TWD187001S - 基板處理裝置用頂置式加熱器 - Google Patents

基板處理裝置用頂置式加熱器

Info

Publication number
TWD187001S
TWD187001S TW106301242F TW106301242F TWD187001S TW D187001 S TWD187001 S TW D187001S TW 106301242 F TW106301242 F TW 106301242F TW 106301242 F TW106301242 F TW 106301242F TW D187001 S TWD187001 S TW D187001S
Authority
TW
Taiwan
Prior art keywords
substrate processing
article
mounted heater
processing equipment
ceiling
Prior art date
Application number
TW106301242F
Other languages
English (en)
Chinese (zh)
Inventor
Tetsuya Kosugi
Takatomo Yamaguchi
Shuhei Saido
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD187001S publication Critical patent/TWD187001S/zh

Links

TW106301242F 2016-10-14 2017-03-13 基板處理裝置用頂置式加熱器 TWD187001S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2016-22413F JP1581406S (cs) 2016-10-14 2016-10-14

Publications (1)

Publication Number Publication Date
TWD187001S true TWD187001S (zh) 2017-12-01

Family

ID=59309850

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106301242F TWD187001S (zh) 2016-10-14 2017-03-13 基板處理裝置用頂置式加熱器

Country Status (3)

Country Link
US (1) USD826185S1 (cs)
JP (1) JP1581406S (cs)
TW (1) TWD187001S (cs)

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JP1590181S (cs) * 2017-02-14 2017-11-06
USD887358S1 (en) * 2018-12-06 2020-06-16 Lofelt Gmbh Motor membrane
USD921431S1 (en) 2019-04-01 2021-06-08 Veeco Instruments, Inc. Multi-filament heater assembly
JP1651618S (cs) * 2019-07-11 2020-01-27
JP1651619S (cs) * 2019-07-11 2020-01-27
JP1651623S (cs) 2019-07-18 2020-01-27
USD913256S1 (en) * 2019-07-31 2021-03-16 Eryn Smith Antenna pattern for a semiconductive substrate carrier
USD926716S1 (en) * 2019-07-31 2021-08-03 Eryn Smith Antenna pattern for a semiconductive substrate carrier
USD895587S1 (en) * 2019-10-22 2020-09-08 Avery Dennison Retail Information Services, Llc Antenna
USD954691S1 (en) 2019-10-22 2022-06-14 Avery Dennison Retail Information Services, Llc Antenna
USD922339S1 (en) * 2019-11-11 2021-06-15 Asia Vital Components Co., Ltd. Radiating fin
USD922340S1 (en) * 2019-11-11 2021-06-15 Asia Vita Components Co., Ltd. Radiating fin
USD922341S1 (en) * 2019-11-11 2021-06-15 Asia Vital Components Co., Ltd. Radiating fin
USD989012S1 (en) * 2020-09-17 2023-06-13 Ebara Corporation Elastic membrane
JP1684469S (ja) 2020-09-24 2021-05-10 基板処理装置用天井ヒータ
JP1684468S (ja) 2020-09-24 2021-05-10 基板処理装置用天井ヒータ
USD980199S1 (en) * 2020-12-17 2023-03-07 Megabyte Limited Antenna for radio frequency tag reader
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication
USD1051530S1 (en) * 2023-03-29 2024-11-12 Irobot Corporation Drip tray for use with a mobile cleaning robot
JP1770111S (ja) 2023-03-09 2024-05-10 移動型掃除ロボット用ドリップトレイ
JP1783361S (ja) * 2024-02-19 2024-10-29 無線通信用タグ
USD1094344S1 (en) * 2024-05-17 2025-09-23 Avery Dennison Retail Information Services Llc Antenna
USD1096704S1 (en) * 2024-06-25 2025-10-07 Avery Dennison Retail Information Services Llc Antenna

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Publication number Priority date Publication date Assignee Title
JP4328009B2 (ja) * 2000-11-30 2009-09-09 日本碍子株式会社 加熱装置
WO2003009346A2 (en) * 2001-07-15 2003-01-30 Applied Materials,Inc. Processing system
JP4276813B2 (ja) * 2002-03-26 2009-06-10 株式会社日立国際電気 熱処理装置および半導体製造方法
JP2004200619A (ja) * 2002-12-20 2004-07-15 Kyocera Corp ウエハ支持部材
JP4380236B2 (ja) * 2003-06-23 2009-12-09 東京エレクトロン株式会社 載置台及び熱処理装置
WO2006060134A2 (en) * 2004-11-15 2006-06-08 Cree, Inc. Restricted radiated heating assembly for high temperature processing
TWD125599S1 (zh) * 2006-09-28 2008-10-21 東京威力科創股份有限公司 半導體製造用加熱器
USD649126S1 (en) * 2008-10-20 2011-11-22 Ebara Corporation Vacuum contact pad
JP5814005B2 (ja) * 2011-06-21 2015-11-17 芝浦メカトロニクス株式会社 ヒータユニット、ファンフィルタユニット及び基板処理装置
US9267739B2 (en) * 2012-07-18 2016-02-23 Applied Materials, Inc. Pedestal with multi-zone temperature control and multiple purge capabilities
US9719629B2 (en) * 2014-04-08 2017-08-01 Plansee Se Supporting system for a heating element and heating system
JP1541874S (cs) * 2015-03-16 2016-01-18
JP1560719S (cs) * 2015-12-01 2016-10-11

Also Published As

Publication number Publication date
JP1581406S (cs) 2017-07-18
USD826185S1 (en) 2018-08-21

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