TWI221122B - Method of producing micro structure, method of producing liquid discharge head, and liquid discharge head by the same - Google Patents
Method of producing micro structure, method of producing liquid discharge head, and liquid discharge head by the same Download PDFInfo
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- TWI221122B TWI221122B TW092118905A TW92118905A TWI221122B TW I221122 B TWI221122 B TW I221122B TW 092118905 A TW092118905 A TW 092118905A TW 92118905 A TW92118905 A TW 92118905A TW I221122 B TWI221122 B TW I221122B
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
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- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
- B41J2202/01—Embodiments of or processes related to ink-jet heads
- B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Materials For Photolithography (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002201971 | 2002-07-10 | ||
| JP2003271623A JP4280574B2 (ja) | 2002-07-10 | 2003-07-07 | 液体吐出ヘッドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200401714A TW200401714A (en) | 2004-02-01 |
| TWI221122B true TWI221122B (en) | 2004-09-21 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW092118905A TWI221122B (en) | 2002-07-10 | 2003-07-10 | Method of producing micro structure, method of producing liquid discharge head, and liquid discharge head by the same |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6986980B2 (enExample) |
| EP (1) | EP1380425B1 (enExample) |
| JP (1) | JP4280574B2 (enExample) |
| KR (1) | KR100591654B1 (enExample) |
| CN (1) | CN1257059C (enExample) |
| DE (1) | DE60335931D1 (enExample) |
| TW (1) | TWI221122B (enExample) |
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| FR2849222B1 (fr) * | 2002-12-20 | 2005-10-21 | Commissariat Energie Atomique | Microstructure comportant une couche d'adherence et procede de fabrication d'une telle microstructure |
| DE10353767B4 (de) * | 2003-11-17 | 2005-09-29 | Infineon Technologies Ag | Vorrichtung zur Häusung einer mikromechanischen Struktur und Verfahren zur Herstellung derselben |
| DE10361075A1 (de) * | 2003-12-22 | 2005-07-28 | Pac Tech - Packaging Technologies Gmbh | Verfahren und Vorichtung zur Trocknung von Schaltungssubstraten |
| JP4447974B2 (ja) | 2004-06-28 | 2010-04-07 | キヤノン株式会社 | インクジェットヘッドの製造方法 |
| EP1763706B1 (en) * | 2004-06-28 | 2013-12-11 | Canon Kabushiki Kaisha | Method for manufacturing liquid discharge head |
| JP4761498B2 (ja) * | 2004-06-28 | 2011-08-31 | キヤノン株式会社 | 感光性樹脂組成物、ならびにこれを用いた段差パターンの製造方法及びインクジェットヘッドの製造方法 |
| CN1968815B (zh) * | 2004-06-28 | 2013-05-01 | 佳能株式会社 | 排液头制造方法，和使用该方法得到的排液头 |
| JP4484774B2 (ja) * | 2004-06-28 | 2010-06-16 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| JP4533256B2 (ja) * | 2004-06-28 | 2010-09-01 | キヤノン株式会社 | 微細構造体の製造方法および液体吐出ヘッドの製造方法 |
| US7629111B2 (en) | 2004-06-28 | 2009-12-08 | Canon Kabushiki Kaisha | Liquid discharge head manufacturing method, and liquid discharge head obtained using this method |
| JP5027991B2 (ja) * | 2004-12-03 | 2012-09-19 | キヤノン株式会社 | インクジェットヘッドおよびその製造方法 |
| KR101012898B1 (ko) | 2005-12-02 | 2011-02-08 | 캐논 가부시끼가이샤 | 액체 토출 헤드 제조 방법 |
| US8438729B2 (en) * | 2006-03-09 | 2013-05-14 | Canon Kabushiki Kaisha | Method of producing liquid discharge head |
| US8376525B2 (en) | 2006-09-08 | 2013-02-19 | Canon Kabushiki Kaisha | Liquid discharge head and method of manufacturing the same |
| JP2008290413A (ja) * | 2007-05-28 | 2008-12-04 | Canon Inc | 液体吐出ヘッドの製造方法 |
| US8039195B2 (en) * | 2008-02-08 | 2011-10-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Si device making method by using a novel material for packing and unpacking process |
| US8137573B2 (en) * | 2008-06-19 | 2012-03-20 | Canon Kabushiki Kaisha | Liquid ejection head, method for manufacturing liquid ejection head, and method for manufacturing structure |
| JP5069186B2 (ja) * | 2008-07-29 | 2012-11-07 | ソニー株式会社 | 液滴吐出ヘッド及び液滴吐出装置 |
| KR20100060423A (ko) * | 2008-11-27 | 2010-06-07 | 삼성전자주식회사 | 잉크젯 프린트헤드 및 그 제조방법 |
| US8499453B2 (en) * | 2009-11-26 | 2013-08-06 | Canon Kabushiki Kaisha | Method of manufacturing liquid discharge head, and method of manufacturing discharge port member |
| FR2953991B1 (fr) * | 2009-12-10 | 2012-01-06 | Commissariat Energie Atomique | Procede de realisation d'un revetement de surface controle tridimensionnellement dans une cavite |
| US11175279B2 (en) | 2010-05-03 | 2021-11-16 | Creatv Microtech, Inc. | Polymer microfilters, devices comprising the same, methods of manufacturing the same, and uses thereof |
| JP5837574B2 (ja) * | 2010-05-03 | 2015-12-24 | クリーティービー マイクロテック， インク．Ｃｒｅａｔｖ Ｍｉｃｒｏｔｅｃｈ， Ｉｎｃ． | 高分子マイクロフィルタおよびその製造方法 |
| US8434229B2 (en) * | 2010-11-24 | 2013-05-07 | Canon Kabushiki Kaisha | Liquid ejection head manufacturing method |
| CN103252997B (zh) * | 2012-02-16 | 2015-12-16 | 珠海纳思达珠海赛纳打印科技股份有限公司 | 一种液体喷头及其制造方法 |
| US9308726B2 (en) * | 2012-02-16 | 2016-04-12 | Xerox Corporation | Printhead fluid paths formed with sacrificial material patterned using additive manufacturing processes |
| US9599852B1 (en) * | 2013-08-05 | 2017-03-21 | Lensvector, Inc. | Manufacturing of liquid crystal lenses using carrier substrate |
| KR101982556B1 (ko) | 2014-09-30 | 2019-05-27 | 후지필름 가부시키가이샤 | 패턴 형성 방법, 레지스트 패턴, 및 전자 디바이스의 제조 방법 |
| JPWO2022050041A1 (enExample) * | 2020-09-07 | 2022-03-10 |
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-
2003
- 2003-07-07 JP JP2003271623A patent/JP4280574B2/ja not_active Expired - Fee Related
- 2003-07-09 US US10/615,302 patent/US6986980B2/en not_active Expired - Fee Related
- 2003-07-10 KR KR1020030046719A patent/KR100591654B1/ko not_active Expired - Fee Related
- 2003-07-10 EP EP03015760A patent/EP1380425B1/en not_active Expired - Lifetime
- 2003-07-10 DE DE60335931T patent/DE60335931D1/de not_active Expired - Lifetime
- 2003-07-10 CN CNB031467830A patent/CN1257059C/zh not_active Expired - Fee Related
- 2003-07-10 TW TW092118905A patent/TWI221122B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| US20040131957A1 (en) | 2004-07-08 |
| CN1257059C (zh) | 2006-05-24 |
| US6986980B2 (en) | 2006-01-17 |
| EP1380425A1 (en) | 2004-01-14 |
| KR100591654B1 (ko) | 2006-06-20 |
| EP1380425B1 (en) | 2011-02-02 |
| CN1475350A (zh) | 2004-02-18 |
| JP4280574B2 (ja) | 2009-06-17 |
| KR20040005695A (ko) | 2004-01-16 |
| JP2004046217A (ja) | 2004-02-12 |
| TW200401714A (en) | 2004-02-01 |
| DE60335931D1 (de) | 2011-03-17 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |