TWI361104B - Method, reagent and apparatus for treating emissions containing chlorine trifluoride and other inorganic halogenated gases - Google Patents
Method, reagent and apparatus for treating emissions containing chlorine trifluoride and other inorganic halogenated gases Download PDFInfo
- Publication number
- TWI361104B TWI361104B TW093113633A TW93113633A TWI361104B TW I361104 B TWI361104 B TW I361104B TW 093113633 A TW093113633 A TW 093113633A TW 93113633 A TW93113633 A TW 93113633A TW I361104 B TWI361104 B TW I361104B
- Authority
- TW
- Taiwan
- Prior art keywords
- gas
- agent
- processing unit
- treatment
- exhaust gas
- Prior art date
Links
- 239000007789 gas Substances 0.000 title claims description 140
- JOHWNGGYGAVMGU-UHFFFAOYSA-N trifluorochlorine Chemical compound FCl(F)F JOHWNGGYGAVMGU-UHFFFAOYSA-N 0.000 title claims description 33
- 238000000034 method Methods 0.000 title claims description 20
- 239000003153 chemical reaction reagent Substances 0.000 title 1
- 239000003795 chemical substances by application Substances 0.000 claims description 61
- 238000011282 treatment Methods 0.000 claims description 57
- WZKSXHQDXQKIQJ-UHFFFAOYSA-N F[C](F)F Chemical compound F[C](F)F WZKSXHQDXQKIQJ-UHFFFAOYSA-N 0.000 claims description 17
- 229910021536 Zeolite Inorganic materials 0.000 claims description 16
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims description 16
- 239000010457 zeolite Substances 0.000 claims description 16
- 229910052801 chlorine Inorganic materials 0.000 claims description 14
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical group [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 13
- 239000011593 sulfur Substances 0.000 claims description 12
- 229910052717 sulfur Inorganic materials 0.000 claims description 12
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 11
- 239000000460 chlorine Substances 0.000 claims description 11
- 239000003638 chemical reducing agent Substances 0.000 claims description 10
- 229910052731 fluorine Inorganic materials 0.000 claims description 9
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 claims description 8
- 239000002253 acid Substances 0.000 claims description 7
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims description 6
- 229910015900 BF3 Inorganic materials 0.000 claims description 5
- AKHNMLFCWUSKQB-UHFFFAOYSA-L sodium thiosulfate Chemical group [Na+].[Na+].[O-]S([O-])(=O)=S AKHNMLFCWUSKQB-UHFFFAOYSA-L 0.000 claims description 5
- 235000019345 sodium thiosulphate Nutrition 0.000 claims description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 4
- 239000011737 fluorine Substances 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- SWUWMVIPFQAITJ-UHFFFAOYSA-N chlorine difluoride-35cl Chemical compound FClF SWUWMVIPFQAITJ-UHFFFAOYSA-N 0.000 claims description 3
- FAIAAWCVCHQXDN-UHFFFAOYSA-N phosphorus trichloride Chemical compound ClP(Cl)Cl FAIAAWCVCHQXDN-UHFFFAOYSA-N 0.000 claims description 3
- XPIIDKFHGDPTIY-UHFFFAOYSA-N F.F.F.P Chemical compound F.F.F.P XPIIDKFHGDPTIY-UHFFFAOYSA-N 0.000 claims description 2
- 230000000382 dechlorinating effect Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910001872 inorganic gas Inorganic materials 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- DHCDFWKWKRSZHF-UHFFFAOYSA-N sulfurothioic S-acid Chemical compound OS(O)(=O)=S DHCDFWKWKRSZHF-UHFFFAOYSA-N 0.000 claims 6
- 239000001307 helium Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- YALHCTUQSQRCSX-UHFFFAOYSA-N sulfane sulfuric acid Chemical compound S.OS(O)(=O)=O YALHCTUQSQRCSX-UHFFFAOYSA-N 0.000 claims 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 claims 1
- UFHHEWUNBJORRL-UHFFFAOYSA-J tetrachlorobismuth Chemical compound Cl[Bi](Cl)(Cl)Cl UFHHEWUNBJORRL-UHFFFAOYSA-J 0.000 claims 1
- OMEWYJXIJDAKHZ-UHFFFAOYSA-J tetrafluorotantalum Chemical compound [F-].[F-].[F-].[F-].[Ta+4] OMEWYJXIJDAKHZ-UHFFFAOYSA-J 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 8
- 238000002309 gasification Methods 0.000 description 8
- 125000001153 fluoro group Chemical group F* 0.000 description 7
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 6
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000000354 decomposition reaction Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 4
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- OMRRUNXAWXNVFW-UHFFFAOYSA-N fluoridochlorine Chemical compound ClF OMRRUNXAWXNVFW-UHFFFAOYSA-N 0.000 description 4
- 238000011221 initial treatment Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 239000003957 anion exchange resin Substances 0.000 description 3
- 150000001804 chlorine Chemical class 0.000 description 3
- 125000001309 chloro group Chemical group Cl* 0.000 description 3
- 238000007872 degassing Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 3
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-N Sulfurous acid Chemical compound OS(O)=O LSNNMFCWUKXFEE-UHFFFAOYSA-N 0.000 description 2
- 235000011941 Tilia x europaea Nutrition 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000006298 dechlorination reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004571 lime Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 2
- 238000009423 ventilation Methods 0.000 description 2
- MIZLGWKEZAPEFJ-UHFFFAOYSA-N 1,1,2-trifluoroethene Chemical group FC=C(F)F MIZLGWKEZAPEFJ-UHFFFAOYSA-N 0.000 description 1
- ZQXCQTAELHSNAT-UHFFFAOYSA-N 1-chloro-3-nitro-5-(trifluoromethyl)benzene Chemical compound [O-][N+](=O)C1=CC(Cl)=CC(C(F)(F)F)=C1 ZQXCQTAELHSNAT-UHFFFAOYSA-N 0.000 description 1
- 229910015844 BCl3 Inorganic materials 0.000 description 1
- 229910021180 PF3 Inorganic materials 0.000 description 1
- 206010036790 Productive cough Diseases 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910003910 SiCl4 Inorganic materials 0.000 description 1
- 229910004014 SiF4 Inorganic materials 0.000 description 1
- 239000005864 Sulphur Substances 0.000 description 1
- 208000027418 Wounds and injury Diseases 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000011149 active material Substances 0.000 description 1
- 238000005273 aeration Methods 0.000 description 1
- 238000005349 anion exchange Methods 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005237 degreasing agent Methods 0.000 description 1
- 239000013527 degreasing agent Substances 0.000 description 1
- 238000006471 dimerization reaction Methods 0.000 description 1
- FGRVOLIFQGXPCT-UHFFFAOYSA-L dipotassium;dioxido-oxo-sulfanylidene-$l^{6}-sulfane Chemical compound [K+].[K+].[O-]S([O-])(=O)=S FGRVOLIFQGXPCT-UHFFFAOYSA-L 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 238000005108 dry cleaning Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 229930182478 glucoside Natural products 0.000 description 1
- 150000008131 glucosides Chemical class 0.000 description 1
- NIXONLGLPJQPCW-UHFFFAOYSA-K gold trifluoride Chemical compound F[Au](F)F NIXONLGLPJQPCW-UHFFFAOYSA-K 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 208000014674 injury Diseases 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000011866 long-term treatment Methods 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- WKFBZNUBXWCCHG-UHFFFAOYSA-N phosphorus trifluoride Chemical compound FP(F)F WKFBZNUBXWCCHG-UHFFFAOYSA-N 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 235000010265 sodium sulphite Nutrition 0.000 description 1
- 210000003802 sputum Anatomy 0.000 description 1
- 208000024794 sputum Diseases 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- QHDCFDQKXQIXLF-UHFFFAOYSA-N sulfuric acid sulfurous acid Chemical compound OS(O)=O.OS(O)(=O)=O QHDCFDQKXQIXLF-UHFFFAOYSA-N 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- HPQYKCJIWQFJMS-UHFFFAOYSA-N tetrathionic acid Chemical class OS(=O)(=O)SSS(O)(=O)=O HPQYKCJIWQFJMS-UHFFFAOYSA-N 0.000 description 1
- DHCDFWKWKRSZHF-UHFFFAOYSA-L thiosulfate(2-) Chemical compound [O-]S([S-])(=O)=O DHCDFWKWKRSZHF-UHFFFAOYSA-L 0.000 description 1
- 150000004764 thiosulfuric acid derivatives Chemical class 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/68—Halogens or halogen compounds
- B01D53/685—Halogens or halogen compounds by treating the gases with solids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
- B01J20/16—Alumino-silicates
- B01J20/18—Synthetic zeolitic molecular sieves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J29/00—Catalysts comprising molecular sieves
- B01J29/04—Catalysts comprising molecular sieves having base-exchange properties, e.g. crystalline zeolites
- B01J29/06—Crystalline aluminosilicate zeolites; Isomorphous compounds thereof
- B01J29/70—Crystalline aluminosilicate zeolites; Isomorphous compounds thereof of types characterised by their specific structure not provided for in groups B01J29/08 - B01J29/65
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- Organic Chemistry (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Treating Waste Gases (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Catalysts (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003154219A JP4564242B2 (ja) | 2003-05-30 | 2003-05-30 | 三フッ化塩素を含む無機ハロゲン化ガス含有排ガスの処理方法、処理剤及び処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200503823A TW200503823A (en) | 2005-02-01 |
| TWI361104B true TWI361104B (en) | 2012-04-01 |
Family
ID=34048944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093113633A TWI361104B (en) | 2003-05-30 | 2004-05-14 | Method, reagent and apparatus for treating emissions containing chlorine trifluoride and other inorganic halogenated gases |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4564242B2 (ja) |
| KR (1) | KR101178179B1 (ja) |
| SG (1) | SG111184A1 (ja) |
| TW (1) | TWI361104B (ja) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4553705B2 (ja) * | 2004-12-02 | 2010-09-29 | 大陽日酸株式会社 | 除害装置及びその管理方法 |
| EP2500093B1 (en) * | 2007-10-26 | 2020-06-10 | Asahi Kasei Kabushiki Kaisha | Use of a supported composite particle material, production process of said material and process for producing compounds using supported composite particle material as catalyst for chemical synthesis |
| JP5471313B2 (ja) * | 2008-12-11 | 2014-04-16 | セントラル硝子株式会社 | 三フッ化塩素の除害方法 |
| JP5626849B2 (ja) * | 2010-05-07 | 2014-11-19 | 学校法人 関西大学 | ゼオライトによるフッ素系ガスの分解処理方法 |
| JP6252153B2 (ja) * | 2013-12-12 | 2017-12-27 | 宇部興産株式会社 | ガスの処理装置及びガスの処理カートリッジ |
| JP2015112545A (ja) * | 2013-12-12 | 2015-06-22 | 宇部興産株式会社 | ガスの処理装置及びガスの処理カートリッジ |
| JP2015112544A (ja) * | 2013-12-12 | 2015-06-22 | 宇部興産株式会社 | ガスの処理装置及びガスの処理カートリッジ |
| JP2015112546A (ja) * | 2013-12-12 | 2015-06-22 | 宇部興産株式会社 | ガスの処理装置及びガスの処理カートリッジ |
| JP2016221428A (ja) * | 2015-05-28 | 2016-12-28 | 宇部興産株式会社 | ガスの処理装置及びガスの処理カートリッジ |
| JP7253132B2 (ja) * | 2018-07-30 | 2023-04-06 | クラリアント触媒株式会社 | ハロゲンガス除去剤とその製造方法、及び除去剤の消費状態をモニターする方法 |
| CN114538380B (zh) * | 2021-01-29 | 2022-10-14 | 福建德尔科技股份有限公司 | 电子级三氟化氯的纯化系统及其温差动力控制方法 |
| CN116902922B (zh) * | 2023-09-13 | 2023-12-05 | 福建省巨颖高能新材料有限公司 | 一种制备工业级五氟化氯的装置及制备方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03217217A (ja) * | 1990-01-19 | 1991-09-25 | Central Glass Co Ltd | 三フッ化塩素を含む排ガスの処理方法 |
| JPH06177B2 (ja) * | 1990-02-05 | 1994-01-05 | 株式会社荏原総合研究所 | Ｃ１ｆ▲下３▼を含有する排ガスの処理方法 |
| JPH0716583B2 (ja) * | 1990-08-10 | 1995-03-01 | セントラル硝子株式会社 | フッ化塩素を含む排ガスの乾式処理方法 |
| JPH10263367A (ja) * | 1997-03-27 | 1998-10-06 | Aiwa Co Ltd | 脱臭装置 |
| JPH10290920A (ja) * | 1997-04-22 | 1998-11-04 | Hitachi Ltd | 高耐食排気体分解装置および半導体製造装置 |
| JP3981206B2 (ja) * | 1997-06-20 | 2007-09-26 | 株式会社荏原製作所 | 無機ハロゲン化ガスを含有する排ガスの処理方法及び処理装置 |
| JP2000117053A (ja) * | 1998-10-16 | 2000-04-25 | Tomoe Shokai:Kk | ＣｌＦ３処理筒、及びＣｌＦ３を含む被処理ガスの処理方法 |
| JP4913271B2 (ja) * | 1999-07-07 | 2012-04-11 | ズードケミー触媒株式会社 | ハロゲンガス用処理剤 |
| JP3600073B2 (ja) | 1999-07-14 | 2004-12-08 | セントラル硝子株式会社 | 改良された微生物農薬製剤 |
-
2003
- 2003-05-30 JP JP2003154219A patent/JP4564242B2/ja not_active Expired - Lifetime
-
2004
- 2004-05-14 TW TW093113633A patent/TWI361104B/zh not_active IP Right Cessation
- 2004-05-21 SG SG200402960A patent/SG111184A1/en unknown
- 2004-05-28 KR KR1020040038115A patent/KR101178179B1/ko active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| SG111184A1 (en) | 2005-05-30 |
| JP2004351364A (ja) | 2004-12-16 |
| TW200503823A (en) | 2005-02-01 |
| KR101178179B1 (ko) | 2012-08-29 |
| KR20040103406A (ko) | 2004-12-08 |
| JP4564242B2 (ja) | 2010-10-20 |
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| Date | Code | Title | Description |
|---|---|---|---|
| MK4A | Expiration of patent term of an invention patent |