TW459274B - Substrate carrying device, processing device, processing system for substrate, conveying method, accommodating device and accommodating container - Google Patents

Substrate carrying device, processing device, processing system for substrate, conveying method, accommodating device and accommodating container Download PDF

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Publication number
TW459274B
TW459274B TW089111878A TW89111878A TW459274B TW 459274 B TW459274 B TW 459274B TW 089111878 A TW089111878 A TW 089111878A TW 89111878 A TW89111878 A TW 89111878A TW 459274 B TW459274 B TW 459274B
Authority
TW
Taiwan
Prior art keywords
substrate
storage box
processing
transfer
outlet
Prior art date
Application number
TW089111878A
Other languages
English (en)
Chinese (zh)
Inventor
Yoshiharu Ota
Kiyohisa Tateyama
Shinichiro Araki
Tatsuya Iwasaki
Noriyuki Anai
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Application granted granted Critical
Publication of TW459274B publication Critical patent/TW459274B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67772—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving removal of lid, door, cover

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
TW089111878A 1999-06-17 2000-06-16 Substrate carrying device, processing device, processing system for substrate, conveying method, accommodating device and accommodating container TW459274B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17083199 1999-06-17

Publications (1)

Publication Number Publication Date
TW459274B true TW459274B (en) 2001-10-11

Family

ID=15912149

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089111878A TW459274B (en) 1999-06-17 2000-06-16 Substrate carrying device, processing device, processing system for substrate, conveying method, accommodating device and accommodating container

Country Status (3)

Country Link
JP (1) JP2001060610A (ko)
KR (1) KR100650807B1 (ko)
TW (1) TW459274B (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100650807B1 (ko) * 1999-06-17 2006-11-27 동경 엘렉트론 주식회사 기판반송장치, 처리장치, 기판의 처리시스템, 반송방법, 수납장치 및 수용박스
CN108058947A (zh) * 2018-01-09 2018-05-22 惠科股份有限公司 一种仓储设备及仓储系统

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100635221B1 (ko) * 2004-05-20 2006-10-17 주식회사 에이디피엔지니어링 평판 디스플레이 패널 제조 장치 및 그 방법
JP4807579B2 (ja) * 2006-09-13 2011-11-02 株式会社ダイフク 基板収納設備及び基板処理設備
JP4756372B2 (ja) 2006-09-13 2011-08-24 株式会社ダイフク 基板処理方法
CN107600965A (zh) * 2017-08-18 2018-01-19 武汉华星光电半导体显示技术有限公司 一种基板传送设备
JP2019192683A (ja) * 2018-04-19 2019-10-31 株式会社ディスコ 搬送機構

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01207944A (ja) * 1988-02-16 1989-08-21 Fujitsu Ltd ウェハーカセット用クリーンボックス
JPH0745488A (ja) * 1993-07-30 1995-02-14 Kokusai Electric Co Ltd 清浄雰囲気保持容器
JPH07312335A (ja) * 1994-05-18 1995-11-28 Sony Corp 基板搬送システムおよびこれを用いたレジスト塗布／現像装置ならびにその使用方法
KR0124944Y1 (ko) * 1995-02-21 1999-02-18 문정환 반도체 제조공정용 웨이퍼 박스의 자동 입,출고장치
DE19540963C2 (de) * 1995-11-03 1999-05-20 Jenoptik Jena Gmbh Transportbehälter für scheibenförmige Objekte
JP3202929B2 (ja) * 1996-09-13 2001-08-27 東京エレクトロン株式会社 処理システム
US6284020B1 (en) * 1997-12-02 2001-09-04 Kabushiki Kaisha Toshiba Method of maintaining cleanliness of substrates and box for accommodating substrates
JPH11284059A (ja) * 1998-03-31 1999-10-15 Ikegami Tsushinki Co Ltd 半導体ウェハ把持装置
JP3670837B2 (ja) * 1998-05-01 2005-07-13 大日本スクリーン製造株式会社 基板処理装置
JP3927758B2 (ja) * 1999-06-03 2007-06-13 東京エレクトロン株式会社 基板搬送装置及び処理装置
JP2001060610A (ja) * 1999-06-17 2001-03-06 Tokyo Electron Ltd 基板搬送装置、処理装置、基板の処理システム、搬送方法、収納装置および収容ボックス
US9928968B2 (en) * 2014-08-14 2018-03-27 Carnegie Mellon University Melanins as active components in energy storage materials

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100650807B1 (ko) * 1999-06-17 2006-11-27 동경 엘렉트론 주식회사 기판반송장치, 처리장치, 기판의 처리시스템, 반송방법, 수납장치 및 수용박스
CN108058947A (zh) * 2018-01-09 2018-05-22 惠科股份有限公司 一种仓储设备及仓储系统

Also Published As

Publication number Publication date
KR20010021000A (ko) 2001-03-15
JP2001060610A (ja) 2001-03-06
KR100650807B1 (ko) 2006-11-27

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