TW549569U - Substrate cassette - Google Patents

Substrate cassette

Info

Publication number
TW549569U
TW549569U TW091218164U TW91218164U TW549569U TW 549569 U TW549569 U TW 549569U TW 091218164 U TW091218164 U TW 091218164U TW 91218164 U TW91218164 U TW 91218164U TW 549569 U TW549569 U TW 549569U
Authority
TW
Taiwan
Prior art keywords
substrate cassette
cassette
substrate
Prior art date
Application number
TW091218164U
Other languages
English (en)
Inventor
Chun-Kai Huang
Ming-Hui Chang
Original Assignee
Foxsemicon Integrated Tech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Foxsemicon Integrated Tech Inc filed Critical Foxsemicon Integrated Tech Inc
Priority to TW091218164U priority Critical patent/TW549569U/zh
Publication of TW549569U publication Critical patent/TW549569U/zh
Priority to JP2003373277A priority patent/JP4339666B2/ja
Priority to US10/605,996 priority patent/US7086540B2/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
TW091218164U 2002-11-13 2002-11-13 Substrate cassette TW549569U (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW091218164U TW549569U (en) 2002-11-13 2002-11-13 Substrate cassette
JP2003373277A JP4339666B2 (ja) 2002-11-13 2003-10-31 基板用カセット
US10/605,996 US7086540B2 (en) 2002-11-13 2003-11-12 Storage cassette with positionable stoppers and method for operating the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW091218164U TW549569U (en) 2002-11-13 2002-11-13 Substrate cassette

Publications (1)

Publication Number Publication Date
TW549569U true TW549569U (en) 2003-08-21

Family

ID=29998502

Family Applications (1)

Application Number Title Priority Date Filing Date
TW091218164U TW549569U (en) 2002-11-13 2002-11-13 Substrate cassette

Country Status (3)

Country Link
US (1) US7086540B2 (zh)
JP (1) JP4339666B2 (zh)
TW (1) TW549569U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109132237A (zh) * 2018-06-22 2019-01-04 郑州云海信息技术有限公司 一种防碰撞板卡运输集板箱

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* Cited by examiner, † Cited by third party
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TWI310850B (en) * 2003-08-01 2009-06-11 Foxsemicon Integrated Tech Inc Substrate supporting rod and substrate cassette using the same
KR100573896B1 (ko) * 2004-08-16 2006-04-26 동부일렉트로닉스 주식회사 웨이퍼 이탈방지 장치 및 방법
JP4534801B2 (ja) * 2005-03-07 2010-09-01 シンフォニアテクノロジー株式会社 基板収納容器
JP2006287030A (ja) * 2005-04-01 2006-10-19 Yodogawa Hu-Tech Kk 基板用カセット
TWI315002B (en) * 2005-04-15 2009-09-21 Innolux Display Corp Substrate cassette
KR100939621B1 (ko) * 2005-06-25 2010-02-02 엘지디스플레이 주식회사 카세트
CN100399129C (zh) * 2005-07-21 2008-07-02 中华映管股份有限公司 基板匣
KR101165466B1 (ko) * 2005-08-31 2012-07-13 엘지디스플레이 주식회사 캐리어 및 이를 구비한 공정 장치
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US9139357B2 (en) * 2012-06-15 2015-09-22 Shenzhen China Star Optoelectronics Technology Co., Ltd. Support frame for packaging liquid crystal glass panel
US9079714B2 (en) * 2012-07-31 2015-07-14 Shenzhen China Star Optoelectronics Technology Co., Ltd Glass substrate cassette and pick-and-place system for glass substrate
US20140069844A1 (en) * 2012-09-07 2014-03-13 Medtronic, Inc. Circuit board magazine having retention bar with a locking mechanism
US8997996B2 (en) * 2013-03-18 2015-04-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Drawer type cushioning packaging device for liquid crystal glass
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CN103448048B (zh) * 2013-09-09 2015-11-25 深圳市华星光电技术有限公司 基板存放架
CN104139929A (zh) * 2014-07-08 2014-11-12 深圳市华星光电技术有限公司 一种包装箱
CN104743341A (zh) * 2015-01-20 2015-07-01 京东方科技集团股份有限公司 挡块、基板卡匣组件
US11315815B2 (en) * 2016-01-05 2022-04-26 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer container and method for holding wafer
US10020213B1 (en) * 2016-12-30 2018-07-10 Sunpower Corporation Semiconductor wafer carriers
TWI651253B (zh) * 2018-06-29 2019-02-21 均華精密工業股份有限公司 具有對準功效之儲存盒
JP7344681B2 (ja) * 2019-06-18 2023-09-14 株式会社ディスコ ウエーハユニットの飛び出し防止治具
CN213503368U (zh) * 2020-06-01 2021-06-22 三赢科技（深圳）有限公司 物料架
US11594438B2 (en) * 2021-06-04 2023-02-28 STATS ChipPAC Pte. Ltd. Semiconductor manufacturing device to securely hold semiconductor panels for transport and manufacturing processes
TWI793703B (zh) * 2021-06-04 2023-02-21 家登精密工業股份有限公司 閉鎖裝置及具有閉鎖裝置之容器

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109132237A (zh) * 2018-06-22 2019-01-04 郑州云海信息技术有限公司 一种防碰撞板卡运输集板箱
CN109132237B (zh) * 2018-06-22 2024-04-26 郑州云海信息技术有限公司 一种防碰撞板卡运输集板箱

Also Published As

Publication number Publication date
JP2004165657A (ja) 2004-06-10
JP4339666B2 (ja) 2009-10-07
US7086540B2 (en) 2006-08-08
US20040108284A1 (en) 2004-06-10

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004