TWI305674B - - Google Patents

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Publication number
TWI305674B
TWI305674B TW91123741A TW91123741A TWI305674B TW I305674 B TWI305674 B TW I305674B TW 91123741 A TW91123741 A TW 91123741A TW 91123741 A TW91123741 A TW 91123741A TW I305674 B TWI305674 B TW I305674B
Authority
TW
Taiwan
Prior art keywords
layer
isolation structure
substrate
surface area
forming
Prior art date
Application number
TW91123741A
Other languages
English (en)
Chinese (zh)
Inventor
Ching Nan Hsiao
Chung Lin Huang
Original Assignee
Nanya Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanya Technology Corp filed Critical Nanya Technology Corp
Priority to TW91123741A priority Critical patent/TWI305674B/zh
Application granted granted Critical
Publication of TWI305674B publication Critical patent/TWI305674B/zh

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TW91123741A 2002-10-15 2002-10-15 TWI305674B (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW91123741A TWI305674B (de) 2002-10-15 2002-10-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW91123741A TWI305674B (de) 2002-10-15 2002-10-15

Publications (1)

Publication Number Publication Date
TWI305674B true TWI305674B (de) 2009-01-21

Family

ID=45071201

Family Applications (1)

Application Number Title Priority Date Filing Date
TW91123741A TWI305674B (de) 2002-10-15 2002-10-15

Country Status (1)

Country Link
TW (1) TWI305674B (de)

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