected.

Figures 3 and 5 show two parts of the system according to an embodiment of the invention. Figure 3 is taken along the first virtual plane and Figure 5 is taken along the second virtual plane-the second virtual plane is oriented (eg-orthogonal to) the first virtual plane. For example-the first virtual plane can be a Z-Y plane and the second virtual plane can be a Z-X plane. FIG. 4 shows a part of the system of FIG. 3.

In FIG. 3, the bright field illumination module includes a bright field light source 6, an adjustable polarizer 9 and an adjustable phase compensator 10. There is a first additional lens 61 after the bright field illumination module, and there is a beam splitter 5 after the first additional lens 61. In FIG. 3, the beam splitter 5 is positioned to the right of the first additional lens 61. The second additional lens 62 is positioned above the beam splitter 5 and below the camera 4. The objective lens 3 is located above the object 2 and below the beam splitter 5.

The objective lens 3 and the second additional lens 62 are parallel to each other and formed in a coaxial arrangement.

In Figures 3-5, there are the first bright field beam 201, the second bright field beam 202, the third bright field beam 203, the fourth bright field beam 204, the specular reflection 211 of the first bright field beam 201, and the second bright field beam 201. The specular reflection of the field beam 202 212, The specular reflection 213 of the third bright field beam 203, the specular reflection 214 of the fourth bright field beam 204, the diffuse reflection 303 of the two dark field beams 301 and 302, and the two dark field beams 301 and 302. In FIG. 3, the blocking element is positioned at the aperture of the bright field light source 6. The blocking element can be in the center of the aperture, thereby effectively forming a ring-shaped aperture for obtaining ring-shaped illumination. There may be additional blocking elements above and below the rays shown.

FIG. 3 shows two bright field beams, which are separated by the blocking element into a first bright field beam to a fourth bright field beam 201, 202, 203, 204.

The first to fourth brightfield beams 201, 202, 203, 204 pass through the first additional lens 61 and irradiate the first area, second area, third area, and fourth area of the beam splitter (in In FIG. 4, they are shown as 51, 52, 53 and 54) and guided to the first, second, third and fourth areas of the objective lens 3.

The objective lens 3 guides the first bright field beam and the second bright field beams 201 and 202 to the first position of the object 2.

The objective lens 3 directs the third bright field beam and the fourth bright field beams 203 and 204 to a second position of the object 2, which is spatially separated from the first position.

The specular reflection 211 of the first brightfield light beam 201 and the specular reflection 212 of the second brightfield light beam 202 pass through the second area and the first area of the objective lens 3, pass through the second area and the first area of the beam splitter, and are propagated by The second additional lens 62 is directed to the camera 4.

The specular reflection 213 of the third bright field beam 203 and the specular reflection 214 of the fourth bright field beam 204 pass through the fourth area and the third area of the objective lens 3 and pass through The fourth area and the third area of the excessive beam splitter propagate and are directed to the camera 4 by the second additional lens 62.

There can be more than two pairs of brightfield beams.

FIG. 5 shows that the dark field light beams 301 and 302 are generated by the dark field light source 7, pass through the adjustable polarizer 9 and the adjustable phase compensator 10, and are reflected by the mirrors 71 and 72 to illuminate the object 2.

The specular reflection 303 passes through the objective lens 3 and the second additional lens to illuminate the camera 4.

Figure 5 is a Y-Z cross section of the system, and this description is for the dark field line illumination of a line scan camera oriented along the x axis (ie, "into the paper").

A method for inspecting the object to be inspected using the system as shown above can be provided.

Figure 6 illustrates a method 400 according to an embodiment of the invention.

The method 400 may begin in steps 410 and 415.

Step 410 may include controlling the phase and polarization of the bright field beam and irradiating the first region of the beam splitter with the bright field beam.

Step 410 may be followed by a sequence of steps 420, 430, 440, 450, and 460.

Step 420 may include guiding the first region of the objective lens from the first region of the beam splitter.

Step 430 may include directing the bright field light beam to the object from the first area of the objective lens so as to irradiate the object with a first angle range.

Step 440 may include receiving the bright field beam from the second area of the objective lens Specular reflection.

Step 450 may include directing the specular reflection of the bright field beam to the second region of the beam splitter.

Step 460 may include directing the specular reflection of the bright field beam to the camera by the second region of the beam splitter.

Step 415 may include controlling the phase and polarization of the dark field beam, and irradiating the object with the dark field beam in a second angle range different from the first angle range.

Step 415 can be followed by a sequence of steps 425 and 435.

Step 425 may include guiding the specular reflection of the dark field beam to the third area of the beam splitter by the third area of the objective lens.

Step 435 may include directing the specular reflection of the dark field beam to the second area of the camera by the third area of the beam splitter.

Any combination of any components of any of the systems shown in FIGS. 1A, 1B, 2, 3, and 5 may be provided.

Any reference to the terms "including" or "having" can be interpreted as also referring to "consisting of" or "consisting essentially of". For example, respectively-a system including specific components may include additional components, may be limited to specific components, or may include additional components that do not materially affect the basic and novel features of the system. Any reference to the terms "comprising" and "comprises" should also be interpreted as referring to the term "composition" (excluding the presence of other elements) and/or to the term "substantially consisting" (excluding other materials or The existence of important components) references.

In addition, those skilled in the art will recognize the operations described above The boundaries between functions are only illustrative. The functions of multiple operations may be combined into a single operation, and/or the functions of a single operation may be dispersed into another operation. In addition, alternative embodiments may include multiple instances of specific operations, and the order of operations may be changed in various other embodiments.

Therefore, it will be understood that the architecture described herein is only exemplary, and in fact many other architectures that achieve the same function can be implemented. Abstractly, but still has a clear meaning, any arrangement of components to obtain the same function is effectively "associated" so that the desired function is obtained. Therefore, any two components herein that are combined to obtain a specific function can be regarded as "associated" with each other, so that the desired function is obtained regardless of the architecture or intermediate components. Likewise, any two components so associated can also be regarded as being "operably connected" or "operably coupled" to each other to obtain a desired function.

However, other modifications, changes and alternatives are also possible. Therefore, the description and the drawings are regarded as illustrative rather than restrictive.

The word "comprising" does not exclude the presence of other elements or steps than those listed in a claim. It should be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the invention described herein can, for example, be operated in other orientations than those illustrated or otherwise described herein.

In addition, the term "a" or "an" as used herein is defined as one or more than one. In addition, introductory phrases such as "at least one" and "one or more" in the patent application The use of should not be construed as implying that another claimed element introduced by the indefinite article "一(a)" or "一(an)" will include any particular application for the claimed element so introduced. An invention of such an element (even when the same patentable scope includes the introductory phrase "one or more" or "at least one" and an indefinite article such as "a" or "an") . The same applies to the use of definite articles. Unless stated otherwise, terms such as "first" and "second" are used to arbitrarily distinguish between elements described by such terms.

Therefore, these terms are not necessarily intended to indicate a temporary or other priority of such elements. The mere fact that certain measures are specified in mutually different patent applications does not indicate that the combination of these measures cannot be used to advantage.

1‧‧‧Table

2‧‧‧Object being inspected

3‧‧‧Objective lens

4‧‧‧Camera

5‧‧‧Beam Splitter

6‧‧‧Brightfield light source

7‧‧‧Dark field light source

9‧‧‧Adjustable polarizer

10‧‧‧Adjustable phase compensator

11‧‧‧Focusing lens; blocking element

30‧‧‧The central area of the objective lens; the third area of the beam splitter

31‧‧‧The left area of the objective lens (the first area)

32‧‧‧The area of the right objective lens (second area)

50‧‧‧The central area of the beam splitter (third area)

51‧‧‧Left area of beam splitter (first area)

52‧‧‧The right area of the beam splitter (second area)

101‧‧‧First brightfield beam

102‧‧‧Specular reflection of brightfield beam

111、112‧‧‧Dark field beam

114‧‧‧Diffuse reflection of dark field beams

141‧‧‧Image processor

142‧‧‧controller

Claims (29)

A system for inspecting an object, the system comprising: a camera; a focusing lens; a beam splitter, which includes a first area, a second area, and a device positioned between the first area and the second area of the beam splitter The third area; the objective lens, which includes a first area, a second area, and a third area positioned between the first area and the second area of the objective lens; a bright field illumination module, which is configured to use a bright field beam Irradiate the first region of the beam splitter; wherein the first region of the beam splitter is configured to direct the bright field beam to the first region of the objective lens; wherein the first region of the objective lens is Is configured to direct the bright field light beam to the area of the object so as to illuminate the area of the object in a first angular range; a dark field lighting module is configured to use a dark field light beam different from the The second angle range of the first angle range illuminates the area of the object; wherein the objective lens is configured to receive at least the light beam emitted from the bright field beam and the dark field beam from the area of the object At least one specular reflection of a light beam; wherein the objective lens is configured to guide the at least one specular reflection to the focusing lens; Wherein, the focusing lens is configured to focus the at least one specular reflection onto the camera; wherein, when the area of the object includes a region having a first orientation, the objective lens is configured to receive Specular reflection of the bright field light beam; and wherein, when the area of the object includes a region having a second orientation different from the first orientation, the objective lens is configured to receive the dark field light beam Specular reflection. The system according to claim 1, wherein the bright field illumination module is configured to change at least one of the phase and polarization of the dark field light beam with the passage of time. The system according to claim 1, wherein the dark field illumination module is configured to change at least one of the phase and polarization of the dark field light beam as time passes. The system according to claim 1, comprising a collection path phase and polarization control module for controlling at least one of the phase and polarization of the light sensed by the camera. The system according to claim 1, wherein the camera is configured to control at least one of the phase and polarization of the light sensed by the camera. The system according to claim 1, wherein the bright field illumination module includes a bright field light source, and the bright field light source is followed by a blocking element. The system according to claim 6, wherein the blocking element has a ring shape. The system according to claim 1, wherein the bright field illumination module is configured to illuminate the second area of the beam splitter with a second bright field light beam; Wherein, the second area of the beam splitter is configured to guide the second bright field light beam to the second area of the objective lens; wherein, the second area of the objective lens is configured to direct the second The bright field light beam is directed to the object so as to irradiate the object in a third angle range different from the first angle range and the second angle range. The system according to claim 1, wherein the dark-field illumination module includes a dark-field light source and a reflector; and wherein the reflector is configured to receive a dark-field light beam from the dark-field light source and transfer the The dark field beam is directed to the object. The system according to claim 9, wherein the mirror is positioned between the objective lens and the object. The system according to claim 7, wherein the bright field illumination module is configured to illuminate the fifth area of the beam splitter with a fourth bright field light beam; wherein the fifth area of the beam splitter is Is configured to guide the fourth bright field light beam to the fifth area of the objective lens; wherein the fifth area of the objective lens is configured to guide the fourth bright field light beam to the object. The system of claim 1, wherein the system includes a second additional lens positioned between the camera and the beam splitter. The system according to claim 1, wherein the bright field lighting module includes a blocking element positioned at a focal plane of a bright field light source of the bright field lighting module. The system according to claim 1, wherein the optical axis of the dark field illumination module is oriented to the optical axis of the bright field illumination module. The system according to claim 1, wherein the dark field illumination module is configured to (a) control the phase and polarization of the second dark field light beam, and (b) irradiate the second dark field light beam Object; and wherein the third area of the objective lens is configured to guide the diffuse reflection of the second dark field light beam to the third area of the objective lens. A method for inspecting an object, the method comprising: irradiating a first area of a beam splitter with a bright field light beam by a bright field illumination module; and irradiating the bright field with the first area of the beam splitter The light beam is directed to the first area of the objective lens; the first area of the objective lens is configured to direct the bright field light beam to the area of the object so as to irradiate the area of the object in a first angular range; The dark-field illumination module uses a dark-field beam to illuminate the area of the object with a second angle range different from the first angle range; through the objective lens and receiving from the area of the object At least one specular reflection of at least one light beam emitted by the bright field light beam and the dark field light beam; the at least one specular reflection is guided to the focusing lens by the objective lens; the at least one specular reflection is directed by the focusing lens The specular reflection is focused on the camera; when the area of the object includes an area with a first orientation, the specular reflection of the bright-field beam is received by the objective lens; and When the area of the object includes a region having a second orientation different from the first orientation, the specular reflection of the dark field light beam is received by the objective lens. The method according to claim 16, including changing at least one of the phase and polarization of the dark field light beam with the passage of time. The method according to claim 16, comprising controlling at least one of the phase and polarization of the light sensed by the camera by a collection path phase and polarization control module. The method according to claim 16, comprising controlling, by the camera, at least one of the phase and polarization of the light sensed by the camera. The method according to claim 16, wherein the bright field illumination module includes a bright field light source, and the bright field light source is followed by a blocking element. The method according to claim 20, wherein the blocking element has a ring shape. The method according to claim 16, comprising irradiating a second area of the beam splitter with a second bright field beam by the bright field illumination module; and irradiating the second area of the beam splitter by the second area of the beam splitter The second bright field beam is guided to the second area of the objective lens; the second bright field beam is guided to the object by the second area of the objective lens so as to be different from the first angle range and the The third angle range of the second angle range irradiates the object. The method according to claim 16, wherein the dark field illumination module includes a dark field light source and a reflector; and wherein the method includes receiving a dark field light beam through the reflector and from the dark field light source; And by the reflection The mirror directs the dark field light beam to the object. The method according to claim 23, wherein the mirror is positioned between the objective lens and the object. The method according to claim 24, comprising irradiating a fifth area of the beam splitter with a fourth bright field beam by the bright field illumination module; and using the fifth area of the beam splitter to irradiate the The fourth bright field light beam is guided to the fifth area of the objective lens; and the fourth bright field light beam is guided to the object through the fifth area of the objective lens. The method of claim 16, wherein the system includes a second additional lens positioned between the camera and the beam splitter. The method of claim 16, wherein the bright field lighting module includes a blocking element positioned at a focal plane of a bright field light source of the bright field lighting module. The method according to claim 16, wherein the optical axis of the dark field illumination module is oriented to the optical axis of the bright field illumination module. The method according to claim 16, comprising controlling the phase and polarization of a second dark field light beam by the dark field illumination module; irradiating the object with the second dark field light beam; and using the objective lens The third area guides the diffuse reflection of the second dark field light beam to the third area of the objective lens.

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