JP4499483B2 - 検査装置 - Google Patents
検査装置 Download PDFInfo
- Publication number
- JP4499483B2 JP4499483B2 JP2004168020A JP2004168020A JP4499483B2 JP 4499483 B2 JP4499483 B2 JP 4499483B2 JP 2004168020 A JP2004168020 A JP 2004168020A JP 2004168020 A JP2004168020 A JP 2004168020A JP 4499483 B2 JP4499483 B2 JP 4499483B2
- Authority
- JP
- Japan
- Prior art keywords
- display panel
- panel
- stage
- holding mechanism
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 title claims description 75
- 230000007246 mechanism Effects 0.000 claims description 89
- 238000012546 transfer Methods 0.000 claims description 8
- 239000000523 sample Substances 0.000 description 20
- 239000000969 carrier Substances 0.000 description 12
- 230000032258 transport Effects 0.000 description 9
- 238000012360 testing method Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03C—DOMESTIC PLUMBING INSTALLATIONS FOR FRESH WATER OR WASTE WATER; SINKS
- E03C1/00—Domestic plumbing installations for fresh water or waste water; Sinks
- E03C1/01—Domestic plumbing installations for fresh water or waste water; Sinks for combinations of baths, showers, sinks, wash-basins, closets, urinals, or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
- B01D35/02—Filters adapted for location in special places, e.g. pipe-lines, pumps, stop-cocks
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03C—DOMESTIC PLUMBING INSTALLATIONS FOR FRESH WATER OR WASTE WATER; SINKS
- E03C1/00—Domestic plumbing installations for fresh water or waste water; Sinks
- E03C1/12—Plumbing installations for waste water; Basins or fountains connected thereto; Sinks
- E03C1/14—Wash-basins connected to the waste-pipe
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03D—WATER-CLOSETS OR URINALS WITH FLUSHING DEVICES; FLUSHING VALVES THEREFOR
- E03D1/00—Water flushing devices with cisterns ; Setting up a range of flushing devices or water-closets; Combinations of several flushing devices
- E03D1/003—Cisterns in combination with wash-basins, urinals, or the like
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03D—WATER-CLOSETS OR URINALS WITH FLUSHING DEVICES; FLUSHING VALVES THEREFOR
- E03D1/00—Water flushing devices with cisterns ; Setting up a range of flushing devices or water-closets; Combinations of several flushing devices
- E03D1/02—High-level flushing systems
- E03D1/22—Twin or multiple flushing cisterns
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03D—WATER-CLOSETS OR URINALS WITH FLUSHING DEVICES; FLUSHING VALVES THEREFOR
- E03D1/00—Water flushing devices with cisterns ; Setting up a range of flushing devices or water-closets; Combinations of several flushing devices
- E03D1/30—Valves for high or low level cisterns; Their arrangement ; Flushing mechanisms in the cistern, optionally with provisions for a pre-or a post- flushing and for cutting off the flushing mechanism in case of leakage
- E03D1/32—Arrangement of inlet valves
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03D—WATER-CLOSETS OR URINALS WITH FLUSHING DEVICES; FLUSHING VALVES THEREFOR
- E03D1/00—Water flushing devices with cisterns ; Setting up a range of flushing devices or water-closets; Combinations of several flushing devices
- E03D1/30—Valves for high or low level cisterns; Their arrangement ; Flushing mechanisms in the cistern, optionally with provisions for a pre-or a post- flushing and for cutting off the flushing mechanism in case of leakage
- E03D1/33—Adaptations or arrangements of floats
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03D—WATER-CLOSETS OR URINALS WITH FLUSHING DEVICES; FLUSHING VALVES THEREFOR
- E03D1/00—Water flushing devices with cisterns ; Setting up a range of flushing devices or water-closets; Combinations of several flushing devices
- E03D1/30—Valves for high or low level cisterns; Their arrangement ; Flushing mechanisms in the cistern, optionally with provisions for a pre-or a post- flushing and for cutting off the flushing mechanism in case of leakage
- E03D1/34—Flushing valves for outlets; Arrangement of outlet valves
- E03D1/35—Flushing valves having buoyancy
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/18—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/18—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float
- F16K31/20—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float actuating a lift valve
- F16K31/22—Actuating devices; Operating means; Releasing devices actuated by fluid actuated by a float actuating a lift valve with the float rigidly connected to the valve
Landscapes
- Engineering & Computer Science (AREA)
- Water Supply & Treatment (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Public Health (AREA)
- Health & Medical Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Testing Electric Properties And Detecting Electric Faults (AREA)
Description
12 表示用パネル
18 本体ベース
24 受渡しステージ
28 検査ステージ
30 プローブ装置
36 搬送装置
38 チャックトップ
60 フレーム
62,64 キャリア
66,68 キャリア移動機構
66a,68a 取り付け部
66b,68b ベース部
72,74,84,92a ガイドレール
76,78,86,92b ガイド
80 キャリアベース
82 支持アーム
88,90 第1及び第2のアーム
98 結合手段
94 Xホルダ
96 Yホルダ
100 ボールねじ
106 X移動機構
108 Y移動機構
110 X駆動源
112,114 プーリ
116 無端ベルト
120 Y駆動源
122 シャフト
124 ナット
130,140,150 ホルダ
Claims (5)
- 表示用パネルを検査する検査ステージと前記表示用パネルを受け渡しする受渡しステージとを有する表示用パネル検査装置であって、
検査済み表示用パネルを前記検査ステージから前記受渡しステージへ及び未検査表示用パネルを前記受渡しステージから前記検査ステージへ移送させることができる第1及び第2の搬送装置を含み、
前記第1の搬送装置は、前記表示用パネルを保持する第1のパネル保持機構と、該第1のパネル保持機構を前記検査ステージ又は前記受渡しステージへ移動させる第1の移動機構とを有し、
前記第2の搬送装置は、前記表示用パネルを保持する第2のパネル保持機構と、該第2のパネル保持機構を前記検査ステージ又は前記受渡しステージへ移動させる第2の移動機構とを有し、
前記第1の移動機構は前記第1のパネル保持機構及び前記第2のパネル保持機構を組み付けることができる第1の取り付け部を有し、
前記第2の移動機構は前記第1のパネル保持機構及び前記第2のパネル保持機構を組み付けることができる第2の取り付け部を有し、
前記第1の取り付け部と前記第2の取り付け部とは、形状及び寸法において同一であり、
前記第1及び第2のパネル保持機構の下端部は、それぞれ、下側の本体ベースの上方に向く面に配置されてZ方向に間隔をおいてX方向へ延びる第1及び第2のレールに前記第1及び第2の移動機構を介して移動可能に支持され、上端部は、それぞれ、上側の本体ベースのZ方向又は下方に向く面に配置されてY方向又はZ方向に間隔をおいてX方向へ延びる第3及び第4のレールに前記第1及び第2の移動機構を介して移動可能に支持されている、表示用パネルの検査装置。 - 前記第1のパネル保持機構と前記第2のパネル保持機構とは、形状及び寸法において同一である、請求項1に記載の検査装置。
- 前記第3及び第4のレールは、Y方向に間隔をおいている、請求項1又は2に記載の検査装置。
- 前記第3及び第4のレールは、Z方向に間隔をおいている、請求項1又は2に記載の検査装置。
- 前記第1及び第2のパネル保持機構のそれぞれは、水平面に対し傾斜したキャリアベースと、Y方向に間隔をおいてX方向へ延びる状態に前記キャリアベースにY方向へ移動可能に配置された一対の支持アームとを含む、請求項1ないし4のいずれか1項に記載の検査装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004168020A JP4499483B2 (ja) | 2004-06-07 | 2004-06-07 | 検査装置 |
TW094111769A TWI274887B (en) | 2004-06-07 | 2005-04-14 | Inspection apparatus |
KR1020050032841A KR100693716B1 (ko) | 2004-06-07 | 2005-04-20 | 검사장치 |
CNB2005100710425A CN100386629C (zh) | 2004-06-07 | 2005-05-23 | 显示用面板的检查装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004168020A JP4499483B2 (ja) | 2004-06-07 | 2004-06-07 | 検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005345406A JP2005345406A (ja) | 2005-12-15 |
JP4499483B2 true JP4499483B2 (ja) | 2010-07-07 |
Family
ID=35497918
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004168020A Expired - Lifetime JP4499483B2 (ja) | 2004-06-07 | 2004-06-07 | 検査装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4499483B2 (ja) |
KR (1) | KR100693716B1 (ja) |
CN (1) | CN100386629C (ja) |
TW (1) | TWI274887B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI631348B (zh) * | 2017-12-29 | 2018-08-01 | 鴻勁精密股份有限公司 | 電子元件轉載裝置及其應用之測試分類設備 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100828950B1 (ko) * | 2007-03-15 | 2008-05-13 | 주식회사 파이컴 | 평판 디스플레이 패널을 평편하게 유지하기 위한 패널 푸셔및 이를 구비한 프로브 유닛 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001154169A (ja) * | 1999-11-19 | 2001-06-08 | Mire Kk | Lcd検査システム |
JP2003243492A (ja) * | 2003-02-19 | 2003-08-29 | Hitachi High-Technologies Corp | ウエハ処理装置とウエハステージ及びウエハ処理方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3900413A1 (de) * | 1989-01-09 | 1990-07-12 | N Proizv Ob Abrazivam I Slifov | Vorrichtung zum messen des gehalts magnetischer bestandteile nichtmetallischer proben |
CN2074460U (zh) * | 1990-09-12 | 1991-04-03 | 何建华 | 浮空制直流系统接地检测装置 |
TW329002B (en) * | 1996-06-05 | 1998-04-01 | Zenshin Test Co | Apparatus and method for inspecting a LCD substrate |
JP3860293B2 (ja) * | 1997-06-23 | 2006-12-20 | 株式会社日本マイクロニクス | 液晶パネルの検査装置 |
JPH1114956A (ja) * | 1997-06-23 | 1999-01-22 | Micronics Japan Co Ltd | 液晶パネル用検査ステージ |
JP4782964B2 (ja) * | 1999-11-16 | 2011-09-28 | 東レエンジニアリング株式会社 | プローブ装置及びそれの製造方法並びにそれを用いる基板検査方法 |
KR20020054170A (ko) * | 2000-12-27 | 2002-07-06 | 구본준, 론 위라하디락사 | 액정기판검사장치의 작업방법 |
-
2004
- 2004-06-07 JP JP2004168020A patent/JP4499483B2/ja not_active Expired - Lifetime
-
2005
- 2005-04-14 TW TW094111769A patent/TWI274887B/zh active
- 2005-04-20 KR KR1020050032841A patent/KR100693716B1/ko active IP Right Grant
- 2005-05-23 CN CNB2005100710425A patent/CN100386629C/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001154169A (ja) * | 1999-11-19 | 2001-06-08 | Mire Kk | Lcd検査システム |
JP2003243492A (ja) * | 2003-02-19 | 2003-08-29 | Hitachi High-Technologies Corp | ウエハ処理装置とウエハステージ及びウエハ処理方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI631348B (zh) * | 2017-12-29 | 2018-08-01 | 鴻勁精密股份有限公司 | 電子元件轉載裝置及其應用之測試分類設備 |
Also Published As
Publication number | Publication date |
---|---|
CN1707272A (zh) | 2005-12-14 |
CN100386629C (zh) | 2008-05-07 |
KR20060047288A (ko) | 2006-05-18 |
TW200540434A (en) | 2005-12-16 |
TWI274887B (en) | 2007-03-01 |
JP2005345406A (ja) | 2005-12-15 |
KR100693716B1 (ko) | 2007-03-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4490066B2 (ja) | 表示用パネルの検査装置 | |
JP2000009661A (ja) | フラットパネル検査装置 | |
JP3999863B2 (ja) | 被測定基板の検査装置 | |
KR100693715B1 (ko) | 검사장치 | |
TWI231964B (en) | LCD panel auto gripping apparatus and method for use in a panel carrier for an automatic probe unit | |
JP4499483B2 (ja) | 検査装置 | |
TW201832313A (zh) | 對準裝置 | |
JP3648349B2 (ja) | 表示パネル基板の検査方法および装置 | |
JP3365781B2 (ja) | 基板外観検査装置 | |
JP4163435B2 (ja) | 被検査基板の検査装置 | |
KR100490952B1 (ko) | 스테이지 방식을 갖는 다목적 광학 검사용 디스플레이패널 이송장치 | |
JPH10160629A (ja) | 液晶パネルの検査装置 | |
JP4745536B2 (ja) | 表示用基板の搬送装置 | |
JP3981533B2 (ja) | 表示用基板の検査装置 | |
JP3526709B2 (ja) | 液晶パネルのアライメント装置 | |
JP3791698B2 (ja) | ウエハ検査装置 | |
KR20130022126A (ko) | 프로브 유닛 및 이를 포함하는 검사 장치 | |
JP3711169B2 (ja) | 表示パネル基板の検査装置 | |
WO2018003577A1 (ja) | アライメント装置 | |
JPH10132706A (ja) | 液晶表示パネルの検査装置 | |
JP2003004588A (ja) | 表示用基板の検査装置 | |
JP2012137300A (ja) | 基板搬送装置及び基板搬送方法並びに基板処理システム及び基板処理方法 | |
JP3923988B2 (ja) | ウエハ検査装置 | |
KR20120079981A (ko) | 기판 수평 이송장치 | |
JP2002373925A (ja) | 表示用基板の受け渡し装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070511 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20091224 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100112 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100302 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20100323 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20100415 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130423 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4499483 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130423 Year of fee payment: 3 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140423 Year of fee payment: 4 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |