TW431946B - Adjustable wafer cassette stand - Google Patents

Adjustable wafer cassette stand Download PDF

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Publication number
TW431946B
TW431946B TW086108858A TW86108858A TW431946B TW 431946 B TW431946 B TW 431946B TW 086108858 A TW086108858 A TW 086108858A TW 86108858 A TW86108858 A TW 86108858A TW 431946 B TW431946 B TW 431946B
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Taiwan
Prior art keywords
window
wheel
frame
edge piece
roller
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TW086108858A
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English (en)
Inventor
Erich Edlinger
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Speedfam Ipec Corp
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Publication of TW431946B publication Critical patent/TW431946B/zh

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775Docking arrangements
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S269/00Work holders
    • Y10S269/903Work holder for electrical circuit assemblages or wiring systems
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00Material or article handling
    • Y10S414/135Associated with semiconductor wafer handling
    • Y10S414/137Associated with semiconductor wafer handling including means for charging or discharging wafer cassette

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Support Devices For Sliding Doors (AREA)

Description

M431946 五、新型說明: 【新型所屬之技術領域】 本創作係指一種銘擠型窗之輪具單元創新 在底框之底方兩側各具有平行的二滚輪,用以 = 力的技術領域。 ,、戰重 【先前技術】 ⑽=在二外框架"内係具有二扇_型“ (如第-圖所不,此處所述之―紹擠型窗即為 座铭擠型窗a係構成-内窗及一外窗之實施,而銘擠型^ m框“及至少一玻璃窗片32所構成 框a 1之底框a 1 1底方設有—輪具單元c (另如第二 T ),而:具單元c具有二輪具組c工而分別組接於底框& 11之底方兩側;就一般重量的窗片而言且 各具有'-滾輪即可,但就較高載重的窗片而言了輪具組 c 1係各設置左、右直線排列的二滾輪c 2 (如第二圖), 用以增加载重。據此,外框架b的下框架b工設置有一内 ^條b 2及-外軌條b 3 (如第—圖),以分別供一紹擠型 窗3安裝而實施,且使銘擠型窗a之二輪具組c !呈直線 排列方向而於内軌條b 2或外軌糾3上滑移(輪具組見 於第-圖),此為現有之紹擠型窗a的傳統結構組成及實施 方式。 然而’因為傳統之二輪具組c上係呈直線排列之方向 (如第二圖),而紹擠型窗a之整體重量均由直線排列的滾 輪c 2所承擔’故造成其載重無法分散,更甚者,操作者 3 推移窗片時,因施力之角度一般均未平行於軌道,因此, 在長久使用後,該滾輪C 2往往會因載重無法分散及受力 角度偏移而使其輪軸損壞,或是與底框a丄丄間不再穩定 組裝,存在結構鬆散的問題,而造成無法在執道上平行移 走的現象,而有推移困難及噪音的產生,尤其在高載重的 窗片更是如此。因此,實有加以改進的必要。 【新型内容】 爰此,本案創作人有鑑於上述現有者之缺失,遂思及 若能使滾輪的载重分散,則即可改善上述的缺失,提升其 使用壽命,且可有效提增其實用性及經濟價值。 承上創作理念及背景,本創作採取之技術結構係指該 鋁擠型窗具有一窗框及至少一玻璃窗片,而窗框具有一底 框、一左框、一右框及一頂框,而玻璃窗片組接於該窗框 之内部,喊具單元包含#二輪具組,且二輪具組分別組 接於該底框之底方兩側,而主要改良係在:該輪具組各具 有内、外平行的二滾輪。其中,所述之輪具組另i包含有 -座體及-祕,體組接於該餘之内部,而該轴桿 係水平向垂直於該底框而樞穿該二滾輪,且該軸桿之兩側 組接於該減’又該二滾輪向下突出該舰。據此,使銘 擠型窗的輪具單元改良為絲之底方_各具有平行的二 滾輪,喊增_贿賴重平均度,㈣統輪因使用 日久後偏移而影響轉型窗的推移順滑性與穩定度。 承上’該底框之底方係向下延伸有一内緣片、一中緣 片及外緣片’而該—滾輪之其—滾輪係位於該内緣片、 内、外向平行的二滾輪,使鋁擠型窗形同在平面的一有 各設置—滾輪的結構方式而承載於減JL,俾使^角落 重得以分散,以增進鋁擠型窗的載重平均度, 的栽 中緣片之間,另一滚輪則位於該中緣片、外緣片之門 另外,該滾輪之縱向斷面結構係包含一輪輛B。 一侧邊部’或可為—輪㈣及二側邊部,且該輪至少 下侧緣為水平直錄,㈣合頂Φ平面狀的赌而實$上、 是以,本創作之目的在提供一種鋁擠型窗的 主要利用底框之底方兩側分別設置之輪具組/、早 而可避免因 與穩定 使用日久,滚輪偏移而影響鋁擠型窗的推移順滑性 度’且可提升其使用壽命。 【實施方式】 如第三圖所示,本創作係關於鋁擠型窗A之輪具單元 B的改進,其中,鋁擠型窗A具有一窗框至少一疋 窗片2,其中,窗框1具有一底框i丄、一左框丄2、j 右框13及一頂框14,而玻璃窗片2係組接於窗框工 内部;而該輪具單元B包含有二輪具組3,且該二輪具2 3係分別組接於該底框1丄之底方兩侧,其中: ^ 輪具組3,各包含有一座體31、一軸桿3 2及二滾 輪3 3 (另如第四、五圖),而座體3 1係組接於底框工工 之内部’而轴桿3 2係水平向地垂直於底框1 1而樞穿該 二滚輪3 3 ’且軸桿3 2之兩側組接於座體31,而使該 一滾輪3 3係呈設為内、外的平行向,又該二滾輪3 3向 下突出該座體3 1。意即’由俯視觀之,形同鋁擠型窗a 的載重平均座落在四角落的滾輪3 3。 此外’既然二輪具組3以四滾輪的方式而分布在 擠型窗A平均載重的四角落,故配合的下框架c即至少 各具有二軌道C1(如第四、 的滾輪33承載。. 圖)刀顺供左、右側 另者’底框1 1之底方係向下延伸有-内緣片i工 而由一中緣片1 12及一外緣片1 13 (如第四、五圖)’ 内缘片夕]卜該二滾輪3 3 ’其一滚輪3 3係位於該 ::片111、中緣片u2之間,另一滾輪33則位於 該中緣片112、夕卜緣a 用以結合-防水隔音條De n 1 1 2係 再者,滾輪3 3之縱向斷面結構係包含一輪轴部3 3 1及至少-側邊部3 3 2 (如第四圖,係以一輪軸部及二 :邊部為例),且輪轴部3 3 1的上、下側緣為水平直線 狀,以配合頂面平面狀的軌道C1而實施。 承上構件組成,其實施時可知靖型窗 f滚輪…因此,可提增魄載窗:: 而可避免液輪33因使用曰久後偏移而影響 銘擠型窗A的推移順滑性與穩定度,意即,即便受力角产 但因為四角落之滾輪3 3的載重已分散故使其ς :有:構不再鬆傲,因而,在執道平行移= 困難及噪音的產生,尤其對於高載重的轉型窗 更疋如此,而可提升其質感及價值。 M431946 據上結構改良及實施說明,當知本創作確已排列習用 者的缺失,而具有產業_性、新酿 ^專利要件。細上所述者,僅縣創作之較佳實 ,,並非絲岐摘作實软朗。g卩凡財創作 專=範圍所做的均等變化與修飾,皆為本創作專利範 涵蓋。 【圖式簡單說明】 第-圖係-f用擠型窗的立縣構實施例示意圖。 第Hf _擠型窗的立體結構示意@。〜 第二圖係本創作之立體結構示意圖。 第四圖係本創作之平面轉實施例示意圖。 第五圖係本創作之立體結構實施例示意圖。 【主要元件符號說明】 a 1....窗框 a 2·.·.玻璃窗片 b 1....下框架 b 3....外軌條 c 1....輪具組 (習用實施例) a….紹擠型窗 a 1 1....底框 b….外框架 b 2....内軌條 c....輪具單元 C 2.…滾輪 (本創作實施例) B....輪具單元 C1....軌道 A·...鋁擠型窗 C….下框架 D....防水隔音條 7 M431946 1.…窗框 1 1 1....内緣片 1 1 3....外緣片 1 3....右框 2....玻璃窗片 * 3....輪具組 3 2....軸桿 3 3 1....輪軸部 1 1....底框 1 1 2 ....中緣片 1 2....左框 1 4....頂框 3 1....座體 3 3....滚輪 3 3 2 ....側邊部

Claims (1)

  1. M431946 六、申請專利範圍: 1種Is擠型_的輪具單元,該銘擠型窗係具有一 窗框及至少一玻璃窗片,該窗框具有-底框、-左框、-右框及-頂框’而該玻璃窗片組接於該窗框之内部,另該 輪具單元包含有分別組接於該底框之底方兩側的二輪具 組,而其特徵係在··該輪具組各具有内、外平行的二滚輪。 _ 2 胃專利制第丨項所述之㉞擠型窗的輪具單 =其中,該輪具組另各包含有—座體及—軸桿,該座體 該底框之内部,而水平向垂直於該底框之該抽桿係 穿該-滚輪’且帅桿之兩触接於該鋪,又該 輪向下突出該座體。 且时3、=申請專利範圍第1或2項所述之紹擠型窗的輪 八早7L ’其中’該底框之底方向下延伸一内緣片、一中緣 二及外緣>{,而該二滾輪之其—滾輪係位於該内緣片、 中緣片之間,另—滾輪則位於該中緣片、外緣片之間。 -4、如中請專利範圍第3項所述之崎型窗的輪且單 心其中,該滾輪之縱向斷面結構係包含—輪轴部及至 -側邊部,且該輪軸部的上、下崎為水平直線狀。 _ 5、如巾請專利制第4項所述之_職的輪 ^部其中該滚輪之縱向斷面結構係包含一輪轴部及^侧 9
TW086108858A 1996-06-28 1997-06-25 Adjustable wafer cassette stand TW431946B (en)

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US08/671,155 US5779203A (en) 1996-06-28 1996-06-28 Adjustable wafer cassette stand

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US (1) US5779203A (zh)
MY (1) MY132631A (zh)
TW (1) TW431946B (zh)
WO (1) WO1998000855A1 (zh)

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US5779203A (en) 1998-07-14
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