TW401534B - Method for improving photoimage quality - Google Patents

Method for improving photoimage quality Download PDF

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Publication number
TW401534B
TW401534B TW086112970A TW86112970A TW401534B TW 401534 B TW401534 B TW 401534B TW 086112970 A TW086112970 A TW 086112970A TW 86112970 A TW86112970 A TW 86112970A TW 401534 B TW401534 B TW 401534B
Authority
TW
Taiwan
Prior art keywords
light
composition
derivatives
weight
oxy
Prior art date
Application number
TW086112970A
Other languages
English (en)
Chinese (zh)
Inventor
Chia-Hu Chang
Andrew Mar
Thai-Hong Nguyen
Harry Joseph Evers
Hugh Stephen Laver
Original Assignee
Ciba Sc Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ciba Sc Holding Ag filed Critical Ciba Sc Holding Ag
Application granted granted Critical
Publication of TW401534B publication Critical patent/TW401534B/zh

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Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/091Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/1053Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
    • Y10S430/1055Radiation sensitive composition or product or process of making
    • Y10S430/114Initiator containing
    • Y10S430/118Initiator containing with inhibitor or stabilizer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Polymerisation Methods In General (AREA)
  • Materials For Photolithography (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
TW086112970A 1996-09-10 1997-09-08 Method for improving photoimage quality TW401534B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70702096A 1996-09-10 1996-09-10
US08/820,322 US5912106A (en) 1996-09-10 1997-03-12 Method for improving photoimage quality

Publications (1)

Publication Number Publication Date
TW401534B true TW401534B (en) 2000-08-11

Family

ID=27107809

Family Applications (1)

Application Number Title Priority Date Filing Date
TW086112970A TW401534B (en) 1996-09-10 1997-09-08 Method for improving photoimage quality

Country Status (9)

Country Link
US (1) US5912106A (enExample)
EP (1) EP0828195B1 (enExample)
JP (1) JPH1097059A (enExample)
KR (1) KR100536922B1 (enExample)
CN (1) CN1176405A (enExample)
BR (1) BR9704669A (enExample)
CA (1) CA2214913A1 (enExample)
DE (1) DE69719131T2 (enExample)
TW (1) TW401534B (enExample)

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US20050192384A1 (en) * 1999-12-09 2005-09-01 Tunja Jung Additive composition for increasing the storage stability of ethylenically unsaturated resins
JP5362938B2 (ja) * 1999-12-09 2013-12-11 チバ ホールディング インコーポレーテッド エチレン性不飽和樹脂の保存安定性を向上させる添加組成物
US6685823B2 (en) * 2000-10-16 2004-02-03 Uniroyal Chemical Company, Inc. C-nitrosoaniline compounds and their blends as polymerization inhibitors
JP4248875B2 (ja) 2000-10-16 2009-04-02 ケムチュア コーポレイション 重合抑制剤としての、キノンアルカイドとニトロキシル化合物の混合物
US6863406B2 (en) * 2002-08-01 2005-03-08 The University Of Chicago Apparatus and method for fabricating, sorting, and integrating materials with holographic optical traps
DE10255667B4 (de) * 2002-11-28 2006-05-11 Kodak Polychrome Graphics Gmbh Strahlungsempfindliche Elemente mit ausgezeichneter Lagerbeständigkeit
US6881533B2 (en) 2003-02-18 2005-04-19 Kodak Polychrome Graphics Llc Flexographic printing plate with ink-repellent non-image areas
US20050056954A1 (en) * 2003-09-12 2005-03-17 Devlin Brian Gerrard Method for making contact lenses
KR101065394B1 (ko) * 2004-01-09 2011-09-16 삼성에스디아이 주식회사 평판 표시소자의 전자방출원 형성용 조성물 및 그로부터제조되는 전자방출원
US6962763B2 (en) * 2004-02-25 2005-11-08 Eastman Kodak Company Silver-free black-and-white thermographic materials
JP2006011397A (ja) * 2004-05-21 2006-01-12 Nippon Kayaku Co Ltd ネガ型着色感光性組成物
US8132507B2 (en) * 2004-10-08 2012-03-13 Flint Group Incorporated Energy-curable news ink containing soy oil
JP2008536993A (ja) * 2005-04-21 2008-09-11 チバ ホールディング インコーポレーテッド 缶中用安定化剤ブレンド
JP2007079153A (ja) * 2005-09-14 2007-03-29 Nippon Paint Co Ltd 感光性樹脂組成物
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US7700264B2 (en) 2005-10-31 2010-04-20 Nippon Paint Co., Ltd. Photosensitive resin composition, image forming material and image forming method using thereof
EP1783548B1 (en) * 2005-11-08 2017-03-08 Rohm and Haas Electronic Materials LLC Method of forming a patterned layer on a substrate
US20070160935A1 (en) * 2006-01-12 2007-07-12 Keiichi Okajima Lithographic printing plate material for CTP
JP2007225675A (ja) * 2006-02-21 2007-09-06 Nippon Paint Co Ltd Ctp用平版印刷版材、その製法およびそれから得られる平版印刷版
US7968001B2 (en) 2007-12-19 2011-06-28 Air Products And Chemicals, Inc. Stabilizers for the stabilization of unsaturated hydrocarbon-based precursor
US8440099B2 (en) * 2007-12-19 2013-05-14 Air Products And Chemicals, Inc. Stabilizers for the stabilization of unsaturated hydrocarbon-based precursor
JP2010181843A (ja) * 2009-02-09 2010-08-19 Seiko Epson Corp 印刷版の製造方法および印刷版製造用光硬化性液体
CN101833241B (zh) * 2009-03-09 2012-07-04 村上精密制版(昆山)有限公司 一种感光性树脂组合物
WO2014024804A1 (ja) * 2012-08-06 2014-02-13 日立化成株式会社 永久マスクレジスト用感光性樹脂組成物、感光性エレメント、レジストパターンの形成方法及びプリント配線板の製造方法
BR112015006206A2 (pt) * 2012-09-20 2017-07-04 Fujifilm Corp precursor de chapa de impressão litográfica e método de preparação da chapa
JP2017191892A (ja) * 2016-04-14 2017-10-19 イビデン株式会社 プリント配線基板及びその製造方法
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Also Published As

Publication number Publication date
BR9704669A (pt) 1999-07-27
CN1176405A (zh) 1998-03-18
EP0828195B1 (en) 2003-02-19
MX9706886A (es) 1998-03-31
KR100536922B1 (ko) 2006-04-14
US5912106A (en) 1999-06-15
DE69719131D1 (de) 2003-03-27
EP0828195A2 (en) 1998-03-11
JPH1097059A (ja) 1998-04-14
EP0828195A3 (en) 1998-08-19
DE69719131T2 (de) 2003-07-31
KR19980024485A (ko) 1998-07-06
CA2214913A1 (en) 1998-03-10

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