TWI280368B - Inspection apparatus - Google Patents

Inspection apparatus Download PDF

Info

Publication number
TWI280368B
TWI280368B TW094109696A TW94109696A TWI280368B TW I280368 B TWI280368 B TW I280368B TW 094109696 A TW094109696 A TW 094109696A TW 94109696 A TW94109696 A TW 94109696A TW I280368 B TWI280368 B TW I280368B
Authority
TW
Taiwan
Prior art keywords
inspection
display panel
panel
stage
carrier
Prior art date
Application number
TW094109696A
Other languages
English (en)
Chinese (zh)
Other versions
TW200535424A (en
Inventor
Shinji Fujiwara
Original Assignee
Nihon Micronics Kabushiki Kais
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Micronics Kabushiki Kais filed Critical Nihon Micronics Kabushiki Kais
Publication of TW200535424A publication Critical patent/TW200535424A/zh
Application granted granted Critical
Publication of TWI280368B publication Critical patent/TWI280368B/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Nonlinear Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
TW094109696A 2004-04-30 2005-03-29 Inspection apparatus TWI280368B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004136092A JP2005315798A (ja) 2004-04-30 2004-04-30 検査装置

Publications (2)

Publication Number Publication Date
TW200535424A TW200535424A (en) 2005-11-01
TWI280368B true TWI280368B (en) 2007-05-01

Family

ID=35352961

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094109696A TWI280368B (en) 2004-04-30 2005-03-29 Inspection apparatus

Country Status (4)

Country Link
JP (1) JP2005315798A (ko)
KR (1) KR100693715B1 (ko)
CN (1) CN1693902A (ko)
TW (1) TWI280368B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101166839B1 (ko) * 2005-12-29 2012-07-19 엘지디스플레이 주식회사 액정패널 검사 장치
JP5364240B2 (ja) * 2007-03-20 2013-12-11 株式会社日本マイクロニクス プローブユニット及び検査装置
KR101827313B1 (ko) * 2017-09-19 2018-02-08 주식회사 에이치비테크놀러지 AOI θ축 얼라인 조정이 가능한 이송장치를 갖는 인라인 스테이지
TWI692644B (zh) 2019-06-18 2020-05-01 旺矽科技股份有限公司 電子元件針測裝置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970075969A (ko) * 1996-05-22 1997-12-10 엄길용 칼라필터를 구비하는 액정기판의 평활도 검사장치 및 검사방법

Also Published As

Publication number Publication date
TW200535424A (en) 2005-11-01
KR20060047174A (ko) 2006-05-18
JP2005315798A (ja) 2005-11-10
CN1693902A (zh) 2005-11-09
KR100693715B1 (ko) 2007-03-13

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