TW549569U - Substrate cassette - Google Patents

Substrate cassette

Info

Publication number
TW549569U
TW549569U TW091218164U TW91218164U TW549569U TW 549569 U TW549569 U TW 549569U TW 091218164 U TW091218164 U TW 091218164U TW 91218164 U TW91218164 U TW 91218164U TW 549569 U TW549569 U TW 549569U
Authority
TW
Taiwan
Prior art keywords
substrate cassette
cassette
substrate
Prior art date
Application number
TW091218164U
Other languages
English (en)
Inventor
Chun-Kai Huang
Ming-Hui Chang
Original Assignee
Foxsemicon Integrated Tech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Foxsemicon Integrated Tech Inc filed Critical Foxsemicon Integrated Tech Inc
Priority to TW091218164U priority Critical patent/TW549569U/zh
Publication of TW549569U publication Critical patent/TW549569U/zh
Priority to JP2003373277A priority patent/JP4339666B2/ja
Priority to US10/605,996 priority patent/US7086540B2/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
TW091218164U 2002-11-13 2002-11-13 Substrate cassette TW549569U (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW091218164U TW549569U (en) 2002-11-13 2002-11-13 Substrate cassette
JP2003373277A JP4339666B2 (ja) 2002-11-13 2003-10-31 基板用カセット
US10/605,996 US7086540B2 (en) 2002-11-13 2003-11-12 Storage cassette with positionable stoppers and method for operating the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW091218164U TW549569U (en) 2002-11-13 2002-11-13 Substrate cassette

Publications (1)

Publication Number Publication Date
TW549569U true TW549569U (en) 2003-08-21

Family

ID=29998502

Family Applications (1)

Application Number Title Priority Date Filing Date
TW091218164U TW549569U (en) 2002-11-13 2002-11-13 Substrate cassette

Country Status (3)

Country Link
US (1) US7086540B2 (zh)
JP (1) JP4339666B2 (zh)
TW (1) TW549569U (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109132237A (zh) * 2018-06-22 2019-01-04 郑州云海信息技术有限公司 一种防碰撞板卡运输集板箱

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI310850B (en) * 2003-08-01 2009-06-11 Foxsemicon Integrated Tech Inc Substrate supporting rod and substrate cassette using the same
KR100573896B1 (ko) * 2004-08-16 2006-04-26 동부일렉트로닉스 주식회사 웨이퍼 이탈방지 장치 및 방법
JP4534801B2 (ja) * 2005-03-07 2010-09-01 シンフォニアテクノロジー株式会社 基板収納容器
JP2006287030A (ja) * 2005-04-01 2006-10-19 Yodogawa Hu-Tech Kk 基板用カセット
TWI315002B (en) * 2005-04-15 2009-09-21 Innolux Display Corp Substrate cassette
KR100939621B1 (ko) * 2005-06-25 2010-02-02 엘지디스플레이 주식회사 카세트
CN100399129C (zh) * 2005-07-21 2008-07-02 中华映管股份有限公司 基板匣
KR101165466B1 (ko) * 2005-08-31 2012-07-13 엘지디스플레이 주식회사 캐리어 및 이를 구비한 공정 장치
KR101124379B1 (ko) * 2009-03-23 2012-03-15 엠파워(주) 웨이퍼 케리어
KR20110019511A (ko) * 2009-08-20 2011-02-28 삼성전자주식회사 매거진의 로킹 장치
KR101898134B1 (ko) * 2012-03-30 2018-10-05 삼성전자주식회사 리드 프레임 이송용 매거진
US9139357B2 (en) * 2012-06-15 2015-09-22 Shenzhen China Star Optoelectronics Technology Co., Ltd. Support frame for packaging liquid crystal glass panel
US9079714B2 (en) * 2012-07-31 2015-07-14 Shenzhen China Star Optoelectronics Technology Co., Ltd Glass substrate cassette and pick-and-place system for glass substrate
US20140069844A1 (en) * 2012-09-07 2014-03-13 Medtronic, Inc. Circuit board magazine having retention bar with a locking mechanism
US8997996B2 (en) * 2013-03-18 2015-04-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Drawer type cushioning packaging device for liquid crystal glass
KR102165269B1 (ko) * 2013-08-23 2020-10-14 삼성전자 주식회사 스토퍼를 포함하는 매거진 검사 장치
CN103448048B (zh) * 2013-09-09 2015-11-25 深圳市华星光电技术有限公司 基板存放架
CN104139929A (zh) * 2014-07-08 2014-11-12 深圳市华星光电技术有限公司 一种包装箱
CN104743341A (zh) * 2015-01-20 2015-07-01 京东方科技集团股份有限公司 挡块、基板卡匣组件
US11315815B2 (en) * 2016-01-05 2022-04-26 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer container and method for holding wafer
US10020213B1 (en) * 2016-12-30 2018-07-10 Sunpower Corporation Semiconductor wafer carriers
TWI651253B (zh) * 2018-06-29 2019-02-21 均華精密工業股份有限公司 具有對準功效之儲存盒
JP7344681B2 (ja) * 2019-06-18 2023-09-14 株式会社ディスコ ウエーハユニットの飛び出し防止治具
CN213503368U (zh) * 2020-06-01 2021-06-22 三赢科技(深圳)有限公司 物料架
US11594438B2 (en) * 2021-06-04 2023-02-28 STATS ChipPAC Pte. Ltd. Semiconductor manufacturing device to securely hold semiconductor panels for transport and manufacturing processes
TWI793703B (zh) * 2021-06-04 2023-02-21 家登精密工業股份有限公司 閉鎖裝置及具有閉鎖裝置之容器

Family Cites Families (76)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US371044A (en) * 1887-10-04 William stephen dimes
US353492A (en) * 1886-11-30 Combined lock and latch
US375161A (en) * 1887-12-20 Apparatus for making fuel-gas
US453654A (en) * 1891-06-09 Attachment for key-seat-cutting machines
US424413A (en) * 1890-03-25 Joseph w
US329344A (en) * 1885-10-27 Geobge d
US431451A (en) * 1890-07-01 Permutation-lock
US411702A (en) * 1889-09-24 Thread-slackening device for sewing-machines
US305431A (en) * 1884-09-23 William g
US466732A (en) * 1892-01-05 Amuzett alonzo warne
US299423A (en) * 1884-05-27 William m
US450540A (en) * 1891-04-14 Wheel
US312385A (en) * 1885-02-17 August eincklake
US247147A (en) * 1881-09-13 Foueth to david l
US289140A (en) * 1883-11-27 Toy money-box
US441913A (en) * 1890-12-02 Joseph wiesbaueb
US379903A (en) * 1888-03-20 Geoege h
US449494A (en) * 1891-03-31 Chusetts
US376749A (en) * 1888-01-24 Apparatus for extinguishing fires in railway-cars
US24588A (en) * 1859-06-28 Improvement in machines for making hay
US464994A (en) * 1891-12-15 Piano-agraffe
US409031A (en) * 1889-08-13 Valve
US710803A (en) * 1901-12-09 1902-10-07 Frederick O Richmond Device for extracting tendons from the legs of fowls.
US873440A (en) * 1907-03-01 1907-12-10 Adelaide C Kerr Kitchen-cabinet.
US1349084A (en) * 1919-08-28 1920-08-10 Lena C Moore Kettle-cover drainer and holder
US1527282A (en) * 1922-11-03 1925-02-24 Earl G Steadman Cash drawer
US1866464A (en) * 1929-12-12 1932-07-05 Standard Pressed Steel Co Drawer support for workbenches
US1897717A (en) * 1931-08-10 1933-02-14 Appel William Table attachment
US1994195A (en) * 1933-12-15 1935-03-12 William B Hay Rack
US2056878A (en) * 1935-04-15 1936-10-06 Charles A Wincholt Holder
US2600755A (en) * 1948-04-29 1952-06-17 Elmer L Greensfelder Cover rack
US2593697A (en) * 1949-11-16 1952-04-22 Alfred F Reilly Counter display device
US3001678A (en) * 1958-06-11 1961-09-26 Maxwell George Earl Shell holders
US3192894A (en) * 1963-08-12 1965-07-06 Robert B Staver Support for an article
US3326387A (en) * 1965-04-20 1967-06-20 Princevalle Peter Portable lid holder
US3413053A (en) * 1967-04-10 1968-11-26 Vue Fax System Controls Corp Posting cabinet with file and posting surface
US3955789A (en) * 1971-12-30 1976-05-11 Larry Harold Kline Tube holder
US3729242A (en) * 1972-05-17 1973-04-24 J Barney Modular slidable member and mounting bracket combination
US3923278A (en) * 1974-07-15 1975-12-02 Paul M Marcil Wall hook structure and method of forming same
CA1049450A (en) * 1977-11-07 1979-02-27 Wilfred J. Carroll Supply container mounting
US4140355A (en) * 1977-12-15 1979-02-20 Comerco, Inc. Undercounter support
US4224974A (en) * 1978-12-13 1980-09-30 International Blind Company Mounting bracket for venetian blind assembly
US4304382A (en) * 1979-04-06 1981-12-08 Jelen William J Pegboard fasteners
US4396123A (en) * 1981-04-20 1983-08-02 Swan Milton D Tape cassette holder
US4580754A (en) * 1984-05-10 1986-04-08 General Electric Company Apparatus for mounting an appliance under a cabinet or the like
US4577914A (en) * 1984-05-16 1986-03-25 Stravitz David M Assembly of slidably interfitting storage units
US4632472A (en) * 1984-11-19 1986-12-30 The Stanbel Group Underhanging drawer system
US4653818A (en) * 1985-03-04 1987-03-31 Amerock Corporation Apparatus for organizing storage containers in a cabinet
US4700849A (en) * 1987-01-20 1987-10-20 Wagner Leonard A Combination wine rack and glass retention/dispensing assembly
US4808875A (en) * 1988-02-05 1989-02-28 Edwards John C Locker shelf and drawer assembly
US5039902A (en) * 1989-07-06 1991-08-13 Schwarz Fred M Overhead storage system
US5297766A (en) * 1992-01-09 1994-03-29 Hoffman Frederick A Pot lid holder
US5383586A (en) * 1993-10-04 1995-01-24 Leivan; Wayne L. Pull out cup and can holder
US5477969A (en) * 1994-03-17 1995-12-26 Csl Plastics Inc. Wall panel display system
US5660284A (en) * 1994-05-16 1997-08-26 Vaughn; Richard C. Storage rack for container lids
JP3145252B2 (ja) 1994-07-29 2001-03-12 淀川化成株式会社 基板支承用側板およびそれを用いたカセット
US5586687A (en) * 1995-02-16 1996-12-24 The Mead Corporation Gravity feed bottle dispensing device having a track-blocking gate mechanism
KR100188137B1 (ko) * 1995-09-07 1999-06-01 김광호 액정 표시 장치 글래스 적재용 카세트
US5853214A (en) * 1995-11-27 1998-12-29 Progressive System Technologies, Inc. Aligner for a substrate carrier
US5743438A (en) * 1996-02-06 1998-04-28 Sokolnicki; Edward L. Under shelf rack for water container
US5850966A (en) * 1996-07-16 1998-12-22 Safepak, Inc. Deposit retrieval and transport security apparatus
US5813549A (en) * 1996-11-06 1998-09-29 Sheehan; Michael P. Storage rack
US5964359A (en) * 1997-08-04 1999-10-12 Marino, Jr.; Frank A. Modular storage system
US6224030B1 (en) * 1998-02-20 2001-05-01 Plasplugs, Inc. Hook/hanger
US6056378A (en) * 1998-10-07 2000-05-02 Manco, Inc. Add-on drawer and method of mounting
US6092981A (en) * 1999-03-11 2000-07-25 Applied Materials, Inc. Modular substrate cassette
US6225594B1 (en) * 1999-04-15 2001-05-01 Integrated Materials, Inc. Method and apparatus for securing components of wafer processing fixtures
US6349654B1 (en) * 1999-08-11 2002-02-26 William H. Peters Table structure for children's play
CN1136609C (zh) 1999-09-06 2004-01-28 淀川化成株式会社 基板用盒
US6378538B1 (en) * 1999-12-13 2002-04-30 Advanced Micro Devices, Inc. Durable, multi-piece rotor for spray acid tools
US6273279B1 (en) * 2000-05-10 2001-08-14 Jerrold M. Wolf Golf towel holder
US6364125B1 (en) * 2000-11-04 2002-04-02 D'angelo Kristen Marie Organizer and storage container
US6561358B2 (en) * 2001-09-17 2003-05-13 B&G Plastics, Inc. Hanger for article display container and container lid
US6573198B2 (en) * 2001-10-10 2003-06-03 Asm International N.V. Earthquake protection for semiconductor processing equipment
US7121414B2 (en) * 2001-12-28 2006-10-17 Brooks Automation, Inc. Semiconductor cassette reducer
KR20050003759A (ko) * 2003-07-04 2005-01-12 비오이 하이디스 테크놀로지 주식회사 유리기판 수납용 카세트

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109132237A (zh) * 2018-06-22 2019-01-04 郑州云海信息技术有限公司 一种防碰撞板卡运输集板箱
CN109132237B (zh) * 2018-06-22 2024-04-26 郑州云海信息技术有限公司 一种防碰撞板卡运输集板箱

Also Published As

Publication number Publication date
JP2004165657A (ja) 2004-06-10
JP4339666B2 (ja) 2009-10-07
US7086540B2 (en) 2006-08-08
US20040108284A1 (en) 2004-06-10

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004