TWI275809B - Liquid crystal substrate inspection apparatus - Google Patents

Liquid crystal substrate inspection apparatus Download PDF

Info

Publication number
TWI275809B
TWI275809B TW094103561A TW94103561A TWI275809B TW I275809 B TWI275809 B TW I275809B TW 094103561 A TW094103561 A TW 094103561A TW 94103561 A TW94103561 A TW 94103561A TW I275809 B TWI275809 B TW I275809B
Authority
TW
Taiwan
Prior art keywords
liquid crystal
crystal substrate
detector
inspection
probe
Prior art date
Application number
TW094103561A
Other languages
English (en)
Chinese (zh)
Other versions
TW200530600A (en
Inventor
Gaku Tanaka
Akira Teramoto
Makoto Shinohara
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of TW200530600A publication Critical patent/TW200530600A/zh
Application granted granted Critical
Publication of TWI275809B publication Critical patent/TWI275809B/zh

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K93/00—Floats for angling, with or without signalling devices
    • A01K93/02—Floats for angling, with or without signalling devices with signalling devices
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K97/00—Accessories for angling
    • A01K97/12—Signalling devices, e.g. tip-up devices
    • A01K97/125—Signalling devices, e.g. tip-up devices using electronic components

Landscapes

  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Animal Husbandry (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Liquid Crystal (AREA)
  • Tests Of Electronic Circuits (AREA)
TW094103561A 2004-02-17 2005-02-04 Liquid crystal substrate inspection apparatus TWI275809B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004039478A JP4241421B2 (ja) 2004-02-17 2004-02-17 液晶基板検査装置

Publications (2)

Publication Number Publication Date
TW200530600A TW200530600A (en) 2005-09-16
TWI275809B true TWI275809B (en) 2007-03-11

Family

ID=34836345

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094103561A TWI275809B (en) 2004-02-17 2005-02-04 Liquid crystal substrate inspection apparatus

Country Status (4)

Country Link
US (1) US7245142B2 (enExample)
JP (1) JP4241421B2 (enExample)
KR (1) KR100693382B1 (enExample)
TW (1) TWI275809B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI503548B (zh) * 2010-01-08 2015-10-11 Photon Dynamics Inc 探針系統

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006273141A (ja) * 2005-03-29 2006-10-12 Nec Lcd Technologies Ltd 液晶モジュール用台車及び液晶表示装置の製造方法
JP4941645B2 (ja) * 2006-10-19 2012-05-30 株式会社島津製作所 基板検査装置
US20100068011A1 (en) * 2006-12-05 2010-03-18 Shimadzu Corporation Pallet conveyance device and substrate inspection device
KR101035570B1 (ko) 2011-04-19 2011-05-19 (주)유비프리시젼 Ｌｃｄ 검사 장비용 자동 프로브 유니트 교체장치
CN102654656B (zh) * 2011-04-21 2015-01-07 京东方科技集团股份有限公司 一种检测装置及其工作方法
KR101373423B1 (ko) * 2012-10-30 2014-03-14 세메스 주식회사 디스플레이 셀들을 검사하기 위한 장치
JP6440420B2 (ja) * 2014-09-05 2018-12-19 昭和電線ケーブルシステム株式会社 電気試験装置及び電気試験方法
CN104637426B (zh) * 2015-03-04 2017-04-05 京东方科技集团股份有限公司 负载测试电路、方法和显示装置
KR101987028B1 (ko) * 2018-02-21 2019-09-30 (주)디이엔티 프로브 카드 이송모듈 및 프로브 카드 이송시스템
JP7310345B2 (ja) * 2019-06-17 2023-07-19 ニデックアドバンステクノロジー株式会社 検査装置
KR102097456B1 (ko) * 2019-07-01 2020-04-07 우리마이크론(주) 디스플레이 패널 검사를 위한 프로브 블록 조립체, 이의 제어 방법 및 디스플레이 패널 검사 장치
KR102097455B1 (ko) * 2019-07-01 2020-04-07 우리마이크론(주) 디스플레이 패널 검사를 위한 프로브 블록 조립체, 이의 제어 방법 및 디스플레이 패널 검사 장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960006869B1 (ko) * 1987-09-02 1996-05-23 도오교오 에레구토론 가부시끼가이샤 프로우브 장치에 의한 전기특성 검사방법
US5432461A (en) * 1991-06-28 1995-07-11 Photon Dynamics, Inc. Method of testing active matrix liquid crystal display substrates
US5999012A (en) * 1996-08-15 1999-12-07 Listwan; Andrew Method and apparatus for testing an electrically conductive substrate
JP3107039B2 (ja) * 1998-03-20 2000-11-06 日本電気株式会社 面光源プローバ装置及び検査方法
KR100279260B1 (ko) * 1998-06-18 2001-01-15 김영환 액정 셀의 액정 주입 및 액정 주입구 봉입검사 시스템
JP2000180807A (ja) * 1998-12-15 2000-06-30 Micronics Japan Co Ltd 液晶基板の検査装置
JP3553460B2 (ja) * 1999-04-23 2004-08-11 ディーイー、エンド、ティー 株式会社 Ｌｃｄテスト装置
KR100758809B1 (ko) * 2000-12-30 2007-09-13 엘지.필립스 엘시디 주식회사 액정표시소자의 검사장치
US6765203B1 (en) * 2003-01-31 2004-07-20 Shimadzu Corporation Pallet assembly for substrate inspection device and substrate inspection device
JP3745750B2 (ja) * 2003-06-27 2006-02-15 東芝テリー株式会社 表示パネルの検査装置および検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI503548B (zh) * 2010-01-08 2015-10-11 Photon Dynamics Inc 探針系統

Also Published As

Publication number Publication date
US7245142B2 (en) 2007-07-17
TW200530600A (en) 2005-09-16
KR20060041972A (ko) 2006-05-12
JP4241421B2 (ja) 2009-03-18
JP2005233997A (ja) 2005-09-02
KR100693382B1 (ko) 2007-03-09
US20050179426A1 (en) 2005-08-18

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