TWD213398S - 基板支撐底座 - Google Patents

基板支撐底座 Download PDF

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Publication number
TWD213398S
TWD213398S TW109300093F TW109300093F TWD213398S TW D213398 S TWD213398 S TW D213398S TW 109300093 F TW109300093 F TW 109300093F TW 109300093 F TW109300093 F TW 109300093F TW D213398 S TWD213398 S TW D213398S
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TW
Taiwan
Prior art keywords
substrate support
support pedestal
design
support base
dotted line
Prior art date
Application number
TW109300093F
Other languages
English (en)
Chinese (zh)
Inventor
昌憲 李
麥克Ｄ 威沃斯
杰弗里 路德維格
Original Assignee
美商應用材料股份有限公司
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Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TWD213398S publication Critical patent/TWD213398S/zh

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TW109300093F 2019-07-30 2020-01-08 基板支撐底座 TWD213398S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/700,012 2019-07-30
US29/700,012 USD931240S1 (en) 2019-07-30 2019-07-30 Substrate support pedestal

Publications (1)

Publication Number Publication Date
TWD213398S true TWD213398S (zh) 2021-08-21

Family

ID=72322262

Family Applications (2)

Application Number Title Priority Date Filing Date
TW109300093F TWD213398S (zh) 2019-07-30 2020-01-08 基板支撐底座
TW109306863F TWD211589S (zh) 2019-07-30 2020-01-08 基板支撐底座

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TW109306863F TWD211589S (zh) 2019-07-30 2020-01-08 基板支撐底座

Country Status (3)

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US (1) USD931240S1 (enrdf_load_stackoverflow)
JP (2) JP1667763S (enrdf_load_stackoverflow)
TW (2) TWD213398S (enrdf_load_stackoverflow)

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JP1655453S (enrdf_load_stackoverflow) * 2019-06-17 2020-03-23
USD896767S1 (en) * 2019-12-02 2020-09-22 Advanced Thermal Solutions, Inc. Fluid mover enclosure
USD956376S1 (en) * 2019-12-18 2022-06-28 Goldeep Ltd. Vacuum bag valve
USD989012S1 (en) * 2020-09-17 2023-06-13 Ebara Corporation Elastic membrane
USD990533S1 (en) * 2020-10-21 2023-06-27 Bryan Ross Schmitt Sanding table for attachment to a garbage can
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication
USD1057675S1 (en) * 2021-04-12 2025-01-14 Lam Research Corporation Pedestal for a substrate processing system
USD1071886S1 (en) * 2022-01-20 2025-04-22 Applied Materials, Inc. Substrate support for a substrate processing chamber
USD1071103S1 (en) * 2022-04-11 2025-04-15 Applied Materials, Inc. Gas distribution plate
USD1085029S1 (en) * 2022-07-19 2025-07-22 Applied Materials, Inc. Gas distribution plate
USD1037778S1 (en) * 2022-07-19 2024-08-06 Applied Materials, Inc. Gas distribution plate
USD1073758S1 (en) * 2022-10-13 2025-05-06 Lam Research Corporation Baffle for substrate processing system

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USD406852S (en) 1997-11-14 1999-03-16 Applied Materials, Inc. Electrostatic chuck with improved spacing mask and workpiece detection device
USD708651S1 (en) 2011-11-22 2014-07-08 Applied Materials, Inc. Electrostatic chuck

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USD490827S1 (en) * 2002-12-20 2004-06-01 Ngk Spark Plug Co., Ltd. Electrostatic chuck
KR20070017255A (ko) 2005-08-06 2007-02-09 삼성전자주식회사 플라즈마 장치의 반도체 기판 고정 장치
KR100854500B1 (ko) 2007-02-12 2008-08-26 삼성전자주식회사 척 어셈블리 및 이를 구비한 고밀도 플라즈마 설비
JP5022077B2 (ja) 2007-03-27 2012-09-12 株式会社アルバック 成膜装置
USD621804S1 (en) * 2009-08-07 2010-08-17 Hon Hai Precision Industry Co., Ltd. PCB for arranging LED lights
US8409995B2 (en) 2009-08-07 2013-04-02 Tokyo Electron Limited Substrate processing apparatus, positioning method and focus ring installation method
JP5183659B2 (ja) 2010-03-23 2013-04-17 東京エレクトロン株式会社 基板処理装置、基板処理方法、プログラム及びコンピュータ記憶媒体
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USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
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TWI749231B (zh) * 2017-05-25 2021-12-11 日商日本碍子股份有限公司 晶圓基座
TWD197827S (zh) 2017-12-19 2019-06-01 Ebara Corp 半導體晶圓研磨用彈性膜
JP6793828B2 (ja) 2018-01-19 2020-12-02 株式会社アルバック ヒータベース及び処理装置
JP7030006B2 (ja) * 2018-04-12 2022-03-04 株式会社ディスコ 拡張方法及び拡張装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD406852S (en) 1997-11-14 1999-03-16 Applied Materials, Inc. Electrostatic chuck with improved spacing mask and workpiece detection device
USD708651S1 (en) 2011-11-22 2014-07-08 Applied Materials, Inc. Electrostatic chuck

Also Published As

Publication number Publication date
TWD211589S (zh) 2021-05-11
USD931240S1 (en) 2021-09-21
JP1667763S (enrdf_load_stackoverflow) 2020-09-07
JP1667762S (enrdf_load_stackoverflow) 2020-09-07

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