TWI368832B - Composition for removing a (photo) resist - Google Patents
Composition for removing a (photo) resistInfo
- Publication number
- TWI368832B TWI368832B TW094114944A TW94114944A TWI368832B TW I368832 B TWI368832 B TW I368832B TW 094114944 A TW094114944 A TW 094114944A TW 94114944 A TW94114944 A TW 94114944A TW I368832 B TWI368832 B TW I368832B
- Authority
- TW
- Taiwan
- Prior art keywords
- resist
- photo
- composition
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
-
- D—TEXTILES; PAPER
- D04—BRAIDING; LACE-MAKING; KNITTING; TRIMMINGS; NON-WOVEN FABRICS
- D04H—MAKING TEXTILE FABRICS, e.g. FROM FIBRES OR FILAMENTARY MATERIAL; FABRICS MADE BY SUCH PROCESSES OR APPARATUS, e.g. FELTS, NON-WOVEN FABRICS; COTTON-WOOL; WADDING ; NON-WOVEN FABRICS FROM STAPLE FIBRES, FILAMENTS OR YARNS, BONDED WITH AT LEAST ONE WEB-LIKE MATERIAL DURING THEIR CONSOLIDATION
- D04H13/00—Other non-woven fabrics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D295/00—Heterocyclic compounds containing polymethylene-imine rings with at least five ring members, 3-azabicyclo [3.2.2] nonane, piperazine, morpholine or thiomorpholine rings, having only hydrogen atoms directly attached to the ring carbon atoms
- C07D295/02—Heterocyclic compounds containing polymethylene-imine rings with at least five ring members, 3-azabicyclo [3.2.2] nonane, piperazine, morpholine or thiomorpholine rings, having only hydrogen atoms directly attached to the ring carbon atoms containing only hydrogen and carbon atoms in addition to the ring hetero elements
- C07D295/027—Heterocyclic compounds containing polymethylene-imine rings with at least five ring members, 3-azabicyclo [3.2.2] nonane, piperazine, morpholine or thiomorpholine rings, having only hydrogen atoms directly attached to the ring carbon atoms containing only hydrogen and carbon atoms in addition to the ring hetero elements containing only one hetero ring
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D295/00—Heterocyclic compounds containing polymethylene-imine rings with at least five ring members, 3-azabicyclo [3.2.2] nonane, piperazine, morpholine or thiomorpholine rings, having only hydrogen atoms directly attached to the ring carbon atoms
- C07D295/04—Heterocyclic compounds containing polymethylene-imine rings with at least five ring members, 3-azabicyclo [3.2.2] nonane, piperazine, morpholine or thiomorpholine rings, having only hydrogen atoms directly attached to the ring carbon atoms with substituted hydrocarbon radicals attached to ring nitrogen atoms
- C07D295/08—Heterocyclic compounds containing polymethylene-imine rings with at least five ring members, 3-azabicyclo [3.2.2] nonane, piperazine, morpholine or thiomorpholine rings, having only hydrogen atoms directly attached to the ring carbon atoms with substituted hydrocarbon radicals attached to ring nitrogen atoms substituted by singly bound oxygen or sulfur atoms
- C07D295/084—Heterocyclic compounds containing polymethylene-imine rings with at least five ring members, 3-azabicyclo [3.2.2] nonane, piperazine, morpholine or thiomorpholine rings, having only hydrogen atoms directly attached to the ring carbon atoms with substituted hydrocarbon radicals attached to ring nitrogen atoms substituted by singly bound oxygen or sulfur atoms with the ring nitrogen atoms and the oxygen or sulfur atoms attached to the same carbon chain, which is not interrupted by carbocyclic rings
- C07D295/088—Heterocyclic compounds containing polymethylene-imine rings with at least five ring members, 3-azabicyclo [3.2.2] nonane, piperazine, morpholine or thiomorpholine rings, having only hydrogen atoms directly attached to the ring carbon atoms with substituted hydrocarbon radicals attached to ring nitrogen atoms substituted by singly bound oxygen or sulfur atoms with the ring nitrogen atoms and the oxygen or sulfur atoms attached to the same carbon chain, which is not interrupted by carbocyclic rings to an acyclic saturated chain
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040032112A KR101082018B1 (ko) | 2004-05-07 | 2004-05-07 | 레지스트 제거용 조성물 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200602818A TW200602818A (en) | 2006-01-16 |
TWI368832B true TWI368832B (en) | 2012-07-21 |
Family
ID=35320362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094114944A TWI368832B (en) | 2004-05-07 | 2005-05-09 | Composition for removing a (photo) resist |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2007536565A (zh) |
KR (1) | KR101082018B1 (zh) |
CN (1) | CN1950754A (zh) |
TW (1) | TWI368832B (zh) |
WO (1) | WO2005109107A1 (zh) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4902299B2 (ja) * | 2006-09-11 | 2012-03-21 | 三星電子株式会社 | 表示装置の製造方法 |
JP5195063B2 (ja) * | 2008-06-19 | 2013-05-08 | 東ソー株式会社 | レジスト剥離液 |
WO2011065603A1 (ko) * | 2009-11-26 | 2011-06-03 | 주식회사 엘지화학 | 포토레지스트 스트리퍼 조성물 및 이를 이용한 포토레지스트 박리방법 |
KR101008373B1 (ko) * | 2009-11-26 | 2011-01-13 | 주식회사 엘지화학 | 포토레지스트 스트리퍼 조성물 및 이를 이용한 포토레지스트 박리방법 |
TWI405053B (zh) * | 2009-11-27 | 2013-08-11 | Lg Chemical Ltd | 光阻剝離組成物及剝離光阻之方法 |
KR101679030B1 (ko) * | 2009-12-16 | 2016-11-23 | 주식회사 동진쎄미켐 | 레지스트 제거용 조성물 |
JP5533383B2 (ja) * | 2010-07-15 | 2014-06-25 | 東ソー株式会社 | レジスト剥離剤及びそれを用いた剥離方法 |
WO2014104192A1 (ja) * | 2012-12-27 | 2014-07-03 | 富士フイルム株式会社 | レジスト除去液およびレジスト剥離方法 |
CN105143984B (zh) * | 2013-03-07 | 2017-09-05 | 株式会社Lg化学 | 用于去除光阻剂的剥离剂组合物及使用其剥离光阻剂的方法 |
KR101668063B1 (ko) * | 2013-05-07 | 2016-10-20 | 주식회사 엘지화학 | 포토레지스트 제거용 스트리퍼 조성물 및 이를 사용한 포토레지스트의 박리방법 |
JP6231423B2 (ja) * | 2014-04-09 | 2017-11-15 | 東京応化工業株式会社 | フォトリソグラフィ用剥離液及びパターン形成方法 |
CN112731777A (zh) * | 2020-12-17 | 2021-04-30 | 芯越微电子材料(嘉兴)有限公司 | 一种适用半导体集成电路的光刻胶剥离液及制备方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60131535A (ja) * | 1983-12-20 | 1985-07-13 | エッチエムシー・パテンツ・ホールディング・カンパニー・インコーポレーテッド | ポジのホトレジスト用のストリツピング組成物 |
JP2578821B2 (ja) * | 1987-08-10 | 1997-02-05 | 東京応化工業株式会社 | ポジ型ホトレジスト用剥離液 |
US6326130B1 (en) * | 1993-10-07 | 2001-12-04 | Mallinckrodt Baker, Inc. | Photoresist strippers containing reducing agents to reduce metal corrosion |
US5798323A (en) * | 1997-05-05 | 1998-08-25 | Olin Microelectronic Chemicals, Inc. | Non-corrosive stripping and cleaning composition |
JP2000056480A (ja) * | 1998-08-10 | 2000-02-25 | Tokyo Ohka Kogyo Co Ltd | レジスト用剥離液組成物およびこれを用いたレジスト剥離方法 |
JP2000250231A (ja) * | 1999-03-03 | 2000-09-14 | Nagase Denshi Kagaku Kk | フォトレジスト剥離剤組成物及びその使用方法 |
JP4442017B2 (ja) * | 2000-10-11 | 2010-03-31 | 東ソー株式会社 | レジスト剥離剤 |
US6599370B2 (en) * | 2000-10-16 | 2003-07-29 | Mallinckrodt Inc. | Stabilized alkaline compositions for cleaning microelectronic substrates |
KR100822236B1 (ko) | 2000-11-30 | 2008-04-16 | 토소가부시키가이샤 | 레지스트 박리제 |
JP2002244310A (ja) * | 2001-02-21 | 2002-08-30 | Tosoh Corp | レジスト剥離剤 |
JP2003270801A (ja) * | 2002-03-13 | 2003-09-25 | Nippon Zeon Co Ltd | レジスト用剥離液組成物及びそれを用いた剥離方法 |
JP4304909B2 (ja) * | 2002-04-03 | 2009-07-29 | 東ソー株式会社 | 洗浄剤及びそれを用いた洗浄方法 |
US6951710B2 (en) * | 2003-05-23 | 2005-10-04 | Air Products And Chemicals, Inc. | Compositions suitable for removing photoresist, photoresist byproducts and etching residue, and use thereof |
JP4405767B2 (ja) * | 2003-08-28 | 2010-01-27 | ソニー株式会社 | 銀及び/又は銀合金を含む基板のフォトレジスト剥離液組成物、それを用いたパターンの製造方法ならびにそれを含む表示装置 |
US8338087B2 (en) * | 2004-03-03 | 2012-12-25 | Advanced Technology Materials, Inc | Composition and process for post-etch removal of photoresist and/or sacrificial anti-reflective material deposited on a substrate |
-
2004
- 2004-05-07 KR KR1020040032112A patent/KR101082018B1/ko active IP Right Grant
-
2005
- 2005-05-06 WO PCT/KR2005/001326 patent/WO2005109107A1/en active Application Filing
- 2005-05-06 CN CNA2005800145635A patent/CN1950754A/zh active Pending
- 2005-05-06 JP JP2007511289A patent/JP2007536565A/ja active Pending
- 2005-05-09 TW TW094114944A patent/TWI368832B/zh active
Also Published As
Publication number | Publication date |
---|---|
JP2007536565A (ja) | 2007-12-13 |
TW200602818A (en) | 2006-01-16 |
KR101082018B1 (ko) | 2011-11-10 |
KR20050106993A (ko) | 2005-11-11 |
WO2005109107A1 (en) | 2005-11-17 |
CN1950754A (zh) | 2007-04-18 |
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