TW594298B - Method and apparatus for fabricating bonded substrate - Google Patents

Method and apparatus for fabricating bonded substrate Download PDF

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Publication number
TW594298B
TW594298B TW092114895A TW92114895A TW594298B TW 594298 B TW594298 B TW 594298B TW 092114895 A TW092114895 A TW 092114895A TW 92114895 A TW92114895 A TW 92114895A TW 594298 B TW594298 B TW 594298B
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substrates
load
seal
container
patent application
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TW092114895A
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TW200401928A (en
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Takanori Muramoto
Takuya Ohno
Kazushige Komatsu
Koji Hashizume
Tsukasa Adachi
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Fujitsu Ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2309/00—Parameters for the laminating or treatment process; Apparatus details
    • B32B2309/60—In a particular environment
    • B32B2309/68—Vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/20—Displays, e.g. liquid crystal displays, plasma displays
    • B32B2457/202—LCD, i.e. liquid crystal displays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133354—Arrangements for aligning or assembling substrates
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1341—Filling or closing of cells
    • G02F1/13415—Drop filling process

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Fluid Mechanics (AREA)
  • Liquid Crystal (AREA)

Description

594298 中該等多數個負載單元中的一個被設在該第一支撐板 的中心處。 ι〇·如申請專利範圍第i項所述之黏合基板製造裝置，更 包含有一位置偵測單元，用以偵測該等第一與第二支撐 板對彼此的一相對位置、並在黏合該等第一與第二基板 時產生表示該相對位置的位置資料。
11 ·如申請專利範圍第3項所述之黏合基板製造裝置，更 包含有： 一監測單元，其感測一影像並根據該感測之影像彥 生資料用以感測在黏合該等第一及第二基板時該密封 物的平坦度；及 一影像處理單元，用以處理由該監測單元所感測的 影像資料以量測該密封物的平坦度。
12·如申請專利範圍第3項所述之黏合基板製造裝置，其 中該密封物包含一用以密封該等第一與第二基板之間 的空間的内密封物框、及一位在該内密封物框之外且具 有大於該内密封物之高度的外密封物。 13 ·如申請專利範圍第12項所述之黏合基板製造裝置， 其中該外密封物係以圍繞該内密封物如此之方式下形 成於一框形。 14. 一種以第一及第二基板製成一黏合基板的方法，包含 步驟有： 形成一密封物框在該第一基板的表面上； 將該等第一及第二基板置入一處理閥室； 51 將該處理閥室減壓； 以亥專第及苐一基板彼此接近如此之方式移動 該等第一及第二基板中的至少一個； 計算作用在該等第一及第二基板的一加壓負載； 當該計算的加壓負載達到一目標負載時，停止該等 第一及第二基板中的該至少一個的移動；及 將該處理閥室中的壓力設回至大氣壓力。 15·如申請專利範圍第ι4項所述之方法，更包含步驟有· 當該計算的加壓負載達到一低於該目標負载的負 載時’暫時停止該等第一及第二基板中的該至少一個的 移動；及 在暫時停止移動的步驟之後，檢查該預定負载與該 計算的加壓負載之間的差。 如申請專利範圍第15項所述之方法，更包含步驟係 在該檢查一差的步驟之後，獲得該密封物之影像並監测 該密封物的平坦度。 1 7·如申請專利範圍第15項所述之方法，更包含步驟係 在停止該等第一及第二基板中的該至少一個的移動之 步驟後’取得密封物之影像並監測該密封物的平坦度， 並且/、中g 5亥岔封物的平坦度位於一預定範圍中時，該 等第一及第二基板的加壓被停止並且將該處理閥室之 壓力設回至大氣壓力的步驟被執行。 18·如申請專利範圍第14項所述之方法，其中計算該加 壓負載之步驟包含自多數個負載單元之多數個量測值 594298 5 10 15 20 ▲的兩個之間的差的計算，並且該方法更包含步驟係當 ^差疋等於或大於一預定值時，除去作用在該等第一及 第二基板的加壓負載。 1 9.如申4專利範圍第14項所述之方法，更包含步驟有： 將一液晶滴於該密封物框中；及 X專第及第二基材中的一個接觸該密封物且 :加壓負載達到該等第一及第二基板二者能接觸該液 晶的一負載時，暫時停止該等第-及第二基板中的該至 少一個的移動並黏合該等第一及第二基板。 =·如申請專利範圍第14項所述之方法，其中將該等第 及第一基板置入該處理閥室之步驟包含將該等第二 及第基板分別保持有設於該處理閥室的第一及第二 支撐板，並且該方法更包含步驟有·· 一 偵測在該第一與第二支撐板之間距離； 當該距離達到-目標距離對應當幾乎整個密封物 框接觸，亥等第-及第二基板時於該第一與第二基板之 間的距離，停止該等第一及第二基板中的該至少一個的 移動。 &如申請專利範圍第14項所述之方法，其中該目標負 載是低於由大氣壓力所引起的一負載。 22.如申請專利範圍第21項所述之方法，其中將該處理 閥室之壓力設回至大氣壓力的步驟包含將該第一與第 二基板之間的縫係壓縮至一預定值’藉由利用大氣壓 力0
53 594298 23·如申請專利範圍第14項所述之方法，其中該目標負 栽疋等於當幾乎整個密封物框接觸該等第一及第二基 板時的一負載。 24·一種自具有預定單元缝隙之第-及第二基板製成黏 合基板的裝置，該裝置包含有： 裝置’用以形成一密封物框其具有一大於該第一 基板上之單元縫隙的高度； 裝置，用以滴下一液晶在該密封物框中的多數個 位置； 一按壓機包含： 了減壓處理閥室，係可分成一第一容器與一 第二容器； ' 一第一支撐板，設於該第一容器中，用以支撐 該第二基板； 一第二支撐板，設於該第二容器中，用以支撐 該第一基板； 人^ 一加壓機構，其按壓該等第一及第二基板並包 :-壓：馬達及一被該壓力馬達可上下移動的連接 木該第一支撐板藉由一懸桿被吊在該連接架上； 、，一定位機構，用以滑動並轉動該第二支撐板在 一水平面當中，以互相校準該第一與第二基板； 彈性構件，係設在該第一容器與該加壓機構之 間並在該第二容器與該定位機構之間；及 一按壓控制單元，其控制該加壓機構根據來自 54 594298 該負載感測器的一量測值、從來自該負載感測器之量測 值σ十#加壓負載、當該計算的加壓負載達到一目標負 載日守仔止該加壓機構、並將該處理閥室之壓力設回至大 ;;力亥苐及苐一基板被大氣壓力壓縮至該預定 5 單元縫隙之方式。 25·如申請專利範圍第24項所述之裝置，其中該等彈性 構件是風箱。 26. 如申請專利範圍第24項所述之裝置，更包含一影像 于單元用以監測该密封物的變形並且其中該按壓控 1〇制單元根據被該影像取得單元所取得之密封物影像來 檢查該計算的加壓負載。 27. 如申請專利範圍第24項所述之裝置，更包含一位置 偵測單70，用以量測在該第一支撐板與該第二支撐板之 Η㈤：距離並且其中該按壓控制單元根據來自該位置偵 測早元的一測量結果來計算在該第一與第二基板之間 的距離。 I如申凊專利範圍第24項所述之裝置，其中該等彈性 構件防止該處理閥室的變形被傳送至該 撐板。 〃弟一支
20 2〇 M rU • σ申請專利範圍第24項所述之裝置，其中該等彈性 構件防止振動被傳送至㈣一肖第二支撐板。 3〇·如申請專利範圍第24項所述之裝置，其中該目標負 載：等於當在該第一與第二基材之間的縫隙是大於該 貝疋的單元縫隙的一預定值時的一負載。 55
TW092114895A 2002-06-11 2003-06-02 Method and apparatus for fabricating bonded substrate TW594298B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002170007 2002-06-11
JP2003059075A JP4243499B2 (ja) 2002-06-11 2003-03-05 貼合せ基板製造装置及び貼合せ基板製造方法

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TW200401928A TW200401928A (en) 2004-02-01
TW594298B true TW594298B (en) 2004-06-21

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US (2) US20030226633A1 (zh)
JP (1) JP4243499B2 (zh)
KR (1) KR20030095324A (zh)
CN (1) CN1291272C (zh)
TW (1) TW594298B (zh)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7244160B2 (en) * 2002-03-23 2007-07-17 Lg.Philips Lcd Co., Ltd. Liquid crystal display device bonding apparatus and method of using the same
US7889309B2 (en) 2003-09-24 2011-02-15 Sharp Kabushiki Kaisha Manufacturing method of liquid crystal display panel and manufacturing apparatus of liquid crystal display panel
JP3683893B2 (ja) * 2003-09-24 2005-08-17 シャープ株式会社 液晶表示パネルの製造方法および液晶表示パネルの製造装置
JP2005309332A (ja) * 2004-04-26 2005-11-04 Fujitsu Ltd 貼合せ基板製造装置及び貼合せ基板製造方法
JP2005331672A (ja) * 2004-05-19 2005-12-02 Joyo Kogaku Kk 透明基板のアライメント装置
KR100864794B1 (ko) * 2004-12-17 2008-10-23 주식회사 에이디피엔지니어링 기판지지장치
CN100361010C (zh) * 2005-01-28 2008-01-09 广辉电子股份有限公司 基板组装方法及其装置
JP4270212B2 (ja) * 2005-03-29 2009-05-27 セイコーエプソン株式会社 基板間隔調整装置、基板間隔調整方法、および液晶表示装置の製造方法
JP4078487B2 (ja) * 2005-05-25 2008-04-23 株式会社日立プラントテクノロジー 基板組立装置及び方法
JP4379435B2 (ja) * 2006-05-17 2009-12-09 株式会社日立プラントテクノロジー 基板組立装置とそれを用いた基板組立方法
KR100801623B1 (ko) * 2006-06-23 2008-02-11 삼성전자주식회사 표시장치의 제조방법과 이에 사용되는 표시장치의 제조장치및 이에 의하여 제조된 표시장치
KR101378072B1 (ko) * 2006-11-29 2014-03-27 엘아이지에이디피 주식회사 기판 합착 장치
US8388781B2 (en) * 2006-12-06 2013-03-05 Adp Engineering Co., Ltd. Apparatus for attaching substrates and gap control unit thereof
KR101311855B1 (ko) * 2006-12-08 2013-09-27 엘아이지에이디피 주식회사 기판합착장치 및 기판합착방법
JP4713517B2 (ja) * 2007-02-20 2011-06-29 芝浦メカトロニクス株式会社 貼り合わせ基板の製造装置及び製造方法
US20080203137A1 (en) * 2007-02-28 2008-08-28 International Business Machines Corporation Substrate bonding methods and system including monitoring
US7947570B2 (en) * 2008-01-16 2011-05-24 Semiconductor Energy Laboratory Co., Ltd. Manufacturing method and manufacturing apparatus of semiconductor substrate
KR101110429B1 (ko) * 2009-04-08 2012-03-30 시바우라 메카트로닉스 가부시키가이샤 기판 붙임 장치 및 기판 붙임 방법
KR101552729B1 (ko) 2009-04-30 2015-09-11 엘지디스플레이 주식회사 플렉서블 표시장치의 제조 방법
JP5445039B2 (ja) * 2009-11-06 2014-03-19 富士通株式会社 貼り合わせ装置及び貼り合わせ方法、並びに液晶表示パネルの製造方法
TWI396491B (zh) * 2010-07-06 2013-05-11 Unimicron Technology Corp 線路板的製造方法
FR2962594B1 (fr) * 2010-07-07 2012-08-31 Soitec Silicon On Insulator Procede de collage par adhesion moleculaire avec compensation de desalignement radial
CN102012581B (zh) * 2010-09-30 2012-08-22 深圳市华星光电技术有限公司 液晶盒成盒装置及其方法
JP5389847B2 (ja) * 2011-03-04 2014-01-15 東京エレクトロン株式会社 接合方法、プログラム、コンピュータ記憶媒体、接合装置及び接合システム
US10014202B2 (en) * 2012-06-12 2018-07-03 Erich Thallner Device and method for aligning substrates
JP6046926B2 (ja) * 2012-06-20 2016-12-21 東京応化工業株式会社 貼付装置
KR101979726B1 (ko) * 2012-10-05 2019-05-20 삼성디스플레이 주식회사 윈도우 합착장치 및 이를 이용한 표시장치 제조방법
KR101469966B1 (ko) * 2012-12-28 2014-12-08 엘아이지에이디피 주식회사 기판합착장치용 면압 측정장치 및 이것을 이용한 기판합착방법
WO2015041688A1 (en) * 2013-09-20 2015-03-26 Apple Inc. Pressure-sensing stages for lamination systems
KR101619781B1 (ko) * 2014-02-20 2016-05-23 안성룡 정압 합착이 가능한 합착장치
CN104122673B (zh) * 2014-07-31 2017-03-08 深圳市奥拓电子股份有限公司 Led显示屏的3d光栅贴合工艺
JP5810207B1 (ja) * 2014-11-14 2015-11-11 株式会社日立製作所 基板組立装置とそれを用いた基板組立方法
JP5837247B1 (ja) * 2015-03-31 2015-12-24 株式会社日立製作所 基板組立装置とそれを用いた基板組立方法
CN106064520B (zh) * 2016-06-08 2018-07-17 马颖 一种采用无影胶粘合基板的方法
KR102455415B1 (ko) * 2017-12-18 2022-10-17 삼성전자주식회사 기판 접합 장치 및 이를 이용한 기판의 접합 방법
JP6670864B2 (ja) 2018-01-31 2020-03-25 アイダエンジニアリング株式会社 プレスシステム
KR102102527B1 (ko) * 2018-05-09 2020-04-22 피에스케이홀딩스 (주) 기판 가압 모듈 및 방법 그리고, 이를 포함하는 기판 처리 장치 및 방법
KR102619624B1 (ko) * 2018-11-13 2023-12-29 삼성전자주식회사 기판합착 장치 및 방법
US11604372B2 (en) * 2018-11-15 2023-03-14 HKC Corporation Limited Method and control device for laminating display panel as well as vacuum laminator
US10663110B1 (en) * 2018-12-17 2020-05-26 Divergent Technologies, Inc. Metrology apparatus to facilitate capture of metrology data
KR102284055B1 (ko) * 2019-10-22 2021-07-30 (주)에스티아이 디스플레이 라미네이션 장치 및 이를 이용한 지지 척 레벨링 방법
CN111736375A (zh) * 2020-06-30 2020-10-02 中国科学院上海光学精密机械研究所 一种用于液晶面板生产的压合装置及加工方法
CN114085034A (zh) * 2021-11-10 2022-02-25 华为技术有限公司 焊接设备以及焊接方法

Family Cites Families (104)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3311522A (en) * 1963-02-25 1967-03-28 Eastman Kodak Co Process for bonding crystalline components and composite article produced thereby
US3392916A (en) * 1965-12-08 1968-07-16 Carl Gunnar Daniel Engstrom Ultrasonic atomizer
US3561444A (en) * 1968-05-22 1971-02-09 Bio Logics Inc Ultrasonic drug nebulizer
US3860173A (en) * 1970-02-03 1975-01-14 Naoyasu Sata Non-polluting combustion engine having ultrasonic fuel atomizer in place of carburetor
US4085893A (en) * 1974-03-20 1978-04-25 Durley Iii Benton A Ultrasonic humidifiers, atomizers and the like
US4309989A (en) * 1976-02-09 1982-01-12 The Curators Of The University Of Missouri Topical application of medication by ultrasound with coupling agent
US4153201A (en) * 1976-11-08 1979-05-08 Sono-Tek Corporation Transducer assembly, ultrasonic atomizer and fuel burner
FR2443113B1 (fr) * 1978-06-30 1985-12-06 Deutsch Pruef Messgeraete Procede et dispositif d'emission d'impulsions acoustiques, particulierement dans le domaine des ultra-sons, et application de ces impulsions notamment au controle non destructif de materiaux
GB2029270B (en) * 1978-07-11 1982-11-03 Plessey Co Ltd Vibratory atomiser
US4334561A (en) * 1979-01-03 1982-06-15 Valico P.V.B.A. Head piece for a tank for liquefied gas
JPS5848225B2 (ja) * 1979-01-09 1983-10-27 オムロン株式会社 超音波液体霧化装置の霧化量制御方式
GB2058209B (en) * 1979-09-11 1983-04-27 Plessey Co Ltd Method of producing a fuel injector for an engine
DE3124854C2 (de) * 1981-06-24 1985-03-14 Reinhard 8057 Eching Mühlbauer Hochdruckeinspritzsystem mit Ultraschall-Zerstäubung
BR8107560A (pt) * 1981-11-19 1983-07-05 Luiz Romariz Duarte Estimulacao ultra-sonica da consolidacao de fraturas osseas
US4655393A (en) * 1983-01-05 1987-04-07 Sonotek Corporation High volume ultrasonic liquid atomizer
US4640583A (en) * 1983-07-22 1987-02-03 Kabushiki Kaisha Seiko Epson Display panel having an inner and an outer seal and process for the production thereof
EP0156409A3 (en) * 1984-02-23 1986-06-25 Jean Michel Anthony Device for moistening parts of the human body
US4582654A (en) * 1984-09-12 1986-04-15 Varian Associates, Inc. Nebulizer particularly adapted for analytical purposes
JPS61138558A (ja) * 1984-12-11 1986-06-26 Toa Nenryo Kogyo Kk 超音波噴射ノズル用振動子
JPS61138559A (ja) * 1984-12-11 1986-06-26 Toa Nenryo Kogyo Kk 超音波噴射ノズル用振動子
US4726523A (en) * 1984-12-11 1988-02-23 Toa Nenryo Kogyo Kabushiki Kaisha Ultrasonic injection nozzle
JPS61259784A (ja) * 1985-05-13 1986-11-18 Toa Nenryo Kogyo Kk 超音波噴射用振動子
US4642581A (en) * 1985-06-21 1987-02-10 Sono-Tek Corporation Ultrasonic transducer drive circuit
US4659014A (en) * 1985-09-05 1987-04-21 Delavan Corporation Ultrasonic spray nozzle and method
US4941618A (en) * 1986-07-07 1990-07-17 Leeman Labs Inc. Nebulizer employing a fine mesh screen
US4930700A (en) * 1986-08-27 1990-06-05 Atochem North America Ultrasonic dispersion nozzle having internal shut-off mechanism with barrier fluid separation
US5104042A (en) * 1986-08-27 1992-04-14 Atochem North America, Inc. Ultrasonic dispersion nozzle with internal shut-off mechanism having barrier-fluid separation means incorporated therewith
US4850534A (en) * 1987-05-30 1989-07-25 Tdk Corporation Ultrasonic wave nebulizer
US5040537A (en) * 1987-11-24 1991-08-20 Hitachi, Ltd. Method and apparatus for the measurement and medical treatment using an ultrasonic wave
DE3741201A1 (de) * 1987-12-02 1989-06-15 Schering Ag Ultraschallarbeitsverfahren und mittel zu dessen durchfuehrung
US4905671A (en) * 1988-01-11 1990-03-06 Dornier Medizintechnik Gmbh Inducement of bone growth by acoustic shock waves
US5186162A (en) * 1988-09-14 1993-02-16 Interpore Orthopaedics, Inc. Ultrasonic transducer device for treatment of living tissue and/or cells
US5211160A (en) * 1988-09-14 1993-05-18 Interpore Orthopaedics, Inc. Ultrasonic orthopedic treatment head and body-mounting means therefor
EP0373237A1 (de) * 1988-12-13 1990-06-20 Siemens Aktiengesellschaft Inhalationsgerät, insbesondere Taschen-Inhalationsgerät
US5002059A (en) * 1989-07-26 1991-03-26 Boston Scientific Corporation Tip filled ultrasound catheter
US5231975A (en) * 1990-02-23 1993-08-03 Cygnus Therapeutic Systems Ultrasound-enhanced delivery of materials into and through the skin
US5115805A (en) * 1990-02-23 1992-05-26 Cygnus Therapeutic Systems Ultrasound-enhanced delivery of materials into and through the skin
US5197946A (en) * 1990-06-27 1993-03-30 Shunro Tachibana Injection instrument with ultrasonic oscillating element
US5324255A (en) * 1991-01-11 1994-06-28 Baxter International Inc. Angioplasty and ablative devices having onboard ultrasound components and devices and methods for utilizing ultrasound to treat or prevent vasopasm
US5304115A (en) * 1991-01-11 1994-04-19 Baxter International Inc. Ultrasonic angioplasty device incorporating improved transmission member and ablation probe
JP2602460B2 (ja) * 1991-01-17 1997-04-23 三菱化学株式会社 紡糸ノズル及び該紡糸ノズルを用いた金属化合物の繊維前駆体の製造法ならびに無機酸化物繊維の製造法
US5316000A (en) * 1991-03-05 1994-05-31 Technomed International (Societe Anonyme) Use of at least one composite piezoelectric transducer in the manufacture of an ultrasonic therapy apparatus for applying therapy, in a body zone, in particular to concretions, to tissue, or to bones, of a living being and method of ultrasonic therapy
JP3532204B2 (ja) * 1991-03-05 2004-05-31 アラダイム コーポレーション 流量計の圧力センサのドリフトオフセットを補正する方法および装置
EP0504881B2 (en) * 1991-03-22 2000-11-08 Katsuro Tachibana Booster for therapy of diseases with ultrasound and pharmaceutical liquid composition containing the same
DE9109452U1 (zh) * 1991-07-31 1991-10-17 Nokia Unterhaltungselektronik (Deutschland) Gmbh, 7530 Pforzheim, De
JPH07502423A (ja) * 1991-10-03 1995-03-16 ザ　ゼネラル　ホスピタル　コーポレーション 血管拡張のための装置および方法
US5529572A (en) * 1992-01-24 1996-06-25 Medispec Ltd. Method and apparatus particularly useful for treating osteoporosis
US5993389A (en) * 1995-05-22 1999-11-30 Ths International, Inc. Devices for providing acoustic hemostasis
US5499127A (en) * 1992-05-25 1996-03-12 Sharp Kabushiki Kaisha Liquid crystal display device having a larger gap between the substrates in the display area than in the sealant area
US5329755A (en) * 1992-05-26 1994-07-19 Palitex Project Company Gmbh Textile yarn processing machine having devices for reducing frictional contact between a rotating yarn balloon and a balloon limiter
US5318014A (en) * 1992-09-14 1994-06-07 Coraje, Inc. Ultrasonic ablation/dissolution transducer
US5393296A (en) * 1992-12-09 1995-02-28 Siemens Aktiengesellschaft Method for the medical treatment of pathologic bone
US5573497A (en) * 1994-11-30 1996-11-12 Technomed Medical Systems And Institut National High-intensity ultrasound therapy method and apparatus with controlled cavitation effect and reduced side lobes
US6098620A (en) * 1993-01-29 2000-08-08 Aradigm Corporation Device for aerosolizing narcotics
US5527350A (en) * 1993-02-24 1996-06-18 Star Medical Technologies, Inc. Pulsed infrared laser treatment of psoriasis
DE4315282C2 (de) * 1993-05-07 1999-10-07 Siemens Ag Verwendung einer akustischen Druckimpulsquelle
WO1995001137A1 (en) * 1993-06-29 1995-01-12 Voges Innovation Pty. Ltd. Dispenser
US5407519A (en) * 1993-07-07 1995-04-18 Interserv Corp. Apparatus for manufacturing liquid crystal display screens
CH686872A5 (de) * 1993-08-09 1996-07-31 Disetronic Ag Medizinisches Inhalationsgeraet.
EP0638832B1 (en) * 1993-08-10 2000-03-22 Canon Kabushiki Kaisha Liquid crystal display apparatus
GB9324250D0 (en) * 1993-11-25 1994-01-12 Minnesota Mining & Mfg Inhaler
US5570682A (en) * 1993-12-14 1996-11-05 Ethex International, Inc. Passive inspiratory nebulizer system
JPH07184907A (ja) * 1993-12-28 1995-07-25 Toshiba Corp 超音波治療装置
US5616140A (en) * 1994-03-21 1997-04-01 Prescott; Marvin Method and apparatus for therapeutic laser treatment
US5437606A (en) * 1994-03-28 1995-08-01 Tsukamoto; Kenichi Ultrasonic system to alleviate toothaches
US5516043A (en) * 1994-06-30 1996-05-14 Misonix Inc. Ultrasonic atomizing device
US5547459A (en) * 1994-10-25 1996-08-20 Orthologic Corporation Ultrasonic bone-therapy apparatus and method
US5520612A (en) * 1994-12-30 1996-05-28 Exogen, Inc. Acoustic system for bone-fracture therapy
US5626554A (en) * 1995-02-21 1997-05-06 Exogen, Inc. Gel containment structure
US6014970A (en) * 1998-06-11 2000-01-18 Aerogen, Inc. Methods and apparatus for storing chemical compounds in a portable inhaler
US5554172A (en) * 1995-05-09 1996-09-10 The Larren Corporation Directed energy surgical method and assembly
US5730705A (en) * 1995-06-12 1998-03-24 Talish; Roger J. Ultrasonic treatment for bony ingrowth
US5658323A (en) * 1995-07-12 1997-08-19 Miller; Iain D. Method and apparatus for dermatology treatment
US5879376A (en) * 1995-07-12 1999-03-09 Luxar Corporation Method and apparatus for dermatology treatment
US6041253A (en) * 1995-12-18 2000-03-21 Massachusetts Institute Of Technology Effect of electric field and ultrasound for transdermal drug delivery
US5735811A (en) * 1995-11-30 1998-04-07 Pharmasonics, Inc. Apparatus and methods for ultrasonically enhanced fluid delivery
US5762616A (en) * 1996-03-15 1998-06-09 Exogen, Inc. Apparatus for ultrasonic treatment of sites corresponding to the torso
US5656016A (en) * 1996-03-18 1997-08-12 Abbott Laboratories Sonophoretic drug delivery system
US5746756A (en) * 1996-06-03 1998-05-05 Ethicon Endo-Surgery, Inc. Internal ultrasonic tip amplifier
WO1998000194A2 (en) * 1996-06-28 1998-01-08 Sontra Medical, L.P. Ultrasound enhancement of transdermal transport
US6024718A (en) * 1996-09-04 2000-02-15 The Regents Of The University Of California Intraluminal directed ultrasound delivery device
CA2272647A1 (en) * 1996-11-27 1998-06-04 Shun K. Lee Compound delivery using impulse transients
US5785972A (en) * 1997-01-10 1998-07-28 Tyler; Kathleen A. Colloidal silver, honey, and helichrysum oil antiseptic composition and method of application
US5904659A (en) * 1997-02-14 1999-05-18 Exogen, Inc. Ultrasonic treatment for wounds
US5722979A (en) * 1997-04-08 1998-03-03 Schneider (Usa) Inc. Pressure assisted ultrasonic balloon catheter and method of using same
DE19718513C5 (de) * 1997-05-02 2010-06-02 Sanuwave, Inc., Vorrichtung zur Erzeugung akustischer Stoßwellen, insbesondere für die medizinische Anwendung
US6171247B1 (en) * 1997-06-13 2001-01-09 Mayo Foundation For Medical Education And Research Underfluid catheter system and method having a rotatable multiplane transducer
US5879314A (en) * 1997-06-30 1999-03-09 Cybersonics, Inc. Transducer assembly and method for coupling ultrasonic energy to a body for thrombolysis of vascular thrombi
DE19733838C2 (de) * 1997-08-04 2001-06-13 Hmt Ag Vorrichtung zur Behandlung mit akustischen Stosswellen
NZ504021A (en) * 1997-10-17 2003-04-29 Systemic Pulmonary Delivery Lt Method and apparatus for delivering aerosolized medication having air discharged through air tube directly into plume of aerosolized medication
US6104952A (en) * 1998-01-07 2000-08-15 Tu; Lily Chen Devices for treating canker sores, tissues and methods thereof
EP1045714A1 (en) * 1998-01-08 2000-10-25 Sontra Medical, L.P. Sonophoretic enhanced transdermal transport
US6102298A (en) * 1998-02-23 2000-08-15 The Procter & Gamble Company Ultrasonic spray coating application system
US6206842B1 (en) * 1998-08-03 2001-03-27 Lily Chen Tu Ultrasonic operation device
JP3828670B2 (ja) * 1998-11-16 2006-10-04 松下電器産業株式会社 液晶表示素子の製造方法
US6061597A (en) * 1998-12-18 2000-05-09 Robert D. Rieman Method and device for healing bone fractures
US6231528B1 (en) * 1999-01-15 2001-05-15 Jonathan J. Kaufman Ultrasonic and growth factor bone-therapy: apparatus and method
US6206843B1 (en) * 1999-01-28 2001-03-27 Ultra Cure Ltd. Ultrasound system and methods utilizing same
JP4689797B2 (ja) * 2000-07-19 2011-05-25 Ｎｅｃ液晶テクノロジー株式会社 液晶表示装置の製造装置及びその製造方法
JP3742000B2 (ja) * 2000-11-30 2006-02-01 富士通株式会社 プレス装置
US7416010B2 (en) * 2002-03-08 2008-08-26 Lg Display Co., Ltd. Bonding apparatus and system for fabricating liquid crystal display device
JP3737059B2 (ja) * 2002-03-14 2006-01-18 芝浦メカトロニクス株式会社 基板貼り合わせ装置および基板貼り合わせ方法
TWI266104B (en) * 2002-03-14 2006-11-11 Sharp Kk Manufacturing method of liquid crystal display apparatus and substrate assembling apparatus
US7102726B2 (en) * 2002-03-15 2006-09-05 Lg. Philips Lcd Co., Ltd. System for fabricating liquid crystal display and method of fabricating liquid crystal display using the same

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JP2004070274A (ja) 2004-03-04
TW200401928A (en) 2004-02-01
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US20060005920A1 (en) 2006-01-12

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