JP2005315798A - 検査装置 - Google Patents

検査装置 Download PDF

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Publication number
JP2005315798A
JP2005315798A JP2004136092A JP2004136092A JP2005315798A JP 2005315798 A JP2005315798 A JP 2005315798A JP 2004136092 A JP2004136092 A JP 2004136092A JP 2004136092 A JP2004136092 A JP 2004136092A JP 2005315798 A JP2005315798 A JP 2005315798A
Authority
JP
Japan
Prior art keywords
display panel
inspection
stage
panel
inclination angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2004136092A
Other languages
English (en)
Japanese (ja)
Inventor
Shinji Fujiwara
慎治 藤原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Micronics Japan Co Ltd
Original Assignee
Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Priority to JP2004136092A priority Critical patent/JP2005315798A/ja
Priority to TW094109696A priority patent/TWI280368B/zh
Priority to KR1020050029972A priority patent/KR100693715B1/ko
Priority to CNA200510068003XA priority patent/CN1693902A/zh
Publication of JP2005315798A publication Critical patent/JP2005315798A/ja
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8803—Visual inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Nonlinear Science (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP2004136092A 2004-04-30 2004-04-30 検査装置 Withdrawn JP2005315798A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2004136092A JP2005315798A (ja) 2004-04-30 2004-04-30 検査装置
TW094109696A TWI280368B (en) 2004-04-30 2005-03-29 Inspection apparatus
KR1020050029972A KR100693715B1 (ko) 2004-04-30 2005-04-11 검사장치
CNA200510068003XA CN1693902A (zh) 2004-04-30 2005-04-29 检查装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004136092A JP2005315798A (ja) 2004-04-30 2004-04-30 検査装置

Publications (1)

Publication Number Publication Date
JP2005315798A true JP2005315798A (ja) 2005-11-10

Family

ID=35352961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004136092A Withdrawn JP2005315798A (ja) 2004-04-30 2004-04-30 検査装置

Country Status (4)

Country Link
JP (1) JP2005315798A (ko)
KR (1) KR100693715B1 (ko)
CN (1) CN1693902A (ko)
TW (1) TWI280368B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101166839B1 (ko) * 2005-12-29 2012-07-19 엘지디스플레이 주식회사 액정패널 검사 장치
JP5364240B2 (ja) * 2007-03-20 2013-12-11 株式会社日本マイクロニクス プローブユニット及び検査装置
KR101827313B1 (ko) * 2017-09-19 2018-02-08 주식회사 에이치비테크놀러지 AOI θ축 얼라인 조정이 가능한 이송장치를 갖는 인라인 스테이지
TWI692644B (zh) 2019-06-18 2020-05-01 旺矽科技股份有限公司 電子元件針測裝置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970075969A (ko) * 1996-05-22 1997-12-10 엄길용 칼라필터를 구비하는 액정기판의 평활도 검사장치 및 검사방법

Also Published As

Publication number Publication date
TWI280368B (en) 2007-05-01
TW200535424A (en) 2005-11-01
KR20060047174A (ko) 2006-05-18
CN1693902A (zh) 2005-11-09
KR100693715B1 (ko) 2007-03-13

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Legal Events

Date Code Title Description
A300 Withdrawal of application because of no request for examination

Free format text: JAPANESE INTERMEDIATE CODE: A300

Effective date: 20070703