TWI292540B - Semiconductor test data analysis system, method for displaying therein, and method for analyzing semiconductor test data implemented therein - Google Patents

Semiconductor test data analysis system, method for displaying therein, and method for analyzing semiconductor test data implemented therein Download PDF

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Publication number
TWI292540B
TWI292540B TW092117608A TW92117608A TWI292540B TW I292540 B TWI292540 B TW I292540B TW 092117608 A TW092117608 A TW 092117608A TW 92117608 A TW92117608 A TW 92117608A TW I292540 B TWI292540 B TW I292540B
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TW
Taiwan
Prior art keywords
analysis
data
job
image
information
Prior art date
Application number
TW092117608A
Other languages
English (en)
Chinese (zh)
Other versions
TW200406692A (en
Inventor
Iguchi Yasuhiko
Enokida Mitsuhiro
Tamura Hiroshi
Louis Dombroski Earl
Thomas Robert Claus
Original Assignee
Agilent Technologies Inc
Sandia Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Agilent Technologies Inc, Sandia Technologies Inc filed Critical Agilent Technologies Inc
Publication of TW200406692A publication Critical patent/TW200406692A/zh
Application granted granted Critical
Publication of TWI292540B publication Critical patent/TWI292540B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G01R31/2846—Fault-finding or characterising using hard- or software simulation or using knowledge-based systems, e.g. expert systems, artificial intelligence or interactive algorithms
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • H10P74/23—Testing or measuring during manufacture or treatment of wafers, substrates or devices characterised by multiple measurements, corrections, marking or sorting processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Tests Of Electronic Circuits (AREA)
TW092117608A 2002-06-28 2003-06-27 Semiconductor test data analysis system, method for displaying therein, and method for analyzing semiconductor test data implemented therein TWI292540B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/186,171 US6898545B2 (en) 2002-06-28 2002-06-28 Semiconductor test data analysis system

Publications (2)

Publication Number Publication Date
TW200406692A TW200406692A (en) 2004-05-01
TWI292540B true TWI292540B (en) 2008-01-11

Family

ID=29718020

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092117608A TWI292540B (en) 2002-06-28 2003-06-27 Semiconductor test data analysis system, method for displaying therein, and method for analyzing semiconductor test data implemented therein

Country Status (4)

Country Link
US (2) US6898545B2 (https=)
EP (1) EP1376144A3 (https=)
JP (1) JP2004072093A (https=)
TW (1) TWI292540B (https=)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7143370B1 (en) * 2003-06-11 2006-11-28 Advanced Micro Devices, Inc. Parameter linking system for data visualization in integrated circuit technology development
TWI401580B (zh) * 2004-11-30 2013-07-11 尼康股份有限公司 A component processing system, an information display method, and a recorded recording medium, an exposure apparatus, a measurement and inspection apparatus
JP4537277B2 (ja) * 2005-07-08 2010-09-01 株式会社日立ハイテクノロジーズ 半導体検査装置
US7200523B1 (en) * 2005-11-30 2007-04-03 Taiwan Semiconductor Manufacturing Company, Ltd. Method and system for filtering statistical process data to enhance process performance
US20100076724A1 (en) * 2008-09-23 2010-03-25 Harold Lee Brown Method for capturing and analyzing test result data
US20140277467A1 (en) 2013-03-14 2014-09-18 Spinal Stabilization Technologies, Llc Prosthetic Spinal Disk Nucleus
CN104077271B (zh) * 2013-03-27 2018-06-05 珠海全志科技股份有限公司 晶圆图数据的处理方法及系统
US20160217192A1 (en) * 2013-10-02 2016-07-28 Hitachi, Ltd. Search system and search method
EP3215069B1 (en) 2014-11-04 2023-03-08 Spinal Stabilization Technologies LLC Percutaneous implantable nuclear prosthesis
CN106999286B (zh) 2014-11-04 2019-08-16 脊柱稳定技术有限责任公司 可经皮植入的髓核假体
US10204188B2 (en) * 2015-03-13 2019-02-12 Samsung Electronics Co., Ltd. Systems, methods and computer program products for analyzing performance of semiconductor devices
US10575967B2 (en) 2015-09-01 2020-03-03 Spinal Stabilization Technologies Llc Implantable nuclear prosthesis
JP2020004070A (ja) * 2018-06-28 2020-01-09 ルネサスエレクトロニクス株式会社 半導体製品品質管理サーバ、半導体装置、および半導体製品品質管理システム
US11744710B2 (en) 2018-09-04 2023-09-05 Spinal Stabilization Technologies Llc Implantable nuclear prosthesis, kits, and related methods
US11475052B1 (en) 2019-11-08 2022-10-18 Tableau Software, Inc. Using visual cues to validate object models of database tables
CN114297052B (zh) * 2021-12-13 2025-03-21 上海金仕达软件科技股份有限公司 测试数据生成方法及装置

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5371851A (en) * 1989-04-26 1994-12-06 Credence Systems Corporation Graphical data base editor
JP2941308B2 (ja) * 1989-07-12 1999-08-25 株式会社日立製作所 検査システムおよび電子デバイスの製造方法
EP0597087B1 (en) * 1992-06-02 1999-07-28 Hewlett-Packard Company Computer-aided design method for multilevel interconnect technologies
JP2616413B2 (ja) * 1993-11-22 1997-06-04 日本電気株式会社 リペアデータの編集装置およびリペアデータの編集方法
JPH07234188A (ja) * 1994-02-23 1995-09-05 Hitachi Ltd データ解析システム
US5761417A (en) * 1994-09-08 1998-06-02 International Business Machines Corporation Video data streamer having scheduler for scheduling read request for individual data buffers associated with output ports of communication node to one storage node
JP3364390B2 (ja) * 1995-12-30 2003-01-08 東京エレクトロン株式会社 検査装置
US20020109734A1 (en) * 1997-10-10 2002-08-15 Satoshi Umezu GUI processing system for performing an operation of an application which controls testing equipment
JP2004513402A (ja) * 1997-10-27 2004-04-30 ケイエルエイ−テンコー　コーポレイション 特別の処方のフローチャートをグラフィックス的に作成するソフトウェアシステム及び方法
US6097887A (en) * 1997-10-27 2000-08-01 Kla-Tencor Corporation Software system and method for graphically building customized recipe flowcharts
US6128759A (en) * 1998-03-20 2000-10-03 Teradyne, Inc. Flexible test environment for automatic test equipment
US6476913B1 (en) * 1998-11-30 2002-11-05 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
US6292766B1 (en) * 1998-12-18 2001-09-18 Vlsi Technology, Inc. Simulation tool input file generator for interface circuitry
JP2000269107A (ja) * 1999-03-15 2000-09-29 Toshiba Corp 半導体製造工程のデータ解析システム
US6319737B1 (en) * 1999-08-10 2001-11-20 Advanced Micro Devices, Inc. Method and apparatus for characterizing a semiconductor device
US6681351B1 (en) * 1999-10-12 2004-01-20 Teradyne, Inc. Easy to program automatic test equipment
US6707474B1 (en) * 1999-10-29 2004-03-16 Agilent Technologies, Inc. System and method for manipulating relationships among signals and buses of a signal measurement system on a graphical user interface
JP3660561B2 (ja) * 1999-11-10 2005-06-15 株式会社東芝 半導体集積回路の故障解析装置
JP3447638B2 (ja) * 1999-12-24 2003-09-16 日本電気株式会社 半導体装置のテスト方法及びシステム並びに記録媒体
JP2001306999A (ja) * 2000-02-18 2001-11-02 Fujitsu Ltd データ解析装置およびデータ解析方法
JP2002071762A (ja) * 2000-06-13 2002-03-12 Advantest Corp 半導体試験装置及びそのモニタ装置
CA2321346A1 (en) * 2000-09-28 2002-03-28 Stephen K. Sunter Method, system and program product for testing and/or diagnosing circuits using embedded test controller access data
KR100374636B1 (ko) * 2000-10-18 2003-03-04 삼성전자주식회사 결함 테스트 및 분석 회로를 구비하는 반도체 장치 및 결함 분석 방법
JP2002163900A (ja) * 2000-11-22 2002-06-07 Hitachi Ltd 半導体ウエハ、半導体チップ、半導体装置および半導体装置の製造方法
US6711522B2 (en) * 2001-04-25 2004-03-23 Fujitsu Limited Data analysis apparatus, data analysis method, and computer products
WO2003026001A2 (en) * 2001-09-18 2003-03-27 Applied Materials, Inc. Integrated equipment set for forming an interconnect on a substrate
US7043696B2 (en) * 2002-01-15 2006-05-09 National Instruments Corporation Graphical program system having a single graphical user interface shared by a plurality of graphical programs

Also Published As

Publication number Publication date
EP1376144A2 (en) 2004-01-02
US7035752B2 (en) 2006-04-25
US20050119852A1 (en) 2005-06-02
US6898545B2 (en) 2005-05-24
US20040002829A1 (en) 2004-01-01
EP1376144A3 (en) 2006-01-18
TW200406692A (en) 2004-05-01
JP2004072093A (ja) 2004-03-04

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