JP2005539375A - 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル - Google Patents

共通の平面にマニホルド接続を有するモジュール式基板ガスパネル Download PDF

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Publication number
JP2005539375A
JP2005539375A JP2004531639A JP2004531639A JP2005539375A JP 2005539375 A JP2005539375 A JP 2005539375A JP 2004531639 A JP2004531639 A JP 2004531639A JP 2004531639 A JP2004531639 A JP 2004531639A JP 2005539375 A JP2005539375 A JP 2005539375A
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JP
Japan
Prior art keywords
substrate
manifold
port
channel
ports
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Pending
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JP2004531639A
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English (en)
Japanese (ja)
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JP2005539375A5 (https=
Inventor
ブ，キム・ンゴク
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Celerity Inc
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Celerity Inc
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Application filed by Celerity Inc filed Critical Celerity Inc
Publication of JP2005539375A publication Critical patent/JP2005539375A/ja
Publication of JP2005539375A5 publication Critical patent/JP2005539375A5/ja
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
  • Loading And Unloading Of Fuel Tanks Or Ships (AREA)
JP2004531639A 2002-08-27 2003-08-26 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル Pending JP2005539375A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US40613202P 2002-08-27 2002-08-27
PCT/US2003/026979 WO2004021412A2 (en) 2002-08-27 2003-08-26 Modular substrate gas panel having manifold connections in a common plane

Publications (2)

Publication Number Publication Date
JP2005539375A true JP2005539375A (ja) 2005-12-22
JP2005539375A5 JP2005539375A5 (https=) 2006-10-12

Family

ID=31978264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004531639A Pending JP2005539375A (ja) 2002-08-27 2003-08-26 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル

Country Status (8)

Country Link
US (2) US7334605B2 (https=)
EP (1) EP1543544A2 (https=)
JP (1) JP2005539375A (https=)
KR (1) KR20060017577A (https=)
CN (1) CN100396980C (https=)
AU (1) AU2003262953A1 (https=)
TW (1) TWI244669B (https=)
WO (1) WO2004021412A2 (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009138837A (ja) * 2007-12-05 2009-06-25 Kitz Sct:Kk 容器用ブロックバルブ
JP2011149554A (ja) * 2011-03-29 2011-08-04 Fujikin Inc 流体制御装置用継手
KR20130037187A (ko) * 2011-10-05 2013-04-15 가부시키가이샤 호리바 에스텍 유체 기구 및 상기 유체 기구를 구성하는 지지 부재 및 유체 제어 시스템
WO2018079288A1 (ja) * 2016-10-24 2018-05-03 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
JPWO2018168559A1 (ja) * 2017-03-15 2020-01-16 株式会社フジキン 継手および流体制御装置

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005539375A (ja) * 2002-08-27 2005-12-22 セレリティ・インコーポレイテッド 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル
US7258139B2 (en) * 2002-11-26 2007-08-21 Swagelok Company Modular surface mount fluid system
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
US7178556B2 (en) * 2003-08-07 2007-02-20 Parker-Hannifin Corporation Modular component connector substrate assembly system
KR100881897B1 (ko) * 2003-11-07 2009-02-06 셀레리티 인크. 표면 장착 히터
EP1744131A1 (en) * 2005-07-15 2007-01-17 Indufil B.V. Module for a gas system
JP4780555B2 (ja) * 2005-09-12 2011-09-28 株式会社フジキン 流体制御装置
JP4780558B2 (ja) * 2005-12-09 2011-09-28 株式会社フジキン 流体制御装置用継手およびそれを用いた流体制御装置
JP4755498B2 (ja) * 2006-01-06 2011-08-24 東京エレクトロン株式会社 加熱装置及び加熱方法
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
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US7784497B2 (en) * 2007-07-12 2010-08-31 Eriksson Mark L MSM component and associated gas panel assembly
KR101229775B1 (ko) * 2008-12-26 2013-02-06 엘지디스플레이 주식회사 기판 세정장치
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
CN102804335B (zh) * 2009-06-10 2015-10-21 威斯塔德尔特有限责任公司 极限流速和/或高温流体递送基体
KR101097509B1 (ko) * 2009-07-17 2011-12-22 주식회사 엠엠티 기판 세정장치
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US8336573B2 (en) 2010-03-10 2012-12-25 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
WO2011112515A2 (en) * 2010-03-10 2011-09-15 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
US8333214B2 (en) 2010-03-10 2012-12-18 Coast Pneumatics, Inc. Modular manifold with quick disconnect valve fittings
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US9114788B2 (en) * 2011-01-27 2015-08-25 Wabtec Holding Corp. Manifold joint seal
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
US8851113B2 (en) * 2012-03-27 2014-10-07 Lam Research Coporation Shared gas panels in plasma processing systems
US9091397B2 (en) 2012-03-27 2015-07-28 Lam Research Corporation Shared gas panels in plasma processing chambers employing multi-zone gas feeds
JP6175300B2 (ja) * 2013-07-17 2017-08-02 株式会社フジキン 流体制御装置用継手部材および流体制御装置
US10128087B2 (en) 2014-04-07 2018-11-13 Lam Research Corporation Configuration independent gas delivery system
US10557197B2 (en) 2014-10-17 2020-02-11 Lam Research Corporation Monolithic gas distribution manifold and various construction techniques and use cases therefor
US10022689B2 (en) 2015-07-24 2018-07-17 Lam Research Corporation Fluid mixing hub for semiconductor processing tool
US10118263B2 (en) 2015-09-02 2018-11-06 Lam Researech Corporation Monolithic manifold mask and substrate concepts
US10215317B2 (en) 2016-01-15 2019-02-26 Lam Research Corporation Additively manufactured gas distribution manifold
US9879795B2 (en) 2016-01-15 2018-01-30 Lam Research Corporation Additively manufactured gas distribution manifold
CN113994460B (zh) * 2019-04-15 2025-05-20 朗姆研究公司 用于气体输送的模块部件系统
JP7333944B2 (ja) * 2019-06-27 2023-08-28 株式会社フジキン 流体制御装置
US11537150B2 (en) * 2020-04-09 2022-12-27 Horiba Stec, Co., Ltd. Fluid control apparatus
WO2026072559A1 (en) * 2024-09-24 2026-04-02 Applied Materials, Inc. Gas mixing block for dual processing chambers
WO2026078576A1 (en) * 2024-10-07 2026-04-16 Compart Systems Pte. Ltd. Fluid delivery system

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009138837A (ja) * 2007-12-05 2009-06-25 Kitz Sct:Kk 容器用ブロックバルブ
JP2011149554A (ja) * 2011-03-29 2011-08-04 Fujikin Inc 流体制御装置用継手
KR20130037187A (ko) * 2011-10-05 2013-04-15 가부시키가이샤 호리바 에스텍 유체 기구 및 상기 유체 기구를 구성하는 지지 부재 및 유체 제어 시스템
KR101940325B1 (ko) 2011-10-05 2019-01-18 가부시키가이샤 호리바 에스텍 유체 기구 및 상기 유체 기구를 구성하는 지지 부재 및 유체 제어 시스템
WO2018079288A1 (ja) * 2016-10-24 2018-05-03 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
CN109891138A (zh) * 2016-10-24 2019-06-14 株式会社富士金 流体控制装置和使用该流体控制装置的制品制造方法
JPWO2018079288A1 (ja) * 2016-10-24 2019-09-12 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
CN109891138B (zh) * 2016-10-24 2020-07-07 株式会社富士金 流体控制装置和使用该流体控制装置的制品制造方法
US11091837B2 (en) 2016-10-24 2021-08-17 Fujikin Incorporated Fluid control system and product manufacturing method using fluid control system
JPWO2018168559A1 (ja) * 2017-03-15 2020-01-16 株式会社フジキン 継手および流体制御装置
JP7061808B2 (ja) 2017-03-15 2022-05-02 株式会社フジキン 継手および流体制御装置

Also Published As

Publication number Publication date
CN1682054A (zh) 2005-10-12
EP1543544A2 (en) 2005-06-22
AU2003262953A8 (en) 2004-03-19
TWI244669B (en) 2005-12-01
US20040129324A1 (en) 2004-07-08
US20060011247A1 (en) 2006-01-19
US7334605B2 (en) 2008-02-26
AU2003262953A1 (en) 2004-03-19
US7225835B2 (en) 2007-06-05
WO2004021412A2 (en) 2004-03-11
TW200419630A (en) 2004-10-01
KR20060017577A (ko) 2006-02-24
CN100396980C (zh) 2008-06-25
WO2004021412A3 (en) 2004-09-02

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