TWI244669B - System for enabling a distribution of fluids, substrate and gas panel used therein, manifold received in a substrate, mounting assembly, and method of attaching a substrate to a mounting plate - Google Patents

System for enabling a distribution of fluids, substrate and gas panel used therein, manifold received in a substrate, mounting assembly, and method of attaching a substrate to a mounting plate Download PDF

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Publication number
TWI244669B
TWI244669B TW92123545A TW92123545A TWI244669B TW I244669 B TWI244669 B TW I244669B TW 92123545 A TW92123545 A TW 92123545A TW 92123545 A TW92123545 A TW 92123545A TW I244669 B TWI244669 B TW I244669B
Authority
TW
Taiwan
Prior art keywords
substrate
manifold
port
groove
item
Prior art date
Application number
TW92123545A
Other languages
English (en)
Chinese (zh)
Other versions
TW200419630A (en
Inventor
Kim Ngoc Vu
Original Assignee
Celerity Group Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Celerity Group Inc filed Critical Celerity Group Inc
Publication of TW200419630A publication Critical patent/TW200419630A/zh
Application granted granted Critical
Publication of TWI244669B publication Critical patent/TWI244669B/zh

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
TW92123545A 2002-08-27 2003-08-27 System for enabling a distribution of fluids, substrate and gas panel used therein, manifold received in a substrate, mounting assembly, and method of attaching a substrate to a mounting plate TWI244669B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US40613202P 2002-08-27 2002-08-27

Publications (2)

Publication Number Publication Date
TW200419630A TW200419630A (en) 2004-10-01
TWI244669B true TWI244669B (en) 2005-12-01

Family

ID=31978264

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92123545A TWI244669B (en) 2002-08-27 2003-08-27 System for enabling a distribution of fluids, substrate and gas panel used therein, manifold received in a substrate, mounting assembly, and method of attaching a substrate to a mounting plate

Country Status (8)

Country Link
US (2) US7334605B2 (https=)
EP (1) EP1543544A2 (https=)
JP (1) JP2005539375A (https=)
KR (1) KR20060017577A (https=)
CN (1) CN100396980C (https=)
AU (1) AU2003262953A1 (https=)
TW (1) TWI244669B (https=)
WO (1) WO2004021412A2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8555460B2 (en) 2008-12-26 2013-10-15 Lg Display Co., Ltd. Apparatus for cleaning substrate
TWI476341B (zh) * 2007-06-11 2015-03-11 蘭姆研究公司 整合之氣體系統氣體控制盤用之變通性歧管

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005539375A (ja) * 2002-08-27 2005-12-22 セレリティ・インコーポレイテッド 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル
US7258139B2 (en) * 2002-11-26 2007-08-21 Swagelok Company Modular surface mount fluid system
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
KR100881897B1 (ko) * 2003-11-07 2009-02-06 셀레리티 인크. 표면 장착 히터
EP1744131A1 (en) * 2005-07-15 2007-01-17 Indufil B.V. Module for a gas system
JP4780555B2 (ja) * 2005-09-12 2011-09-28 株式会社フジキン 流体制御装置
JP4780558B2 (ja) * 2005-12-09 2011-09-28 株式会社フジキン 流体制御装置用継手およびそれを用いた流体制御装置
JP4755498B2 (ja) * 2006-01-06 2011-08-24 東京エレクトロン株式会社 加熱装置及び加熱方法
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
US7784497B2 (en) * 2007-07-12 2010-08-31 Eriksson Mark L MSM component and associated gas panel assembly
JP5000469B2 (ja) * 2007-12-05 2012-08-15 株式会社キッツエスシーティー 容器用ブロックバルブ
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
CN102804335B (zh) * 2009-06-10 2015-10-21 威斯塔德尔特有限责任公司 极限流速和/或高温流体递送基体
KR101097509B1 (ko) * 2009-07-17 2011-12-22 주식회사 엠엠티 기판 세정장치
US8327879B2 (en) 2010-03-10 2012-12-11 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8336573B2 (en) 2010-03-10 2012-12-25 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
WO2011112515A2 (en) * 2010-03-10 2011-09-15 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8333214B2 (en) 2010-03-10 2012-12-18 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US9074686B2 (en) 2010-12-06 2015-07-07 Microflex Technologies Llc Ring seal retainer assembly and methods
US9114788B2 (en) * 2011-01-27 2015-08-25 Wabtec Holding Corp. Manifold joint seal
JP5277278B2 (ja) * 2011-03-29 2013-08-28 株式会社フジキン 流体制御装置用継手
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
US9188990B2 (en) * 2011-10-05 2015-11-17 Horiba Stec, Co., Ltd. Fluid mechanism, support member constituting fluid mechanism and fluid control system
US8851113B2 (en) * 2012-03-27 2014-10-07 Lam Research Coporation Shared gas panels in plasma processing systems
US9091397B2 (en) 2012-03-27 2015-07-28 Lam Research Corporation Shared gas panels in plasma processing chambers employing multi-zone gas feeds
JP6175300B2 (ja) * 2013-07-17 2017-08-02 株式会社フジキン 流体制御装置用継手部材および流体制御装置
US10128087B2 (en) 2014-04-07 2018-11-13 Lam Research Corporation Configuration independent gas delivery system
US10557197B2 (en) 2014-10-17 2020-02-11 Lam Research Corporation Monolithic gas distribution manifold and various construction techniques and use cases therefor
US10022689B2 (en) 2015-07-24 2018-07-17 Lam Research Corporation Fluid mixing hub for semiconductor processing tool
US10118263B2 (en) 2015-09-02 2018-11-06 Lam Researech Corporation Monolithic manifold mask and substrate concepts
US10215317B2 (en) 2016-01-15 2019-02-26 Lam Research Corporation Additively manufactured gas distribution manifold
US9879795B2 (en) 2016-01-15 2018-01-30 Lam Research Corporation Additively manufactured gas distribution manifold
US11091837B2 (en) * 2016-10-24 2021-08-17 Fujikin Incorporated Fluid control system and product manufacturing method using fluid control system
KR20190116372A (ko) * 2017-03-15 2019-10-14 가부시키가이샤 후지킨 조인트 및 유체 제어 장치
CN113994460B (zh) * 2019-04-15 2025-05-20 朗姆研究公司 用于气体输送的模块部件系统
JP7333944B2 (ja) * 2019-06-27 2023-08-28 株式会社フジキン 流体制御装置
US11537150B2 (en) * 2020-04-09 2022-12-27 Horiba Stec, Co., Ltd. Fluid control apparatus
WO2026072559A1 (en) * 2024-09-24 2026-04-02 Applied Materials, Inc. Gas mixing block for dual processing chambers
WO2026078576A1 (en) * 2024-10-07 2026-04-16 Compart Systems Pte. Ltd. Fluid delivery system

Family Cites Families (71)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1625306B1 (de) * 1967-10-24 1971-02-25 Daimler Benz Ag Steckmutter für eine schraubverbindung
US4067531A (en) * 1976-07-22 1978-01-10 Derre & Company Vibration isolation and sealing gasket
US4082324A (en) 1976-10-04 1978-04-04 Obrecht Robert E Connection arrangement for manifold blocks
US4490083A (en) 1980-01-10 1984-12-25 Russell, Burdsall, & Ward Corporation Sealing capped nut and bolt therefor
US4524807A (en) * 1982-05-21 1985-06-25 Humphrey Products Company Snap-together modular manifold construction
IT8422711U1 (it) 1984-07-27 1986-01-27 Migliori Luciano Sottobase per l'alimentazione ed il sostegno di valvole di comando.
DE3522955A1 (de) * 1985-06-27 1987-01-08 Festo Kg Anordnung von ventilgehaeusen
US4681476A (en) 1986-05-01 1987-07-21 Motorola, Inc. Flex-lock dovetail mounting apparatus for radio transceivers and accessories
US5440477A (en) 1991-05-20 1995-08-08 Creative Pathways, Inc. Modular bottle-mounted gas management system
US5368062A (en) 1992-01-29 1994-11-29 Kabushiki Kaisha Toshiba Gas supplying system and gas supplying apparatus
US5275074A (en) 1992-08-25 1994-01-04 Taylor Christopher L Miter slider
WO1996001994A1 (en) * 1994-07-11 1996-01-25 Tekmar Company Modular vial autosampler
DE9411684U1 (de) 1994-07-19 1994-09-15 Elco Klöckner Heiztechnik GmbH, 72379 Hechingen Steuervorrichtung für einen Wärme- oder Kältekreislauf
US5605179A (en) 1995-03-17 1997-02-25 Insync Systems, Inc. Integrated gas panel
JP3661040B2 (ja) 1995-05-31 2005-06-15 忠弘 大見 流体制御装置
JP3546275B2 (ja) 1995-06-30 2004-07-21 忠弘 大見 流体制御装置
KR100232112B1 (ko) 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
DE19600629A1 (de) 1996-01-10 1997-07-17 Meuleman Andre Spezialschraube zum Verbinden von beschichteten Blechteilen
JP3726168B2 (ja) 1996-05-10 2005-12-14 忠弘 大見 流体制御装置
US5662143A (en) 1996-05-16 1997-09-02 Gasonics International Modular gas box system
US5915409A (en) 1996-06-13 1999-06-29 Ckd Corporation Manifold
JP3650859B2 (ja) 1996-06-25 2005-05-25 忠弘 大見 遮断開放器およびこれを備えた流体制御装置
US5794645A (en) 1996-07-15 1998-08-18 Creative Pathways, Inc. Method for supplying industrial gases using integrated bottle controllers
JP3122386B2 (ja) 1996-07-16 2001-01-09 シーケーディ株式会社 ガスケット保持具
US5992463A (en) 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
US6394138B1 (en) 1996-10-30 2002-05-28 Unit Instruments, Inc. Manifold system of removable components for distribution of fluids
US6293310B1 (en) 1996-10-30 2001-09-25 Unit Instruments, Inc. Gas panel
JP4022696B2 (ja) 1996-11-20 2007-12-19 忠弘 大見 遮断開放器
JP3997337B2 (ja) 1996-11-20 2007-10-24 忠弘 大見 流体制御装置
US6302141B1 (en) * 1996-12-03 2001-10-16 Insync Systems, Inc. Building blocks for integrated gas panel
US5836355A (en) 1996-12-03 1998-11-17 Insync Systems, Inc. Building blocks for integrated gas panel
JPH10220698A (ja) 1996-12-03 1998-08-21 Nippon Aera Kk 流体制御装置
JP3997338B2 (ja) * 1997-02-14 2007-10-24 忠弘 大見 流体制御装置
JPH10300000A (ja) 1997-02-28 1998-11-13 Benkan Corp 集積化ガス制御装置
JP3814704B2 (ja) 1997-05-08 2006-08-30 忠弘 大見 流体制御器用継手
JP3774800B2 (ja) 1997-09-24 2006-05-17 株式会社フジキン 下段部材の固定装置およびこれを備えた流体制御装置
JP3737869B2 (ja) 1997-05-13 2006-01-25 シーケーディ株式会社 プロセスガス供給ユニット
US6152175A (en) 1997-06-06 2000-11-28 Ckd Corporation Process gas supply unit
US5860676A (en) 1997-06-13 1999-01-19 Swagelok Marketing Co. Modular block assembly using angled fasteners for interconnecting fluid components
JP3876351B2 (ja) 1997-06-18 2007-01-31 忠弘 大見 管継手
JP4235759B2 (ja) 1997-08-05 2009-03-11 忠弘 大見 流体制御装置
JP4378553B2 (ja) 1997-10-13 2009-12-09 忠弘 大見 流体制御装置
US5975590A (en) 1998-02-17 1999-11-02 Applied Materials, Inc. High pressure fitting
US6644353B1 (en) 1998-03-05 2003-11-11 Swagelok Company Modular surface mount manifold
US6502601B2 (en) 1998-03-05 2003-01-07 Swagelok Company Modular surface mount manifold assemblies
US6629546B2 (en) 1998-03-05 2003-10-07 Swagelok Company Modular surface mount manifold assemblies
JP3780096B2 (ja) 1998-04-27 2006-05-31 シーケーディ株式会社 プロセスガス供給ユニット
CA2332550C (en) * 1998-05-18 2008-01-08 The Swagelok Company Modular surface mount manifold assemblies
JP4288629B2 (ja) * 1998-06-05 2009-07-01 日立金属株式会社 集積形流体制御装置
US6085783A (en) 1998-09-02 2000-07-11 Hollingshead; J. Gregory Unified modular multi-directional flow chemical distribution block
US6260581B1 (en) * 1998-06-12 2001-07-17 J. Gregory Hollingshead Apparatus for assembling modular chemical distribution substrate blocks
JP4110304B2 (ja) 1998-06-30 2008-07-02 株式会社フジキン 流体制御装置および流体制御装置組立て方法
JP3921565B2 (ja) 1998-07-10 2007-05-30 株式会社フジキン 流体制御装置
JP2000145979A (ja) 1998-11-16 2000-05-26 Fujikin Inc 下段部材の固定装置およびこれを備えた流体制御装置
KR100427563B1 (ko) 1999-04-16 2004-04-27 가부시키가이샤 후지킨 병렬분류형 유체공급장치와, 이것에 사용하는 유체가변형압력식 유량제어방법 및 유체가변형 압력식 유량제어장치
US6363958B1 (en) 1999-05-10 2002-04-02 Parker-Hannifin Corporation Flow control of process gas in semiconductor manufacturing
US6186177B1 (en) 1999-06-23 2001-02-13 Mks Instruments, Inc. Integrated gas delivery system
WO2001016512A1 (en) * 1999-09-01 2001-03-08 Silicon Valley Group, Inc. Layered block fluid delivery system
US6729353B2 (en) 1999-09-01 2004-05-04 Asml Us, Inc. Modular fluid delivery apparatus
US6125887A (en) 1999-09-20 2000-10-03 Pinto; James V. Welded interconnection modules for high purity fluid flow control applications
EP1222402A1 (en) 1999-10-20 2002-07-17 Parker Hannifin Plc Fluid control system
US6546960B1 (en) 2000-03-03 2003-04-15 Creative Pathways, Inc. Self-aligning SmartStrate™
EP1132669B1 (en) 2000-03-10 2004-10-13 Tokyo Electron Limited Fluid control apparatus
US6523570B2 (en) 2000-05-04 2003-02-25 Parker-Hannifin Corp. Manifold for valve assembly
US6349744B1 (en) 2000-10-13 2002-02-26 Mks Instruments, Inc. Manifold for modular gas box system
JP3564115B2 (ja) 2001-12-06 2004-09-08 シーケーディ株式会社 ガス供給ユニット
US6634385B2 (en) * 2001-12-21 2003-10-21 Motorola, Inc. Apparatus for conveying fluids and base plate
JP2005539375A (ja) 2002-08-27 2005-12-22 セレリティ・インコーポレイテッド 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル
US6874538B2 (en) 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
US20050005981A1 (en) 2003-03-26 2005-01-13 Paul Eidsmore Modular fluid components and assembly
US7178556B2 (en) 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI476341B (zh) * 2007-06-11 2015-03-11 蘭姆研究公司 整合之氣體系統氣體控制盤用之變通性歧管
US8555460B2 (en) 2008-12-26 2013-10-15 Lg Display Co., Ltd. Apparatus for cleaning substrate
TWI415693B (zh) * 2008-12-26 2013-11-21 Ｌｇ顯示器股份有限公司 清潔基板之裝置

Also Published As

Publication number Publication date
JP2005539375A (ja) 2005-12-22
CN1682054A (zh) 2005-10-12
EP1543544A2 (en) 2005-06-22
AU2003262953A8 (en) 2004-03-19
US20040129324A1 (en) 2004-07-08
US20060011247A1 (en) 2006-01-19
US7334605B2 (en) 2008-02-26
AU2003262953A1 (en) 2004-03-19
US7225835B2 (en) 2007-06-05
WO2004021412A2 (en) 2004-03-11
TW200419630A (en) 2004-10-01
KR20060017577A (ko) 2006-02-24
CN100396980C (zh) 2008-06-25
WO2004021412A3 (en) 2004-09-02

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