TWI357375B - - Google Patents

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Publication number
TWI357375B
TWI357375B TW98104233A TW98104233A TWI357375B TW I357375 B TWI357375 B TW I357375B TW 98104233 A TW98104233 A TW 98104233A TW 98104233 A TW98104233 A TW 98104233A TW I357375 B TWI357375 B TW I357375B
Authority
TW
Taiwan
Prior art keywords
hand
joint
column
arm
moving
Prior art date
Application number
TW98104233A
Other languages
English (en)
Chinese (zh)
Other versions
TW200932456A (en
Inventor
Satoshi Sueyoshi
Kentaro Tanaka
Tomohiro Matsuo
Original Assignee
Yaskawa Denki Seisakusho Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Denki Seisakusho Kk filed Critical Yaskawa Denki Seisakusho Kk
Publication of TW200932456A publication Critical patent/TW200932456A/zh
Application granted granted Critical
Publication of TWI357375B publication Critical patent/TWI357375B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW98104233A 2006-07-11 2007-07-10 Multijoint robot TW200932456A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006190822 2006-07-11

Publications (2)

Publication Number Publication Date
TW200932456A TW200932456A (en) 2009-08-01
TWI357375B true TWI357375B (ja) 2012-02-01

Family

ID=38923081

Family Applications (3)

Application Number Title Priority Date Filing Date
TW96125092A TW200817151A (en) 2006-07-11 2007-07-10 Multijoint robot
TW98104232A TW200930524A (en) 2006-07-11 2007-07-10 Multijoint robot
TW98104233A TW200932456A (en) 2006-07-11 2007-07-10 Multijoint robot

Family Applications Before (2)

Application Number Title Priority Date Filing Date
TW96125092A TW200817151A (en) 2006-07-11 2007-07-10 Multijoint robot
TW98104232A TW200930524A (en) 2006-07-11 2007-07-10 Multijoint robot

Country Status (5)

Country Link
JP (3) JP4168410B2 (ja)
KR (3) KR100914387B1 (ja)
CN (3) CN101360589B (ja)
TW (3) TW200817151A (ja)
WO (1) WO2008007516A1 (ja)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4655228B2 (ja) * 2006-07-11 2011-03-23 株式会社安川電機 多関節ロボットおよび多関節ロボットの移送方法
JP2010064219A (ja) * 2008-09-12 2010-03-25 Yaskawa Electric Corp 多関節ロボット
JP4591624B1 (ja) 2010-03-12 2010-12-01 株式会社安川電機 産業用ロボット
KR200466172Y1 (ko) * 2010-04-28 2013-04-09 히라따기꼬오 가부시키가이샤 기판반송로봇
US8985537B2 (en) * 2010-09-13 2015-03-24 Toyota Jidosha Kabushiki Kaisha Support arm
KR101211911B1 (ko) * 2010-11-02 2012-12-13 주식회사 로보스타 표시장치용 패널의 반전로봇
KR101682465B1 (ko) * 2010-11-17 2016-12-05 삼성전자 주식회사 기판이송로봇
JP5847393B2 (ja) * 2010-11-30 2016-01-20 川崎重工業株式会社 搬送ロボット
CN102145488B (zh) * 2011-02-14 2012-12-26 山东爱通工业机器人科技有限公司 一种柔性四自由度机械手
JP5565345B2 (ja) * 2011-03-07 2014-08-06 株式会社安川電機 搬送ロボット
CN102126208B (zh) * 2011-03-16 2012-09-19 哈尔滨工业大学 一种并联型r轴扩展机械臂
CN102152297B (zh) * 2011-03-16 2013-04-10 哈尔滨工业大学 一种串联型r轴扩展机械臂
CN102161199B (zh) * 2011-03-16 2012-09-19 哈尔滨工业大学 一种用于硅片传输机器人的w轴同轴传动机构
CN102126209B (zh) * 2011-03-16 2012-08-15 哈尔滨工业大学 一种用于硅片传输机器人的w轴差轴传动机构
JP5387622B2 (ja) * 2011-06-17 2014-01-15 株式会社安川電機 搬送ロボット
JP5429256B2 (ja) * 2011-10-03 2014-02-26 株式会社安川電機 ロボットシステム
JP5768827B2 (ja) * 2013-03-14 2015-08-26 株式会社安川電機 ロボットシステムおよびワークの搬送方法
KR101458697B1 (ko) * 2013-04-19 2014-11-05 현대중공업 주식회사 기판 이송장치 및 이를 이용한 기판 이송방법
JP6295037B2 (ja) * 2013-08-08 2018-03-14 日本電産サンキョー株式会社 産業用ロボット
KR101506188B1 (ko) * 2013-08-30 2015-03-26 주식회사 로보스타 멀티플 암을 구비한 반송 로봇
JP6352016B2 (ja) * 2014-03-27 2018-07-04 日本電産サンキョー株式会社 産業用ロボット
CN105922242B (zh) * 2016-06-28 2018-06-29 江苏捷帝机器人股份有限公司 一种高效的智能化机械臂及其工作方法
CN105922233B (zh) * 2016-06-28 2018-08-07 江苏捷帝机器人股份有限公司 一种高精准智能化机械臂及其工作方法
CN106041876B (zh) * 2016-06-28 2019-01-29 江苏捷帝机器人股份有限公司 一种全方位移动的智能化机械臂及其工作方法
CN106175934B (zh) * 2016-06-29 2019-04-30 微创（上海）医疗机器人有限公司 手术机器人及其机械臂
CN106078724B (zh) * 2016-06-29 2020-01-24 微创（上海）医疗机器人有限公司 机械臂及其手术机器人
JP6873881B2 (ja) * 2017-10-13 2021-05-19 日本電産サンキョー株式会社 産業用ロボット
KR102059445B1 (ko) 2017-11-28 2019-12-27 주식회사 엠티에스이 이동식 워크 테이블
CN108608460A (zh) * 2018-04-23 2018-10-02 深圳市华星光电半导体显示技术有限公司 机械臂结构及机器人
CN110549354A (zh) * 2018-05-31 2019-12-10 北新集团建材股份有限公司 下抄式机械抓取夹具
CN110454554A (zh) * 2019-08-26 2019-11-15 苏州领裕电子科技有限公司 一种单轴折叠手臂直线模组

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58109284A (ja) * 1981-12-22 1983-06-29 株式会社小松製作所 ロボツト装置
GB2287045B (en) * 1994-03-04 1997-05-14 Joseph Michael Programmable materials
JP2599571B2 (ja) * 1994-05-11 1997-04-09 ダイトロンテクノロジー株式会社 基板搬送ロボット
JPH11347982A (ja) * 1998-06-02 1999-12-21 Mecs Corp 搬送ロボットの摺動部構造
CN2341778Y (zh) * 1998-12-02 1999-10-06 和椿事业股份有限公司 机械手臂
JP3973006B2 (ja) * 2000-03-23 2007-09-05 日本電産サンキョー株式会社 ダブルアーム型ロボット
JP2003158170A (ja) * 2001-11-20 2003-05-30 Aitec:Kk 基板用カセットのスロット検出装置
CN2637135Y (zh) * 2003-07-02 2004-09-01 陕西科技大学 凸轮式提升转位机械手
CN100342519C (zh) * 2003-07-16 2007-10-10 东京毅力科创株式会社 搬送装置及驱动机构
JP4063781B2 (ja) * 2004-03-04 2008-03-19 株式会社ラインワークス 搬送装置
JP4911371B2 (ja) * 2006-07-11 2012-04-04 株式会社安川電機 多関節ロボットおよび配線方法

Also Published As

Publication number Publication date
KR100914387B1 (ko) 2009-08-28
JPWO2008007516A1 (ja) 2009-12-10
TWI315244B (ja) 2009-10-01
KR20080082606A (ko) 2008-09-11
TW200930524A (en) 2009-07-16
JP4168410B2 (ja) 2008-10-22
TWI315243B (ja) 2009-10-01
JP4596375B2 (ja) 2010-12-08
CN101844359B (zh) 2013-06-05
JP2008155361A (ja) 2008-07-10
KR20080081196A (ko) 2008-09-08
KR101120824B1 (ko) 2012-03-23
TW200817151A (en) 2008-04-16
CN101360589B (zh) 2011-02-09
JP2010274413A (ja) 2010-12-09
KR100914386B1 (ko) 2009-08-28
JP5077406B2 (ja) 2012-11-21
CN101863015B (zh) 2012-02-15
WO2008007516A1 (fr) 2008-01-17
TW200932456A (en) 2009-08-01
CN101863015A (zh) 2010-10-20
CN101844359A (zh) 2010-09-29
KR20080081197A (ko) 2008-09-08
CN101360589A (zh) 2009-02-04

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