TWI338054B - - Google Patents
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- Publication number
- TWI338054B TWI338054B TW092135255A TW92135255A TWI338054B TW I338054 B TWI338054 B TW I338054B TW 092135255 A TW092135255 A TW 092135255A TW 92135255 A TW92135255 A TW 92135255A TW I338054 B TWI338054 B TW I338054B
- Authority
- TW
- Taiwan
- Prior art keywords
- film
- silver
- reflective film
- sputtering
- gas
- Prior art date
Links
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 69
- 239000000758 substrate Substances 0.000 claims description 37
- 238000004544 sputter deposition Methods 0.000 claims description 36
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 33
- 229910052709 silver Inorganic materials 0.000 claims description 32
- 239000004332 silver Substances 0.000 claims description 32
- 239000007789 gas Substances 0.000 claims description 29
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 22
- 229910052760 oxygen Inorganic materials 0.000 claims description 22
- 239000001301 oxygen Substances 0.000 claims description 22
- 229910045601 alloy Inorganic materials 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000000654 additive Substances 0.000 claims description 8
- 230000000996 additive effect Effects 0.000 claims description 8
- 229910044991 metal oxide Inorganic materials 0.000 claims description 7
- 150000004706 metal oxides Chemical class 0.000 claims description 7
- 238000005477 sputtering target Methods 0.000 claims description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 5
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000011230 binding agent Substances 0.000 claims description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims description 2
- 229910001887 tin oxide Inorganic materials 0.000 claims description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims 2
- 229910052718 tin Inorganic materials 0.000 claims 2
- 229910000410 antimony oxide Inorganic materials 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 claims 1
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 claims 1
- 239000011787 zinc oxide Substances 0.000 claims 1
- 239000010408 film Substances 0.000 description 124
- 238000005260 corrosion Methods 0.000 description 25
- 230000007797 corrosion Effects 0.000 description 25
- 230000015572 biosynthetic process Effects 0.000 description 15
- 239000010931 gold Substances 0.000 description 14
- 239000011521 glass Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 238000005530 etching Methods 0.000 description 9
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 229910001868 water Inorganic materials 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 229910000929 Ru alloy Inorganic materials 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/06—Alloys based on silver
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Liquid Crystal (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002363648A JP4671579B2 (ja) | 2002-12-16 | 2002-12-16 | Ａｇ合金反射膜およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200419003A TW200419003A (en) | 2004-10-01 |
| TWI338054B true TWI338054B (enExample) | 2011-03-01 |
Family
ID=32761736
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092135255A TW200419003A (en) | 2002-12-16 | 2003-12-12 | Method for producing silver alloy reflective film, sputtering target, and silver alloy film |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4671579B2 (enExample) |
| KR (1) | KR101101732B1 (enExample) |
| TW (1) | TW200419003A (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4714477B2 (ja) * | 2004-02-19 | 2011-06-29 | アルバック成膜株式会社 | Ａｇ合金膜及びその製造方法 |
| JP2006098856A (ja) * | 2004-09-30 | 2006-04-13 | Ulvac Japan Ltd | Ａｇ系反射膜およびその作製方法 |
| JP4918994B2 (ja) | 2005-05-30 | 2012-04-18 | 住友電気工業株式会社 | 金属被膜の形成方法および金属配線 |
| JP5116218B2 (ja) * | 2005-06-02 | 2013-01-09 | 株式会社アルバック | 分散液、分散液の製造方法 |
| JP2007273744A (ja) * | 2006-03-31 | 2007-10-18 | Stanley Electric Co Ltd | Ｌｅｄ用共晶基板及びその製造方法 |
| KR100841367B1 (ko) * | 2006-08-28 | 2008-06-26 | 삼성에스디아이 주식회사 | 유기전계 발광표시장치의 제조방법 |
| WO2008035617A1 (en) * | 2006-09-21 | 2008-03-27 | Kabushiki Kaisha Kobe Seiko Sho | Ag ALLOY THIN FILM, AND Ag ALLOY SPUTTERING TARGET FOR FORMATION OF THE Ag ALLOY THIN FILM |
| JP4176136B2 (ja) * | 2006-09-21 | 2008-11-05 | 株式会社神戸製鋼所 | Ａｇ合金薄膜 |
| CN101449184B (zh) | 2006-11-17 | 2012-04-04 | 田中贵金属工业株式会社 | 反射膜或半透反射膜用的薄膜及溅射靶材以及光记录介质 |
| US20110108114A1 (en) | 2008-06-17 | 2011-05-12 | Ulvac, Inc. | Solar cell and method of manufacturing same |
| JP2013105546A (ja) * | 2011-11-10 | 2013-05-30 | Ulvac Japan Ltd | 有機ｅｌ表示装置、ｌｅｄ装置、太陽電池、反射膜 |
| JP5806653B2 (ja) * | 2011-12-27 | 2015-11-10 | 株式会社神戸製鋼所 | 反射電極用Ａｇ合金膜、反射電極、およびＡｇ合金スパッタリングターゲット |
| CN104704140B (zh) * | 2012-10-01 | 2019-03-12 | 日产自动车株式会社 | 在线式涂敷装置、在线式涂敷方法以及隔板 |
| KR20160112377A (ko) | 2015-03-19 | 2016-09-28 | 희성금속 주식회사 | 스퍼터링 타겟 및 이의 제조방법 |
| KR101688920B1 (ko) | 2016-11-01 | 2016-12-22 | 희성금속 주식회사 | 도전성 막 형성용 은 합금 조성물 및 이의 제조 방법 |
| KR101710196B1 (ko) | 2016-11-04 | 2017-02-24 | 희성금속 주식회사 | 도전성 막 형성용 은 합금 조성물 및 이의 제조 방법 |
| KR101959865B1 (ko) | 2016-11-18 | 2019-03-20 | 엘티메탈 주식회사 | 도전성 막 형성용 은 합금 조성물 및 이의 제조 방법 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04372738A (ja) * | 1991-06-21 | 1992-12-25 | Tdk Corp | 光記録媒体 |
| JPH0843839A (ja) * | 1994-07-27 | 1996-02-16 | Toppan Printing Co Ltd | 反射型液晶表示装置及びその製造方法 |
| JPH08146208A (ja) * | 1994-11-25 | 1996-06-07 | Matsushita Electric Works Ltd | 反射鏡およびその製造方法 |
| JPH0930124A (ja) * | 1995-05-12 | 1997-02-04 | Ricoh Co Ltd | 光情報記録媒体及びその製造方法 |
| JPH09108654A (ja) * | 1995-10-16 | 1997-04-28 | Nisshin Steel Co Ltd | 浄水用活性炭 |
| JP4615701B2 (ja) * | 1999-12-07 | 2011-01-19 | 株式会社フルヤ金属 | 高耐熱性反射膜を用いた積層体 |
| JP3957259B2 (ja) * | 2000-04-12 | 2007-08-15 | 株式会社神戸製鋼所 | 光情報記録媒体用反射層および光情報記録媒体 |
| JP3365762B2 (ja) * | 2000-04-28 | 2003-01-14 | 株式会社神戸製鋼所 | 光情報記録媒体用の反射層または半透明反射層、光情報記録媒体及び光情報記録媒体用スパッタリングターゲット |
| EP1371749B1 (en) * | 2001-03-16 | 2009-01-07 | Ishifuku Metal Industry Co., Ltd. | Optical disc medium, reflection type STN liquid crystal display and organic EL display |
| JP2004002929A (ja) * | 2001-08-03 | 2004-01-08 | Furuya Kinzoku:Kk | 銀合金、スパッタリングターゲット、反射型ｌｃｄ用反射板、反射配線電極、薄膜、その製造方法、光学記録媒体、電磁波遮蔽体、電子部品用金属材料、配線材料、電子部品、電子機器、金属膜の加工方法、電子光学部品、積層体及び建材ガラス |
-
2002
- 2002-12-16 JP JP2002363648A patent/JP4671579B2/ja not_active Expired - Lifetime
-
2003
- 2003-12-12 TW TW092135255A patent/TW200419003A/zh not_active IP Right Cessation
- 2003-12-15 KR KR1020030091353A patent/KR101101732B1/ko not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| TW200419003A (en) | 2004-10-01 |
| KR20040055604A (ko) | 2004-06-26 |
| JP4671579B2 (ja) | 2011-04-20 |
| JP2004197117A (ja) | 2004-07-15 |
| KR101101732B1 (ko) | 2012-01-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |