JP2005539375A5 - - Google Patents

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Publication number
JP2005539375A5
JP2005539375A5 JP2004531639A JP2004531639A JP2005539375A5 JP 2005539375 A5 JP2005539375 A5 JP 2005539375A5 JP 2004531639 A JP2004531639 A JP 2004531639A JP 2004531639 A JP2004531639 A JP 2004531639A JP 2005539375 A5 JP2005539375 A5 JP 2005539375A5
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JP
Japan
Prior art keywords
manifold
substrate
port
channel
ports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004531639A
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English (en)
Japanese (ja)
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JP2005539375A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2003/026979 external-priority patent/WO2004021412A2/en
Publication of JP2005539375A publication Critical patent/JP2005539375A/ja
Publication of JP2005539375A5 publication Critical patent/JP2005539375A5/ja
Pending legal-status Critical Current

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JP2004531639A 2002-08-27 2003-08-26 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル Pending JP2005539375A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US40613202P 2002-08-27 2002-08-27
PCT/US2003/026979 WO2004021412A2 (en) 2002-08-27 2003-08-26 Modular substrate gas panel having manifold connections in a common plane

Publications (2)

Publication Number Publication Date
JP2005539375A JP2005539375A (ja) 2005-12-22
JP2005539375A5 true JP2005539375A5 (https=) 2006-10-12

Family

ID=31978264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004531639A Pending JP2005539375A (ja) 2002-08-27 2003-08-26 共通の平面にマニホルド接続を有するモジュール式基板ガスパネル

Country Status (8)

Country Link
US (2) US7334605B2 (https=)
EP (1) EP1543544A2 (https=)
JP (1) JP2005539375A (https=)
KR (1) KR20060017577A (https=)
CN (1) CN100396980C (https=)
AU (1) AU2003262953A1 (https=)
TW (1) TWI244669B (https=)
WO (1) WO2004021412A2 (https=)

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US10215317B2 (en) 2016-01-15 2019-02-26 Lam Research Corporation Additively manufactured gas distribution manifold
US9879795B2 (en) 2016-01-15 2018-01-30 Lam Research Corporation Additively manufactured gas distribution manifold
US11091837B2 (en) * 2016-10-24 2021-08-17 Fujikin Incorporated Fluid control system and product manufacturing method using fluid control system
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CN113994460B (zh) * 2019-04-15 2025-05-20 朗姆研究公司 用于气体输送的模块部件系统
JP7333944B2 (ja) * 2019-06-27 2023-08-28 株式会社フジキン 流体制御装置
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