IL243163B - A lighting method for imaging specular reflections from a wide range of angles in a visual inspection system - Google Patents

A lighting method for imaging specular reflections from a wide range of angles in a visual inspection system

Info

Publication number
IL243163B
IL243163B IL243163A IL24316315A IL243163B IL 243163 B IL243163 B IL 243163B IL 243163 A IL243163 A IL 243163A IL 24316315 A IL24316315 A IL 24316315A IL 243163 B IL243163 B IL 243163B
Authority
IL
Israel
Prior art keywords
angles
wide range
inspection system
visual inspection
lighting method
Prior art date
Application number
IL243163A
Other languages
Hebrew (he)
Other versions
IL243163A0 (en
Inventor
Gordon Noam
Cohen Itay
Tzhori Amir
Original Assignee
Gordon Noam
Cohen Itay
Tzhori Amir
Cims Suzhou Co Ltd
Camtek Imaging Tech Suzhou Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gordon Noam, Cohen Itay, Tzhori Amir, Cims Suzhou Co Ltd, Camtek Imaging Tech Suzhou Co Ltd filed Critical Gordon Noam
Publication of IL243163A0 publication Critical patent/IL243163A0/en
Publication of IL243163B publication Critical patent/IL243163B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Microscoopes, Condenser (AREA)
  • Studio Devices (AREA)
IL243163A 2014-12-18 2015-12-16 A lighting method for imaging specular reflections from a wide range of angles in a visual inspection system IL243163B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201462093457P 2014-12-18 2014-12-18

Publications (2)

Publication Number Publication Date
IL243163A0 IL243163A0 (en) 2016-02-29
IL243163B true IL243163B (en) 2021-02-28

Family

ID=56186607

Family Applications (1)

Application Number Title Priority Date Filing Date
IL243163A IL243163B (en) 2014-12-18 2015-12-16 A lighting method for imaging specular reflections from a wide range of angles in a visual inspection system

Country Status (3)

Country Link
CN (1) CN205317229U (en)
IL (1) IL243163B (en)
TW (1) TWI700487B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018070938A1 (en) 2016-10-13 2018-04-19 Life Technologies Holdings Pte Limited Devices, systems, and methods for illuminating and imaging objects
CN207908817U (en) * 2016-10-13 2018-09-25 生命技术控股私人有限公司 Lighting system
US10422984B2 (en) * 2017-05-12 2019-09-24 Applied Materials, Inc. Flexible mode scanning optical microscopy and inspection system
DE102017115658A1 (en) * 2017-07-12 2019-01-17 Carl Zeiss Microscopy Gmbh Flickering at angle-variable illumination
CN111065912A (en) * 2019-12-04 2020-04-24 长江存储科技有限责任公司 Inspection system for semiconductor device and related inspection method
CN111044521A (en) * 2019-12-13 2020-04-21 苏州通富超威半导体有限公司 Combined light source device and method for chip detection
CN114264658B (en) * 2021-03-12 2024-01-26 青岛昇瑞光电科技有限公司 LED chip detection device and equipment
CN115015275B (en) * 2022-07-11 2025-05-23 凌云光技术股份有限公司 Defect detection device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6809808B2 (en) * 2002-03-22 2004-10-26 Applied Materials, Inc. Wafer defect detection system with traveling lens multi-beam scanner
WO2007023500A2 (en) * 2005-08-26 2007-03-01 Camtek Ltd. Device and method for inspecting an object
JP2007101401A (en) * 2005-10-05 2007-04-19 Tokyo Seimitsu Co Ltd Visual examination device and method
US8501503B2 (en) * 2011-04-28 2013-08-06 Nanda Technologies Gmbh Methods of inspecting and manufacturing semiconductor wafers
CN203490180U (en) * 2013-09-13 2014-03-19 楚天科技股份有限公司 Impurity detection device of automatic light inspection machine

Also Published As

Publication number Publication date
CN205317229U (en) 2016-06-15
TWI700487B (en) 2020-08-01
TW201629472A (en) 2016-08-16
IL243163A0 (en) 2016-02-29

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