JP4241421B2 - 液晶基板検査装置 - Google Patents

液晶基板検査装置 Download PDF

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Publication number
JP4241421B2
JP4241421B2 JP2004039478A JP2004039478A JP4241421B2 JP 4241421 B2 JP4241421 B2 JP 4241421B2 JP 2004039478 A JP2004039478 A JP 2004039478A JP 2004039478 A JP2004039478 A JP 2004039478A JP 4241421 B2 JP4241421 B2 JP 4241421B2
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JP
Japan
Prior art keywords
prober
liquid crystal
crystal substrate
rack
load lock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004039478A
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English (en)
Japanese (ja)
Other versions
JP2005233997A (ja
JP2005233997A5 (enExample
Inventor
岳 田中
晃 寺本
真 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2004039478A priority Critical patent/JP4241421B2/ja
Priority to TW094103561A priority patent/TWI275809B/zh
Priority to US11/053,936 priority patent/US7245142B2/en
Priority to KR1020050012527A priority patent/KR100693382B1/ko
Publication of JP2005233997A publication Critical patent/JP2005233997A/ja
Publication of JP2005233997A5 publication Critical patent/JP2005233997A5/ja
Application granted granted Critical
Publication of JP4241421B2 publication Critical patent/JP4241421B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K93/00—Floats for angling, with or without signalling devices
    • A01K93/02—Floats for angling, with or without signalling devices with signalling devices
    • A—HUMAN NECESSITIES
    • A01—AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01K—ANIMAL HUSBANDRY; AVICULTURE; APICULTURE; PISCICULTURE; FISHING; REARING OR BREEDING ANIMALS, NOT OTHERWISE PROVIDED FOR; NEW BREEDS OF ANIMALS
    • A01K97/00—Accessories for angling
    • A01K97/12—Signalling devices, e.g. tip-up devices
    • A01K97/125—Signalling devices, e.g. tip-up devices using electronic components

Landscapes

  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Animal Husbandry (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Liquid Crystal (AREA)
  • Tests Of Electronic Circuits (AREA)
JP2004039478A 2004-02-17 2004-02-17 液晶基板検査装置 Expired - Fee Related JP4241421B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2004039478A JP4241421B2 (ja) 2004-02-17 2004-02-17 液晶基板検査装置
TW094103561A TWI275809B (en) 2004-02-17 2005-02-04 Liquid crystal substrate inspection apparatus
US11/053,936 US7245142B2 (en) 2004-02-17 2005-02-10 Liquid crystal substrate inspection apparatus
KR1020050012527A KR100693382B1 (ko) 2004-02-17 2005-02-16 액정기판 검사장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004039478A JP4241421B2 (ja) 2004-02-17 2004-02-17 液晶基板検査装置

Publications (3)

Publication Number Publication Date
JP2005233997A JP2005233997A (ja) 2005-09-02
JP2005233997A5 JP2005233997A5 (enExample) 2006-06-29
JP4241421B2 true JP4241421B2 (ja) 2009-03-18

Family

ID=34836345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004039478A Expired - Fee Related JP4241421B2 (ja) 2004-02-17 2004-02-17 液晶基板検査装置

Country Status (4)

Country Link
US (1) US7245142B2 (enExample)
JP (1) JP4241421B2 (enExample)
KR (1) KR100693382B1 (enExample)
TW (1) TWI275809B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006273141A (ja) * 2005-03-29 2006-10-12 Nec Lcd Technologies Ltd 液晶モジュール用台車及び液晶表示装置の製造方法
JP4941645B2 (ja) * 2006-10-19 2012-05-30 株式会社島津製作所 基板検査装置
US20100068011A1 (en) * 2006-12-05 2010-03-18 Shimadzu Corporation Pallet conveyance device and substrate inspection device
CN102753979B (zh) * 2010-01-08 2016-05-04 烽腾科技有限公司 自动探针结构站及其方法
KR101035570B1 (ko) 2011-04-19 2011-05-19 (주)유비프리시젼 Ｌｃｄ 검사 장비용 자동 프로브 유니트 교체장치
CN102654656B (zh) * 2011-04-21 2015-01-07 京东方科技集团股份有限公司 一种检测装置及其工作方法
KR101373423B1 (ko) * 2012-10-30 2014-03-14 세메스 주식회사 디스플레이 셀들을 검사하기 위한 장치
JP6440420B2 (ja) * 2014-09-05 2018-12-19 昭和電線ケーブルシステム株式会社 電気試験装置及び電気試験方法
CN104637426B (zh) * 2015-03-04 2017-04-05 京东方科技集团股份有限公司 负载测试电路、方法和显示装置
KR101987028B1 (ko) * 2018-02-21 2019-09-30 (주)디이엔티 프로브 카드 이송모듈 및 프로브 카드 이송시스템
JP7310345B2 (ja) * 2019-06-17 2023-07-19 ニデックアドバンステクノロジー株式会社 検査装置
KR102097456B1 (ko) * 2019-07-01 2020-04-07 우리마이크론(주) 디스플레이 패널 검사를 위한 프로브 블록 조립체, 이의 제어 방법 및 디스플레이 패널 검사 장치
KR102097455B1 (ko) * 2019-07-01 2020-04-07 우리마이크론(주) 디스플레이 패널 검사를 위한 프로브 블록 조립체, 이의 제어 방법 및 디스플레이 패널 검사 장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960006869B1 (ko) * 1987-09-02 1996-05-23 도오교오 에레구토론 가부시끼가이샤 프로우브 장치에 의한 전기특성 검사방법
US5432461A (en) * 1991-06-28 1995-07-11 Photon Dynamics, Inc. Method of testing active matrix liquid crystal display substrates
US5999012A (en) * 1996-08-15 1999-12-07 Listwan; Andrew Method and apparatus for testing an electrically conductive substrate
JP3107039B2 (ja) * 1998-03-20 2000-11-06 日本電気株式会社 面光源プローバ装置及び検査方法
KR100279260B1 (ko) * 1998-06-18 2001-01-15 김영환 액정 셀의 액정 주입 및 액정 주입구 봉입검사 시스템
JP2000180807A (ja) * 1998-12-15 2000-06-30 Micronics Japan Co Ltd 液晶基板の検査装置
JP3553460B2 (ja) * 1999-04-23 2004-08-11 ディーイー、エンド、ティー 株式会社 Ｌｃｄテスト装置
KR100758809B1 (ko) * 2000-12-30 2007-09-13 엘지.필립스 엘시디 주식회사 액정표시소자의 검사장치
US6765203B1 (en) * 2003-01-31 2004-07-20 Shimadzu Corporation Pallet assembly for substrate inspection device and substrate inspection device
JP3745750B2 (ja) * 2003-06-27 2006-02-15 東芝テリー株式会社 表示パネルの検査装置および検査方法

Also Published As

Publication number Publication date
US7245142B2 (en) 2007-07-17
TW200530600A (en) 2005-09-16
KR20060041972A (ko) 2006-05-12
JP2005233997A (ja) 2005-09-02
KR100693382B1 (ko) 2007-03-09
TWI275809B (en) 2007-03-11
US20050179426A1 (en) 2005-08-18

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