TW202037546A - Jig conveyance member and surface treatment apparatus and method - Google Patents

Abstract

A jig conveyance member (100) comprises: a jig-holding section (110) on which a workpiece-holding jig (10) for holding a workpiece W suspended therefrom is detachably installed; a support section (120) for supporting the jig-holding section; and a connecting part (130) for connecting the jig-holding section (110) to the support section (120). The connecting part (130): releases the connection between the jig-holding section (110) and the support section (120) when an external force is being applied; connects the jig-holding section (110) to the support section (120) when the external force is released; and is capable of selecting one of multiple connection positions in which the relative angle between the jig-holding section (110) and the support section (120) in planar view differs when connected.

Description

Jig conveying member, surface treatment device and method

The present invention relates to a jig conveying member, a surface treatment device, and a method for conveying a workpiece holding jig for surface treatment such as electroless plating.

For example, electroless plating is different from electroplating in that no current flows in the pool. Therefore, its advantage is that the workpiece to be plated can be not only a conductive body, but also a non-conductive body like plastic or ceramic. Patent Document 1 discloses that in a plating tank containing an electroless plating solution, there is a gap through which the electroless plating solution can flow, and a plurality of workpieces are vertically erected side by side, or suspended on a shelf for batch Processing (request items 1, 3 and Figure 4). [Prior Technical Literature] [Patent Literature] [Patent Document 1] JP 2006-93651 A

[The problem to be solved by the invention] If there are bubbles in the plating solution, and the bubbles adhere to the workpiece, the area where the bubbles exist will cause poor plating. In particular, there are cases where a through hole or a bottomed hole exists in the workpiece. If the work is a circuit board, it is provided with a through hole that conducts both sides of the board, or a contact hole or a pore that conducts the upper and lower conductive layers with each other. Therefore, bubbles tend to stay in such holes, and poor plating tends to occur. The object of the present invention is to provide a jig conveying member, a surface treatment device and a method, which can reduce processing defects caused by bubbles adhering to the workpiece. [Means to solve the problem] (1) One aspect of the present invention relates to a jig conveying member, which has: The jig holding part, which is used for the work-holding jig that is hanging down to hold the work piece to be installed and unloaded freely; A supporting part, which supports the aforementioned jig holding part; and The connecting part connects the jig holding part and the supporting part, The connection part releases the connection between the jig holding part and the support part when an external force is applied, and connects the jig holding part and the support part when the external force is released. When connecting, you can choose to view it in a plan view. One of a plurality of connecting positions where the relative angle of the jig holding portion and the supporting portion is different. According to an aspect of the present invention, when an external force is applied, the connection between the jig holding portion and the support portion is released, so that the relative angle of the jig holding portion and the support portion can be changed in a plan view. After the external force is released, the jig holding part and the support part are connected. Thereby, one of a plurality of connecting positions with different relative angles of the jig holding portion and the supporting portion in a plan view can be selected. The workpiece is a workpiece holding jig that is installed in the jig holding part. Therefore, by changing the relative angle of the jig holding portion and the supporting portion in a plan view, the orientation of the main surface of the workpiece can be changed with respect to the supporting portion. When the workpiece is immersed in the processing liquid in the processing tank by the jig conveying member, the support portion of the jig conveying member is reciprocated in the first direction. In this way, bubbles attached to the workpiece are removed. At this time, by appropriately setting the orientation of the main surface of the workpiece to the reciprocating swing direction, bubbles can be efficiently removed. (2) In an aspect (1) of the present invention, the connecting portion includes a plurality of engaging portions and at least one engaged portion, and the jig holding portion and the jig holding portion that move relative to each other due to the application of the external force The support portion is used to release any one of the plurality of engaging portions and the at least one engaged portion, and by releasing the external force, any one of the plurality of engaging portions and the at least one One can be engaged by the engaging part. In this way, the connection and disconnection of the jig holding portion and the support portion are easy, and at least one engaged portion is engaged with any one of the plurality of engaging portions, thereby fixing the rotated position. (3) In one aspect (2) of the present invention, the engaging portion is a hole or recess into which the at least one engaged portion can be inserted. In this way, the structure of the connecting portion is simplified, and the connection and disconnection of the jig holding portion and the supporting portion are easier. (4) In one aspect (2) or (3) of the present invention, The aforementioned jig holding part contains the guided part, The support part includes a guide part that can guide the guided part up and down, The aforementioned connection part contains: The movable part that moves with the aforementioned guided part, The fixed part of the guide part is arranged opposite to the movable part, The plurality of engaging parts are provided on one of the movable part and the fixed part, The at least one engaged portion may be provided on the other of the movable portion and the fixed portion. In this way, by relatively raising and lowering the jig holding portion and the support portion, the connection and disconnection of the jig holding portion and the support portion can be easily performed. (5) Another aspect of the present invention relates to a surface treatment device, having: Jig conveying member, which can be installed freely by hanging down and holding the workpiece holding jig; A treatment tank, which will be held on the surface of a plurality of workpieces of the aforementioned workpiece holding jig to be processed by a treatment liquid; and A loading part which mounts the workpiece holding jig carried in from the outside on the jig conveying member, and loads the jig conveying member on the processing tank, The aforementioned jig conveying member is the jig conveying member according to any one of the aspects (1) to (4) of the present invention, and includes the jig holding portion, the supporting portion, and the connecting portion, The processing tank includes a swinging portion for reciprocating the jig conveying member in the first direction, The aforementioned loading part contains: An elevating part for raising and lowering the jig holding part of the jig conveying member, A rotating part that rotates the raised jig holding part in a horizontal plane. (6) In another aspect (5) of the present invention, The rotating part can rotate the jig holding part so that the surfaces of the plurality of workpieces held by the jig holding part are non-parallel to the first direction. (7) Another aspect of the present invention relates to a surface treatment method, It is a method of surface treatment on a plurality of workpieces with a surface treatment device, The surface treatment device has: Jig conveying member, which can be installed freely by hanging down and holding the workpiece holding jig; A processing tank, which will be held on the surface of the plurality of workpieces of the workpiece holding jig to be processed by a processing liquid; and A loading part which mounts the workpiece holding jig carried in from the outside on the jig conveying member, and loads the jig conveying member on the processing tank, The aforementioned jig conveying member is the jig conveying member according to any one of the aspects (1) to (4) of the present invention, and includes the jig holding portion, the supporting portion, and the connecting portion, The surface treatment method contains: The step of raising the jig holding part of the jig conveying member, The step of rotating the raised jig holding part in the horizontal plane, After that, the step of lowering the aforementioned jig holding portion. (8) In another aspect (7) of the present invention, The processing tank includes a swinging portion for reciprocating the jig conveying member in the first direction, In the rotating step, the jig holding portion can be rotated so that the surfaces of the plurality of workpieces held by the jig holding portion are non-parallel to the first direction. According to the aspects (5) and (7) of the present invention, the jig holding part is raised by the lifting part in the loading part, thereby releasing the connection between the jig holding part and the supporting part. In the loading part, the raised jig holding part is rotated in the horizontal plane by the rotating part, thereby changing the relative angle of the jig holding part and the supporting part in a plan view. After that, the jig holding part is lowered by the lifting part in the loading part, thereby connecting the jig holding part and the supporting part. Thereby, one of a plurality of connecting positions with different relative angles between the jig holding portion and the supporting portion in a plan view is selected. In the processing tank using the workpiece holding jig, the support portion of the workpiece holding jig is reciprocated in the first direction to remove air bubbles attached to the workpiece. At this time, by appropriately setting the orientation of the main surface of the workpiece to the reciprocating swing direction, bubbles can be efficiently removed. According to the aspects (6) and (8) of the present invention, the hydraulic pressure of more processing liquid acts on the surface of the workpiece by swinging. Therefore, air bubbles remaining on the surface of the workpiece, bottomed holes or through holes can be efficiently removed from the workpiece by hydraulic pressure.

In the following disclosure, in order to implement features different from the suggested theme, a variety of different implementation types or embodiments are provided. Of course, these are only examples and are not intended to be limiting. In addition, in various examples of the present disclosure, reference symbols and/or words are repeatedly used. This repeated use is only for brevity and clarity, and does not in itself mean that there must be a relationship between various implementation types and/or illustrated structures. In addition, when the first element is described as "connected" or "connected to" the second element, this description includes an embodiment in which the first element and the second element are directly connected or connected to each other, and also includes the first element The second element has one or more other elements in between to indirectly connect or connect with each other. In addition, when the first requirement is described as "moving" to the second requirement, this description includes the relative movement of at least one of the first requirement and the second requirement to the other. FIG. 1 is a cross-sectional view of the surface treatment device 1. In FIG. 1, there is shown: a jig conveying member 100, which conveys a workpiece holding jig 10; and a processing tank 200, which will be held on the surface of at least one, such as a plurality of workpieces W, of the workpiece holding jig 10 by the treatment liquid Q To process. The surface treatment apparatus 1, as shown in FIG. 2(A)(B), may have at least one, for example, a plurality of treatment tanks 200-1 to 200-n (n is a plural number). The plurality of treatment tanks 200-1 to 200-n may include, in addition to surface treatment tanks such as plating treatment, pre-treatment tanks and/or post-treatment tanks necessary before and after the surface treatment. In the treatment tank 200, the workpiece W is immersed in a treatment liquid Q such as a plating liquid, whereby the workpiece W can be surface treated. The surface treatment apparatus 1A shown in FIG. 2(A) has a loading/unloading part 210 at one end in the longitudinal direction where the treatment tanks 200-1 to 200-n are connected. In FIG. 2(A), in the loading/unloading part 210, the workpiece holding jig 10 carried in from the outside is mounted on the jig conveying member 100. The loading/unloading unit 210 loads the jig conveying member 100 with the workpiece holding jig 10 in the processing tank 200. For example, the jig conveying member 100 is first conveyed to the processing tank 200-1, and then sequentially and intermittently conveyed from the processing tank 200-1 to 200-n, so that a plurality of workpieces W are in each processing tank 200-1 to 200 -n for batch processing. After the processing is completed, the workpiece holding jig 10 is detached from the jig conveying member 100 in the loading/unloading part 210. The surface treatment apparatus 1B shown in FIG. 2(B) has a loading part 220 at one end in the longitudinal direction to which the treatment tanks 200-1 to 200-n are connected, and an unloading part 230 at the other end in the longitudinal direction. In FIG. 2(B), the workpiece holding jig 10 carried in from the outside is attached to the jig conveying member 100 in the loading part 220. The loading part 220 loads the jig conveying member 100 with the workpiece holding jig 10 on the processing tank 200. For example, the jig conveying member 100 is sequentially and intermittently conveyed from the processing tank 200-1 to 200-n, and a plurality of workpieces W are subjected to batch processing in each of the processing tanks 200-1 to 200-n. After the processing is completed, the workpiece holding jig 10 is removed from the jig conveying member 100 in the unloading part 230. Here, the loading/unloading part 210 shown in FIG. 2(A) and the loading part 220 and the unloading part 230 shown in FIG. 2(B) are provided with an external force applying device 250. The external force applying device 250 will be described after the description of the workpiece holding jig 10 and the jig conveying member 100. First, the workpiece holding jig 10 will be described. For the workpiece holding jig 10, for example, the jig disclosed by the applicant in PCT/JP2017/034924 can be used. If the work holding jig 10 is briefly described, the work holding jig 10 has a frame 11 as shown in FIGS. 1 and 2. An upper gripper 12 is fixed to the upper part of the frame 11, which holds the upper ends of a plurality of, for example, 20 workpieces W, and suspends and supports the workpieces W. When the workpiece W is thin and may bend when suspended, as shown in FIGS. 1 and 2, a lower gripper 13 is further provided. It is preferable that the lower holder 13 can support the frame 11 to move up and down. In this way, the work W is given downward tension by the weight of the lower gripper 13, so that the work W does not bend. The frame body 11 has an arm 14 extending upward and a hook 15 provided on the upper portion of the arm 14. In addition, the workpiece holding jig 10 shown in FIGS. 1 and 2 is an example, and various other workpiece holding jigs can be used as long as the workpiece W can be suspended and held. The workpiece holding jig 10 may be a jig for batch processing in which a plurality of workpieces W are arranged in parallel without bending as shown in FIG. 3. As a result, when a plurality of workpieces W held by the workpiece holding jig 10 are immersed in the plating bath, even a thin workpiece W can secure an appropriate gap between adjacent workpieces W for the plating liquid to flow. Thereby, it is possible to perform electroless plating and batch process a plurality of workpieces W while maintaining the plating quality. Next, the jig conveying member 100 will be described. The jig conveying member 100, as shown in FIG. 1, has: a jig holding portion 110 for detachably mounting the workpiece holding jig 10 that holds a plurality of workpieces W hanging down; a support portion 120 that supports the jig holding portion 110; and the connecting portion 130, which connects the jig holding portion 110 and the supporting portion 120. The connecting portion 130 releases the connection between the jig holding portion 110 and the supporting portion 120 when an external force is applied, and connects the jig holding portion 110 and the supporting portion 120 when the external force is released. When connecting, one of a plurality of connecting positions with different relative angles between the jig holding portion 110 and the supporting portion 120 in a plan view can be selected. The jig holding portion 110 of the jig conveying member 100 has a suspending support portion 111 for suspending and supporting the hook 15 of the workpiece holding jig 10 freely. The suspension support portion 111 includes a positioning portion 111A for positioning the hook 15. The hook 15 of the workpiece holding jig 10 is guided by the positioning portion 111A and supported by the suspension support portion 111 as shown in FIG. 3, thereby allowing the workpiece holding jig 10 to be suspended and supported. The jig holding portion 110 further has a guided portion extending upward from the suspension support portion 111, for example, a vertical shaft portion 112 with a circular cross section. The vertical shaft portion 112 may have an upper limit stopper 113. The support portion 120 of the jig conveying member 100 has a guide portion 121 having, for example, a circular hole 121A that can guide the vertical shaft 112 as the guided portion to be raised and lowered. The support portion 120 further has a locked portion 122 connected to the guide portion 121 and a conveyed portion 123 connected to the locked portion 122. The locked portion 122 of the jig conveying member 100 is locked by the locking portion 240 in the surface treatment apparatus 1A, 1B shown in FIG. 2(A)(B), and the locking portion 240 is arranged in the jig conveying Each position where the component 100 stops (processing tanks 200-1 to 200-n, loading/unloading section 210, loading section 220, and unloading section 230). Thereby, the jig conveying member 100 to which the workpiece holding jig 10 is attached can be stopped and supported at each position. The jig conveying member 100 is conveyed intermittently by engaging the conveying part 123 with the conveying part which is not shown in figure. In this way, the jig conveying member 100 to which the workpiece holding jig 10 is attached can be intermittently conveyed toward each position. The connecting portion 130 of the jig conveying member 100 includes a movable portion 131 fixed to the upper portion of the vertical shaft portion 112 and moved together with the vertical shaft portion 112, and a fixed portion 132 disposed on the guide portion 121 opposite to the movable portion 131 . In addition, the fixing portion 132 and the guiding portion 121 may be integrated. On one of the movable portion 131 and the fixed portion 132, for example, a plurality of engaging portions such as holes 132A or recesses are provided in the fixed portion 132 as shown in FIG. 4. On the other of the movable portion 131 and the fixed portion 132, for example, the movable portion 131 is provided with at least one pin 131A, which is a plurality of engaged portions. FIG. 5 is a diagram showing an external force applying device 250 arranged in the loading/unloading section 210 (loading section 220, unloading section 230). The external force applying device 250 includes an elevating portion 260 that raises and lowers the jig holding portion 110 and a rotating portion 270 that rotates the raised jig holding portion 110 in a horizontal plane. In the embodiment shown in FIG. 5, although the example in which the lifting part 260 is rotated by the rotating part 270 is given, it is not limited to this. As shown in FIG. 6, the lifting part 260 may also include a lifting driving part 261, a lifting shaft 262 that is raised and lowered by the lifting driving part 261, and a push rod 263 fixed to the lifting shaft 262. With the lifting driving part 261, the push rod 263 moves from the lowered position shown in FIG. 5 to the arrow A direction, and is set to the raised position shown in FIG. In the ascending position shown in FIG. 6, the push rod 263 pushes the suspension support portion 111 of the jig holding portion 110 up. In the jig conveying member 100, the support portion 120 is locked to the locking portion 240, and on the other hand, the jig holding portion 110 moves up and moves to the support portion 120. This ascending movement is stopped because the stopper 113 of the jig holding part 110 abuts against the lower surface of the guide part 121. As shown in FIG. 6, when an external force is applied to stop at the raised position, the connection between the connection jig holding portion 110 and the connection portion 130 of the support portion 120 is released. This is because the movable part 131 fixed to the vertical shaft 112 of the jig holding part 110 is disengaged from the fixed part 132 of the guide part 121 arranged on the support part 120, and the engagement between the pin 131A and the hole 132A is released. In the rising position shown in FIG. 6, the rotating part 270 rotates. Thereby, the elevating part 260 mounted on the rotating part 270 rotates. The jig holding portion 110 supported by the lifting portion 260 rotates in the direction of arrow B around the axis of the vertical shaft portion 112 inserted into the hole 121A of the guide portion 121. In this way, the jig holding portion 110 rotates with respect to the supporting portion 120 in a plan view. After that, the lifter 260 lowers the push rod 263 from the raised position of FIG. 6 to the lowered position of FIG. 5. Thereby, the movable part 131 fixed to the vertical shaft 112 of the jig holding part 110 will descend, and the pin 131A will engage with the opposite hole 132A among the plurality of holes 132A of the fixed part 132 after rotation. In this way, one of a plurality of connecting positions with different relative angles between the jig holding portion 110 and the supporting portion 120 in a plan view is selected. The jig conveying member 100 that has performed the above actions in the loading/unloading section 210 or the loading section 220 moves in the processing tanks 200-1 to 200-n in sequence, and moves to the loading/unloading section 210 or the unloading section 230 after the processing is completed . In the loading/unloading section 210 or the unloading section 230, the jig conveying member 100 is returned to the initial state by the above-mentioned lifting and rotating operations. FIGS. 7 to 9 are plan views showing the state of the workpiece holding jig 10 or the workpiece W arranged in the processing tank 200. FIG. 7 shows an initial state in which the jig holding portion 110 of the jig conveying member 100 is not rotated. Fig. 8 shows a state where the jig holding portion 110 of the jig conveying member 100 is rotated 45 degrees from the position of Fig. 7. Fig. 8 shows a state where the jig holding portion 110 of the jig conveying member 100 is rotated 90 degrees from the position of Fig. 7. Here, the processing tank 200 includes a swinging portion that swings the jig conveying member 100 back and forth in the first direction. Although the mechanism of the swing portion is omitted, for example, an eccentric cam mechanism or the like is used to swing the jig conveying member 100 back and forth. If the reciprocating swing direction is parallel to the Y-axis direction in FIG. 7, the necessity of rotating the jig holding portion 110 of the jig conveying member 100 is low. However, if the reciprocating swing direction in FIG. 7 is parallel to the X-axis direction, it is necessary to rotate the jig holding portion 110 of the jig conveying member 100. This is because the main surface of the workpiece W is parallel to the reciprocating swing direction X (first direction), and the effect of removing bubbles due to the swing is small. Here, for example, as shown in FIG. 8 or FIG. 9, the jig holding portion 110 of the jig conveying member 100 is rotated, and the main surface of the workpiece W is set to be non-parallel to the reciprocating swing direction X (first direction). Moreover, the rotation angle of the jig holding part 110 is only an example in FIG. 8 or FIG. 9, and other various angles can also be set. If it is set so that the main surface of the workpiece W and the reciprocating swing direction X (first direction) are at a non-parallel angle, a large amount of hydraulic pressure of the treatment liquid Q acts on the main surface of the workpiece W due to the swing. Thereby, air bubbles remaining on the surface of the workpiece W, bottomed holes, or through holes can be efficiently removed from the workpiece W by hydraulic pressure.

1, 1A, 1B: surface treatment device 10: Workpiece holding fixture 100: Fixture handling components 110: Fixture holding part 111: Suspension support 112: Guided part (vertical shaft part) 113: Stop 120: Support 121: Guided Department 121A: Hole 130: Connection 131: movable part 131A: The engaged part (pin) 132: Fixed part 132A: engagement part (hole) 200,200-1~200-n: processing tank 210: Loading/Unloading Department 220: loading department 230: Unloading Department 240: Locking part 250: External force imparting department 260: Lifting Department 263: Putter 270: Rotating part Q: Treatment liquid W: Workpiece

[Fig. 1] is a cross-sectional view of a surface treatment device of an embodiment of the present invention. [FIG. 2(A)] and [FIG. 2(B)] are schematic plan views of the surface treatment apparatus. [Fig. 3] is a diagram showing a workpiece holding jig used in the surface treatment device of Fig. 1. [Fig. [Fig. 4] is a plan view of the fixing part provided at the connection part of the jig conveying member. [Fig. 5] is a diagram showing a state where the jig holding unit is lowered by the loading/unloading unit (loading unit, unloading unit). Fig. 6 is a diagram showing a state where the jig holding part is raised by the loading/unloading part (loading part, unloading part). [Fig. 7] is a plan view of the jig conveying member arranged in the loading/unloading section (loading section, unloading section). Fig. 8 is a diagram showing a state where the jig holding portion is rotated 45 degrees from the position of Fig. 7. [Fig. 9] is a diagram showing a state where the jig holder is rotated 90 degrees from the position of Fig. 7.

10: Workpiece holding fixture

100: Fixture handling components

110: Fixture holding part

111: Suspension support

112: Guided part (vertical shaft part)

113: Stop

120: Support

121: Guided Department

121A: Hole

130: Connection

131: movable part

131A: The engaged part (pin)

132: Fixed part

240: Locking part

250: External force imparting department

260: Lifting Department

261: Lifting drive

263: Putter

270: Rotating part

Claims (8)

A fixture conveying component, which has: The jig holding part, which is used for the work-holding jig that is hanging down to hold the work piece to be installed and unloaded freely; A supporting part, which supports the aforementioned jig holding part; and The connecting part connects the jig holding part and the supporting part, The connection part releases the connection between the jig holding part and the support part when an external force is applied, and connects the jig holding part and the support part when the external force is released. When connecting, you can choose to view it in a plan view. One of a plurality of connecting positions where the relative angle of the jig holding portion and the supporting portion is different. The jig conveying member according to claim 1, wherein: The connecting portion includes a plurality of engaging portions and at least one engaged portion, and the jig holding portion and the supporting portion that move relative to each other due to the application of the external force allow one of the plurality of engaging portions The engagement of any one with the at least one engaged portion is released, and any one of the plurality of engaging portions is engaged with the at least one engaged portion by the release of the external force. The jig conveying member described in claim 2, wherein: The aforementioned engaging portion is a hole or recess into which the aforementioned at least one engaged portion can be inserted. The jig conveying member described in claim 2 or 3, wherein: The aforementioned jig holding part contains the guided part, The support part includes a guide part that can guide the guided part up and down, The aforementioned connection part contains: The movable part that moves with the aforementioned guided part, The fixed part of the guide part is arranged opposite to the movable part, The plurality of engaging parts are provided on one of the movable part and the fixed part, The at least one engaged portion is provided on the other of the movable portion and the fixed portion. A surface treatment device having: Jig conveying member, which can be installed freely by hanging down and holding the workpiece holding jig; A treatment tank, which will be held on the surface of a plurality of workpieces of the aforementioned workpiece holding jig to be processed by a treatment liquid; and A loading part which mounts the workpiece holding jig carried in from the outside on the jig conveying member, and loads the jig conveying member on the processing tank, The jig conveying member is the jig conveying member according to any one of claims 1 to 4, and includes the jig holding part, the supporting part, and the connecting part, The processing tank includes a swinging portion for reciprocating the jig conveying member in the first direction, The aforementioned loading part contains: An elevating part that raises and lowers the jig holding part of the jig conveying member, A rotating part that rotates the raised jig holding part in a horizontal plane. The surface treatment device according to claim 5, wherein: The rotating part rotates the jig holding part so that the surfaces of the plurality of workpieces held by the jig holding part are non-parallel to the first direction. A surface treatment method is a method of surface treatment on a plurality of workpieces by a surface treatment device, The surface treatment device has: Jig conveying member, which can be installed freely by hanging down and holding the workpiece holding jig; A processing tank, which will be held on the surface of the plurality of workpieces of the workpiece holding jig to be processed by a processing liquid; and A loading part which mounts the workpiece holding jig carried in from the outside on the jig conveying member, and loads the jig conveying member on the processing tank, The jig conveying member is the jig conveying member according to any one of claims 1 to 4, and includes the jig holding part, the supporting part, and the connecting part, The surface treatment method is characterized in that it contains: The step of raising the jig holding part of the jig conveying member, The step of rotating the raised jig holding part in the horizontal plane, After that, the step of lowering the aforementioned jig holding portion. The surface treatment method according to claim 7, wherein: The processing tank includes a swinging portion for reciprocating the jig conveying member in the first direction, In the rotating step, the jig holding portion is rotated so that the surfaces of the plurality of workpieces held by the jig holding portion are non-parallel to the first direction.

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